Kwimimandla yokwenziwa ngokuchanekileyo kunye nophando lwezenzululwazi, ukunyanzeliswa kweeplatifomu ezichanekileyo zegranite luphawu oluphambili lokuqinisekisa ukuchaneka kwezixhobo. Oku kulandelayo yintshayelelo eneenkcukacha ezininzi kwiindlela zokubona eziqhelekileyo kunye neenkqubo zazo zokusebenza kuwe.
I. Laser interferometer Ukufunyanwa indlela
I-laser interferometer sisixhobo esikhethwayo sokufumanisa ukuchaneka okuphezulu. Thatha i-ZYGO GPI XP laser interferometer njengomzekelo, isisombululo sayo sinokufikelela kwi-0.1nm. Xa uqhuba ukufumanisa, okokuqala ulungelelanisa umthombo wokukhanya we-interferometer kunye neqonga kwaye uhlukanise indawo yesikhulumi kwiindawo zegridi ze-50mm × 50mm. Emva koko, idatha yefringe yokuphazamiseka iqokelelwe inqaku ngenqaku, kwaye idatha ifakwe kwaye ihlalutywe kusetyenziswa i-polynomial yeZernike ukufumana impazamo ye-flatness. Le ndlela isetyenziswa kwiiplatifti ezichaneke kakhulu kwaye inokubona iimpazamo ze-flatness ≤0.5μm/m². Isetyenziswa ngokuqhelekileyo ekubhaqweni koomatshini be-photolithography kunye nemigangatho ephezulu emithathu yokulungelelanisa umatshini wokulinganisa umatshini.
Ii. Indlela ye-Electronic Level Array
Ukufunyanwa kwenqanaba loluhlu lwe-elektroniki kulula ukusebenza kwaye lusebenza kakuhle kakhulu. Inqanaba le-elektroniki le-TESA A2 (kunye nesisombululo se-0.01μm / m) likhethwe kwaye licwangciswe kwi-9 × 9 uluhlu kunye nolwalathiso lwe-X / Y lwe-axis yeqonga. Ngokuqokelela idatha yokuthambekela kwinqanaba ngalinye kwaye usebenzise eyona ndlela incinci yokubala, ixabiso le-flatness lingafunyanwa ngokuchanekileyo. Le ndlela inokuchonga ngokufanelekileyo i-concavity yendawo kunye neemeko ze-convexity zeqonga. Ngokomzekelo, ukuguquguquka kwe-0.2μm ngaphakathi koluhlu lwe-50mm kunokubonwa, okufanelekileyo ukufunyanwa ngokukhawuleza kwimveliso yobuninzi.
Iii. Indlela yekristale ye-Optical Flat
Indlela ye-crystal optical flat ifanelekile ukukhangela iiplatifomu zendawo ezincinci. Qhoboshela ikristale ye-optical flat ngokuqinileyo kumphezulu ukuze ivavanywe eqongeni kwaye ujonge imiphetho yokuphazamiseka eyenziwe phakathi kwabo phantsi kokukhanya komthombo wokukhanya we-monochromatic (njengesibane sesodium). Ukuba imivumbo iyimigca ehambelanayo ethe tye, oko kubonisa ukucaba okulungileyo. Ukuba kuvela imigca egobileyo, bala impazamo yokucaba ngokusekwe kwiqondo lemigca egophe. Umgca ngamnye ogobileyo ubonisa ukuhluka kobude be-0.316μm, kwaye idatha ye-flatness inokufumaneka ngokuguqulwa okulula.
Isine. Ulungelelwaniso oluthathu lokulinganisa umatshini Indlela yokuhlola
Umatshini wokulinganisa ulungelelwaniso oluthathu unokufezekisa umlinganiselo ophezulu wokuchaneka kwindawo enemigangatho emithathu. Beka iplatifomu yegranite kwi-worktable yomatshini wokulinganisa kwaye usebenzise i-probe ukuqokelela ngokulinganayo idatha ukusuka kwiindawo ezininzi zokulinganisa kumgangatho weqonga. Inkqubo yenkqubo yokulinganisa umatshini kwaye ihlalutya le datha ukuvelisa ingxelo ye-flatness yeqonga. Le ndlela ayikwazi ukubona kuphela i-flatness, kodwa iphinda ifumane ezinye iiparitha zejometri zeplatifomu ngaxeshanye, kwaye ifanelekile ukufumanisa ngokubanzi iiplatifomu ezinkulu zegranite.
Ukuqonda ezi ndlela zokufumanisa kunokukunceda ukuvavanya ngokuchanekileyo ukunyameka kweqonga le-granite elichanekileyo kwaye unikeze isiqinisekiso esithembekileyo sokusebenza ngokuzinzile kwezixhobo ezichanekileyo.
Ixesha lokuposa: May-29-2025