Iindawo zesicelo sendibano yegranite yeemveliso zesixhobo sokuvelisa inkqubo ye-semiconductor

I-Granite luhlobo lwelitye eliqinileyo eliye laba yinto efunekayo kwishishini lokuvelisa i-semiconductor. Iimpawu zayo ziyivumela ukuba imelane namaqondo obushushu aphezulu, nto leyo eyenza ukuba ilungele ukusetyenziswa kwizigaba ezahlukeneyo zeenkqubo zokuvelisa izixhobo ze-semiconductor. Ngenxa yoko, indibano ye-granite ifumene iindawo ezininzi zokusetyenziswa kwiimveliso zezixhobo zenkqubo yokuvelisa i-semiconductor.

Enye yezona ndlela zisetyenziswa kakhulu xa kuhlanganiswa igranite kukwakha izakhiwo zezixhobo zomatshini ezichanekileyo. Ukuqina nokuzinza kwegranite kwenza kube nokwenzeka ukuvelisa izixhobo ezichanekileyo nezichanekileyo ezingenazo iinguqu ezincinci okanye ezingenazo kwaphela. Eli nqanaba lokuchaneka liyimfuneko kwiinkqubo zokwenziwa kwe-semiconductor ezifana nokufakelwa kwe-ion, apho umqadi kufuneka uqondiswe ngokuchanekileyo kwi-wafer.

Enye indlela yokusebenzisa i-granite ekuveliseni i-semiconductor kukwakha izixhobo ze-metrology. Izixhobo ze-Metrology zibalulekile kwiinkqubo zokuvelisa i-semiconductor njengoko zilinganisa kwaye ziqinisekisa ukuchaneka kwezixhobo eziveliswayo. Uzinzo lwe-granite olunobukhulu, ukwanda kobushushu obuphantsi, kunye neempawu ezibalaseleyo zokudambisa ukungcangcazela kwenza ukuba ibe yinto ekhethwayo ekwakheni izixhobo ze-metrology. Oku kuquka iindawo ezinkulu ze-granite ezisetyenziswa ekucwangcisweni nasekuhlolweni kwee-wafers.

Iitafile ze-optical zezinye iindawo ezisetyenziswa kakhulu kwi-granite assembly kwishishini le-semiconductor. Iitafile ze-optical zisetyenziswa ekuvavanyweni kwezixhobo ze-optical ezifana ne-waveguides zonxibelelwano lwedatha. Ukuthe tyaba kwe-granite, ukwanda kobushushu obuphantsi, ukuqina okuphezulu, kunye nokuzinza koomatshini kwenza ukuba ibonelele ngomphezulu ozinzileyo kakhulu wokufakelwa kunye nokubekwa kwe-optics. Iitafile ze-optical ze-Granite zinokubonelela ngozinzo kunye nokuqina okufunekayo ukwenza uvavanyo oluchanekileyo noluchanekileyo lwezixhobo ze-optical.

I-Granite ikwasetyenziswa ekwakhiweni kwee-wafer chucks kunye nezigaba. Ngexesha lenkqubo yokwenziwa kwe-semiconductor, ukulungelelaniswa ngokuchanekileyo, kunye nolawulo lwendawo kubalulekile. Ii-wafer chucks, ezibamba ii-wafers endaweni yazo ngexesha lokucubungula, kufuneka zigcine ukuchaneka kwendawo ngelixa zinyamezela amaqondo obushushu aphezulu kunye neemeko ze-vacuum. I-Granite inozinzo oluhle kakhulu kumanqanaba obushushu kwaye inokumelana neemeko ze-vacuum, nto leyo eyenza ukuba ilungele ukwakhiwa kwee-wafer chucks. Amanqanaba asetyenziswa ekushukumeni kwee-wafers ukusuka kwenye indawo ukuya kwenye adlula kulandelelwano lokuhamba ngebhayisekile ngexesha lenkqubo yokwenziwa kwe-semiconductor. Ukuhlanganiswa kwe-granite kubonelela ngozinzo kunye nokuqina okufunekayo ukuthwala imijikelo eqhubekayo nephindaphindayo yentshukumo.

Ngamafutshane, ukusetyenziswa kwendibano yegranite kwishishini lokuvelisa i-semiconductor kukhulu kakhulu. Iimpawu zayo ezifana nokuzinza okulinganayo, ukwanda okuphantsi kobushushu, ukuqina okuphezulu, kunye nokuxinana kokungcangcazela kwenza ukuba ibe yinto efanelekileyo yokusetyenziswa kwizigaba ezahlukeneyo zeenkqubo zokuvelisa izixhobo ze-semiconductor. Ukususela ekwakhiweni kwezixhobo zoomatshini ezichanekileyo kakhulu kunye nezixhobo ze-metrology ukuya kwiitafile ze-optical kunye nezigaba ze-wafer kunye nee-chucks, iimpawu zegranite zidlala indima ebalulekileyo ekuboneleleni ngozinzo, ukuchaneka, kunye nokuphindaphinda okufunekayo ukuze kufezekiswe ukwenziwa kwezixhobo ze-semiconductor ezikumgangatho ophezulu.