Amacandelo e-Granite asetyenziswa ngokubanzi kwintsimi yokuvelisa ngokuchanekileyo, ukunyameka njengesalathisi esibalulekileyo, kuchaphazela ngokuthe ngqo ukusebenza kwayo kunye nomgangatho wemveliso. Oku kulandelayo yintshayelelo eneenkcukacha kwindlela, izixhobo kunye nenkqubo yokubona ukuthambeka kwamacandelo egranite.
I. Iindlela zokufumanisa
1. Indlela yokuphazamiseka kwekristale ye-Flat: ifanelekile kwi-high-precision yegranite inxalenye ye-flatness, njengesiseko sesixhobo se-optical, i-ultra-precision yokulinganisa iqonga, njl njl. imivimbo yokuphazamiseka. Ukuba indiza yelungu ithe tyaba ngokugqibeleleyo, imiphetho yokuphazamiseka imigca ethe tye ehambelanayo enezithuba ezilinganayo; Ukuba inqwelomoya i-concave kwaye i-convex, i-fringe iya kugoba kwaye iguqule. Ngokweqondo lokugoba kunye nesithuba semida, impazamo ye-flatness ibalwa ngefomula. Ukuchaneka kunokufikelela kwi-nanometers, kwaye ukuphambuka kwenqwelomoya encinci kunokubonwa ngokuchanekileyo.
2. Indlela yokulinganisa inqanaba le-elektroniki: isetyenziswa rhoqo kumacandelo amakhulu e-granite, njengombhede wesixhobo somatshini, iqonga elikhulu lokucubungula i-gantry, njl njl. Inqanaba lombane libekwe phezu kwendawo yegranite ukukhetha indawo yokulinganisa kwaye uhambe ngendlela ethile yokulinganisa. Inqanaba le-elektroniki lilinganisa utshintsho lwe-Angle phakathi kwayo kunye ne-gravity direction in time real ngokusebenzisa i-sensor yangaphakathi kwaye iyiguqulele kwi-levelness deviation data. Xa ulinganisa, kuyimfuneko ukwakha igridi yokulinganisa, khetha amanqaku okulinganisa kumgama othile kwiindlela ze-X kunye ne-Y, kwaye urekhode idatha yenqaku ngalinye. Ngokuhlalutya isoftware yokusetyenzwa kwedatha, i-flatness yomhlaba yamacandelo e-granite inokufakwa, kwaye ukuchaneka komlinganiselo kunokufikelela kwinqanaba le-micron, elinokuthi lihlangabezane neemfuno zecandelo elikhulu lokufunyanwa kwe-flatness kwiindawo ezininzi zemizi-mveliso.
3. Indlela yokufumanisa i-CMM: ukufumanisa okubanzi kwe-flatness kunokuqhutyelwa kumacandelo e-granite emilo enzima, njenge-granite substrate ye-molds ekhethekileyo. I-CMM ihamba kwindawo ene-dimensional-three-dimensional ngokusebenzisa i-probe kwaye ichukumisa umphezulu wecandelo le-granite ukufumana ulungelelwaniso lwamanqaku okulinganisa. Amanqaku okulinganisa ahanjiswa ngokulinganayo kwi-plane yecandelo, kwaye i-lattice yokulinganisa iyakhiwa. Isixhobo siqokelela ngokuzenzekelayo idatha yolungelelwaniso lwenqaku ngalinye. Ukusetyenziswa kwesoftware yokulinganisa yobuchwephesha, ngokwedatha yokulungelelanisa ukubala impazamo yokucaba, ayikwazi nje ukubona ukucaba, kodwa inokufumana ubungakanani becandelo, imilo kunye nokunyamezelana kwesikhundla kunye nolunye ulwazi olunamacala amaninzi, ukuchaneka komlinganiso ngokwesixhobo sokuchaneka kwahlukile, ngokubanzi phakathi kweemicrons ezimbalwa ukuya kumashumi eemicrons, ukuguquguquka okuphezulu, okufanelekileyo kwiintlobo ezahlukeneyo zegranite.
II. Ukulungiswa kwezixhobo zokuvavanya
1. Ikristale ephezulu echanekileyo ethe tyaba: Khetha ikristale ethe tyaba echanekileyo ehambelanayo ngokweemfuno zokuchaneka kwezinto zegranite, ezinje ngokuchongwa kwe-nanoscale flatness kufuneka ukhethe ikristale ethe tyaba echanekileyo enempazamo phakathi kwee-nanometers ezimbalwa, kunye nobubanzi bekristale obucaba kufuneka bube bukhulu kancinci kunobuncinci bobungakanani benxalenye yegranite, ukuqinisekisa ukubonwa kwendawo.
2. Inqanaba lombane: Khetha inqanaba lombane elichaneka ukuchaneka komlinganiso, njengenqanaba lombane elinomlinganiselo wokuchaneka kwe-0.001mm / m, olufanelekileyo ukufumanisa ukuchaneka okuphezulu. Ngelo xesha, isiseko setheyibhile esihambelanayo silungiselelwe ukuququzelela inqanaba le-elektroniki ngokuqinileyo adsorb kumphezulu wecandelo le-granite, kunye neentambo zokufumana idatha kunye nesofthiwe yokufumana idatha yekhompyutheni, ukuphumeza ukurekhoda kwexesha langempela kunye nokucubungula idatha yokulinganisa.
3. Ukulungelelanisa isixhobo sokulinganisa: Ngokobungakanani bamacandelo e-granite, ukubumba ubunzima bokukhetha ubungakanani obufanelekileyo besixhobo sokulinganisa ukulungelelanisa. Amacandelo amakhulu afuna iigeji ezinkulu zestroke, ngelixa iimilo ezintsonkothileyo zifuna izixhobo ezineprobes ezichanekileyo kunye nesoftware yokulinganisa enamandla. Ngaphambi kokufunyanwa, i-CMM ilinganiswe ukuqinisekisa ukuchaneka kweprobe kunye nokulungelelanisa ukuchaneka kwendawo.
III. Inkqubo yovavanyo
1. Inkqubo ye-Flat crystal interferometry:
◦ Coca umphezulu wezinto zegranite eziza kuhlolwa kunye ne-crystal surface, sula nge-ethanol ye-anhydrous ukususa uthuli, i-oyile kunye nobunye ukungcola, ukuqinisekisa ukuba ezi zimbini zihambelana ngokuqinileyo ngaphandle kwe-gap.
Beka ikristale ecaba ngokucothayo kumphezulu welungu legranite, kwaye ucinezele kancinci ukwenza ezi zimbini ziqhagamshelane ngokupheleleyo ukuphepha amaqamza okanye ukuthambeka.
◦ Kwimeko yegumbi elimnyama, umthombo wokukhanya we-monochromatic (njengesibane sesodium) usetyenziselwa ukukhanyisa ikristale ecaba ngokuthe nkqo, ukujonga imiphetho yokuphazamiseka ukusuka phezulu, kunye nokurekhoda imilo, isalathiso kunye nenqanaba lokugoba kwemiphetho.
◦ Ngokusekelwe kuphazamiseko lwedatha, bala impazamo yokucaba usebenzisa ifomyula efanelekileyo, kwaye uyithelekise neemfuno zokunyamezela ukunyameka kwecandelo ukuze ufumanise ukuba ngaba ifanelekile na.
2. Inkqubo yokulinganisa inqanaba lombane:
◦ Igridi yokulinganisa izotywa kumphezulu wecandelo legranite ukumisela indawo yendawo yokulinganisa, kwaye isithuba seendawo zokulinganisa ezimeleneyo sisetwa ngokufanelekileyo ngokobukhulu kunye neemfuno zokuchaneka kwecandelo, ngokubanzi ngama-50-200mm.
◦ Fakela inqanaba lombane kwisiseko setafile yemagnethi kwaye uyincamathele kwindawo yokuqala yegridi yokumejarisha. Qala inqanaba le-elektroniki kwaye urekhode inqanaba lokuqala emva kokuba idatha izinzile.
◦ Hambisa inqanaba lombane ngenqaku ecaleni kwendlela yokumejarisha kwaye urekhode idatha yomgangatho kwindawo nganye yokumejarisha de kube kulinganiswe zonke iindawo.
◦ Ngenisa idatha elinganisiweyo kwisoftware yokusetyenzwa kwedatha, sebenzisa eyona ndlela incinci yesikweri kunye nezinye ii-algorithms ukuze ilingane ukutyeba, ukuvelisa ingxelo yempazamo yokucaba, kwaye uvavanye ukuba ukucaba kwecandelo kusemgangathweni.
3. Inkqubo yokufunyanwa kweCMM:
◦ Beka inxalenye yegranite kwitafile yomsebenzi weCMM kwaye usebenzise ukulungiswa ukuze ulungise ngokuqinileyo ukuqinisekisa ukuba inxalenye ayisuki ngexesha lokulinganisa.
◦ Ngokwemilo kunye nobukhulu becandelo, indlela yokulinganisa icwangciswe kwi-software yokulinganisa ukumisela ukuhanjiswa kwamanqaku okulinganisa, ukuqinisekisa ukugubungela okupheleleyo kwenqwelomoya ukuba ihlolwe kunye nokuhanjiswa okufanayo kweendawo zokulinganisa.
◦ Qala i-CMM, hambisa i-probe ngokwendlela ecwangcisiweyo, qhagamshelana necandelo le-granite indawo yokulinganisa umphezulu, kwaye uqokelele ngokuzenzekelayo idatha yokulungelelanisa yendawo nganye.
◦ Emva kokuba umlinganiselo ugqityiwe, i-software yokulinganisa ihlalutya kwaye isebenze idatha yolungelelwaniso oluqokelelweyo, ibala impazamo yokucaba, ivelise ingxelo yovavanyo, kwaye igqibe ukuba ingaba i-flatness yecandelo idibana nomgangatho.
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Ixesha lokuposa: Mar-28-2025