Xa kusenziwa iindawo ezichanekileyo, itheyibhile yokusebenza echanekileyo ye-XY ifana "nomntu onobuchule obuphezulu", onoxanduva lokugaya iindawo ukuze zifane ngokuchanekileyo. Kodwa ngamanye amaxesha, nangona umsebenzi ulungile, iindawo ezivelisiweyo azikho semgangathweni. Oku kusenokuba kungenxa yokuba isiseko segranite sebhentshi yokusebenza "sibangela umsindo"! Namhlanje, masithethe ngendlela ebaluleke ngayo ukuhambelana kwezinto ezisisiseko segranite ekucutshungulweni ngokuchanekileyo.
Izinto ezisetyenzisiweyo "azilingani", kwaye ingxaki ivele
Khawucinge ngesiseko segranite, ezinye iindawo ziqinile kwaye ezinye iindawo zithambile; Kuya kwenzeka ntoni ukuba ezinye iindawo zanda ngakumbi xa zishushu kwaye ezinye iindawo zanda kancinci?
Ukungalingani kokungcangcazela: Ukuba uxinano kwiindawo ezahlukeneyo zesiseko somatshini wegranite alufani, xa itafile yokusebenza ihamba ngokukhawuleza, kuya kuba ngathi ngumntu ohambayo, omnye uphezulu nomnye uphantsi, nto leyo ebangela ukungcangcazela. Olu hlobo lokungcangcazela lubaluleke kakhulu ekucutshungulweni ngokuchanekileyo. Umzekelo, xa upholisha iilensi ze-optical, lunokubangela ukuba umphezulu weelensi ube rhabaxa. Iilensi ebezinokufikelela kwisiphumo esifana nesipili ekuqaleni ziya kwenza ukuba izinga lazo lokukrazula linyuke nge-30% ngokuthe ngqo!
Ubushushu "bubangela ingxaki": Kwinkqubo ye-semiconductor photolithography, kufuneka ulawulo oluchanekileyo lwendawo. Nangona kunjalo, ukuba ii-coefficients zokwandisa ubushushu kwiindawo ezahlukeneyo zesiseko segranite zahluka kakhulu, xa ubushushu butshintsha, isiseko "siya kutshintsha size sitshintshe", nto leyo ekhokelela kwiimpazamo ezinkulu zokubeka indawo kwaye mhlawumbi i-wafer yonke ikhutshiwe.
Ukuguguleka okungalinganiyo: Isiseko esinobunzima obungaguqukiyo sifana nezihlangu ezinemigangatho eyahlukeneyo yokuguguleka. Emva kokusetyenziswa ixesha elide, iindawo ezinobunzima obuphantsi kwibhentshi yokusebenzela ziya kuguga ngokukhawuleza. Umzila ohamba ngokuthe tye wokuqala uya kugoba, kwaye ukuthe tye kuya kwehla kakhulu. Iindleko zokugcina ziya kunyuka kakhulu.
Kuphela xa izinto zihambelana apho ukucutshungulwa kungazinza njengeNtaba iTai.
Xa iipropati zezinto ezibonakalayo zesiseko segranite zifana kwaye zihambelana, iingenelo zikhawuleza:
Ukusebenza okuzinzileyo, okuchanekileyo nokunamandla okuguquguqukayo: Isiseko esenziwe ngezinto ezihambelanayo sinokufunxa ngokulinganayo ukungcangcazela xa itafile yokusebenza iqala, ima okanye ijika ngokukhawuleza. Ngale ndlela, ukuchaneka kokubekwa kwakhona kunokufikelela kwi-±0.3μm emangalisayo, okufana nokuchaneka kokwahlula iinwele zomntu zibe ngamacandelo angama-300 angaphezulu!
Impendulo echanekileyo yobushushu: I-coefficient edibeneyo yokwandiswa kobushushu ifana nokufaka "inkqubo yokulawula ubushushu ekrelekrele" kwisiseko. Iinjineli zinokuqikelela ngokuchanekileyo ukuguquka kwesiseko xa ubushushu butshintsha. Ngokusebenzisa i-algorithm compensation, impazamo yokuguqulwa kobushushu ilawulwa ngaphakathi kwe-±0.5μm.
"Ubomi benkonzo" obude kakhulu: Ubunzima obufanayo kunye noxinano kuqinisekisa ukuba zonke iindawo zesiseko "zixinene ngokulinganayo", kuthintelwe ukuguguleka okugqithisileyo kwendawo. Iziseko zoomatshini eziqhelekileyo zinokufuna ukutshintshwa rhoqo emva kweminyaka emihlanu, ngelixa ezo zisemgangathweni ophezulu ezenziwe ngezinto ezihambelanayo zinokuhlala iminyaka esibhozo ukuya kwelishumi, oko konga imali eninzi yeendleko zokutshintshwa kwezixhobo.
Ungakhetha njani isiseko seenqwelo-moya zegranite "esinokuthenjwa"?
Chonga "imvelaphi": Khetha i-granite eyombiwe kumaleko ofanayo weeminerali nendawo efanayo, njengokuba ukha iziqhamo kumthi omnye, oku kunokuqinisekisa ukuba ukwakheka kweziminerali kuyafana.
"Uvavanyo oluqinileyo": Iziseko zoomatshini begranite ezinokuthenjwa kufuneka zidlule "kwiindawo zokujonga" ezili-12 ezifana nohlalutyo lwe-spectral kunye novavanyo loxinano, kwaye zonke izinto ezingaphantsi komgangatho ziyasuswa.
Jonga "ikhadi lesazisi": Cela umthengisi ukuba anike isiqinisekiso esisemgangathweni kunye neengxelo zovavanyo. Kuphela sisiseko esinesiqinisekiso esigunyazisiweyo esinokusetyenziswa ngoxolo olukhulu lwengqondo.
Kwihlabathi loomatshini abachanekileyo, iinkcukacha zigqiba impumelelo okanye ukungaphumeleli. Ukuhambelana kwezinto ezisetyenziswayo kwisiseko segranite yeyona nto ibalulekileyo ukuqinisekisa ukuchaneka nokunciphisa iindleko. Ngexesha elizayo xa ukhetha izixhobo, ungalibali eli "nkcukacha lincinci" kwakhona!
Ixesha leposi: Juni-17-2025