Iqonga legranite elinikezelwe kumagumbi acocekileyo: Akukho kukhutshwa kwe-ion yesinyithi, ukhetho olufanelekileyo kwizixhobo zokuhlola iiwafer.

Kwicandelo lokuhlolwa kwe-semiconductor wafer, ubunyulu bendawo yokucoca bunxulumene ngokuthe ngqo nemveliso. Njengoko ukuchaneka kweenkqubo zokuvelisa iitship kuqhubeka kuphucuka, iimfuno zamaqonga okuthwala izixhobo zokufumanisa ziya zisiba nzima ngakumbi. Amaqonga egranite, aneempawu zawo zokungabikho kwe-ion yesinyithi kunye nongcoliseko oluphantsi lwamasuntswana, adlule kwizixhobo zentsimbi engagqwaliyo zendabuko kwaye aba sisisombululo esithandwayo kwizixhobo zokuhlola ii-wafer.

I-Granite lilitye lendalo eliyi-igneous elenziwe kakhulu ziiminerali ezingezizo zesinyithi ezifana ne-quartz, i-feldspar kunye ne-mica. Olu phawu luyinika ithuba lokukhululwa kwe-ion yesinyithi engenanto. Ngokwahlukileyo koko, intsimbi engatyiwayo, njenge-alloy yeesinyithi ezifana ne-iron, i-chromium kunye ne-nickel, ithambekele ekuqhekekeni kwe-electrochemical kumphezulu wayo ngenxa yokukhukuliseka komphunga wamanzi kunye neegesi ze-acidic okanye ze-alkaline kwindawo ecocekileyo, okubangela ukuna kwee-ion zesinyithi ezifana ne-Fe²⁺ kunye ne-Cr³⁺. Nje ukuba ezi i-ion zincinci zinamathele kumphezulu we-wafer, ziya kutshintsha iipropati zombane zezinto ze-semiconductor kwiinkqubo ezilandelayo ezifana ne-photolithography kunye ne-etching, zibangele ukukhukhuleka kombane we-threshold voltage ye-transistor, kwaye zide zikhokelele kwiisekethe ezimfutshane kwisekethe. Idatha yovavanyo lweziko lobuchwephesha ibonisa ukuba emva kokuba iqonga le-granite livezwe rhoqo kwindawo yobushushu begumbi elicocekileyo kunye nendawo yokufuma (23±0.5℃, 45%±5% RH) kangangeeyure ezili-1000, ukukhululwa kwee-ion zesinyithi bekuphantsi kunomda wokufumanisa (< 0.1ppb). Izinga leziphene zee-wafers ezibangelwa kukungcola kwee-ion zesinyithi xa kusetyenziswa amaqonga entsimbi engagqwaliyo linokuba phezulu ukuya kuthi ga kwi-15% ukuya kwi-20%.

Ngokuphathelele ulawulo longcoliseko lwamasuntswana, amaqonga egranite nawo asebenza kakuhle kakhulu. Amagumbi okucoca aneemfuno eziphezulu kakhulu zoxinzelelo lwamasuntswana axhonyiweyo emoyeni. Umzekelo, kumagumbi okucoca e-ISO Class 1, inani lamasuntswana angama-0.1μm avumelekileyo nge-cubic meter alidluli kwi-10. Nokuba iqonga lentsimbi engagqwaliyo liye lanyangwa ngokupolishwa, lisenokuvelisa inkunkuma yesinyithi okanye isikali se-oxide esiqhekekayo ngenxa yamandla angaphandle afana nokungcangcazela kwezixhobo kunye nokusebenza kwabasebenzi, okunokuphazamisa indlela yokuchonga okanye ukukrwela umphezulu we-wafer. Amaqonga egranite, anesakhiwo sawo esixineneyo seminerali (ubuninzi ≥2.7g/cm³) kunye nobunzima obuphezulu (6-7 kwisikali seMohs), awagugi okanye aqhekeke ngexesha lokusetyenziswa ixesha elide. Ukulinganisa okulinganisiweyo kubonisa ukuba anokunciphisa uxinzelelo lwamasuntswana axhonyiweyo emoyeni wendawo yezixhobo zokufumanisa ngaphezulu kwe-40% xa kuthelekiswa namaqonga entsimbi engagqwaliyo, okugcina ngokufanelekileyo imigangatho yomgangatho wegumbi lokucoca.

Ukongeza kwiimpawu zayo ezicocekileyo, ukusebenza okubanzi kwamaqonga egranite kudlula kakhulu oko kwentsimbi engagqwaliyo. Ngokuphathelele ukuzinza kobushushu, i-coefficient yayo yokwandiswa kobushushu yi-(4-8) ×10⁻⁶/℃ kuphela, ngaphantsi kwesiqingatha sentsimbi engagqwaliyo (malunga ne-17×10⁻⁶/℃), enokugcina ukuchaneka kokubekwa kwezixhobo zokufumanisa xa ubushushu kwigumbi elicocekileyo butshintshatshintsha. Uphawu oluphezulu lokudambisa (umlinganiselo wokudambisa > 0.05) lunokunciphisa ngokukhawuleza ukungcangcazela kwezixhobo kwaye luthintele i-probe yokufumanisa ekunyikimeni. Ukumelana kwayo nokugqwala kwendalo kuyenza ihlale izinzile nokuba ivezwe kwizinyibilikisi ze-photoresist, iigesi ezicimayo kunye nezinye iikhemikhali ngaphandle kwesidingo sokhuseleko olongezelelweyo lokugquma.

Okwangoku, amaqonga egranite asetyenziswa kakhulu kwizityalo zokuvelisa iiwafer eziphambili. Idatha ibonisa ukuba emva kokwamkela iqonga legranite, izinga lokugweba kakubi lokufunyanwa kweentwana ze-wafer surface linciphile ngama-60%, umjikelo wokulinganisa izixhobo wongezwe kathathu, kwaye iindleko zemveliso iyonke zehle ngama-25%. Njengoko ishishini le-semiconductor lisiya ngokuchanekileyo okuphezulu, amaqonga egranite, aneenzuzo zawo eziphambili ezifana nokukhululwa kwe-ion yesinyithi kunye nongcoliseko oluphantsi lweentwana, aya kuqhubeka nokubonelela ngenkxaso ezinzileyo nethembekileyo yokuhlolwa kwe-wafer, ibe ngamandla abalulekileyo aqhuba inkqubela phambili yeshishini.