Izixhobo zegranite zisetyenziswa kakhulu kwicandelo lokuvelisa ngokuchanekileyo, ukuba tyaba njengesalathisi esibalulekileyo, kuchaphazela ngokuthe ngqo ukusebenza kwayo kunye nomgangatho wemveliso. Oku kulandelayo yintshayelelo eneenkcukacha zendlela, izixhobo kunye nenkqubo yokufumanisa ukuba tyaba kwezixhobo zegranite.
I. Iindlela zokufumanisa
1. Indlela yokuphazamiseka kwekristale ethe tyaba: ifanelekile ekufumaneni ukuthamba kwecandelo legranite elichanekileyo, njengesiseko sesixhobo esibonakalayo, iqonga lokulinganisa elichanekileyo kakhulu, njl. Ikristale ethe tyaba (into yeglasi ekhanyayo enobuthamba obuphezulu kakhulu) inamathele ngokusondeleyo kwicandelo legranite ukuze ihlolwe kwiplane, kusetyenziswa umgaqo wokuphazamiseka kwamaza okukhanya, xa ukukhanya kudlula kwikristale ethe tyaba kunye nomphezulu wecandelo legranite ukwenza imivimbo yokuphazamiseka. Ukuba iplane yelungu ithe tyaba ngokugqibeleleyo, imivimbo yokuphazamiseka yimigca ethe tye ehambelanayo enesithuba esilinganayo; Ukuba iplane igobile kwaye ingqukuva, umphetho uya kugoba kwaye uguqulwe. Ngokwenqanaba lokugoba kunye nendawo yemiphetho, impazamo yokuthamba ibalwa ngefomula. Ukuchaneka kunokufikelela kwi-nanometers, kwaye ukuphambuka kweplane encinci kunokufunyaniswa ngokuchanekileyo.
2. Indlela yokulinganisa inqanaba le-elektroniki: isetyenziswa rhoqo kwiindawo ezinkulu zegranite, ezifana nebhedi yesixhobo somatshini, iqonga elikhulu lokucubungula i-gantry, njl. Inqanaba le-elektroniki libekwa kumphezulu wecandelo legranite ukuze kukhethwe indawo yokulinganisa kwaye kuhambe ngendlela ethile yokulinganisa. Inqanaba le-elektroniki lilinganisa utshintsho lwe-Angle phakathi kwalo kunye nolwalathiso lomxhuzulane ngexesha langempela nge-sensor yangaphakathi kwaye liyiguqule ibe yidatha yokuphambuka kwenqanaba. Xa ulinganisa, kuyimfuneko ukwakha igridi yokulinganisa, ukhethe iindawo zokulinganisa kumgama othile kwiindlela ze-X kunye ne-Y, kwaye urekhode idatha yenqaku ngalinye. Ngokuhlalutya isoftware yokucubungula idatha, ukuthamba komphezulu wezinto zegranite kunokufakelwa, kwaye ukuchaneka kokulinganisa kunokufikelela kwinqanaba le-micron, elinokuhlangabezana neemfuno zokufunyanwa kokuthamba kwecandelo elikhulu kwiindawo ezininzi zoshishino.
3. Indlela yokufumanisa i-CMM: ukufunyanwa okubanzi kokuthe tyaba kungenziwa kwizinto zegranite ezintsonkothileyo, ezifana ne-granite substrate yeemolds ezimile ngendlela ekhethekileyo. I-CMM ihamba kwindawo enemilinganiselo emithathu ngeprobe kwaye ichukumise umphezulu wenxalenye yegranite ukuze ifumane ii-coordinates zamanqaku okulinganisa. Iindawo zokulinganisa zisasazwa ngokulinganayo kwiplani yenxalenye, kwaye i-lattice yokulinganisa yakhiwe. Isixhobo siqokelela ngokuzenzekelayo idatha yokulungelelanisa yenqaku ngalinye. Ukusetyenziswa kwesoftware yokulinganisa yobungcali, ngokwedatha yokulungelelanisa ukubala impazamo yokuthe tyaba, akunakubona kuphela ukuthe tyaba, kodwa kunokufumana ubungakanani becandelo, ukunyamezelana kwemilo kunye nesikhundla kunye nolunye ulwazi olunemilinganiselo emininzi, ukuchaneka kokulinganisa ngokwezixhobo ukuchaneka kwahlukile, ngokubanzi phakathi kwee-microns ezimbalwa ukuya kwi-tens of microns, ukuguquguquka okuphezulu, kufanelekile kwiintlobo ezahlukeneyo zokuchonga izinto zegranite.
II. Ukulungiswa kwezixhobo zovavanyo
1. Ikristale ethe tyaba echanekileyo kakhulu: Khetha ikristale ethe tyaba echanekileyo ehambelanayo ngokweemfuno zokuchaneka kokufunyanwa kwezinto zegranite, ezifana nokufunyanwa kwe-nanoscale flatness iimfuno zokukhetha ikristale ethe tyaba echanekileyo kakhulu enempazamo ye-flatness ngaphakathi kweenanometers ezimbalwa, kwaye ububanzi bekristale ethe tyaba kufuneka bube bukhulu kancinci kunobungakanani obuncinci becandelo legranite eliza kuhlolwa, ukuqinisekisa ukugubungela ngokupheleleyo indawo yokubhaqwa.
2. Inqanaba le-elektroniki: Khetha inqanaba le-elektroniki elichanekileyo ekulinganisweni kwalo elihlangabezana neemfuno zokufumanisa, njengenqanaba le-elektroniki elichanekileyo ekulinganisweni kwe-0.001mm/m, elifanelekileyo ekufumaneni ngokuchanekileyo. Kwangaxeshanye, isiseko setafile yemagnethi esihambelanayo siyalungiselelwa ukwenza lula ukuba inqanaba le-elektroniki lifunxeke ngokuqinileyo kumphezulu wecandelo le-granite, kunye neentambo zokufumana idatha kunye nesoftware yokufumana idatha yekhompyutha, ukuze kufezekiswe ukurekhoda kunye nokucutshungulwa kwedatha yokulinganisa ngexesha langempela.
3. Isixhobo sokulinganisa esilungelelanisiweyo: Ngokobungakanani bezinto zegranite, ubunzima bemilo ukukhetha ubungakanani obufanelekileyo besixhobo sokulinganisa esilungelelanisiweyo. Izinto ezinkulu zifuna iigeyiji ezinkulu zestroke, ngelixa iimilo ezintsonkothileyo zifuna izixhobo ezineeprobe ezichanekileyo kunye nesoftware enamandla yokulinganisa. Ngaphambi kokufunyanwa, i-CMM iyalinganiswa ukuqinisekisa ukuchaneka kweprobe kunye nokuchaneka kokubeka indawo okufanelekileyo.
III. Inkqubo yovavanyo
1. Inkqubo ye-flat crystal interferometry:
◦ Coca umphezulu wezinto zegranite eziza kuhlolwa kunye nomphezulu wekristale othe tyaba, usule nge-ethanol engenamanzi ukuze ususe uthuli, ioyile kunye nezinye izinto ezingcolileyo, ukuqinisekisa ukuba zombini zilingana kakuhle ngaphandle kwesithuba.
Beka ikristale esicaba kancinci phezu komphezulu welungu legranite, uze ucinezele kancinci ukuze zombini ziqhagamshelane ngokupheleleyo ukuze uphephe amaqamza okanye ukuthambekela.
◦ Kwindawo emnyama, umthombo wokukhanya we-monochromatic (njengesibane se-sodium) usetyenziselwa ukukhanyisa ikristale ethe tyaba ngokuthe nkqo, ukujonga imiphetho yokuphazamiseka evela phezulu, kunye nokurekhoda imo, icala kunye nomlinganiselo wokugoba kwemiphetho.
◦ Ngokusekelwe kwidatha yokuphazamiseka, bala impazamo yokuthamba usebenzisa ifomula efanelekileyo, uze uyithelekise neemfuno zokunyamezela ukuthamba kwecandelo ukuze ubone ukuba liyafaneleka na.
2. Inkqubo yokulinganisa inqanaba le-elektroniki:
◦ Kuzotywa igridi yokulinganisa phezu komphezulu wenxalenye yegranite ukuze kuchongwe indawo yokulinganisa, kwaye isithuba seendawo zokulinganisa ezikufutshane simiselwe ngokufanelekileyo ngokweemfuno zobungakanani kunye nokuchaneka kwenxalenye, ngokubanzi yi-50-200mm.
◦ Faka inqanaba le-elektroniki kwisiseko setafile yemagnethi uze ulincamathisele kwindawo yokuqala yegridi yokulinganisa. Qala inqanaba le-elektroniki uze urekhode inqanaba lokuqala emva kokuba idatha izinzile.
◦ Hambisa inqanaba le-elektroniki ngenqaku kwindlela yokulinganisa kwaye urekhode idatha yobungakanani kwindawo nganye yokulinganisa de kube zonke iindawo zokulinganisa zilinganisiwe.
◦ Ngenisa idatha elinganisiweyo kwisoftware yokucubungula idatha, sebenzisa indlela yesikwere esincinci kunye nezinye iindlela zokulinganisa ukutyibilika, velisa ingxelo yempazamo yokutyibilika, kwaye uvavanye ukuba ukutyibilika kwecandelo kusemgangathweni na.
3. Inkqubo yokufumanisa i-CMM:
◦ Beka icandelo legranite kwitafile yokusebenza yeCMM kwaye usebenzise isixhobo ukuyilungisa ngokuqinileyo ukuqinisekisa ukuba icandelo aliguquki ngexesha lokulinganisa.
◦ Ngokwemilo kunye nobukhulu becandelo, indlela yokulinganisa icwangcisiwe kwisoftware yokulinganisa ukuze kuchongwe ukusasazwa kwamanqaku okulinganisa, ukuqinisekisa ukugubungela ngokupheleleyo kwendiza eza kuhlolwa kunye nokusasazwa okufanayo kwamanqaku okulinganisa.
◦ Qalisa i-CMM, hambisa iprobe ngokwendlela ecwangcisiweyo, nxibelelana neendawo zokulinganisa umphezulu we-granite component, kwaye uqokelele ngokuzenzekelayo idatha yokulungelelanisa yenqaku ngalinye.
◦ Emva kokuba umlinganiselo ugqityiwe, isoftware yokulinganisa ihlalutya kwaye icwangcise idatha eqokelelweyo, ibale impazamo yokuthamba, ivelise ingxelo yovavanyo, kwaye igqibe ukuba ukuthamba kwecandelo kuyahlangabezana na nomgangatho.
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Ixesha leposi: Matshi-28-2025