Iqonga leGranite elinikezelwe kumagumbi acocekileyo: Ukukhutshwa kwe-ion yentsimbi ye-Zero, ukhetho olufanelekileyo lwezixhobo zokuhlola i-wafer.

Kwintsimi yokuhlolwa kwe-wafer semiconductor, ukucoceka kwendawo ecocekileyo yegumbi kuhambelana ngokuthe ngqo kwimveliso yemveliso. Njengoko ukuchaneka kweenkqubo zokwenziwa kwe-chip kuqhubeka nokuphucula, iimfuno zokuthwala amaqonga ezixhobo zokubona ziya ziba ngqongqo ngakumbi. Amaqonga e-Granite, aneempawu zawo zokukhutshwa kwe-ion yesinyithi kunye nongcoliseko oluphantsi lwamasuntswana, agqwesileyo kwizixhobo zentsimbi yentsimbi yesiqhelo kwaye abe sisisombululo esithandwayo sezixhobo zokuhlola i-wafer.

I-Granite lilitye lendalo elivuthayo elibandakanya i-non-metallic minerals njenge-quartz, i-feldspar kunye ne-mica. Olu phawu lunika inzuzo yokukhutshwa kwe-ion yesinyithi. Ngokwahlukileyo, intsimbi engatyiwayo, njengealloyi yeentsimbi ezifana nentsimbi, ichromium kunye nenickel, ithanda ukudleka ngenxa ye-electrochemical corrosion kumphezulu wayo ngenxa yokukhukuliseka komphunga wamanzi kunye ne-acidic okanye iigesi zealkaline kwindawo ecocekileyo, ekhokelela kwimvula yeeyoni zentsimbi ezifana neFe²⁺ kunye neCr³⁺. Nje ukuba ezi ion zincinci zincanyathiselwe kumphezulu we-wafer, ziya kutshintsha iipropathi zombane zemathiriyeli ye-semiconductor kwiinkqubo ezilandelayo ezifana ne-photolithography kunye ne-etching, zibangele i-threshold voltage drift ye-transistor, kwaye zikhokelele kwiisekethe ezimfutshane kwisekethe. Idatha yovavanyo lweziko lobuchwephesha ibonisa ukuba emva kokuba iqonga legranite lihlala libonakaliswe kwindawo edibeneyo yokushisa kwegumbi elicocekileyo kunye nokufuma (23±0.5℃, 45% ± 5% RH) kwiiyure ze-1000, ukukhutshwa kwee-ion zetsimbi kwakungaphantsi komda wokufumanisa (<0.1ppb). Izinga lesiphako se-wafers ezibangelwa ukungcoliseka kwe-ion yensimbi xa kusetyenziswa iiplatifomu zensimbi ezingenasici zingaba phezulu kwi-15% ukuya kwi-20%.

Ngokubhekiselele kulawulo longcoliseko lwamasuntswana, amaqonga egranite nawo aqhuba kakuhle kakhulu. Amagumbi okucoca aneemfuno eziphezulu kakhulu zoxinaniso lwamasuntswana amisiweyo emoyeni. Ngokomzekelo, kwi-ISO Class 1 yamagumbi ahlambulukileyo, inani le-0.1μm elivumelekileyo kwi-cubic meter nganye alidluli i-10. Nangona iqonga lensimbi engenasici liye lafumana unyango lokupholisa, lisenokwenza i-debris yensimbi okanye i-oxide isikali esiqhekezayo ngenxa yemikhosi yangaphandle efana ne-vibration yezixhobo kunye nokusebenza kwabasebenzi, okunokuphazamisa indlela yokubona i-optical optical surface. Iiplatifomu zeGranite, kunye nesakhiwo sazo samaminerali (ubuninzi ≥2.7g / cm³) kunye nobunzima obuphezulu (i-6-7 kwisikali se-Mohs), aziqhelekanga ukugqoka okanye ukuphuka ngexesha lokusetyenziswa kwexesha elide. Imilinganiselo elinganisiweyo ibonisa ukuba inokunciphisa ukuxinwa kweengqungquthela ezimisiweyo emoyeni wendawo yezixhobo zokubona ngaphezu kwe-40% xa kuthelekiswa neeplatifomu zensimbi ezingenasici, ngokufanelekileyo ukugcina imigangatho yemigangatho yegumbi lokucoca.

Ukongeza kwiimpawu zayo ezicocekileyo, ukusebenza okubanzi kweeplatifti zegranite nazo zigqithise kakhulu kwintsimbi engenasici. Ngokumalunga nokuzinza kwe-thermal, i-coefficient yayo yokwandiswa kwe-thermal kuphela (4-8) × 10⁻⁶/℃, engaphantsi kwesiqingatha sensimbi engenasici (malunga ne-17 × 10⁻⁶ / ℃), enokuthi igcine kakuhle ukuchaneka kokumisa izixhobo zokufumanisa xa izinga lokushisa kwigumbi elicocekileyo liguquguquka. Uphawu oluphezulu lokudambisa (umlinganiselo wokudambisa> 0.05) unokunciphisa ngokukhawuleza ukungcangcazela kwesixhobo kwaye uthintele i-probe yokufumanisa ukuba ingagungqi. Ukuxhathisa kwayo kwendalo kukwenza ukuba ihlale izinzile naxa ivezwe kwi-solvents ye-photoresist, iigesi ze-etching kunye nezinye iikhemikhali ngaphandle kwesidingo sokhuseleko olongezelelweyo lokugquma.

Okwangoku, iiplatifti zegranite zisetyenziswa ngokubanzi kwizityalo zokwenziwa kwe-wafer. Idatha ibonisa ukuba emva kokwamkelwa kweqonga legranite, izinga lokugwetywa ngokungalunganga kokufunyanwa kwe-wafer surface particle yehle nge-60%, umjikelo wokulinganisa izixhobo uye wandiswa ngamaxesha amathathu, kwaye ixabiso lokuvelisa lilonke liye lehla ngama-25%. Njengoko ishishini le-semiconductor liqhubela phambili ekuchanekeni okuphezulu, amaqonga egranite, kunye nezibonelelo zawo ezingundoqo ezifana nokukhululwa kwe-ion yesinyithi kunye nongcoliseko oluphantsi lwamasuntswana, luya kuqhubeka nokubonelela ngenkxaso ezinzileyo nethembekileyo yokuhlolwa kwe-wafer, ibe yinto ebalulekileyo eqhuba inkqubela phambili yoshishino.