Xa kufakwa iqonga lokuchaneka kwegranite kwi-metrology okanye i-assembly ekumgangatho ophezulu, abathengi bahlala bebuza: ngaba singayilungisa umphezulu ngeempawu—ezifana nemigca ye-coordinate, iipateni zegridi, okanye amanqaku athile okubhekisa? Impendulo, evela kumvelisi ochaneke kakhulu onjengeZHHIMG®, ngu-ewe oqinisekileyo, kodwa ukusetyenziswa kwezi zimpawu bubugcisa obuncinci obufuna ubuchule ukuqinisekisa ukuba iimpawu ziphucula, endaweni yokunciphisa, ukuchaneka okuphambili kweqonga.
Injongo yeempawu zomphezulu ezichanekileyo
Kwiiplati ezininzi zomphezulu wegranite okanye iziseko zoomatshini, injongo ephambili kukufikelela ekuthini kube tyaba kakhulu kwaye kuzinze ngokwejometri. Nangona kunjalo, kwizicelo ezinje ngeejigi zokuhlanganisa ezinkulu, izitishi zokulinganisa, okanye useto lokuhlola ngesandla, izixhobo ezibonakalayo nezomzimba ziyafuneka. Iimpawu zomphezulu zisebenza imisebenzi emininzi ebalulekileyo:
- Izikhokelo Zokulungelelanisa: Ukubonelela ngemigca yesalathiso ekhawulezayo nebonakalayo yokubeka izinto okanye iindawo ngendlela engacwangciswanga ngaphambi kokuba kusetyenziswe amanqanaba okulungisa izinto ezincinci.
- Iinkqubo zoQhagamshelo: Ukumisela igridi yoQhagamshelo ecacileyo, yokuqala (umz., ii-axes ze-XY) ezinokulandeleka ukuya kwindawo esembindini okanye kwi-datum yomda.
- Iindawo Ezingavumelekanga Ukuya: Ukuphawula iindawo apho izixhobo zingafanele zibekwe khona ukuze kugcinwe ulungelelwano okanye kuthintelwe ukuphazamiseka kwiinkqubo ezidibeneyo.
Umngeni Wokuchaneka: Ukuphawula Ngaphandle Kokonakalisa
Ubunzima obukhoyo bukwinyani yokuba nayiphi na inkqubo esetyenziselwa ukufaka iimpawu—ukukrola, ukupeyinta, okanye ukuchwetheza—ayifanele iphazamise ukuthamba kwe-sub-micron okanye i-nanometer esele ifezekisiwe yinkqubo yokulapha nokulinganisa okungqongqo.
Iindlela zemveli, ezifana nokukrola okunzulu okanye ukubhala, zinokuzisa uxinzelelo lwendawo okanye ukugqwetheka komphezulu, okuphazamisa ukuchaneka kwegranite eyenzelwe ukuyizisa. Ke ngoko, inkqubo ekhethekileyo esetyenziswa yiZHHIMG® isebenzisa iindlela ezenzelwe ukunciphisa impembelelo:
- Ukukrola/Ukukrola okuNgenzulu: Iimpawu zihlala zisetyenziswa ngokukrola okuchanekileyo nokungenzulu—ngokudla ngokuba ngaphantsi kwe-±0.1 mm ubunzulu. Olu bunzulu lubalulekile kuba luvumela umgca ukuba ubonakale kwaye uchukumiseke ngaphandle kokunciphisa kakhulu ukuzinza kwesakhiwo segranite okanye ukuguqula ukuthamba kwayo iyonke.
- IiFillers ezikhethekileyo: Imigca eqoshiweyo idla ngokuzaliswa yi-epoxy okanye ipeyinti eyahlukileyo, ene-viscosity ephantsi. Le filler yenzelwe ukuthambisa umphezulu wegranite, ithintela uphawu ukuba lungabi yindawo ephakamileyo enokuphazamisana nokulinganisa okulandelayo okanye iindawo ezidibanayo.
Ukuchaneka kweempawu vs. i-Platform Flatness
Kubalulekile ukuba iinjineli ziqonde umahluko phakathi kokuchaneka kokuthe tyaba kweqonga kunye nokuchaneka kokubekwa kweempawu:
- Ukuqina kwePlatform (Ukuchaneka kweJiyometri): Olu luvavanyo lokugqibela lokuba umphezulu ulungelelaniswe ngokugqibeleleyo kangakanani, ohlala uqinisekiswa kwinqanaba le-sub-micron, uqinisekiswa zii-laser interferometers. Lo ngumgangatho ophambili wesalathiso.
- Ukuchaneka kokuphawula (Ukuchaneka kwesikhundla): Oku kubhekisa kwindlela ebekwe ngayo ngokuchanekileyo umgca othile okanye inqaku legridi ngokumalunga nemiphetho yedatha yeqonga okanye inqaku eliphakathi. Ngenxa yobubanzi obuqhelekileyo bomgca ngokwawo (odla ngokuba malunga ne-±0.2mm ukuze ubonakale) kunye nenkqubo yokuvelisa, ukuchaneka kwesikhundla seempawu kuqinisekiswa ukuba ziyanyamezela ukusuka kwi-± 0.1 mm ukuya kwi-± 0.2 mm.
Nangona oku kuchaneka kwendawo kunokubonakala kukhululekile xa kuthelekiswa nokuqina kwe-nanometer ye-granite ngokwayo, iimpawu zenzelwe ukujonga nokuseka, kungekhona ukulinganisa kokugqibela ngokuchanekileyo. Umphezulu we-granite ngokwawo uhlala ungowona mzekelo uphambili, ongenakuguqulwa ngokuchanekileyo, kwaye ukulinganisa kokugqibela kufuneka kuthathwe kusetyenziswa izixhobo ze-metrology ezijonga iplani ethe tyaba eqinisekisiweyo yeqonga.
Ukuqukumbela, iimpawu zomphezulu ezenziwe ngokwezifiso kwiqonga legranite zizinto ezibalulekileyo ekuphuculeni indlela yokusebenza kunye nokuseta, kwaye zinokwenziwa ngaphandle kokuphazamisa ukusebenza kweqonga ngokuchanekileyo. Nangona kunjalo, kufuneka zichazwe kwaye zisetyenziswe ngumvelisi oyingcali, ukuqinisekisa ukuba inkqubo yokuphawula ihlonipha ukuthembeka okusisiseko kwesiseko segranite esixineneyo kakhulu.
Ixesha leposi: Okthobha-21-2025
