Iibheringi zomoya zifezekisa into engenakukwazi ukwenziwa yibheringi yokuthintana: intshukumo ngaphandle kokuguguleka, ngaphandle kokutyibilika kunye nokuthambisa, kumanqanaba okuthe tye kwe-sub-micron. Kodwa ibheringi yomoya ilungile kuphela njengomphezulu edada kuwo. Eli nqaku lichaza ifiziksi yeefilimu zomoya, isizathu sokuba i-granite yendalo ecolekileyo ibe yinto efanelekileyo yokudibana, ukuchaneka komphezulu okufunwa yindlela ekhokelayo, kunye nokuba izigaba zebheringi zomoya zegranite zibonelela ngexabiso eliphezulu - ukusuka kumaqonga eemoto ezithe ngqo ukuya kwiinkqubo zokuhlola ezibonakalayo.
1. Indlela Ezisebenza Ngayo Iibheringi Zomoya: Ukukhwela Ifilimu Yomoya Encinci
I-air bearing ixhasa umthwalo wayo kwifilimu encinci ecinezelweyo, edla ngokuba yi-3–15 µm ubukhulu. Zimbini imigaqo yokubonelela elawulayo:
- Imbuyekezo ye-orifice.Umoya udlula kwimingxuma enobukhulu obuchanekileyo uye kwipokotho okanye kwigroove enganzulu; uxinzelelo luyazilungisa ngokwalo njengoko umsantsa utshintsha. Kulula kwaye kuqinile, kodwa umthamo womthwalo uphakathi kwaye ifilimu inovelwano kwiimpazamo zomphezulu wendawo.
- Imbuyekezo enomngxuma.Umoya uphuma ngokulinganayo kwizinto ezinemingxuma (ngokuqhelekileyo ikhabhoni), nto leyo evelisa ifilimu ezinzileyo nekwaziyo ukumelana nokuthambeka enomswakama ophezulu.
Nokuba yeyiphi na indlela, ifiziksi elawulayo iyafana: ukuqina kwefilimu kuxhomekeke kwisikwere somsantsa ofanayo. Ukuba umphezulu wendlela unamaza afana nobukhulu befilimu, iqonga lifumana ukuguqulwa koxinzelelo — okubonakala njengempazamo yokuthe tye, ukuqengqeleka, okanye okubi ngakumbi, ihamile yomoya (ukushukuma okuzivuselelayo).Indlela ekhokelayo, hayi i-bearing, imisela umgangatho womgangatho wenkqubo.
2. Kutheni iGranite iyinto efanelekileyo yokubonisa indlela
Ngamanye amaxesha iinjineli ziyabuza ukuba kutheni izigaba zokuthwala umoya zisebenza kakhulu kwi-granite endaweni yentsimbi okanye iireyile ze-ceramic. Izizathu zezi zinto-ifiziksi, hayi isiko:
- Isakhiwo esihle, esifana neenkozo.I-granite emnyama ye-Igneous iyaqina xa inyibilika kanye; akukho mahluko phakathi kwe-dendritic, i-inclusions okanye i-matrix ethambileyo njengakwintsimbi ephosiweyo. Ukuleqa kuveza umphezulu ofanayo, ngoko ke umsantsa womoya uhlala ufana kulo lonke uhambo - eyona nto ibalulekileyo yozinzo lwefilimu.
- Ukwanda okuphantsi kobushushu (≈5–8 µm/m·°C).Izikhewu zomoya zimbalwa kakhulu kwii-microns; isiqingatha seqondo lokutshintsha kobushushu sinokutshintsha umzila wentsimbi ngaphezu kwesikhewu somoya. Uzinzo lweGranite lugcina i-geometry yefilimu ingaphazanyiswa kwimijikelo yasemini nasebusuku.
- Akukho mhlwa, akukho oyile.I-granite engenanto ayifuni kufakwa i-coating kwaye ayifuni lubricant — ibaluleke kakhulu kumagumbi acocekileyo, apho ukuphuma kwegesi kunye nokuveliswa kwamasuntswana kwenza ukuba ii-rails ezigcotyiweyo zingafaneleki.
- Ukunciphisa kakhulu.Ukuthintela kwangaphakathi kweGranite kuthintela ukudluliselwa kokungcangcazela ukusuka kumgangatho nakwiidrive, kuphucula indlela esebenza ngayo inqanaba lokudada.
- Iyakwazi ukutsiba ukuya kwinqanaba le-micron ngaphezulu kweemitha.Iireyile ezinde zegranite zinokudityaniswa ngesandla kwaye ziqinisekiswe ukuya kuthi ga kwii-microns ezimbalwa kwiimitha ezininzi - into engenakuphunyezwa kukusebenza ngomatshini kuphela.
3. Yintoni Efunekayo Kwisikhokelo Seebhereyitha Zomoya Ukuchaneka Komphezulu?
Ingcaciso ixhomekeke kuhlobo lwebhereyitha kunye nomgangatho wentshukumo ekujoliswe kuyo, kodwa iimfuno eziqhelekileyo zokuchanekai-granite air bearinginkqubo zezi:
| Ipharamitha | Imfuneko eqhelekileyo | Isizathu Sokuba Kubalulekile |
|---|---|---|
| Ubuso obupheleleyo bokuthwala | 1–5 µm ubude bohambo | Ukufana kwesithuba sefilimu esisiseko |
| Ukuthamba/ukujika kwendawo | ≤ 0.5–1 µm kwi-25 mm nganye | Iimpazamo zobude obufutshane ziguqula uxinzelelo ngokuthe ngqo |
| Ukuthe tye phezu kohambo olupheleleyo | 0.5–2 µm (ethe tye kunye nethe nkqo) | Iba yimpazamo ngokuthe ngqo yesigaba |
| Ukugqitywa komphezulu | I-Lapped, i-Ra ≤ 0.4 µm ngokwesiqhelo | Ukugqitywa kuchaphazela ukuvuza kwesithuba kunye nokuzinza kokuhamba kwamanzi |
| Ukufana kweereyile ezichaseneyo | 1–3 µm ubude | Izilawuli ziyaqengqeleka kwaye ziyakhwaza inqwelo |
Ukuqinisekiswa akwahlulwa kwezi nombolo: ukulinganisa ngokuthe tye phezu kwereyile ye-2 m ene-sub-micron ukungaqiniseki kufuna amanqanaba e-elektroniki, ii-autocollimators okanye i-laser interferometry kwigumbi elilawulwa bubushushu. Yingakho amandla okulinganisa omthengisi wendlela yokuqondisa ebaluleke kakhulu njengeebhentshi zabo zokulala - sichaza indlela yethu kwindlela yethu.ukuhlolwa kunye nokulinganiswa kwegraniteinkqubo.
4. Izicelo eziqhelekileyo
- Iiplatifomu zeemoto ezicwangcisiweyo.Iimoto ezizii-linear ezingenasinyithi zinika amandla agudileyo ngaphandle kokubopha; xa zidityaniswe neendlela zomoya ze-granite, izigaba zifikelela kwi-sub-micron straightness ngesantya se-1–2 m/s — uyilo oluqhelekileyo lokuhlolwa kwe-wafer kunye ne-laser scanning.
- Amanqanaba okuchaneka kwe-XY.Izigaba zokuthwala umoya ezihlanganisiweyo okanye ezicwangcisiweyo kwisiseko segranite zifikelela kwinqanaba le-nanometer lokuphindaphinda i-lithography-ekufutshane ne-metrology, amakhadi e-probe kunye nokuhlolwa kwesibonisi.
- Iinkqubo zokuhlola amehlo.Iinkqubo zesensor zeConfocal, interferometric kunye nechromatic zifuna intshukumo yokuskena engashukumiyo, engagugiyo; ifilimu engachukumisiyo ayongezi masuntswana kwaye ayina hysteresis.
- Iilebhu zokuthelekisa izinto ezininzi kunye neemetrology.Iinqwelo zomoya ezithwala umoya kwiireyile zegranite zisebenza apho ucoceko kunye nokugqibelela kwejometri kuyimfuneko.
Kuzo zonke ezi meko igranite idlala iindima ezimbini ngaxeshanye: isiseko solwakhiwo kunye nendlela echanekileyo. Ukudibanisa zombini izinto kwinto enye — inkqubo yokuleqa enye, indlela enye yokushisa, isiqinisekiso esinye — kususa ii-interfaces ebezinokufaka impazamo. Iinkcukacha ezithe vetshe zesicelo ziyafumaneka kwi-intanethi yethu.izixhobo ze-semiconductorizisombululo.
5. Amanqaku oYilo Ngaphambi kokuba Ucacise
- Chaza uhambo, umthwalo kunye neziko lobunzima bomxhuzulane— ukuqina kwefilimu kunye nomthwalo wangaphambi kokuthwala kulinganiswa ngeenxa zonke.
- Cacisa umgangatho womoya— umoya ococekileyo nowomileyo ohlala ucociwe ukuya kuthi ga kwi-0.01 µm; ifilimu icocekile kuphela njengomthombo.
- Gqiba ngedatha yokulinganisa— ngubani ophethe isalathiso sokuthe tye: umenzi weebheringi, umenzi wesiseko, okanye inkqubo edibeneyo?
- Cwangcisa okusingqongileyo— 20 ± 0.5 °C kunye nesiseko esizimeleyo sokungcangcazela zigcina ijiyometri eqinisekisiweyo.
- Cela ingxelo yokuhlolwa kunye nenxalenye— amaxabiso okulinganisa ukuthe tye/ukuthe tyaba ngokuchonga isixhobo kunye nokulandeleka, kungekuphela nje ngoonobumba bebanga.
Isiphelo
Iibheringi zomoya kunye negranite ziyafana: ibheringi inika intshukumo engenakuphikiswa, kwaye igranite inika umphezulu ozinzileyo ngokwejometri, othuleyo ngokobushushu, ongenamasuntswana okwenza ifilimu isebenze. Xa zombini zenziwe zaza zaqinisekiswa kunye, isiphumo siba semgangathweni wentshukumo ongenakufikelela kwiinkqubo zoqhagamshelwano.
Ngaba uphuhlisa iqonga lokuthwala umoya okanye iqonga lokuhamba? Sithumelele uluhlu lokuhamba, umthwalo, ukuthe tye okufunekayo kunye nomzobo we-interface — I-ZHHIMG® iya kuyila kwaye iqinisekise izixhobo zegranite guideway zenkqubo yakho, kunye nengxelo yokuhlolwa elandelekayo ifakiwe.
Ixesha leposi: Sep-24-2026