Kwimveliso ye-semiconductor, umatshini we-photolithography sisixhobo esibalulekileyo esichaza ukuchaneka kweechips, kunye nesiseko segranite, esineempawu zayo ezininzi, siye saba yinto efunekayo kumatshini we-photolithography.
Uzinzo lweThermal: I "Shield" ngokuchasene noTshintsho loBubushushu
Xa umatshini wefotolithography usebenza, uvelisa ubushushu obukhulu. Nokuba ukuguquguquka kobushushu be-0.1 ℃ kuphela kunokubangela ukuguqulwa kwamacandelo esixhobo kwaye kuchaphazele ukuchaneka kwefotografi. I-coefficient yokwandiswa kwe-thermal ye-granite iphantsi kakhulu, kuphela i-4-8 × 10⁻⁶/℃, emalunga ne-1/3 yentsimbi kunye ne-1/5 ye-aluminium alloy. Oku kwenza ukuba isiseko se-granite sigcine ukuzinza kwe-dimensional xa umatshini we-photolithography usebenza ixesha elide okanye xa ubushushu bendalo buguquka, ukuqinisekisa ukubekwa ngokuchanekileyo kwamacandelo optical kunye nezakhiwo zomatshini.
Ukusebenza okuphezulu kokuchasana nokungcangcazela: "Isiponji" esifunxa ukungcangcazela
Kwifektri ye-semiconductor, ukusebenza kwezixhobo ezijikelezileyo kunye nokuhamba kwabantu konke kunokuvelisa ukungcangcazela. I-Granite inoxinano oluphezulu kunye nokuqina okuqinileyo, kwaye ineempawu ezibalaseleyo zokudambisa, kunye nomlinganiselo we-damping 2 ukuya ku-5 amaxesha esinyithi. Xa ukushukuma kwangaphandle kuhanjiswa kwisiseko segranite, ukungqubuzana phakathi kweekristale zamaminerali zangaphakathi kuguqula amandla okunyakaza kumandla obushushu bokutshatyalaliswa, okunokunciphisa kakhulu ukunyakaza ngexesha elifutshane, ukuvumela umatshini we-photolithography ukuba ubuyisele ngokukhawuleza ukuzinza kwaye ugweme ukuphazamiseka okanye ukungahambi kakuhle kwepateni ye-photolithography ngenxa yokunyakaza.
Uzinzo lweMichiza: "Umgcini" weNdawo ecocekileyo
Ingaphakathi lomatshini we-photolithography udibana neendaba ezahlukeneyo zeekhemikhali, kunye nezixhobo eziqhelekileyo zetsimbi zixhomekeke kwi-corrosion okanye ukukhutshwa kwamasuntswana. Igranite yenziwe ngamaminerali afana nequartz kunye nefeldspar. Ineempawu ezizinzileyo zeekhemikhali kunye nokumelana nokugqwala okuqinileyo. Emva kokucwiliswa kwizisombululo ze-asidi kunye ne-alkali, i-corrosion yomhlaba incinci kakhulu. Ngeli xesha, ubume bayo obuxineneyo buvelisa phantse akukho nkunkuma okanye uthuli, ukuhlangabezana neemfuno zemigangatho ephezulu yokucoceka kunye nokunciphisa umngcipheko wokungcoliseka kwe-wafer.
Ukusetyenzwa nokuziqhelanisa: "Imathiriyeli efanelekileyo" yokudala ibhentshimakhi ezichanekileyo
Amacandelo angundoqo omatshini we-photolithography kufuneka afakwe kwindawo yokubhekisela echanekileyo. Ubume bangaphakathi begranite bufana kwaye kulula ukusetyenzwa ngokuchaneka okuphezulu ngokusila, ukupolisha kunye nezinye iindlela. I-flatness yayo inokufikelela ku-≤0.5μm / m, kunye nobunzima bomhlaba u-Ra ngu-≤0.05μm, ukubonelela ngesiseko esichanekileyo sokufakela amacandelo afana ne-lens optical.
Ubomi obude kunye nokugcinwa ngaphandle: "Izixhobo ezibukhali" zokunciphisa iindleko
Xa kuthelekiswa nezixhobo zetsimbi ezijongene nokudinwa kunye nokuqhekeka ngenxa yokusetyenziswa kwexesha elide, i-granite ayinakudlula i-deformation yeplastiki okanye i-fracture phantsi kwemithwalo eqhelekileyo, kwaye ayifuni unyango olungaphezulu, ngaloo ndlela igwema umngcipheko wokugcoba kunye nokungcola. Kwizicelo eziphathekayo, emva kokusetyenziswa iminyaka emininzi, izibonakaliso zokusebenza eziphambili zesiseko segranite zisenokuhlala zizinzile, ukunciphisa iindleko zokusebenza kunye nokugcinwa kwezixhobo.
Ukususela ekuzinzeni kwe-thermal, ukunyanzeliswa kwe-vibration kwi-inertness yamachiza, iimpawu ezininzi zesiseko se-granite zihlangabezana ngokugqibeleleyo neemfuno zomshini we-photolithography. Njengoko inkqubo yokwenziwa kwetshiphu iqhubeleka nokuphuhla ukuya kuchaneko oluphezulu, iziseko zegranite ziya kuqhubeka ukudlala indima engenakuthathelwa indawo kwindawo yokwenziwa kwesemiconductor.
Ixesha lokuposa: May-20-2025