Kwicandelo lokwenziwa kwee-semiconductor, ukuchaneka yinto yonke. Njengoko iteknoloji yokwenziwa kwee-chip iqhubeka ihambela phambili kwinqanaba le-nanometer kwanakwinqanaba le-nanometer, nayiphi na impazamo encinci inokukhokelela ekwehleni kokusebenza kwee-chip okanye ukusilela ngokupheleleyo. Kolu khuphiswano lokuchaneka kokugqibela, izixhobo ze-granite, ezineempawu zazo zomzimba neze-mechanical ezizodwa, ziye zaba yinto ephambili ekuqinisekiseni ukuchaneka kwe-nanoscale yokuveliswa kwee-chip.
Uzinzo olubalaseleyo lubeka isiseko sokuchaneka
Imeko-bume kwindawo yokusebenzela yokuvelisa i-semiconductor iyinkimbinkimbi, kwaye izinto zangaphandle ezifana nokungcangcazela kunye notshintsho lobushushu zihlala zisongela ukuchaneka kwemveliso. Izixhobo zokuchaneka kwegranite zinozinzo oluphezulu kakhulu, zibonelela ngesiseko esiqinileyo sokuveliswa kweetships. Ulwakhiwo lwayo lwangaphakathi luxinene kwaye lufana, lwenziwe ngeenkqubo zejoloji kwiminyaka engamakhulu ezigidi, kwaye luneempawu zendalo zokudambisa okuphezulu. Xa ukungcangcazela kwangaphandle kudluliselwa kwizixhobo zemveliso, iindawo zokuchaneka kwegranite zinokufunxa ngempumelelo kwaye zinciphise ngaphezulu kwe-80% yamandla okungcangcazela, okunciphisa kakhulu impembelelo yokungcangcazela kwizixhobo zokuchaneka.
Olu phawu lubaluleke kakhulu kwinkqubo ye-photolithography. I-Photolithography linyathelo elibalulekileyo ekudluliseleni iipateni zoyilo lweetships kwii-silicon wafers, nto leyo efuna ukuba itafile yokusebenza yomatshini we-photolithography igcine uzinzo oluphezulu kakhulu. Ibhentshi yokusebenzela echanekileyo yegranite inokwahlula ukuphazamiseka kokungcangcazela kumgangatho weworkshop nakwezinye izixhobo, iqinisekisa ukuba impazamo yendawo ephakathi kwe-silicon wafer kunye ne-photolithography mask ilawulwa kwinqanaba le-nanometer ngexesha lenkqubo yokuvezwa komatshini we-photolithography, ngaloo ndlela iqinisekisa ukudluliselwa ngokuchanekileyo kwepateni.
Ukongeza, i-coefficient yokwandiswa kobushushu begranite iphantsi kakhulu, idla ngokuqala kwi-5 ukuya kwi-7×10⁻⁶/℃. Ngexesha lenkqubo yokuvelisa i-semiconductor, ubushushu obuveliswa kukusebenza kwezixhobo kunye nokuguquguquka kobushushu kwindawo yokusebenzela bunokubangela ukuguquka kobushushu bezinto. Izixhobo zokuchaneka kwegranite azichaphazeleki lutshintsho lobushushu kwaye zihlala zigcina ubukhulu kunye neemilo ezizinzileyo. Umzekelo, kwinkqubo yokuchola iitship, nokuba utshintsho oluncinci kubushushu lunokubangela ukwanda kobushushu kwezixhobo eziphambili zokuchola, okubangela ukuphambuka kubunzulu bokuchola kunye nokuchaneka. Nangona kunjalo, ukusebenzisa izixhobo zokuchaneka kwegranite njengenkxaso kunye nezixhobo ezithwala umthwalo kunokuthintela ngempumelelo le meko ukuba ingenzeki, ukuqinisekisa ukuchaneka okuphezulu kunye nokuhambelana kwenkqubo yokuchola.
Ukucubungula ngokuchanekileyo okuphezulu kunye neenzuzo zomgangatho womphezulu
Itekhnoloji yokucubungula ngokuchanekileyo okuphezulu kwamacandelo okuchaneka kwegranite nayo ibalulekile ekuqinisekiseni ukuchaneka kwemveliso yeetships. Ngokusebenzisa itekhnoloji yokucubungula ngokuchanekileyo okuphambili, ukuba tyaba komphezulu, ukuthe tye kunye nezinye izalathisi zokuchaneka kwezixhobo zegranite kunokufikelela kwinqanaba eliphezulu kakhulu. Umzekelo, ngokusebenzisa iindlela zokugaya nokupolisha ze-CNC, ukuba rhabaxa komphezulu wegranite kunokunciphisa ukuya kwinqanaba le-nanometer, okwenza indlela yokugqiba umphezulu ibe nesiphumo esifana nesipili.
Kwizixhobo zokwenza iitshiphusi, umgangatho womphezulu ochanekileyo wezinto ezifana neerali zesikhokelo sokuchaneka kwegranite kunye nezilayidi unokunciphisa kakhulu ukungqubana kunye nokuguguleka phakathi kweendawo ezihambayo. Oku akupheleli nje ekuphuculeni uzinzo kunye nokuchaneka kokuhamba kwezixhobo, kodwa kwandisa nobomi benkonzo yezixhobo. Thatha izixhobo zokupakisha iitshiphusi njengomzekelo. Iirali zesikhokelo sokuchaneka kwegranite zinokuqinisekisa ukuba impazamo yendlela yokuhamba kwentloko yokupakisha xa uthatha kwaye ubeka itshiphusi ilawulwa kwinqanaba le-micrometer okanye ne-nanometer, ngaloo ndlela kufezekiswa ulungelelwaniso oluchanekileyo kunye nonxibelelwano oluthembekileyo phakathi kwetshiphusi kunye ne-substrate yokupakisha.
Ukungagugi kunye nokuzinza kwexesha elide
Ukwenziwa kwee-semiconductor yinkqubo yemveliso eqhubekayo nehlala ixesha elide, kwaye izixhobo kufuneka zisebenze ngokuzinzileyo ixesha elide. I-Granite inokumelana nokuguguleka okuhle kakhulu, enobunzima be-Mohs obuyi-6 ukuya kwi-7, ekwaziyo ukumelana neentshukumo zoomatshini kunye nemithwalo yexesha elide. Ekusebenzeni kwemihla ngemihla kwezixhobo zokwenza iitshiphusi, iindawo ezichanekileyo ze-granite azigugi kwaye zinokugcina ukusebenza okuzinzileyo kunye nokuchaneka.
Xa kuthelekiswa nezinye izinto, i-granite ayifumani tshintsho lokudinwa okanye ukuwohloka kokusebenza ngexesha lokusetyenziswa ixesha elide. Oku kuthetha ukuba izixhobo zokwenza iitshiphusi ezisebenzisa izixhobo zokuchaneka kwe-granite zisenokugcina ukuchaneka okuphezulu kunye nozinzo emva kokusebenza ixesha elide, nto leyo enciphisa ngempumelelo izinga leziphene zemveliso ezibangelwa kukwehla kokuchaneka kwezixhobo. Kubavelisi be-semiconductor, oku akupheleli nje ekuphuculeni ukusebenza kakuhle kwemveliso kodwa kukwanciphisa neendleko zemveliso.
Isiphelo
Kwindlela yokulandela ukuchaneka kwe-nanoscale kwimveliso ye-semiconductor, iindawo ezichanekileyo ze-granite zidlala indima engenakutshintshwa ngokuzinza kwazo okubalaseleyo, ukucutshungulwa ngokuchanekileyo okuphezulu kunye nokuthembeka kwexesha elide. Ukusuka kwi-photolithography ukuya ekukroleni, ukusuka ekupakishweni kwee-chip ukuya kuvavanyo, izixhobo ezichanekileyo ze-granite zihamba kuyo yonke ikhonkco ephambili kwimveliso yee-chip, zibonelela ngesiqinisekiso esiqinileyo sokwenziwa kwee-chips ngokuchanekileyo okuphezulu. Ngophuhliso oluqhubekayo lwetekhnoloji ye-semiconductor, iimfuno zokuchaneka ziya kuba phezulu ngakumbi. Iindawo ezichanekileyo ze-granite nazo ziya kuqhubeka nokudlala indima ebalulekileyo kweli candelo, zinceda imboni ye-semiconductor ukuba ifikelele rhoqo kwiindawo eziphakamileyo ezintsha. Nokuba ngoku okanye kwixesha elizayo, iindawo ezichanekileyo ze-granite ziya kuhlala zingundoqo ukuqinisekisa ukuchaneka kwinqanaba le-nanometer kwimveliso ye-semiconductor.
Ixesha leposi: Meyi-07-2025