Iqonga le-granite, njengesixhobo sokubhekisela kumlinganiselo ochanekileyo kunye nokucubungula, ukugcinwa kwayo ngokuchanekileyo kuchaphazela ngokuthe ngqo umgangatho wokuvelisa. Oku kulandelayo kubonelela ngesicwangciso solondolozo olucwangcisiweyo olubandakanya ulawulo lokusingqongileyo, ukugcinwa kwemihla ngemihla kunye nokulinganisa ubuchwephesha ukuqinisekisa ukuba iqonga ligcina ukuchaneka kwenqanaba le-nanometer ixesha elide.
1. Ulawulo lokusingqongileyo: Yakha umqobo wokukhusela ochanekileyo
Ulawulo lobushushu kunye nokufuma
Ubushushu bendawo yokusebenza kufuneka buzinziswe kwi-20±1℃. Yonke i-1℃ ukuguquguquka kuya kubangela ukuguqulwa kwe-thermal yeqonga legranite kwi-0.5-1μm/m. Inkqubo yobushushu obungaguqukiyo inokufakwa kwindawo yokusebenzela ukuze kuthintelwe iindawo zokupholisa umoya ukuba zivuthele ngqo eqongeni.
Ukufuma kufuneka kulawulwe phakathi kwe-40% kunye ne-60%. Ukufuma okugqithisileyo kunokubangela lula umhlwa kwiindawo zentsimbi, ngelixa ukufuma okuphantsi kakhulu kunokukhokelela kuphazamiseko lombane ongatshintshiyo kumlinganiselo.
Ukwahlukaniswa kweVibration
Iqonga kufuneka ligcinwe likude nemithombo yokungcangcazela efana noomatshini bokubetha kunye noomatshini bokungqusha. Kunconywa ukugcina umgama ongaphezu kweemitha ezi-3 ukusuka kwisixhobo sokungcangcazela.
Ukuba i-vibration ayikwazi ukuphetshwa, i-air spring shock absorbers ingafakwa phantsi kweqonga ukunciphisa impembelelo ye-vibration yokusingqongileyo kwi-flatness yeqonga (elinokunciphisa ukunyakaza kwangaphandle ngaphezu kwe-80%).
2. ULondolozo lweMihla: Ulawulo olucokisekileyo ukusuka ekucoceni ukuya ekukhuseleni
Iinkcukacha zokucoca umphezulu
Ukususwa kothuli: Sula umphezulu ngesikhumba senyamakazi okanye ilaphu elingena-lint kwicala elinye yonke imihla ukukhusela amasuntswana othuli (≥5μm) ekukrweleni iqonga. Amabala anenkani angasulwa ngobumnene nge-ethanol ye-anhydrous (ubunyulu ≥99.7%). Izinyibilikisi ezinamandla ezifana ne-acetone kufuneka zingasetyenziswa.
I-Degreasing: Ukuba idibene namabala e-oyile, yisule nge-diluted neutral cleaner, emva koko uhlambulule ngamanzi adibeneyo kunye nomoya owomileyo ukukhusela i-oyile yeminerali ukuba ingene kwi-pores encinci yeqonga.
Ukhuseleko lomthwalo kunye nokungqubana
Umthamo wokuthwala umthwalo weqonga kufuneka ulawulwe ngaphakathi kwe-70% yomthwalo olinganisiweyo (umzekelo, kwiqonga le-1000kg, kucetyiswa ukuba umthwalo ube ngu-≤700kg) ukuphepha ukuguqulwa okusisigxina okubangelwa ukugqithiswa kwendawo.
Akuvumelekanga ngokungqongqo ukubetha ii-workpieces eqongeni. Xa uphatha izixhobo, nxiba iiglavu ezithambileyo ukuthintela izinto ezibukhali ukusuka kumphezulu (imikrwelo enobunzulu obungaphezulu kwe-20μm iya kuchaphazela umlinganiselo wendlela yokukhanya ebonakalisiweyo).
3. Ulungelelwaniso lobuNgcali: Undoqo wokugcinwa kokuchaneka ngokwenzululwazi
Ulungelelwaniso lomjikelo wolungelelwaniso
Iimeko zokusetyenziswa okuqhelekileyo: Linganisa kanye ngekota kwaye usebenzise i-laser interferometer ukubona ukucaba (ngokuchaneka kwe-± 0.5μm/m).
Ukusetyenziswa kwe-high-frequency okanye indawo engqongileyo enzima: Ukulinganisa kwenyanga, kugxininise ekubekeni iliso kwiindawo ezithintekayo kwiqondo lokushisa (njengomda weqonga kufuphi nemithombo yokushisa).
Ukuqhubekeka kolungelelwaniso lwasemva
Ukuba ukutenxa okuthe tyaba kufunyenwe (okufana > ±1μm/m), kufuneka kucolwe kwaye kulungiswe ligcisa elichwepheshile esebenzisa i-W1.5 micro-powder. Ukuzigaya nge-sandpaper kunqatshelwe ngokungqongqo.
Emva kokulinganisa, idatha kufuneka irekhodwe kwaye igcinwe, kwaye i-platform ye-platform accuracy attenuation curve kufuneka isekwe ukuqikelela iimfuno zokugcinwa kwangaphambili.
4. Ukugcinwa kunye noThutho: Kuphephe ilahleko echanekileyo efihliweyo
Amanqaku aphambili okugcina ixesha elide
Xa ugcina, kufuneka igqunywe ngesigqubuthelo sobungqina bokufuma kunye nothuli. I-bottom kufuneka ixhaswe ngamanqaku amathathu (indawo yokuxhasa ifumaneka kwi-2/9 yobude beqonga) ukukhusela i-deformation egobayo ebangelwa ubunzima (i-platform ye-1-meter inokuthi i-0.3μm ngenxa yenkxaso yexesha elide elilodwa).
Hambisa indawo yeendawo zokuxhasa iqonga rhoqo (ngenyanga) ukuphepha uxinzelelo lwexesha elide lwendawo.
Isicwangciso sokhuseleko kwezothutho
Ukuthuthwa komgama omfutshane: Ukusonga ngegwebu elifunxayo, lungisa ngaphakathi kwesakhelo esiqinileyo, kwaye ugcine ukukhawuleza ngaphakathi kwe-2g.
Uthutho lomgama omde: Kufuneka lufakwe ivacuum-packed kwaye izaliswe yinitrogen eyomileyo. Emva kokufika, kufuneka kushiywe ukuma iiyure ezingama-24 de iqondo lokushisa lifikelele kwi-equilibrium ngaphambi kokukhulula ukuthintela ukuchaneka kwamanzi ukuba achaphazele ukuchaneka.
5. I-Fault Prediction: Iindlela zokuchonga iingxaki zakwangoko
Ukuhlolwa okubonakalayo: Jonga rhoqo umphezulu ngeglasi ye-40x yokukhulisa. Ukuba imikrwelo eqhubekayo okanye ukwehla okukhulu kwi-gloss kufunyenwe, kunokubonisa ukuhla kokuchaneka.
Ukufunyaniswa kwesandi: Cofa iqonga ngobunono. Ukuba isandi siya kuba rhabaxa (ngokuqhelekileyo kufuneka sibe sisandi esicacileyo), kusenokubakho iintanda ezincinci ngaphakathi. Yeka ukuyisebenzisa kwangoko ukuze ubhaqwe.
Ngokusebenzisa le nkqubo yokulondoloza, iqonga le-granite le-ZHHIMG® linokugcina i-flatness ye-± 1μm / m iminyaka eyi-10, engaphezulu kwexesha eliphindwe kathathu kunobomi obuchanekileyo beeplatifomu ezingagcinwanga ngokufanelekileyo. Ukuziqhelanisa kuye kwabonisa ukuba emva kokuba umzi-mveliso othile we-semiconductor wamkele esi sisombululo, ukuphindaphinda kokulinganisa iqonga kwancitshiswa ngama-50%, kwaye iindleko zokugcinwa konyaka zigcinwe ngaphezu kwe-yuan eyi-150,000.
Ixesha lokuposa: Jun-18-2025