Kwintsimi yokwenziwa kwe-semiconductor, ukuchaneka kuyo yonke into. Njengoko itekhnoloji yokwenziwa kwetshiphu iqhubela phambili ukuya kwinqanaba le-nanometer kunye nakwinqanaba le-nanometer, nayiphi na impazamo encinci inokukhokelela ekwehleni kokusebenza kwetshiphu okanye ukusilela ngokupheleleyo. Kolu khuphiswano lokuchaneka kokugqibela, izixhobo ezichanekileyo zegranite, kunye neempawu zazo ezikhethekileyo zomzimba kunye nezomatshini, ziye zaba yinto ephambili ekuqinisekiseni ukuchaneka kwe-nanoscale yokuveliswa kwe-chip.
Uzinzo olubalaseleyo lubeka isiseko sokuchaneka
Imekobume kwi-workshop yokuvelisa i-semiconductor inzima, kwaye izinto zangaphandle ezifana nokungcangcazela kunye nokutshintsha kweqondo lokushisa zihlala zisongela ukuchaneka kwemveliso. Izixhobo ezichanekileyo zegranite zinozinzo oluphezulu kakhulu, zibonelela ngesiseko esiluqilima sokuveliswa kwetshiphu. Ubume bayo bangaphakathi buxinene kwaye bufana, bubunjwe ngenkqubo yejoloji kumakhulu ezigidi zeminyaka, kwaye inophawu oluphezulu lwendalo lokudambisa. Xa ukungcangcazela kwangaphandle kuhanjiswa kwisixhobo sokuvelisa, iinxalenye ezichanekileyo zegranite zinokufunxa ngokufanelekileyo kwaye zithobe ngaphezu kwe-80% yamandla okungcangcazela, ukunciphisa kakhulu impembelelo yokungcangcazela kwizixhobo ezichanekileyo.
Olu phawu lubaluleke kakhulu kwinkqubo ye-photolithography. Ifotolithography linyathelo elibalulekileyo ekudluliseleni iipateni zoyilo lweetshiphusi kwi-silicon wafers, efuna itafile yokusebenza yomatshini wokufotokopa ukugcina uzinzo oluphezulu kakhulu. Ibhentshi yokusebenzela echanekileyo yegranite inokwahlula ukuphazamiseka kokungcangcazela kumgangatho weworkshop kunye nezinye izixhobo, iqinisekisa ukuba impazamo yendawo ehambelanayo phakathi kwe-silicon wafer kunye ne-photolithography imaski ilawulwa kwinqanaba le-nanometer ngexesha lenkqubo yokuvezwa komatshini we-photolithography, ngaloo ndlela iqinisekisa ukudluliselwa ngokuchanekileyo kwepateni.
Ukongezelela, i-coefficient yokwandiswa kwe-thermal ye-granite iphantsi kakhulu, ngokuqhelekileyo isuka kwi-5 ukuya kwi-7 × 10⁻⁶/℃. Ngexesha lenkqubo yokuvelisa i-semiconductor, ubushushu obuveliswa kukusebenza kwezixhobo kunye nokuguquguquka kwindawo yobushushu beworkshop kunokubangela zombini ukuguquka kwe-thermal yezinto. Izixhobo ezichanekileyo zeGranite ziphantse zingachatshazelwa lutshintsho lobushushu kwaye zihlala zigcina imilinganiselo ezinzileyo kunye neemilo. Umzekelo, kwinkqubo yokufakwa kwetshiphu, kwanotshintsho oluncinci kwiqondo lobushushu lunokubangela ukwanda kwe-thermal yezixhobo eziphambili ze-etching, okukhokelela ekuphambukeni kubunzulu be-etching kunye nokuchaneka. Nangona kunjalo, ukusebenzisa izixhobo ezichanekileyo zegranite njengenkxaso kunye nezinto ezithwala umthwalo kunokuthintela ngokufanelekileyo le meko ukuba ingenzeki, iqinisekisa ukuchaneka okuphezulu kunye nokuhambelana kwenkqubo yokubhala.
Ukuchaneka okuphezulu kokusebenza kunye neenzuzo zomgangatho womphezulu
Itekhnoloji ephezulu yokuchaneka kwetekhnoloji yegranite echanekileyo nayo iyinto ebalulekileyo ekuqinisekiseni ukuchaneka kwemveliso yeechips. Ngokusebenzisa itekhnoloji yokuqhubela phambili echanekileyo, ukuthambeka komphezulu, ukuthe tye kunye nezinye izikhombisi ezichanekileyo zezixhobo zegranite zinokufikelela kwinqanaba eliphezulu kakhulu. Umzekelo, ngokwamkela ubuchule be-CNC bokusila kunye nokupholisha, uburhabaxa bomphezulu begranite bunokuncitshiswa bube kumgangatho we-nanometer, kwenze umphezulu wokugqiba umphezulu ube nesiphumo esifana nesipili.
Kwizixhobo zokwenza i-chip, umgangatho ophezulu ochanekileyo ophezulu wamacandelo afana ne-granite precision guide rails kunye ne-sliders inokunciphisa kakhulu ukungqubuzana kunye nokunxiba phakathi kweendawo ezihambayo. Oku akugcini nje ukwandisa ukuzinza kunye nokuchaneka kokuhamba kwezixhobo, kodwa kwandisa ubomi benkonzo yezixhobo. Thatha izixhobo zokupakisha iitshiphu njengomzekelo. Umzila ochanekileyo wesikhokelo segranite unokuqinisekisa ukuba impazamo yendlela yokuhamba yentloko yokupakisha xa ithatha kwaye ibeka i-chip ilawulwa kwi-micrometer okanye nakwizinga le-nanometer, ngaloo ndlela ifezekisa ukulungelelaniswa okuchanekileyo kunye nokudibanisa okuthembekileyo phakathi kwe-chip kunye ne-substrate yokupakisha.
Ukuchasana nokunxiba kunye nokuzinza kwexesha elide
Ukuveliswa kweSemiconductor yinkqubo yokuvelisa eqhubekayo kunye nexesha elide, kwaye izixhobo kufuneka zisebenze ngokuzinzileyo ixesha elide. I-Granite inokumelana nokugqwesa okugqwesileyo, kunye nobunzima be-Mohs be-6 ukuya kwi-7, ekwazi ukumelana nokunyakaza kwexesha elide kunye nemithwalo. Ekusebenzeni kwansuku zonke kwezixhobo zokuvelisa i-chip, iindawo ezichanekileyo zegranite azikwazi ukunxiba kwaye zinokuhlala zigcina ukusebenza okuzinzile kunye nokuchaneka.
Xa kuthelekiswa nezinye izinto, igranite ayifumani deformation yokudinwa okanye ukuthotywa kokusebenza ngexesha lokusetyenziswa kwexesha elide. Oku kuthetha ukuba izixhobo zokuvelisa i-chip zisebenzisa amacandelo e-granite achanekileyo angakwazi ukugcina ukuchaneka okuphezulu kunye nokuzinza emva kokusebenza kwexesha elide, ngokufanelekileyo ukunciphisa izinga lesiphako semveliso esibangelwa ukuhla kokuchaneka kwezixhobo. Kubavelisi be-semiconductor, oku akugcini nje ukwandisa ukusebenza kakuhle kwemveliso kodwa kunciphisa iindleko zemveliso.
Ukuqukumbela
Kwindlela yokulandela ukuchaneka kwe-nanoscale kwimveliso ye-semiconductor, iindawo ezichanekileyo ze-granite zidlala indima engenakuthathelwa indawo kunye nokuzinza kwazo okugqwesileyo, ukusetyenzwa ngokuchanekileyo kunye nokuthembeka kwexesha elide. Ukusuka kwifotografi ukuya kwi-etching, ukusuka ekupakishweni kwetshiphu ukuya kuvavanyo, izincedisi zegranite ezichanekileyo zihamba ngekhonkco ngalinye eliphambili kwimveliso yetshiphu, inika isiqinisekiso esiqinileyo sokwenziwa ngokuchanekileyo okuphezulu kweetshiphusi. Ngophuhliso oluqhubekayo lwetekhnoloji ye-semiconductor, iimfuno zokuchaneka ziya kuba phezulu. Iindawo ezichanekileyo zeGranite nazo ziya kuqhubeka zidlala indima ebalulekileyo kule ntsimi, ukunceda imboni ye-semiconductor ukuba ihlale ifikelela kwiindawo eziphakamileyo. Nokuba ngoku okanye kwixesha elizayo, iindawo ezichanekileyo zegranite ziya kuhlala zingamandla angundoqo aqinisekisa ukuchaneka kwenqanaba le-nanometer kwimveliso ye-semiconductor.
Ixesha lokuposa: May-07-2025