Kwintsimi yokwenziwa kwezinto eziphezulu kunye nophando lwezenzululwazi olunqamlekileyo, imodyuli ye-ultra-precision motion motion ye-air float iye yaba sisixhobo esibalulekileyo sokusebenza kakuhle kunye nokulinganisa kunye nokusebenza kwayo okuchanekileyo. Isiseko esichanekileyo se-granite, njengesiseko senkxaso, sineemfuno eziqinileyo zendawo yokusebenza, kwaye iimeko ezifanelekileyo zokusingqongileyo zisisiseko sokuqinisekisa ukusebenza kwayo okuzinzile kunye nesiphumo esihle.
Okokuqala, ulawulo lobushushu: ngokuchanekileyo "stabilizer"
Nangona i-granite iyaziwa ngokuzinza kwayo, ayikhuselekanga ngokupheleleyo kwiinguqu zeqondo lokushisa. Nangona i-coefficient yayo yokwandiswa kwe-thermal iphantsi, ngokubanzi i-5-7 × 10⁻⁶/℃, kwiimeko zokulawula intshukumo ye-ultra-precision, ukuguquguquka okufihlakeleyo kweqondo lokushisa kusenokubangela utshintsho lwe-dimensional kunye nokuchaphazela ukuchaneka kwemodyuli. Kwi-workshop ye-semiconductor chip, inkqubo ye-lithography idinga ukuchaneka kwe-danami-level positioning, kwaye ubushushu be-ambient buguquguquka nge-1 ° C, kunye nesiseko se-granite esinecala lemitha ye-1 sinokuvelisa ukwanda komgca okanye ukucutha kwe-5-7 microns. Olu tshintsho luncinci luhanjiswa yimodyuli yentshukumo ye-ultra-precision ye-float air, eyaneleyo ukwenza i-chip lithography iphethini yokuphambuka kunye nokunciphisa kakhulu isivuno. Ke ngoko, ixhotyiswe ngesiseko segranite esichanekileyo somoya odadayo wemodyuli yentshukumo echanekileyo, indawo efanelekileyo yokusebenza kufuneka ilawulwe kwi-20 ° C ± 1 ° C, ngoncedo lwezixhobo zobushushu ezichanekileyo ezichanekileyo, ezifana nobushushu obungaguqukiyo kunye nokufuma kwenkqubo yomoya, ukubeka iliso rhoqo kunye nohlengahlengiso lobushushu obuphakathi, ukuqinisekisa ukuba imodyuli ikwisiseko esincinci kakhulu, ukuguquguquka kwemodyuli. umsebenzi ochanekileyo ophezulu.
Okwesibini, ulawulo lokufuma: isitshixo sokukhusela ubungqina bokufuma "ilitye"
Ukufuma yenye into ebalulekileyo echaphazela ukusebenza kwesiseko segranite esichanekileyo. Kwindawo yomswakama ophezulu, i-granite ilula ukufunxa umphunga wamanzi, onokuthi ukhokhelele kwi-condensation ebusweni, obungachaphazeli kuphela ukuzinza koxhulumaniso lwe-granite kunye nemodyuli ye-ultra-precision yentshukumo ye-air float, kodwa inokubangela ukukhukuliseka komhlaba kunye nokunciphisa i-gloss kunye nokuchaneka kwexesha elide. Kwi-workshop yokusila i-lens optical, ukuba umswakama uphezulu kune-60% ye-RH ixesha elide, umphunga wamanzi obhengezwa kumphezulu wesiseko se-granite uya kuphazamisa ukuhamba kwe-slider float slider, ukwenzela ukuba ukuchaneka kokugaya i-lens kuncitshiswe, kwaye umphezulu unesiphako. Ke ngoko, ukufuma okunxulumene nendawo yokusebenza kufuneka kulawulwe ngokungqongqo phakathi kwe-40% -60% RH, enokuthi ibekwe iliso kwaye ihlengahlengiswe ngexesha lokwenyani ngokufakela izinto zokuthambisa, izinzwa zokufuma kunye nezinye izixhobo zokuthintela umonakalo kwisiseko segranite ngenxa yokufuma okuphezulu, kunye nokuqinisekisa ukusebenza kakuhle kwemodyuli yentshukumo ye-ultra-precision ye-air float.
Okwesithathu, isiqinisekiso sococeko: "umlindi" wokuchaneka
Ukulimala kwamasuntswana othuli kwisiseko segranite esichanekileyo semodyuli yentshukumo ye-ultra-precision ye-air flotation ayinakujongelwa phantsi. Nje ukuba iincinci ezincinci zingene kwisithuba sefilimu yegesi phakathi kwesilayidi segesi edadayo kunye nesiseko segranite, banokutshabalalisa ukufana kwefilimu yegesi, bandise ukukhuhlana, kwaye bakrwele umphezulu wesiseko, okukhokelela ekunciphiseni ukuchaneka kwentshukumo. Kwi-workshop ye-ultra-precision machining workshop yeendawo ze-aerospace, ukuba amasuntswana othuli emoyeni awela kwisiseko se-granite, i-trajectory yentshukumo yesixhobo somatshini inokuphambuka, ichaphazela ukuchaneka komatshini wamacandelo. Ngoko ke, indawo yokusebenzela kufuneka igcinwe icocekile kakhulu, ifikelele kwi-10,000 okanye nangaphezulu kwemigangatho yokucoceka, ngokufakela izixhobo zokucoca umoya, ezifana nezihluzo eziphezulu zomoya (HEPA), ukucoca amaqhekeza othuli emoyeni, kwangaxeshanye, abasebenzi kufuneka banxibe iimpahla ezingenalo uthuli, izigqubuthelo zezihlangu, njl., ukunciphisa uthuli oluziswa ngabantu. Gcina ukuchaneka okuphezulu kwendawo yokusebenza kwesiseko segranite kunye nemodyuli yentshukumo yomoya edadayo echanekileyo.
Okwesine, ukwahlukaniswa kokungcangcazela: ukusebenza kakuhle kwe "pad yokothuka"
Ukungcangcazela kwangaphandle lutshaba lokuchaneka kwemodyuli yentshukumo ye-ultra-precision ye-air float. Nangona isiseko segranite esichanekileyo sinamandla athile okunciphisa ukungcangcazela, ukungcangcazela okuphakamileyo kusenokwaphula umda wayo webuffer. I-vibration eyenziwa yi-traffic ejikeleze i-factory kunye nokusebenza kwezixhobo ezinkulu zemishini idluliselwa kwisiseko se-granite emhlabeni, esiya kuphazamisa ukuchaneka kwentshukumo ye-ultra-precision motion module ye-float air. Kwi-CMM ephezulu, i-vibration inokubangela ukuba uqhagamshelwano phakathi kweprobe yokulinganisa kunye ne-workpiece ukuba ilinganiswe ukuba ingazinzi, okukhokelela ekuphambukeni kwedatha yokulinganisa. Ukuze kusonjululwe le ngxaki, kuyimfuneko ukwamkela imilinganiselo yokwahlula yokungcangcazela esebenzayo, njengokubeka iipads zokungcangcazela zodwa kwindawo yofakelo lwesixhobo, isiseko sokungcangcazela sokwakha isiseko, okanye ukusebenzisa inkqubo yokwahlula intshukumo esebenzayo ukuphelisa ukungcangcazela kwangaphandle, kunye nokudala indawo yokusebenza ezolileyo nezizinzileyo kwisiseko esichanekileyo segranite kunye nemodyuli yokudada yomoya ochanekileyo.
Kuphela ngokuhlangabezana ngokupheleleyo neemfuno zokusingqongileyo zobushushu, ukufuma, ukucoceka kunye nolawulo lokungcangcazela, isiseko segranite esichanekileyo semodyuli yentshukumo ye-ultra-precision motion ye-air float inokunika umdlalo opheleleyo kwiinzuzo zayo zokusebenza, inike isiqinisekiso esithembekileyo semisebenzi echanekileyo kakhulu kwiinkalo ezahlukeneyo, kwaye incede imboni ukuba iqhubele phambili kwimveliso echanekileyo ephezulu kunye nenqanaba lophando lwezesayensi.
Ixesha lokuposa: Apr-08-2025