Phantsi kweemfuneko ezingqongqo zokuchaneka okuphezulu kunye nokuthembeka okuphezulu kwishishini le-semiconductor, nangona i-granite yenye yezona zinto ziphambili, iimpawu zayo zizisa nemida ethile. Nazi iingxaki zayo eziphambili kunye nemingeni ekusebenziseni izinto ezisebenzayo:
Okokuqala, izinto ezisetyenzisiweyo zibuthathaka kakhulu kwaye kunzima ukuzisebenzisa
Umngcipheko wokuqhekeka: I-Granite ngokuyintloko lilitye lendalo elinee-micro-cracks zendalo kunye nemida yeeminerali ngaphakathi, kwaye yinto eqhelekileyo ebuthathaka. Kwi-machining echanekileyo kakhulu (efana nokugaya i-nanoscale kunye nokucubungula umphezulu ogobileyo okunzima), ukuba amandla awalingani okanye iiparameter zokucubungula azifanelekanga, iingxaki ezifana nokuqhekeka kunye nokusasazwa kwe-microcrack zinokwenzeka, nto leyo ekhokelela ekuqhekekeni kwe-workpiece.
Ukusebenza kakuhle kokucubungula: Ukuze kuthintelwe ukwaphuka okubuthathaka, kufuneka iinkqubo ezikhethekileyo ezifana nokugaywa ngesantya esiphantsi ngamavili okugaywa kwedayimani kunye nokupholisha ngemagnetorheological. Umjikelo wokucubungula ubude ngama-30% ukuya kuma-50% kunezixhobo zesinyithi, kwaye iindleko zotyalo-mali lwezixhobo ziphezulu (umzekelo, ixabiso leziko lomatshini wokudibanisa eline-axis ezintlanu lidlula i-10 yezigidi zeeyuan).
Imida yesakhiwo esintsonkothileyo: Kunzima ukuvelisa izakhiwo ezikhaphukhaphu ezingenanto ngokusebenzisa inkqubo yokubumba, ukubumba nezinye iinkqubo. Isetyenziswa kakhulu kwiimilo ezilula zejometri ezifana neepleyiti kunye neziseko, kwaye ukusetyenziswa kwayo kulinganiselwe kwizixhobo ezifuna inkxaso engaqhelekanga okanye ukuhlanganiswa kwemibhobho yangaphakathi.
Okwesibini, uxinano olukhulu lukhokelela kumthwalo onzima kwizixhobo
Kunzima ukuyiphatha nokuyifakela: Ubunzima begranite bumalunga ne-2.6-3.0 g/cm³, kwaye ubunzima bayo buphindwe kayi-1.5-2 kunobentsimbi ephoswe phantsi komthamo ofanayo. Umzekelo, ubunzima besiseko segranite somatshini we-photolithography bunokufikelela kwiitoni ezi-5 ukuya kwezili-10, nto leyo edinga izixhobo zokuphakamisa ezizimeleyo kunye neziseko ezingenakushukunyiswa, nto leyo enyusa iindleko zokwakha umzi-mveliso kunye nokufakwa kwezixhobo.
Ukulibaziseka kwempendulo eguqukayo: Ukungabi namandla okuphezulu kuthintela ukukhawuleziswa kweendawo ezishukumayo zezixhobo (ezifana neerobhothi zokudlulisa i-wafer). Kwiimeko apho kufuneka ukuqalisa nokumisa ngokukhawuleza (ezifana nezixhobo zokuhlola ezikhawulezayo), oku kunokuchaphazela isigqi semveliso kwaye kunciphise ukusebenza kakuhle.
Okwesithathu, iindleko zokulungisa nokuhlaziya ziphezulu
Kunzima ukulungisa iziphene: Ukuba kwenzeka umonakalo womphezulu okanye ukungqubana ngexesha lokusetyenziswa, kufuneka ubuyiselwe kumzi-mveliso ukuze ulungiswe ngezixhobo zobuchwephesha zokusila, ezingenakuphathwa ngokukhawuleza kwindawo yokusebenza. Ngokwahlukileyo koko, izinto zesinyithi zinokulungiswa ngoko nangoko ngeendlela ezifana nokuwelda kwindawo ethile kunye nokugquma nge-laser, nto leyo ebangela ukuba ixesha lokungasebenzi lifutshane.
Umjikelo wokuphindaphinda uyilo mde: Umahluko kwimithambo yendalo yegranite unokubangela ukuguquguquka okuncinci kwiimpawu zezinto (ezifana ne-thermal expansion coefficient kunye ne-damping ratio) kwiibhetshi ezahlukeneyo. Ukuba uyilo lwezixhobo luyatshintsha, iimpawu zezinto kufuneka ziphinde zifaniswe, kwaye umjikelo wokuqinisekisa uphando nophuhliso mde kakhulu.
Iv. Izixhobo eziNcinci kunye nemingeni yokusingqongileyo
Ilitye lendalo alinakuhlaziywa: I-granite esemgangathweni ophezulu (efana ne-"Jinan Green" kunye ne-"Sesame Black" esetyenziswa kwi-semiconductors) ixhomekeke kwimithambo ethile, inokugcinwa okulinganiselweyo kwaye ukumbiwa kwayo kuthintelwe yimigaqo-nkqubo yokukhusela okusingqongileyo. Ngokwanda kweshishini le-semiconductor, kunokubakho umngcipheko wokunikezelwa kwezinto eziluhlaza ezingazinzanga.
Imiba yokucubungula ungcoliseko: Ngexesha leenkqubo zokusika nokugaya, kuveliswa uthuli oluninzi lwegranite (olune-silicon dioxide). Ukuba aluphathwanga kakuhle, lunokubangela i-silicosis. Ngaphezu koko, amanzi amdaka kufuneka aphathwe nge-sedimentation ngaphambi kokuba akhutshwe, nto leyo eyandisa utyalo-mali lokukhusela okusingqongileyo.
Isihlanu. Ukungahambelani ngokwaneleyo neenkqubo ezintsha
Imida yendawo yokukhupha umoya: Ezinye iinkqubo ze-semiconductor (ezifana ne-vacuum coating kunye ne-electron beam lithography) zifuna ukugcina imeko ephezulu yokukhupha umoya ngaphakathi kwesixhobo. Nangona kunjalo, ii-micro-pores kumphezulu we-granite zinokufunxa iimolekyuli zegesi, ezikhutshwa kancinci kwaye zichaphazele uzinzo lwe-vacuum degree. Ke ngoko, unyango olongezelelweyo lokuxinana komphezulu (njengokufakwa kwe-resin) luyimfuneko.
Imiba yokuhambelana kwe-electromagnetic: I-Granite yinto yokukhusela. Kwiimeko apho kufuneka ukukhutshwa kombane ongashukumiyo okanye ukukhuselwa kwe-electromagnetic (ezifana namaqonga e-wafer electrostatic adsorption), ii-metal coating okanye ii-conductive films kufuneka zihlanganiswe, nto leyo eyandisa ubunzima besakhiwo kunye neendleko.
Icebo lokuphendula kushishino
Nangona kukho iziphene ezikhankanyiweyo apha ngasentla, ishishini le-semiconductor liye layilungisa ngokuyinxenye intsilelo ye-granite ngokusebenzisa ubugcisa obutsha:
Uyilo lwesakhiwo esidityanisiweyo: Lusebenzisa indibaniselwano "yesiseko segranite + ifreyimu yesinyithi", luthathela ingqalelo ukuqina kunye nokukhanya (umzekelo, umenzi othile womatshini we-photolithography ufaka isakhiwo se-honeycomb ye-aluminium alloy kwisiseko segranite, enciphisa ubunzima nge-40%).
Izixhobo ezizezinye ezenziwe ngokwenziwa: Phuhlisa ii-ceramic matrix composites (ezifana ne-silicon carbide ceramics) kunye namatye okwenziwa asekelwe kwi-epoxy resin ukulinganisa uzinzo lobushushu kunye nokumelana nokungcangcazela kwe-granite, ngelixa kuphucula ukuguquguquka kokucubungula.
Iteknoloji yokucubungula ekrelekrele: Ngokuzisa ii-algorithms ze-AI ukuze kuphuculwe indlela yokucubungula, ukulinganisa uxinzelelo ukuze kuqikelelwe iingozi zokuqhekeka, kunye nokudibanisa ukufunyanwa kwe-intanethi ukuze kulungiswe iiparameter ngexesha langempela, izinga lokuchithwa kwenkunkuma yokucubungula lincitshisiwe ukusuka kwi-5% ukuya ngaphantsi kwe-1%.
Isishwankathelo
Iintsilelo zegranite kwishishini le-semiconductor ngokuyintloko zivela kumdlalo phakathi kweempawu zayo zendalo kunye neemfuno zoshishino. Ngokuhambela phambili kwetekhnoloji kunye nophuhliso lwezixhobo ezizezinye, iimeko zayo zokusetyenziswa zinokuncipha kancinci kancinci ziye "kwiinxalenye zesalathiso ezingenakuthathelwa indawo" (ezifana nee-hydrostatic guide rails zoomatshini be-photolithography kunye namaqonga okulinganisa ngokuchanekileyo), ngelixa kancinci kancinci zinika indawo kwizixhobo zobunjineli eziguquguqukayo ngakumbi kwizixhobo zesakhiwo ezingezizo ezibalulekileyo. Kwixesha elizayo, indlela yokulinganisela ukusebenza, iindleko kunye nokuzinza kuya kuba yinto eqhubeka iphononongwa lishishini.
Ixesha leposi: Meyi-24-2025