Kwicandelo lokwenziwa kwezinto ezikumgangatho ophezulu kunye nophando lwesayensi oluphambili, imodyuli yokunyakaza echanekileyo kakhulu ye-air float ibe sisixhobo esibalulekileyo sokusebenza kakuhle kunye nokulinganisa ngokusebenza kwayo okugqwesileyo. Isiseko sokuchaneka kwegranite, njengesiseko senkxaso, sineemfuno ezingqongqo kwindawo yokusebenza, kwaye iimeko ezifanelekileyo zendalo zisisiseko sokuqinisekisa ukusebenza kwayo okuzinzileyo kunye nesiphumo esingcono.
Okokuqala, ulawulo lobushushu: "uzinzisi" oluchanekileyo
Nangona i-granite yaziwa ngokuzinza kwayo, ayikhuselekanga ngokupheleleyo kutshintsho lobushushu. Nangona i-coefficient yayo yokwandiswa kobushushu iphantsi, ngokubanzi i-5-7 × 10⁻⁶/℃, kwiimeko zokulawula ukuhamba okuchanekileyo kakhulu, ukuguquguquka kobushushu okuncinci kunokubangela utshintsho olukhulu kwaye kuchaphazele ukuchaneka kwemodyuli. Kwi-workshop yokwenza ii-chip ze-semiconductor, inkqubo ye-lithography ifuna ukuchaneka kwendawo ye-danami, kwaye ubushushu be-ambient buyatshintshatshintsha nge-1 ° C, kwaye isiseko se-granite esinobude becala bemitha e-1 sinokuvelisa ukwanda okuthe ngqo okanye ukucotha kwe-microns ezi-5-7. Olu tshintsho luncinci ludluliselwa yi-module ye-motion echanekileyo kakhulu ye-air float, eyaneleyo ukwenza i-chip lithography pattern deviation kwaye inciphise kakhulu isivuno. Ngoko ke, ixhotyiswe ngesiseko segranite esichanekileyo semodyuli yomoya ejikelezayo echanekileyo kakhulu, ubushushu obufanelekileyo kwindawo yokusebenza kufuneka bulawulwe kwi-20 ° C ± 1 ° C, ngoncedo lwezixhobo zobushushu obuchanekileyo obuchanekileyo, ezifana nobushushu obuqhelekileyo kunye nomswakama, ukujonga rhoqo kunye nokulungiswa kobushushu obungqongileyo, ukuqinisekisa ukuba ukuguquguquka kobushushu kuluhlu oluncinci kakhulu, kugcina uzinzo lobungakanani besiseko, ukuqinisekisa ukuba imodyuli isebenza ngokuchanekileyo.
Okwesibini, ulawulo lokufuma: isitshixo sokukhusela "ilitye" elingangenisi manzi
Umswakama yenye into ebalulekileyo echaphazela ukusebenza kwesiseko segranite esichanekileyo. Kwimeko enomswakama ophezulu, igranite kulula ukuyifunxa umphunga wamanzi, nto leyo enokubangela ukujiya komphezulu, nto leyo engachaphazeli nje kuphela uzinzo loqhagamshelo lwegranite kunye nemodyuli yokuhamba echanekileyo kakhulu ye-air float, kodwa inokubangela ukukhukuliseka komphezulu kwaye inciphise ukukhanya kunye nokuchaneka ekuhambeni kwexesha. Kwi-workshop yokugaya ilensi ye-optical, ukuba umswakama ungaphezulu kwe-60%RH ixesha elide, umphunga wamanzi ofakwe kumphezulu wesiseko segranite uya kuphazamisa intshukumo ye-gas float slider, ukuze ukuchaneka kokugaya ilensi kunciphe, kwaye umphezulu ube nesiphako. Ke ngoko, umswakama ohambelana nendawo yokusebenza kufuneka ulawulwe ngokungqongqo phakathi kwe-40%-60%RH, enokubekwa esweni kwaye ilungiswe ngexesha langempela ngokufaka ii-dehumidifiers, ii-humidifiers kunye nezinye izixhobo ukuthintela ukonakala kwisiseko segranite ngenxa yomswakama ophezulu, kwaye kuqinisekiswe ukusebenza kakuhle kwemodyuli yokuhamba echanekileyo kakhulu ye-air float.
Okwesithathu, isiqinisekiso sococeko: "umlindi" wokuchaneka
Umonakalo wee-dust particles kwisiseko se-precision granite se-ultra-precision motion module ye-air flotation awunakuthathelwa ingqalelo. Nje ukuba ii-particles ezincinci zingene kumsantsa wefilimu yegesi phakathi kwe-gas float slider kunye nesiseko se-granite, zinokutshabalalisa ukufana kwefilimu yegesi, zonyuse ukungqubana, kwaye zide zikrwele umphezulu wesiseko, nto leyo ebangela ukuchaneka kokunyakaza okuphantsi. Kwi-workshop ye-ultra-precision machining yeenxalenye ze-aerospace, ukuba ii-dust particles emoyeni ziwela kwisiseko se-granite, indlela yokuhamba kwesixhobo soomatshini inokuphambuka, ichaphazele ukuchaneka koomatshini beenxalenye. Ke ngoko, indawo yokusebenza kufuneka igcinwe icocekile kakhulu, ifikelele kumanqanaba ali-10,000 okanye aphezulu emigangatho yococeko, ngokufakela izixhobo zokucoca umoya, ezifana nezihluzi zomoya ezisebenzayo kakhulu (HEPA), zihluze ii-dust particles emoyeni, kwangaxeshanye, abasebenzi kufuneka banxibe iimpahla ezingenathuli, izigqubuthelo zezihlangu, njl.njl., ukunciphisa uthuli oluziswa ngabantu. Gcina indawo yokusebenza echanekileyo kakhulu yesiseko se-granite kunye ne-air float ultra-precision motion module.
Isine, ukuvaleka kokungcangcazela: ukusebenza kakuhle kwe "shock pad"
Ukungcangcazela kwangaphandle lutshaba lokuchaneka kwemodyuli yokushukuma okuchanekileyo kakhulu kwe-air float. Nangona isiseko se-precision granite sinamandla athile okuthomalalisa ukungcangcazela, ukungcangcazela kwamandla aphezulu kusenokwaphula umda waso we-buffer. Ukungcangcazela okubangelwa yithrafikhi ejikeleze umzi-mveliso kunye nokusebenza kwezixhobo ezinkulu zoomatshini kudluliselwa kwisiseko se-granite emhlabeni, okuya kuphazamisa ukuchaneka kokushukuma kwemodyuli yokushukuma okuchanekileyo kakhulu kwe-air float. Kwi-CMM ephezulu, ukungcangcazela kunokubangela ukuba unxibelelwano phakathi kweprobe yokulinganisa kunye ne-workpiece lulinganiswe lungazinzi, nto leyo ekhokelela ekuphambukeni kwedatha yokulinganisa. Ukuze kusonjululwe le ngxaki, kuyimfuneko ukwamkela amanyathelo okwahlula ukungcangcazela asebenzayo, njengokubeka ii-vibration isolation pads kwindawo yokufakela izixhobo, ukwakha isiseko sokuhlukaniswa kokungcangcazela, okanye ukusebenzisa inkqubo yokuhlukaniswa kokungcangcazela esebenzayo ukucima ukungcangcazela kwangaphandle, kunye nokudala indawo yokusebenza ezolileyo nezinzileyo yesiseko sokuchaneka kwe-granite kunye nemodyuli yokushukuma okuchanekileyo kakhulu kwe-air float.
Kuphela ngokuhlangabezana ngokupheleleyo neemfuno zokusingqongileyo zobushushu, ukufuma, ucoceko kunye nolawulo lokungcangcazela, isiseko sokuchaneka kwegranite semodyuli yokushukuma okuchanekileyo kakhulu ye-air float sinokunika ukusebenza okugcweleyo kwiingenelo zayo zokusebenza, sinike isiqinisekiso esithembekileyo semisebenzi yokuchaneka kakhulu kwiindawo ezahlukeneyo, kwaye sincede eli shishini ukuba lihambele kwinqanaba eliphezulu lokuvelisa ngokuchanekileyo kunye nophando lwesayensi.
Ixesha leposi: Epreli-08-2025