Kutheni iiPlati zoHlolo lweGranite zeNanometer-Flatness ziseyisiseko esingenakuphikiswa se-Ultra-Precision Metrology?

Kwiphulo elingapheliyo lokuphucula imveliso, apho ukunyamezelana kobukhulu bezinto kuncipha ukusuka kwi-micrometers ukuya kwi-nanometers, i-reference plane ihlala iyeyona nto ibalulekileyo. Eyona siseko se-metrology yanamhlanje—umphezulu apho zonke izilinganiso ezithe ngqo zivela khona—yi-granite plate. Ngokukodwa, i-granite echanekileyo kakhulu yokuhlola i-granite kunye nomlingani wayo wesakhiwo, i-granite inspection table okanye i-granite surface table, iyaqhubeka nokulawula, kwanakwixesha leenkqubo zokulinganisa zedijithali eziphambili. Kodwa yintoni le nto yendalo, ebonakala ilula eyenza ukuba ingathathelwa indawo njenge "zero point" kumashishini anzima kakhulu kwihlabathi, ukusuka kwimveliso ye-semiconductor ukuya kwiinkqubo ze-laser ezinamandla aphezulu?

Impendulo ikwiindlela ezidibeneyo zezinto ezibonakalayo kunye nobuchule bokwenza izinto obucokisekileyo nobomeleleyo obusekwe kwiminyaka emininzi. Xa ukhetha umphezulu oza kusetyenziswa ukuze uhlolwe ngokucokisekileyo, iimfuno zidlula kakhulu ubulukhuni obulula. Uzinzo, ukuqina, kunye nokuqina kobushushu kubaluleke kakhulu.

Inzuzo Engaguqukiyo yePremium Black Granite

Isiseko sayo nayiphi na into echanekileyo kakhulu yegranite zizinto eziluhlaza ngokwazo. Ngokungafaniyo negranite eqhelekileyo engwevu okanye imabula engaguqukiyo edla ngokusetyenziswa ngabavelisi abangacokisekanga kangako, umgangatho woshishino wokuzinza okungenamkhethe ufuna igranite enoxinano oluphezulu, ene-black-gabbro.

Umzekelo, i-ZHHIMG® Black Granite eyilwe ngokwesayensi ukuze isebenze, inobunzima obungaqhelekanga obumalunga ne-3100 kg/m³. Olu lwakhiwo lweminerali olugqwesileyo alulonani nje kuphela; luyisiqinisekiso sokusebenza. Ubunzima obuphezulu buhambelana ngokuthe ngqo ne-modulus kaYoung ekhulayo, nto leyo ebangela ukuba izinto zibe nzima kwaye zixhathise ngakumbi kwimithwalo engaguqukiyo neguquguqukayo ebekwe phezu kwayo. Olu kuqina oluyimvelo luqinisekisa ukuba itafile yomphezulu wegranite igcina ukunyamezela kwayo okuthe ngqo—ngamanye amaxesha ukuya kwi-nanometer—nangona ixhasa ii-gantries ezinkulu zeCoordinate Measuring Machine (CMM) okanye izinto zokusebenza ezinzima.

Ngaphezu koko, ukuhanjiswa kobushushu obuphantsi kwegranite kunye ne-coefficient ephantsi kakhulu yokwandiswa kobushushu kubalulekile. Kumagumbi okuhlola alawulwa bubushushu, umphezulu wesalathiso kufuneka umelane notshintsho oluncinci olubangelwa kukuguquguquka kobushushu okanye ukudluliselwa kobushushu ukusuka kwinxalenye ehlolwayo. Izinto ze-ZHHIMG® zidlula kwinkqubo yokuguga yendalo yexesha elide ukuze kususwe uxinzelelo lwangaphakathi ngokupheleleyo, ukuqinisekisa ukuba ulwakhiwo lombutho lufana kwaye luqinisekisa ukuba ugqityiweipleyiti yegraniteiza kubonelela ngesicwangciso esithembekileyo nesingenasiphazamiso kangangeminyaka emininzi.

Ubunjineli "kwi-Zero Point": Ukuchaneka ngaphaya kokupolisha okulula

Ukwenziwa kwepleyiti yokuhlola igranite echanekileyo ngokwenene yindlela yobugcisa esekelwe kwisayensi engqongqo, edlula kude ukumba nokusika kokuqala. Le nkqubo ibandakanya oomatshini abakhulu, abakumgangatho ophezulu abasebenza kunye nezixhobo zemetrology ezinobuthathaka kwaye, ngokubaluleke kakhulu, ubuchule bomntu.

Iinkokheli zehlabathi kweli candelo zisebenzisa izixhobo ezinkulu nezilawulwa yindalo. Iitafile zokuhlola i-granite echanekileyo ezinobunzima obufikelela kwiitoni ezili-100 kwaye ubude bayo bufikelela kwiimitha ezingama-20 zifuna iziseko ezingundoqo ezikhethekileyo. Umzekelo, ukusetyenziswa kwee-workshops ezilawulwa kukungcangcazela, ezilawulwa kubushushu nokufuma—ezihlala zinemigangatho yekhonkrithi etyebileyo neqinisiweyo kunye nemisele yokulwa nokungcangcazela—kuyimfuneko. Le ndawo isusa ingxolo yokusingqongileyo, iqinisekisa ukuba izigaba zokugqibela zokuleqa ngesandla kunye noomatshini zenziwa phantsi kweemeko ezizinzileyo kangangoko.

Inkqubo yokusila nokuleqa kulapho kufezekiswa khona ukuthamba okufunekayo. Abavelisi abachanekileyo batyala imali eninzi koomatshini bokuleqa abakhulu, abanobuchule obuphezulu, abakwaziyo ukucubungula izinto zesinyithi kunye nezingezizo zesinyithi ukuya kumanqanaba aphezulu okuchaneka. Nangona kunjalo, nomatshini ophucukileyo unokufezekisa okuncinci kuphela. Ukulinganiswa kokugqibela—i-micron yokugqibela yokulungiswa kokuthamba—ngokwesiko kufezekiswa ngabantu abanobuchule. Aba basebenzi, abanamava angama-30 nangaphezulu eminyaka, basebenzisa iindlela zokubhala ngesandla, bexhomekeke ekuqondeni okuphantse kube yinto yemveli, okuchukumisayo ukuze bafezekise ukunyamezela ukuthamba komphezulu okuhlangabezana okanye okugqitha imigangatho engqongqo yehlabathi, kubandakanya i-ASME B89.3.7, i-DIN 876, kunye ne-JIS B 7510. Olu chukumiso lomntu, oluguqula i-slab yelitye elixineneyo libe yireferensi ye-nanometer-flat, yiyo ehlukanisa itafile yomphezulu we-granite ephezulu.

Igunya leMetroloji: Ukulandelela kunye neMigangatho

Kwishishini elinobunono obukhulu, umlinganiselo ulungile kuphela njengokulinganiswa komphezulu ongqinisisiweyo.ipleyiti yokuhlola igraniteUkuze ithembeke kwihlabathi liphela, ukuqinisekiswa kwayo kufuneka kube yinto engenasiphako kwaye ilandeleke.

Abavelisi abaphambili bavavanya yonke ipleyiti yomphezulu ngokusebenzisa izixhobo zokulinganisa eziphucukileyo zehlabathi: ii-laser interferometers, amanqanaba e-elektroniki (afana nalawo avela kwi-WYLER), kunye nee-probes ze-inductive ezinesisombululo esiphezulu (ezifana nezo zivela kwi-Mahr). Ezi zixhobo zilinganisa ukuthamba ngokubanzi, ukuchaneka kokufunda okuphindaphindiweyo, kunye nokwahluka kwendawo ekuthamba kuyo, rhoqo ukuya kwizisombululo ze-0.5 m okanye ngaphezulu.

Okubalulekileyo kukuba, zonke izixhobo zokulinganisa kufuneka zilinganiswe rhoqo, kwaye ukulandeleka kubuyele kwizikhungo zemetrology zamazwe ngamazwe nezesizwe (ezifana ne-NIST, i-NPL, okanye i-PTB). Oku kunamathela kumgangatho wemetrology ongqongqo, wehlabathi jikelele yingakho iitafile zokuhlolwa kwegranite eziqinisekisiweyo zamkelwe ngokubanzi njengomgangatho wegolide kumagumbi okulinganisa kunye nolawulo lomgangatho. Ngaphandle kwesi siseko siqinisekisiweyo, esisicaba se-nanometer, ukusebenza kwezixhobo ezichanekileyo zezigidi zeerandi—ezifana ne-CMMs eziphambili, iinkqubo ze-semiconductor lithography, kunye noomatshini be-laser be-femtosecond—bekungenakwenzeka ukuba kuqinisekiswe.

I-Granite njengeCandelo loMbane loMatshini

Nangona itafile yomphezulu wegranite ibaluleke kakhulu njengesixhobo sokulinganisa, indima yayo kwisakhiwo kwizixhobo zanamhlanje ezikhawulezayo nezichanekileyo ibaluleke ngokulinganayo. Izixhobo zegranite, iziseko, kunye neendibano ziye zathatha indawo yesinyithi esityhidiweyo kunye nezinye izinto zemveli kwisiseko sesakhiwo soomatshini abaphambili:

• Ukudambisa ukungcangcazela: Ulwakhiwo lwangaphakathi lweGranite kunye nobunzima bubonelela ngeempawu zokudambisa eziphezulu xa kuthelekiswa nesinyithi, zifunxa ngempumelelo ukungcangcazela komatshini kunye nokwandiswa kobushushu okunokuphazamisa indawo ebekwe kuyo i-sub-micron.

• Uzinzo Lwemilinganiselo: Kwizinto ezibalulekileyo ezifana neenkqubo zomoya, i-granite inika uzinzo lwexesha elide, olungagqwaliyo, nolungagobiyo oluyimfuneko ekugcineni izithuba zomoya kunye nolawulo lwereli oluhambelanayo kwimijikelo emikhulu yokusebenza.

• Ubukhulu kunye noBunzima: Ngenxa yokuba inamandla okuvelisa izakhiwo zegranite ezintsonkothileyo, ezi-monolithic kunye neziseko zoomatshini ezifikelela kwiimitha ezingama-20 ubude, iipleyiti zegranite ngoku zizinto ezenziwe ngokwezifiso, ezinee-T-slots ezidibeneyo, i-threaded inserts, kunye neendawo ezithwala umoya ezisebenza njengomqolo wesakhiwo semigca yonke yemveliso.

Ukubaluleka okuhlala ixesha elide kwepleyiti yegranite echanekileyo kakhulu kucacile. Ayisiyonto nje eseleyo yemetrology yendabuko; sisisombululo sezinto zobugcisa obuphezulu esihlala sitshintsha, esenza indawo esisiseko yokubonisa amacandelo okuvelisa aphucukileyo kwihlabathi liphela. Njengoko iimfuno zokuchaneka kobukhulu ziqhubeka ziqina, uzinzo, ukuqina, kunye nokuthe tyaba okuqinisekisiweyo kwegranite emnyama yeprimiyamu kuhlala kubalulekile ukuqinisekisa umgangatho, ukuhambelana, kunye nokuvelisa izinto ezintsha kulo lonke ishishini elichaneke kakhulu kwihlabathi liphela.