Iigeyithi zeCeramic zeAlumina kwiMveliso yeSemiconductor: Iminyaka eli-10 yoZinzo oluNgcono olungenakuthelekiswa nanto

Kwishishini le-semiconductor, apho i-micron enye inokuba ngumahluko phakathi kwebhetshi enemveliso ephezulu kunye nokusilela okubiza kakhulu, ukukhetha izinto ze-metrology kubalulekile. Njengoko i-lithography kunye nokuhlolwa kwe-wafer kuqhubela phambili imida yefiziksi, isinyithi sendabuko kunye ne-granite ephezulu zifikelela kwimida yazo.

I-Alumina Ceramic (Al2O3) ivele njengesisombululo esiqinisekileyo sabavelisi bezixhobo ze-semiconductor. Ngenxa yokuba ixesha lokugcinwa ngokuchanekileyo linokudlula izixhobo zemveli ngaphezu kweminyaka eli-10, iiseramikhi azisaseyona nto iphambili—ziyimfuneko yokwakha.

Kutheni iAlumina Ceramic isetyenziswa kwiSemiconductors?

Ngaphambi kokuba ungene kwiindlela ezisetyenziswayo, kubalulekile ukuqonda iprofayili eyahlukileyo "yengozi ezintathu" yale nto:

• Uzinzo lobushushu: I-coefficient ephantsi yokwandiswa kobushushu (≈7 × 10^{-6}/K) iqinisekisa ukuba imilinganiselo ihlala ihambelana nangona ubushushu buveliswa zizixhobo ezikhawulezayo.

• Ayisebenzisi Magnetic kwaye Ayisebenzisi I-Conductive: Ibalulekile kwiindawo ezingenanto yakwenza ne-vacuum kunye ne-electron-beam lithography enobukrelekrele apho ukuphazamiseka kwemagnethi kunokuphambukisa imisebe.

• Akukho Mhlwa: Ngokungafaniyo nentsimbi, iiseramikhi azinawo amandla ngokweekhemikhali, nto leyo eyenza ukuba zihambelane neendlela zokucoca amagumbi okucoca kunye neendawo ezinegesi erhabaxa.

Izicelo ezi-5 eziphambili kwiZixhobo zeSemiconductor

1. Amanqanaba oMatshini weLithography

I-photolithography yanamhlanje ifuna indawo yokubeka izinto kwinqanaba le-nanometer. Izikwere ze-ceramic kunye nezinto zokwakha zisebenza njenge "reference master" yesigaba se-wafer. Umlinganiselo wazo wokuqina-ubunzima obuphezulu uvumela ukukhawuleziswa ngokukhawuleza ngaphandle kokungcangcazela okanye "ukukhala" okunxulunyaniswa nezinto ezinzima.

2. Uhlolo lweWafer kunye neMetrology

Kwiinkqubo zejometri ye-wafer, iiCeramic Master Squares zisetyenziselwa ukulinganisa ukuthe nkqo kunye nokuthe tye kwee-axes zokuskena. Ngenxa yokuba i-ceramic igcina imo yayo ngaphezulu kweminyaka elishumi, ezi matshini zifuna imijikelo embalwa kakhulu yokuhlaziya, nto leyo eyenza ukuba ixesha lokusebenza libe likhulu.

3. Ukuhlanganiswa ngokuchanekileyo kweeGumbi zoVutha

Ukuhlanganiswa kwee-semiconductor kudla ngokwenzeka kwiindawo zokucoca umoya apho ukuthambisa kunqongophele khona. Iigeyiji zeseramikhi zibonelela ngereferensi yokuchaneka "eyomileyo" engayi kuphuma igesi okanye ingcolise ukucoca umoya, ukuqinisekisa ukuba izinto zangaphakathi zihambelana nokunyamezelana kwe-sub-micron.

4. Uvavanyo lwe-elektroniki oluQhelekileyo kakhulu

Kuvavanyo lwe-chip olukhawulezayo, naluphi na uphazamiseko lwe-magnetic okanye i-conductive oluvela kwisixhobo sokulinganisa lunokuphazamisa iziphumo. I-Alumina ceramic ayisebenzisi i-magnetic yendalo eyenza ibe yeyona nto ifanelekileyo yokulungisa amakhadi e-probe kunye nee-alignment gages.

5. IiMasters zoLungiso lwegumbi lokucoca

Kwigumbi lokucoca le-ISO Class 1, umhlwa yinto engavumelekanga ukungcoliswa. Iigeyiji zentsimbi zifuna iifilimu zeoyile ukuthintela i-oxidation, nto leyo eyingozi enkulu yokungcoliswa. Iigeyiji zeseramikhi azifuni oyile kwaye zinokucocwa nge-isopropyl alcohol, zigcine iprofayili "ye-zero-particle" kangangeminyaka eli-10 nangaphezulu.

"Inzuzo Yeminyaka Eli-10"

Nangona iigeyiji zesinyithi zinokugoba okanye ziguge emva kweminyaka embalwa yokusetyenziswa kakhulu, ulwakhiwo lweemolekyuli ze-Alumina ecocekileyo kakhulu luzinzile kakhulu. Xa lusetyenziswa njengeCeramic Square okanye iStraight Edge, ubunzima bezinto (ukusondela kobo besafire) buthintela ukuwohloka komphezulu ongama-microscopic okubangela ukuba ukuchaneka "kuguguleke" ngokuhamba kwexesha.

Kwi-OEM ye-semiconductor, oku kuthetha ukuncitshiswa kweendleko zokugcinwa kwexesha elide ngokuphindwe kalishumi kunye nenqanaba eliphezulu kakhulu lokuthemba ukuchaneka komatshini ebomini.