Uzinzo kunye nokuchaneka kwawo nawuphi na umatshini ochanekileyo-ukusuka kwi-Coordinate Measuring Machines enkulu (i-CMMs) ukuya kwizixhobo eziphambili ze-semiconductor lithography-ixhomekeke kwisiseko sayo segranite. Xa ujongene neziseko ze-monolithic zesikali esibalulekileyo, okanye i-multi-section ye-Granite Flat Panels, indibano kunye nenkqubo yokufakela ibaluleke kakhulu njengoko ngokuchanekileyo kokuvelisa ngokwayo. Ukubeka nje ipaneli egqityiweyo akwanelanga; iimfuno ezithile zokusingqongileyo kunye nesakhiwo kufuneka kuhlangatyezwane nazo ukuze kugcinwe kwaye kusetyenziswe indawo yolawulo engqiniweyo yokubaleka kwemicron encinci.
1. ISiseko: ISubstrate eZinzileyo, eneNqanaba
Eyona ngcamango iphosakeleyo ixhaphakileyo yeyokuba ipaneli yegranite echanekileyo, efana nezo ziyilwe kwi-high-density yethu ye-ZHHIMG® Black Granite (3100 kg/m³), inokulungisa umgangatho ongazinzanga. Ngelixa igranite ibonelela ngobungqongqo obukhethekileyo, kufuneka ixhaswe sisakhiwo esilungiselelwe ukuphambuka okuncinci kwexesha elide.
Indawo yendibano kufuneka ibonise isubstrate yekhonkrithi engeyiyo kuphela inqanaba kodwa enyange ngokufanelekileyo, rhoqo ukuya kwimilinganiselo yomgangatho womkhosi wobunzima kunye noxinaniso—ukulinganisa i-$1000mm$ engqindilili, imigangatho yekonkrithi eqinileyo kwiiholo zendibano zeZHHIMG. Okubaluleke kakhulu, le substrate kufuneka ibe yodwa kwimithombo yangaphandle yokungcangcazela. Kuyilo lweziseko zoomatshini bethu abakhulu, sibandakanya iikhonsepthi ezifana ne-anti-vibration moat ejikeleze amagumbi ethu e-metrology ukuqinisekisa isiseko ngokwaso simile kwaye sikwadwa.
2. Umaleko wokuBekwa Kwadwa: Ukukhulisa nokuNqamisa
Ukuqhagamshelana ngokuthe ngqo phakathi kwepaneli yegranite kunye nesiseko sekhonkrithi kugwenywe ngokungqongqo. Isiseko segranite kufuneka sixhaswe kwiindawo ezithile, ezibalwe ngokwemathematika ukuchasa uxinzelelo lwangaphakathi kunye nokugcina ijometri yayo eqinisekisiweyo. Oku kufuna inkqubo yokulinganisa yobungcali kunye ne-grouting layer.
Emva kokuba iphaneli ibekwe ngokuchanekileyo kusetyenziswa iijacks ezilungelelanisiweyo zokulinganisa okanye i-wedges, i-high-power-high, i-non-shrink, i-grout echanekileyo ifakwe kwi-cavity phakathi kwe-granite kunye ne-substrate. Le grout ekhethekileyo iphilisa ukwenza uxinaniso oluphezulu, ujongano olufanayo olusasaza ngokusisigxina ubunzima bendawo yolawulo ngokulinganayo, inqanda ukugoba okanye ukugqwetheka okunokuthi ngenye indlela ingenise uxinzelelo lwangaphakathi kwaye ibeke esichengeni ukutyeba ngokuhamba kwexesha. Eli nyathelo liguqula ngokufanelekileyo ipaneli yegranite kunye nesiseko ibe yisisindo esinye, esibambeneyo, nesiqinileyo.
3. UkuLingana kweThermal kunye neTemporal
Njengawo wonke umsebenzi we-metrology echanekileyo, umonde ubalulekile. Iphaneli yegraniti, imathiriyeli yokugalela, kunye nesiseko sekonkile kufuneka zonke zifikelele kwi-thermal equilibrium kunye nemeko-bume yokusebenza engqongileyo phambi kokuba kuhlolwe ulungelelwaniso lokugqibela. Le nkqubo inokuthatha iintsuku kwiipaneli ezinkulu kakhulu.
Ngapha koko, uhlengahlengiso lomgangatho-olwenziwa kusetyenziswa izixhobo ezifana ne-laser interferometers kunye namanqanaba e-elektroniki-kufuneka lwenziwe ngokucothayo, ngokunyuswa kwemizuzu, ukuvumela ixesha lokuba izinto zizinze. Amagcisa ethu amakhulu, abambelela kwimigangatho engqongqo ye-metrology yehlabathi (DIN, ASME), bayaqonda ukuba ukuleqa inqanaba lokugqibela kunokwazisa uxinzelelo olufihlakeleyo, oluya kuthi luvele kamva njengokuchaneka kokuchaneka.
4. Ukudityaniswa kwamacandelo kunye neNdibano yeSiko
KwiMicimbi yeGranite yesiko le-ZHHIMG okanye iiPaneli zeFlat zeGranite ezidibanisa iimotor ezinomgca, iibheringi zomoya, okanye iireyile zeCMM, indibano yokugqibela ifuna ukucoceka ngokupheleleyo. Amagumbi ethu okudityaniswa acocekileyo acocekileyo, alinganisa imekobume yezixhobo zesemiconductor, ayimfuneko kuba amasuntswana othuli oluncinci oluvalekileyo phakathi kwegranite kunye nenxalenye yentsimbi anokubangela ukuphambuka kancinci. Lonke ujongano kufuneka lucocwe ngobuchule kwaye lujongwe phambi kokuba kuqiniswe okokugqibela, kuqinisekiswe ukuba uzinzo lwecandelo lugqithiselwa ngokungenasiphako kwinkqubo yomatshini ngokwayo.
Ngokuhlonipha ezi mfuno zingqongqo, abathengi baqinisekisa ukuba abafaki nje icandelo, kodwa bachaza ngempumelelo eyona Datum yezixhobo zabo ezichaneke kakhulu-isiseko esiqinisekiswe yi-ZHHIMG yenzululwazi yezinto eziphathekayo kunye nobuchule bokuvelisa.
Ixesha lokuposa: Oct-29-2025