Decrypt the “rock force” emva kokwenziwa kwesemiconductor-Ingenziwa njani into echanekileyo yegranite ukubumba kwakhona umda ochanekileyo wokwenziwa kwetshiphu

Utshintsho oluchanekileyo kwimveliso ye-semiconductor: Xa igranite idibana neteknoloji yemicron
1.1 Ukufunyaniswa okungalindelekanga kwinzululwazi yemathiriyeli
Ngokwengxelo yowama-2023 ye-SEMI International Semiconductor Association, ama-63% eendwangu eziphucukileyo zehlabathi sele ziqalisile ukusebenzisa iziseko zegranite endaweni yamaqonga esinyithi emveli. Eli litye lendalo, elisuka kwi-magma condensation enzulu eMhlabeni, libhala kwakhona imbali yokwenziwa kwe-semiconductor ngenxa yeempawu zayo ezizodwa:

Inzuzo ye-inertia ye-thermal: i-coefficient yokwandiswa kwe-thermal ye-granite 4.5 × 10⁻⁶/℃ yi-1/5 kuphela yensimbi engenasici, kwaye ukuzinza kwe-dimensional ± 0.001mm kugcinwa kumsebenzi oqhubekayo womatshini we-lithography

Iimpawu zokudambisa i-Vibration: i-coefficient yangaphakathi ye-friction iphezulu ngokuphindwe ka-15 kune-iron etyhidiweyo, ngokufanelekileyo ukufunxa izixhobo ze-micro-vibration.

Ubume be-Zero magnetization: susa ngokupheleleyo impazamo yamagnetic kumlinganiselo welaser

1.2 Uhambo lwemetamorphosis ukusuka kweyam ukuya kwi-fab
Ukuthatha isiseko semveliso esikrelekrele seZHHIMG eShandong njengomzekelo, isiqwenga segranite ekrwada kufuneka singene kuyo:

I-Ultra-precision machining: iziko lokudibanisa i-axis emihlanu yeeyure ezingama-200 zokusila okuqhubekayo, uburhabaxa bomphezulu ukuya kuthi ga kwi-Ra0.008μm

Unyango lokuguga olwenziwayo: iiyure ezingama-48 zokukhululwa koxinzelelo lwendalo kwi-workshop yobushushu obuqhubekayo kunye nomswakama, ophucula ukuzinza kwemveliso nge-40%
Okwesibini, qhekeza iingxaki ezintandathu ezichanekileyo zokwenziwa kwe-semiconductor "isisombululo samatye"
2.1 Iskimu sokunciphisa izinga lokwahlulwa kweWafer

Umboniso wemeko: Emva kokuba isiseko setshiphu eJamani samkele iqonga lethu lerhasi elidadayo legranite:

Idayamitha yewafer	ukunciphisa izinga letshiphu	ukuphuculwa kokutya
12 intshi	67%	≤0.001mm
18 intshi	82%	≤0.0005mm

2.2 Iskimu sokuchaneka kokuchaneka kolungelelwaniso lwe-lithographic

Inkqubo yembuyekezo yobushushu: i-sensor efakwe kwi-ceramic ijonga ukuguquguquka kwemilo ngexesha lokwenyani kwaye ihlengahlengisa ngokuzenzekelayo ukuthambekela kweqonga.
Idatha elinganisiweyo: phantsi kokuguquguquka kwe-28 ℃ ± 5 ℃, ukuchaneka kokuzinzisa kuyaguquguquka ngaphantsi kwe-0.12μm