Iingcali ezininzi ekwenzeni izinto ngokuchanekileyo zijongene nengxaki enzima: amaqonga ereferensi amatsha amkelweyo kancinci kancinci alahlekelwa bubuthebelele kwaye aqhubeke ngokuchanekileyo emva kokufakwa kwinkonzo, nto leyo edinga ukuphinda kugaywe kwakhona kumzi-mveliso. Ukonakala okunjalo kokuchaneka akwenzeki ngenxa yokuguga kwemihla ngemihla. Oku kuvela ikakhulu ekukhutshweni kancinci koxinzelelo lwangaphakathi olusele lufihliwe ngaphakathi kwezinto ezingaphantsi komhlaba, nto leyo ephazamisa umphezulu wereferensi. Phakathi kweentlobo ngeentlobo zeenkampani zereferensi zemetrology, iipleyiti zomphezulu wegranite ziyakuphepha ukuguquguquka okubangelwa kukukhululwa koxinzelelo ngenxa yoxinzelelo lwangaphakathi oluphantsi. Nje ukuba zenziwe ngomatshini, zinokugcina ukuchaneka okuphezulu ixesha elide kwaye zisebenze njengereferensi ekhethwayo yemetrology ezinzileyo yexesha elide.
Uxinzelelo lwangaphakathi luxinzelelo olungabonakaliyo olubanjwe ngaphakathi kwezinto. Izinto ezisetyenziswa ngesinyithi ezifana nentsimbi ephosiweyo kunye nentsimbi ziqokelela ngokulula uxinzelelo olukhulu olushiyekileyo ngexesha lokuphosa, ukubumba kunye nokusika. Kwanasemva konyango lokwaluphala ngaphambi kokunikezelwa, uxinzelelo lwangaphakathi alunakususwa ngokupheleleyo. Luya kukhululwa kancinci phantsi kokuguquguquka kobushushu, umthwalo oqhubekayo kunye nokubekwa okuzinzileyo ixesha elide, okubangela i-warpage encinci engabonakaliyo. Ukuhlolwa kokuchaneka kwe-nano kunye ne-micro-level, ukuguquguquka okuncinci kunokuphambukisa i-reference plane kwaye kubangele ukushukuma okuqhubekayo kwedatha elinganisiweyo, okukhokelela ekulinganisweni rhoqo kunye nokulungiswa kwakhona, okunyusa iindleko zokusebenza. Iigeyiji zamatye ezingabizi kakhulu zithwala imingcipheko efanayo: ilitye elikumgangatho ophantsi liqokelela uxinzelelo olukhulu ngexesha lokumba kunye nokusika. Nangona ukuchaneka kwazo kubonakala kufanelekile kwixesha elifutshane, ukuguquguquka kuvela emva kweenyanga zokubekwa kwaye ukuchaneka kwehla ngokukhawuleza.
Iibhloko zegranite ezikumgangatho ophezulu zikhethwa ngononophelo. Eli litye liye landa ngokwendalo kwimiba yejoloji kwiminyaka ezizigidi, kwaye uxinzelelo lwangaphakathi lwangaphambili lukhutshwe ngokupheleleyo. Ilitye eliluhlaza liya kudlula ekugubungeni okuzinzileyo emva kokumba nokusika. Iibhloko ezinkulu zigcinwa kwindawo yamatye ukuze uxinzelelo olutsha oluvela ngexesha lokusika lukwazi ukunyamalala kancinci ngaphambi kokuba lugaywe. Oku kubalulekile kwiimveliso ezigqityiweyo ezinoxinzelelo oluphantsi, kunciphisa umngcipheko wokuguquka kwangaphambili. Iibhloko kuphela ezinesimo esizinzileyo kunye nokunciphisa uxinzelelo olufanelekileyo zidluliselwa kwindawo yokusebenzela yobushushu obungaguqukiyo ukuze zigaywe kakuhle.
Iinkqubo zoomatshini zenzelwe ukulawula uxinzelelo. Kwimishini enzima, amatye angaphezulu asuswa kancinci kancinci ukuthintela ukuqokelelwa koxinzelelo olutsha ekusikweni okunzima kube kanye. Amaxesha okuzinzisa okuzinzileyo agcinelwe phakathi kokudlula kokusila ukuze kulinganiswe imeko yangaphakathi ngaphambi kokuba kuqhutyekwe phambili. Ukugqitywa kugqitywa kwindawo yokusebenzela enobushushu obungaguqukiyo kunye nokungcangcazela ukuze kuthintelwe uxinzelelo olongezelelweyo olubangelwa kukwahluka kobushushu. Emva kokuba ukusila kufikelelwe ekujoliswe kuko, iipleyiti ezigqityiweyo zigcinwa ukuze zijongwe ngokungaguqukiyo ukuze kulandelelwe utshintsho lokusila. Iimveliso zivunyelwe ukuba zipakishwe kwaye zithunyelwe kuphela emva kokuqinisekiswa ukuba akukho tshintsho oluvela ekukhululweni koxinzelelo olucothayo. 
Eyona nzuzo icacileyo yeempawu ezingenaxinzelelo kukugcina ukuchaneka kwexesha elide. Nje ukuba ipleyiti yomphezulu wegranite enoxinzelelo oluphantsi yenziwe ngendlela yokugqibela, ijiyometri yayo yokubhekisa ihlala izinzile kangangeminyaka emininzi ngaphandle kokuthwala kakhulu okanye impembelelo embi. Ukuchaneka kuyonakala kancinci kakhulu. Xa kuthelekiswa namaqonga esinyithi kunye neegeyiji zamatye eziphantsi, kufuna ukulungiswa okuncinci kakhulu kunye nokugaya kwakhona kwaye kugcina ukusebenza kwemetrology rhoqo. Kwiilabhoratri zemetrology, amaqonga ophando eyunivesithi kunye nezikhululo zokulinganisa ze-semiconductor ezifuna iireferensi ezizinzileyo zexesha elide, ezi plate zegranite zinciphisa ukutshintshwa kwegeyiji kunye nexesha lokungasebenzi ukuze kuqinisekiswe kwakhona, ukuqinisekisa idatha eqhubekayo nethembekileyo yemveliso kunye nophando.
Kwimizi-mveliso echanekileyo kakhulu, ukuthembeka kwereferensi akujongwa kuphela ngokuchaneka kokunikezelwa, kodwa nangokuzinza kwayo emva kweminyaka okanye amashumi eminyaka. Ukususa uxinzelelo lwangaphakathi kuthetha ukususa umngcipheko ofihliweyo wexesha elide wokuchaneka. I-ZHHIMG imisela umsebenzi opheleleyo wokulawula uxinzelelo oquka ukukhethwa kwezinto eziluhlaza, ukugcinwa kwamatye, umatshini ocwangcisiweyo kunye nokujongwa emva kokuveliswa. Oku kugcina iipleyiti zomphezulu wegranite zingenakuguqulwa okubangelwa kuxinzelelo lwangaphakathi. Ngeempawu ze-substrate ezizinzileyo, iipleyiti zigcina ukuchaneka okuphezulu emva komatshini. Ngokulandela umgaqo-nkqubo womgangatho wokuba akukho mfuneko ingqongqo kakhulu kubunjineli bokuchaneka, i-ZHHIMG ibonelela ngeereferensi ze-metrology ezizinzileyo ezihlala ixesha elide kushishino lwehlabathi oluchaneke kakhulu.
Ixesha leposi: Sep-24-2026