Izicelo ezi-8 eziqhelekileyo zePrecision Granite Components kwiSemiconductor Equipment

Kwishishini le-semiconductor, apho "i-nanometer" iyiyunithi eqhelekileyo yokulinganisa, ukuthembeka kwesakhiwo sezixhobo akunakuxoxiswana ngako. Njengoko ii-chip nodes zincipha ukuya kwi-5nm nangaphezulu, imfuno yokudambisa ukungcangcazela kunye nokuzinza kobushushu ifikelela kumanqanaba aphezulu. Izinto zegranite ezichanekileyo zitshintshile ukusuka ekubeni lukhetho oluphezulu ukuya kwi-"DNA" ebalulekileyo yezixhobo zokwenza i-semiconductor.

Njengomboneleli ophambili wezakhiwo zezixhobo ezizinzileyo, i-ZHHIMG® ihlalutya ezona zicelo zisibhozo zibalulekileyo apho i-granite iliqhawe elithuleyo lezinto ezintle.

1. Iziseko zoMatshini weLithography

Umatshini we-lithography sesona sixhobo sinzima kakhulu kwi-semiconductor chain. Isiseko kufuneka sixhase iinkqubo ezinkulu ze-optical ngelixa sihlala singashukumi ngokupheleleyo. Uxinano oluphezulu lweGranite kunye nokuxinana kwangaphakathi kuyivumela ukuba ifunxe ii-micro-vibrations ezivela kwindawo engqongileyo, ukuqinisekisa ukuba umthombo wokukhanya uhlala ulungelelene kwinqanaba le-athomu.

2. Amanqanaba okuHamba koMoya

Ukuthuthwa kwe-wafer ekhawulezayo kufuna intshukumo engenazingxabano. Ngenxa yokuba i-granite inokudityaniswa ibe yi-sub-micron flatness, isebenza njengeqabane elifanelekileyo kwitekhnoloji yokuthwala umoya. "I-air cushion" ityibilika phezu komphezulu we-granite ngaphandle kokuguguleka, inika intshukumo egudileyo kakhulu efunekayo ekuskeni nasekubekeni indawo.

3. Iiplatfomu zohlolo lweWafer kunye neMetrology

Emva kokugrumba, ii-wafers kufuneka zihlolwe ukuba azinazo iziphene. Naluphi na ulwandiso lobushushu kwisakhelo somatshini luya kubangela "i-false positive" okanye isiphene esingafanelekanga.Izixhobo zegranite ezichanekileyoukubonelela ngendawo engasebenzi kakuhle kubushushu, ukuqinisekisa ukuba idatha yokuhlolwa ibonakalisa ngokwenene umphezulu we-wafer, kungekhona ukugqwetheka komatshini.

4. Iinkqubo zeGantry Motion (Izakhiwo zeBridge)

Kwi-dicing okanye i-wire bonding ekhawulezayo, "ibhulorho" okanye i-gantry kufuneka ihambe ngokukhawuleza ngaphandle kokushukuma. I-granite gantry inika umlinganiselo wokuqina okuphezulu xa kuthelekiswa ne-cast iron, nto leyo enciphisa kakhulu "ixesha lokuzinza" - ixesha ekufuneka umatshini ulinde ukuba iintshukumo ziyeke ngaphambi kokuba wenze umsebenzi wawo olandelayo.

5. Iifreyimu zezixhobo zokulungisa i-laser

Xa kufunyenwe isiphene kwimaski okanye kwi-wafer, ii-laser zisetyenziselwa ukulungisa ngokuchanekileyo. Oku kufuna isiseko solwakhiwo esingenamagnethi ngokupheleleyo kwaye esingahambisi umbane. I-Granite ikhusela ngokwemvelo, ithintela ukuphazamiseka kwe-electromagnetic ekuchaphazeleni indlela ye-laser ethambileyo.

6. I-CMM (iiMatshini zokulinganisa eziHlanganisiweyo) zamagumbi okucoca

Ulawulo lomgangatho ngaphakathi kwesakhiwo se-semiconductor lufuna ii-CMM ezinokumelana neenkqubo ezingqongqo zegumbi lokucoca. Ngokungafaniyo nesinyithi, esinokukhupha amasuntswana okanye sinyibilikise, i-granite ayimelani ne-asidi kwaye ayidli mhlwa, igcina isakhiwo sesixhobo esizinzileyo ngaphandle kokungcolisa okusingqongileyo.

7. Iziseko zeChemical Mechanical Polishing (CMP)

Inkqubo ye-CMP ibandakanya uludaka kunye neekhemikhali ezingcolisa kakhulu iintsimbi. Ukumelana neekhemikhali kwendalo kwegranite kwenza ukuba ibe yeyona nto ifanelekileyo kwisiseko sesakhiwo seeyunithi zokupolisha, okuqinisekisa ubomi obude benkonzo nakwiindawo ezinzima zeekhemikhali.

8. Iinkqubo zokufakelwa kwee-Ion

Iindawo ezine-voltage ephezulu kwi-ion implanters zifuna izinto ezingayi kuphazamisana ne-ion beams okanye zenze i-electrical arcing. Iimpawu ze-dielectric zeGranite zenza ukuba ibe lukhetho olukhuselekileyo noluzinzileyo lokufaka izinto ezinobukrelekrele zombane kunye ne-vacuum.

Kutheni i-ZHHIMG® isetyenziselwa iziseko zeSemiconductor?

Apha kwi-ZHHIMG®, siyaqonda ukuba isiseko sezixhobo ze-semiconductor asiyonto nje yelitye—sisixhobo esilinganisiweyo. I-granite yethu emnyama ekhethekileyo, kunye namava ethu angaphezu kweminyaka engama-30 okugaya ngesandla, isenza sikwazi ukufikelela kumanqanaba okuthamba kunye nokufana ahlangabezana neemfuno ezinzima zexesha le-sub-micron.

• Izinto: I-granite emnyama ye-ZHHIMG® enobunzima obuphezulu, ecolekileyo kakhulu.

• Ukuchaneka: Amanqanaba okuchaneka ngokwe-DIN 876 Grade 00 okanye ngokweenkcukacha ze-JIS/ASME ezenziwe ngokwezifiso.

• Ukwenziwa ngokwezifiso: Izixhobo ezidityanisiweyo, ii-T-slots, kunye neendlela zomoya ezifakelwe kwangaphambili kwiindawo zethu zokusebenzela zobushushu obungaguqukiyo ezingama-10,000m².