Kwihlabathi le-nanometer ye-semiconductor lithography, ukungcangcazela okuncinci kwesakhiwo okanye ukwanda kobushushu obuncinci kunokwenza i-silicon wafer yezigidi zeerandi ingasebenzi. Njengoko ishishini lisiya kuma-node e-2nm nangaphezulu, izixhobo ezisetyenziselwa iziseko zoomatshini azisekho nje "zixhasayo" - zingabathathi-nxaxheba abakhutheleyo ekufuneni ukuchaneka.
Kwi-ZHHIMG, sibuzwa ngakumbi zii-OEM zehlabathi: Ngaba kufuneka sinamathele kubungqina bokuzinza kwe-granite echanekileyo, okanye lixesha lokutshintshela kwi-ceramics zobugcisa eziphambili? Impendulo ikwi-physics ethile yesicelo sakho.
Ifiziksi yoZinzo: I-Granite vs. iCeramic
Xa uthelekisaizinto zegranite ezichanekileyokunye namalungu e-ceramic, kufuneka sijonge "u-trinity ongcwele" wobunjineli bokuchaneka: Ukudambisa, Uzinzo lobushushu, kunye nokuqina.
1. Ukudambisa ukungcangcazela: Inzuzo yesakhiwo sendalo seMicros
Ukungcangcazela lutshaba lokukhupha amandla. I-Granite, ilitye lendalo eliyi-igneous, inesakhiwo esintsonkothileyo se-polycrystalline esisebenza njenge-absorber yendalo yokufunxa uloyiko. Olu ngqubano lwangaphakathi luvumela i-granite ukuba ikhuphe amandla oomatshini ngempumelelo kakhulu kunezinye izinto zokwenziwa.
Ngokwahlukileyo koko, iiceramics eziphambili ezifana neSilicon Carbide (SiC) okanye iAlumina ziqinile kakhulu. Nangona obu bunzima buluncedo kwimpendulo ephezulu, iiceramics aziniki manzi angaphakathi kakhulu. Kwimeko ye-lithography, apho izigaba zihamba ngokukhawuleza okukhulu, isiseko segranite esivela kwi-ZHHIMG sinika indawo "ezolileyo" efunekayo ukuze ii-optics zihlale zilungelelene ngokugqibeleleyo.
2. Ulawulo lweThermal Dynamics: Ukulawula iMicron
Ukwandiswa kobushushu kudla ngokuba yingxaki enkulu ekuchanekeni kwexesha elide. I-granite yendalo ine-coefficient ephantsi kakhulu yokwandiswa kobushushu (CTE), ngokuqhelekileyo imalunga ne-5 × 10^{-6}/K ukuya kwi-6 × 10^{-6}/K.
Iiceramics eziphambili zinokufikelela nakwexabiso eliphantsi le-CTE, kodwa zihlala zine-inertia ephantsi yobushushu. Oku kuthetha ukuba nangona zanda kancinci xa zizonke, zisabela ngokukhawuleza kakhulu kutshintsho lobushushu olujikeleze umhlaba. Ubunzima obukhulu bobushushu beGranite busebenza njenge-"buffer," nto leyo eyenza ukuba ibe lolona khetho lukhethwayo kwiindawo ezinkulu.iziseko zomatshini we-lithographyapho imeko-bume kufuneka ihlale izinzile kangangeeyure zokusebenza okuqhubekayo.
Izixhobo zeLithography Frontier
Umatshini we-lithography wanamhlanje mhlawumbi sesona sixhobo sinzima kakhulu esakha sakhiwa. Kwizakhelo eziphambili zesakhiwo, eli shishini belisoloko lixhomekeke kuloIinxalenye zeGranite eziBalaseleyongenxa yendalo yazo engeyiyo imagnethi kunye nokumelana nokugqwala.
Nangona kunjalo, kwiindawo ezithile ezihamba ngesantya esiphezulu ngaphakathi kwi-lithography stack—ezifana nee-wafer chucks okanye i-short-stroke stages—iiceramics ziyanda ngenxa yomlinganiselo wazo ophezulu wokuqina-ubunzima. Kwi-ZHHIMG, sibona ikamva kungekhona njengokhuphiswano phakathi kwezi zinto, kodwa njengokuhlanganiswa kwe-hybrid yeqhinga. Ngokusebenzisa isiseko segranite sesiseko kunye ne-ceramic kwizinto ezinamandla aphezulu, iinjineli zinokufikelela kwibhalansi yokugqibela yokudambisa kunye nesantya.
Kutheni i-ZHHIMG inguMboneleli oKhethekileyo weHlabathi
Njengomntu okhokelayoumthengisi wezinto zegranite ezichanekileyo, I-ZHHIMG iyaqonda ukuba ukuchaneka akupheleli nje kwizinto eziluhlaza; kuxhomekeke kwi-metrology esemva kwayo. Isakhiwo sethu sisebenzisa i-vacuum-degassing kuzo zonke iindibano ezenziwe ngokwezifiso kunye neendlela zokulepha ezichanekileyo ezigqitha imigangatho ye-DIN 876 Grade 00.
Sigxile ku:
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Iziseko zeGranite ezenzelwe wena ze-OEM: Iijometri ezilungiselelwe wena ezinee-inserts ezidityanisiweyo zezikhokelo ezithe tye.
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Izinto ezintsonkothileyo zeLithography: Ubunjineli beziseko ezinkulu ezigcina ulutyani ngaphakathi kwe-1 micron ngaphezu kweemitha ezininzi.
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I-Advanced Metrology: Ukubonelela ngemigangatho yesalathiso yezixhobo zokuhlola ezibuthathaka kakhulu kwihlabathi.
Isiphelo: Indlela yoBuchule yokuQhubela phambili
Ukukhetha phakathi kwegranite kunye neseramikhi kufuna ukuqonda okunzulu ngeprofayili eguquguqukayo yomatshini wakho. Nangona iiseramikhi zibonelela ngokuqina kwamaza aphezulu, ukufuma kwendalo kunye nobunzima bobushushu begranite abunakuthelekiswa nanto ukuze kuhlale kuzinzo olukhulu.
Njengoko sijonge phambili ku-2026, i-ZHHIMG iyaqhubeka nokuvelisa izinto ezintsha kwindawo apho amatye endalo kunye nezinto ezidityanisiweyo eziphambili zihlangana khona. Asiboneleli nje kuphela ngesiseko, kodwa siqinisekisa ukuba izixhobo zakho ziya kusebenza ngendlela ezinokuthi zisebenze ngayo.
Nxibelelana neqela lobunjineli le-ZHHIMG namhlanje ukuze ufumane iphepha ledatha yokuthelekisa ngobugcisa okanye ukuxoxa ngeemfuno zeprojekthi yakho eyenziwe ngokwezifiso.
Ixesha leposi: Jan-26-2026