Njengoko ukwenziwa kwe-ultra-precision, ukwenziwa kwe-semiconductor, kunye ne-metrology ephucukileyo ziqhubeka nokutyhalela phambili ekunyamezeleni okuqinileyo kunye nokukhupha okuphezulu, isiseko soomatshini seenkqubo zokuhamba kunye nokulinganisa siye saba yinto ebalulekileyo yokusebenza. Kule meko, izakhiwo ezisekwe kwi-granite—ukusuka kwiitafile ze-granite XY kunye nezigaba ezichanekileyo zomgca ukuya kwiiplate zomphezulu we-granite kunyeIziseko zegranite zeCMM—idlala indima ebalulekileyo ekuqinisekiseni uzinzo, ukuchaneka, kunye nokuthembeka kwexesha elide.
Kwi-OEMs, abahlanganisi beenkqubo, kunye nabasebenzisi bokugqibela eYurophu naseMntla Melika, ukukhetha iqonga elifanelekileyo lokuhamba okanye isiseko se-metrology akuseyosigqibo soomatshini kuphela. Kufuna uvavanyo olupheleleyo lokuziphatha okuguquguqukayo, ukusebenza kobushushu, ukwahlulwa kokungcangcazela, iimfuno zolondolozo, kunye neendleko zizonke zobunini. Eli nqaku libonelela ngothelekiso olucwangcisiweyo phakathi kweetafile ze-granite XY kunye nezigaba zomoya, ngelixa likwahlola indima ebanzi yeepleyiti zomphezulu we-granite kunye neziseko ze-granite ze-CMM kwiinkqubo zokuchaneka. Ngokusebenzisa iindlela zoshishino kunye nobuchule bokuvelisa be-ZHHIMG, ingxoxo ijolise ekuxhaseni izigqibo zobunjineli ezinolwazi kunye nokuthengwa.
I-Granite njengesixhobo esisisiseko kwiNjineli yoBuchule
Ngaphambi kokuba uthelekise uyilo oluthile lwenkqubo, kubalulekile ukuqonda ukuba kutheni i-granite iye yaba yinto ekhethwayo yokuqhuba ngokuchanekileyo kunye namaqonga okulinganisa.
I-granite emnyama yendalo, xa ikhethwe kakuhle kwaye icutshungulwa, inika indibaniselwano eyahlukileyo yeempawu zomzimba ezinzima ukuziphinda ngeentsimbi okanye izinto ezidityanisiweyo. Ubuninzi bayo obuphezulu bunegalelo ekuthinteleni ukungcangcazela okuhle kakhulu, ngelixa i-coefficient yayo ephantsi yokwandiswa kobushushu iqinisekisa uzinzo olulinganayo kuzo zonke iinguqu zobushushu eziqhelekileyo zefektri. Ngokungafaniyo nentsimbi okanye isinyithi esityhidiweyo, i-granite ayigqwali, ayifuni zigqubuthelo zokukhusela, kwaye igcina ubuqotho bayo bejometri kwiminyaka emininzi yokusebenza.
Ukuze ufumane izigaba ezichanekileyo zomgca, iitafile ze-XY zegranite, kunyeIziseko zeCMM, ezi mpawu ziguqulela ekusebenzeni okuqikelelweyo, ubuthathaka obuncitshisiweyo kokusingqongileyo, kunye neendleko zokugcinwa eziphantsi kwexesha elide. Ngenxa yoko, i-granite iye yaba lukhetho oluqhelekileyo lwezinto ezibonakalayo kwizixhobo zokuhlola i-semiconductor, iinkqubo zokulungelelanisa i-optical, oomatshini bokulinganisa abalungelelanisiweyo, kunye nezixhobo zokwenza izinto ngokuzenzekelayo eziphezulu.
Itheyibhile yeGranite XY: Ulwakhiwo, Amandla, kunye noSetyenziso
Itafile yegranite XY liqonga lokushukuma apho kufakwe khona ii-axes ezimbini ezithe nkqo kwisiseko segranite esinomatshini ochanekileyo. Umzimba wegranite ubonelela nge-reference plane eqinileyo nezinzileyo kubushushu, ngelixa ii-axes ezishukumayo zihlala ziqhutywa zizikrufu zebhola, ii-linear motors, okanye iindlela eziqhutywa yibhanti, kuxhomekeke ekuchanekeni nakwisantya.
Iimpawu zoLwakhiwo
Iitafile zeGranite XY ziphawulwa ngoyilo lwazo lwesiseko se-monolithic. Umphezulu wokusebenza kunye neendawo zokufakela zidibene ukuze zibe tyaba kwaye zihambelane, okuqinisekisa ukulungelelana okulinganayo phakathi kwee-axes. Ubunzima beisiseko segraniteithintela ngempumelelo ukungcangcazela kwangaphandle, okubaluleke kakhulu kwiindawo apho ukwahlulwa okusebenzayo kulinganiselwe okanye kungabizi kakhulu.
Ii-linear guides kunye neenkqubo zokuqhuba ziqiniswe ngoomatshini kwi-granite kusetyenziswa ii-precision inserts okanye ii-bonded interfaces. Le ndlela inciphisa ukuguquguquka phantsi komthwalo kwaye iqinisekisa ukuziphatha okuphindaphindiweyo kokunyakaza kwimijikelo emide yomsebenzi.
Iprofayili Yokusebenza
Ngokuphathelele ukuchaneka kokubekwa kunye nokuphindaphinda, iitafile ze-granite XY zifanelekile kwizicelo zenqanaba le-micron. Ngee-encoders ezifanelekileyo ezichanekileyo kunye nolawulo lwe-servo, ukuphindaphindwa kwe-sub-micron kunokwenzeka kwiinkqubo ezininzi zoshishino kunye neelebhu. Nangona impendulo yazo enamandla iphantsi kakhulu kuneyezigaba zomoya, iitafile ze-granite XY zibonelela ngokulinganisela okuhle phakathi kokuchaneka, umthamo womthwalo, kunye neendleko.
Amatyala aqhelekileyo okusetyenziswa
Iitafile zeGranite XY zisetyenziswa kakhulu kwezi:
- Ukuhlolwa kwe-semiconductor back-end kunye nezixhobo zokuphonononga
- Ulungelelwaniso lwezixhobo ezibonakalayo kunye neenkqubo zokuhlanganisa
- Amaqonga okuhambisa ngokuchanekileyo kunye nokucubungula nge-laser
- Izixhobo zokulinganisa kunye neenkqubo zokubeka ireferensi
Kwizicelo apho imithwalo ephakathi ukuya kwephezulu kufuneka ihanjiswe ngokuchanekileyo nangokuzinzileyo, okuphindaphindwayo, iitafile ze-granite XY zihlala zisisombululo esisebenzayo nesiqinisekisiweyo.
Isigaba Sokuthwala Umoya: Ifilosofi Yoyilo kunye Neengenelo Zokusebenza
Isigaba esithwala umoya simele ifilosofi yoyilo eyahlukileyo. Endaweni yokuxhomekeka kunxibelelwano loomatshini phakathi kweendlela zokuhamba, izigaba ezithwala umoya zisebenzisa ifilimu encinci yomoya oxinzelelweyo ukudala intshukumo engashukumiyo. Xa zidityaniswe neisiseko segranite, olu lwakhiwo lubonelela ngobuchule obugqwesileyo kunye nesisombululo esiphezulu kakhulu sokuma.
Izinto zoYilo oluPhambili
Kwinqanaba lokuthwala umoya, isiseko segranite sisebenza njengomphezulu wesalathiso esichanekileyo apho inqwelo ehambayo idada khona. Iibheringi zomoya zisasaza umthwalo ngokulinganayo kumphezulu wegranite, zisusa ukuguguleka koomatshini kunye nemiphumo yokutyibilika kwenduku. Intshukumo idla ngokuqhutywa ziimoto ezithe nkqo, kwaye impendulo yendawo inikezelwa zii-encoders ze-optical okanye ze-interferometric.
Umgangatho wegranite othe tyaba kunye nomphezulu wayo zibalulekile, njengoko zichaphazela ngokuthe ngqo ukusebenza kweebheringi. Oku kubeka iimfuno ezingqongqo ekukhethweni kwezinto zegranite, ekuchwethezeni nasekudibaniseni.
Ukuziphatha Okuchanekileyo Nokuguqukayo
Amanqanaba okuthwala umoya agqwesile kwiindlela ezifuna isisombululo sokubeka i-nanometer, ukuthe tye okuphezulu, kunye nokuthamba kwesantya okugqwesileyo. Ukungabikho koqhagamshelwano loomatshini kwenza iiprofayili zentshukumo eziphindaphindwayo kwaye kunciphisa i-hysteresis.
Nangona kunjalo, ezi zibonelelo ziza neenzuzo. Amanqanaba omoya afuna umoya ococekileyo nozinzileyo kunye nolawulo olucokisekileyo lokusingqongileyo. Akwanobuthathaka ngakumbi kungcoliseko kwaye ahlala exhasa amandla omthwalo aphantsi xa kuthelekiswa neetafile ze-granite XY ezikhokelwa ngoomatshini.
Imizekelo yesicelo
Amanqanaba okuthwala umoya adla ngokusetyenziswa kwi:
- Ukuhlolwa kwe-wafer kunye neenkqubo ze-metrology
- Izixhobo zokulungelelanisa i-Lithography kunye neemaski
- Amaqonga okulinganisa okubonakalayo aphezulu
- Iindawo zophando nophuhliso ezifuna ukuchaneka okugqithisileyo
Kwiimeko ezinjalo, iingenelo zokusebenza zithethelela utyalo-mali lokuqala oluphezulu kunye nobunzima bokusebenza.
Itafile yeGranite XY vs. Isigaba sokuBeka Umoya: Uhlalutyo lokuthelekisa
Xa kuthelekiswa itafile yegranite XY nenqanaba elinomoya, isigqibo kufuneka siqhutywe zizinto eziza kuqala kwisicelo kunokuba kusetyenziswe amanani okuchaneka kuphela.
Ngokwembono yoomatshini, iitafile ze-granite XY zibonelela ngokuqina okuphezulu kwesakhiwo kunye nomthamo womthwalo. Ziyakwazi ukumelana neemeko zoshishino kwaye azifuni ziseko zoncedo ezininzi. Izigaba ezinomoya, ngokuchaseneyo, zibeka phambili ubumsulwa bokuhamba kunye nesisombululo, rhoqo ngaphandle kokuqina kokusingqongileyo kunye nokulula kwenkqubo.
Ngokuphathelele iindleko zomjikelo wobomi, iitafile ze-granite XY ngokubanzi zibonelela ngexabiso eliphantsi lobunini. Iimfuno zazo zokugcinwa zincinci, kwaye ukusebenza kwazo kuhlala kuzinzile kwixesha elide lenkonzo. Amanqanaba okuthwala umoya anokubangela iindleko ezongezelelweyo ezinxulumene neenkqubo zokubonelela ngomoya, ukucoca, kunye nolawulo lokusingqongileyo.
Kubasebenzisi abaninzi bemizi-mveliso, ukhetho alukho kabini. Uyilo lweenkqubo ze-hybrid luxhaphake kakhulu, apho iziseko zegranite zixhasa indibaniselwano yee-axes ezikhokelwa ngoomatshini kunye nezigaba zomoya, nto leyo ephucula ukusebenza apho kubaluleke khona.
Iipleyiti zomphezulu weGranite: Umgangatho wokuBhekiswa
Iipleyiti zomphezulu wegranite zihlala zisisiseko sokuhlolwa kobukhulu kunye nokulinganiswa kwemilinganiselo ekuvelisweni ngokuchanekileyo. Nangona zingabandakanyi intshukumo esebenzayo, indima yazo njengeeplani zereferensi ibalulekile ekuqinisekiseni ukulandeleka komlinganiselo kunye nokuchaneka kwenkqubo.
Indima Yokusebenza
Ipleyiti yomphezulu wegranite inika i-datum ezinzileyo, ethe tyaba apho iindawo, izixhobo, kunye nezixhobo zinokulinganiswa okanye zihlanganiswe khona. Uzinzo lwayo lwendalo lwenza ukuba ifaneleke ukusetyenziswa kwiindawo ezinokuguquguquka kobushushu ngaphandle kokuphazamiseka okukhulu.
Ukuhlanganiswa neeNkqubo zokuLungisa
Kwiindawo zemveliso zanamhlanje, iipleyiti zomphezulu wegranite zihlala zidityaniswa neegeyiji zokuphakama, ii-linear stages, kunye neenkqubo zokulinganisa ezibonakalayo. Zikwasebenza njengezalathiso zokulinganisa ii-linear stages ezichanekileyo kunye namaqonga okushukuma, okuqinisa ukubaluleka kwazo ngaphaya kwamagumbi okuhlola emveli.
Isiseko seGranite seCMM: Umqolo weMetrology eHlanganisiweyo
Kwiimatshini zokulinganisa ezihambelanayo, isiseko segranite singaphezulu nje kwesakhiwo esingasebenziyo—sisisiseko senkqubo yonke yokulinganisa.
Iimfuno zeSakhiwo kunye nezeMetrological
Isiseko segranite seCMM kufuneka sinike ubuthe tyaba obungaqhelekanga, ukuqina, kunye nokuzinza okubonakalayo kwexesha elide. Nakuphi na ukuguqulwa okanye ukushukuma kobushushu kuchaphazela ngokuthe ngqo ukungaqiniseki komlinganiselo. Ngenxa yesi sizathu, ukukhethwa kwegranite, ukukhululeka koxinzelelo, kunye nokulungiswa ngokuchanekileyo ngamanyathelo abalulekileyo ekuvelisweni kwesiseko seCMM.
Impembelelo ekuChanekeni koMlinganiselo
Ukusebenza kweCMM kunxulunyaniswa ngokugqibeleleyo nomgangatho wesiseko sayo segranite. Isiseko esenziwe kakuhle siqinisekisa i-axis geometry ehambelanayo, sinciphisa imithombo yeempazamo, kwaye sixhasa ukulinganiswa okuthembekileyo kubomi benkonzo yomatshini.
I-ZHHIMG isebenzisana ngokusondeleyo nabavelisi beenkqubo ze-metrology ukubonelela ngeziseko ze-granite ezihlangabezana nemigangatho engqongqo yamazwe ngamazwe, ixhasa ukuhlolwa okuchaneke kakhulu kumacandelo eenqwelo moya, iimoto, kunye nemveliso echanekileyo.
Izinto ekufuneka ziqwalaselwe kukwenziwa kwemveliso kunye noLawulo loMgangatho
Ukuvelisa amaqonga okushukuma kwegranite kunye neziseko zemetrology kufuna indibaniselwano yobuchule besayensi yezinto kunye nobuchule bokuvelisa obuphambili. Igranite eluhlaza kufuneka ihlolwe ngononophelo ukuze ibone iziphene zangaphakathi, ukulingana, kunye nolwakhiwo lweenkozo. Umatshini wokulungisa, ukuleqa, kunye nokuhlolwa ngokuchanekileyo kwenziwa kwiindawo ezilawulwayo ukuqinisekisa ukuthotyelwa kweemfuno zokuthe tyaba, ukufana, kunye nokuma nkqo.
Kwiindibano ezintsonkothileyo ezifana neetafile ze-granite XY kunye nezigaba zomoya, ukuchaneka kojongano kunye nokulungelelaniswa kwendibano kubaluleke ngokulinganayo. Iinkqubo zokuvelisa ze-ZHHIMG zigxininisa ukulinganiswa okulandelekayo, ubuchule obuphindaphindwayo, kunye nentsebenziswano esondeleyo nabathengi ngexesha lezigaba zoyilo kunye nokuqinisekiswa.
Isiphelo
Iitafile zeGranite XY, izigaba zomoya, iipleyiti zomphezulu wegranite, kunye neziseko zegranite zeCMM nganye isebenza indima eyahlukileyo kodwa ehambelanayo kubunjineli bokuchaneka kwanamhlanje. Ukuqonda iimpawu zazo zesakhiwo, iiprofayili zokusebenza, kunye neemeko zesicelo kubalulekile ekukhetheni isisombululo esifanelekileyo.
Kubasebenzisi bemizi-mveliso abafuna ukuchaneka okuqinileyo nokungabizi kakhulu, iitafile ze-granite XY zihlala zilukhetho oluthembekileyo. Kwintshukumo ephezulu kakhulu kunye ne-metrology, izigaba zomoya ezixhaswa ziziseko ze-granite ezichanekileyo zibonelela ngokusebenza okungenakuthelekiswa nanto. Iipleyiti zomphezulu we-granite kunye neziseko ze-granite ze-CMM ziyaqhubeka nokuxhasa ukuchaneka kunye nozinzo kuyo yonke inkqubo yokuvelisa ukuchaneka.
Ngokusebenzisa amava anzulu ekucutshungulweni kwegranite kunye nokuveliswa ngokuchanekileyo, i-ZHHIMG ixhasa abathengi behlabathi ngezisombululo ezicwangcisiweyo ezihambelana neemfuno zokuchaneka eziguqukayo kunye neenjongo zokusebenza zexesha elide.
Ixesha leposi: Jan-23-2026