Kwimimandla yokwenziwa kwezinto ngokuchanekileyo kunye nophando lwesayensi, ukuba tyaba kwamaqonga okuchaneka kwegranite luphawu oluphambili lokuqinisekisa ukuchaneka kwezixhobo. Oku kulandelayo yintshayelelo eneenkcukacha kwiindlela ezininzi zokuchonga eziphambili kunye neenkqubo zazo zokusebenza.
I. Indlela yokuFumanisa i-Laser interferometer
I-laser interferometer sisixhobo esithandwayo sokufumanisa ukuthamba okuchanekileyo. Umzekelo, thabatha i-ZYGO GPI XP laser interferometer, isisombululo sayo sinokufikelela kwi-0.1nm. Xa usenza ukufumanisa, qala ulungelelanise umthombo wokukhanya we-interferometer neqonga kwaye wahlule umphezulu weqonga kwiindawo zegridi ezingama-50mm×50mm. Emva koko, idatha ye-interference fringe yaqokelelwa inqaku ngenqaku, kwaye idatha yafakwa kwaye yahlalutywa kusetyenziswa i-Zernike polynomial ukufumana impazamo yokuthamba. Le ndlela isebenza kumaqonga achanekileyo kwaye inokufumanisa iimpazamo zokuthamba ze-≤0.5μm/m². Isetyenziswa rhoqo ekufumaneni oomatshini be-photolithography kunye namaqonga oomatshini bokulinganisa abathathu abaphezulu.
Ii. Indlela ye-Electronic Level Array
Ukuchonga uluhlu lwe-elektroniki kulula ukuyisebenzisa kwaye kusebenza kakuhle. Inqanaba le-elektroniki le-TESA A2 (elinesisombululo se-0.01μm/m) likhethwe laza lahlelwa kuluhlu lwe-9×9 kwicala le-X/Y axis yeqonga. Ngokuqokelela idatha yokuthambekela kwinqanaba ngalinye ngokulandelelana kwaye kusetyenziswa indlela yesikwere esincinci ukubala, ixabiso lokuthamba lingafunyanwa ngokuchanekileyo. Le ndlela inokuchonga ngokufanelekileyo imeko yokugoba kwendawo kunye nokugoba kweqonga. Umzekelo, ukuguquguquka kwe-0.2μm ngaphakathi koluhlu lwe-50mm nako kunokubonwa, okufanelekileyo ukufunyanwa ngokukhawuleza kwimveliso yobuninzi.
Iii. Indlela yekristale ecacileyo
Indlela yekristale ethe tyaba ye-optical ifanelekile ekufumaneni amaqonga amancinci endawo. Ncamathisela ikristale ethe tyaba ye-optical ngokuqinileyo kumphezulu oza kuvavanywa eqongeni kwaye ujonge imiphetho yokuphazamiseka eyenziwe phakathi kwawo phantsi kokukhanya komthombo wokukhanya we-monochromatic (njengesibane se-sodium). Ukuba imivimbo yimivimbo ethe tye ehambelanayo, ibonisa ukuba ithe tyaba kakuhle. Ukuba imivimbo ethe tyaba ivela, bala impazamo yokuba ithe tyaba ngokusekelwe kwinqanaba lokugoba kwemivimbo. Umvimbo ngamnye othe tyaba umele umahluko wokuphakama we-0.316μm, kwaye idatha yokuba ithe tyaba ingafunyanwa ngokuguqulwa okulula.
Indlela yokuhlola umatshini wokulinganisa onamaqhina amathathu.
Umatshini wokulinganisa onama-three-coordinate unokufikelela kumlinganiselo ochanekileyo kwindawo enamacala amathathu. Beka iqonga legranite kwitafile yokusebenza yomatshini wokulinganisa kwaye usebenzise iprobe ukuqokelela idatha ngokulinganayo kwiindawo ezininzi zokulinganisa kumphezulu weqonga. Inkqubo yomatshini wokulinganisa iyayicubungula kwaye ihlalutye le datha ukuvelisa ingxelo yokuba iqonga lithe tyaba. Le ndlela ayinakuchonga kuphela ukuba lithe tyaba, kodwa ikwafumana nezinye iiparameter zejometri zeqonga ngaxeshanye, kwaye ifanelekile ekuchongweni ngokubanzi kwamaqonga amakhulu egranite.
Ukuziqhelanisa nezi ndlela zokufumanisa kunokukunceda uvavanye ngokuchanekileyo ukuba iqonga lokuchaneka kwegranite lithe tyaba kwaye kunikeze isiqinisekiso esithembekileyo sokusebenza okuzinzileyo kwezixhobo zokuchaneka.
Ixesha leposi: Meyi-29-2025