Kwiinkalo ezinqamlezileyo ezifana nokuveliswa kwe-semiconductor kunye ne-optical instrument assembly, ukusukelwa kwe-sub-micron okanye nakwinqanaba le-nanometer-level yokuchaneka ngokuchaneka kwe-multi-axis worktables ayinasiphelo. Igranite enoxinano oluphezulu (enoxinano lwe-≥3100kg/m³) iba yeyona nto iphambili ekuphuculeni ukusebenza kweebhentshi zokusebenza ngenxa yeempawu zayo ezizodwa. Oku kulandelayo luhlalutyo lweenzuzo zayo ezingenakubuyiselwa ukusuka kwimilinganiselo emine engundoqo.
1. Uzinzo olubalaseleyo: "Isithintelo sendalo" ukucinezela ukuphazamiseka kokungcangcazela
Xa i-multi-axis worktable ikwintshukumo yesantya esiphezulu (ngesantya somgca esidlula i-500mm/s) okanye kunxibelelwano lwe-multi-axis, ii-vibrations ezintsonkothileyo ziqhele ukwenzeka. Iincinci zangaphakathi zamaminerali ze-granite ezixineneyo eziphezulu zisondelelene ngokusondeleyo, kunye ne-frequency yendalo ephantsi njenge-10-20Hz, kwaye inokuthatha ngaphezu kwe-90% yamandla okunyakaza kwangaphandle. Kwinkqubo yokupakisha i-chip ye-semiconductor, inokulawula impazamo yokufuduka kwe-workbench ngaphakathi kwe-± 0.5μm, ukuphepha ukucima i-wire offset okanye umonakalo we-chip obangelwa yi-vibration. Xa kuthelekiswa nezixhobo zentsimbi yentsimbi yesiko, izinga lokungcangcazela kwegranite liphindwe kathathu, liphucula kakhulu ukuhambelana kokusetyenzwa.
2. Uzinzo lwe-Thermal: "I-ankile yokuzinzisa" ngokuchasene nokuguquguquka kobushushu
Kwimeko yokulungiswa okuchanekileyo, utshintsho lweqondo lokushisa lwe-0.1 ℃ lunokubangela ukuguqulwa kwezinto ze-0.1μm / m. I-coefficient yokwandiswa kwe-thermal ye-granite ephezulu yoxinaniso kuphela (4-8) × 10⁻⁶/℃, emalunga ne-1/6 ye-aluminium alloy. Kwiimeko ezichanekileyo ezichanekileyo ezifana nokusila i-lens optical, nokuba iqondo lokushisa kwi-workshop liguquguquka nge-± 2℃, isiseko segranite sisenako ukugcina ukuchaneka kwe-micron-level positioning of the key components of the workbench, ukuqinisekisa ukuba impazamo ye-lens curvature ingaphantsi kwe-0.01D, idlula kakhulu umgangatho woshishino.
3. Ubungqongqo obuphezulu: "Ilitye leSiseko eliSolid" lokuthwala imithwalo enzima
Iitheyibhile ezininzi ze-axis zihlala zixhotyiswe ngamacandelo anzima njengeentloko ze-laser kunye ne-probe arrays (nomthwalo we-axis enye odlula i-200kg). Amandla acinezelayo egranite enoxinano oluphezulu yi-≥200MPa, kwaye inokumelana nomthwalo ofanayo ongaphezulu kwe-1000kg/m² ngaphandle koguquko olusisigxina. Emva kokuba ishishini elithile le-aerospace lamkele le mathiriyeli, xa i-worktable yayo ye-axis emihlanu ithwala umthwalo wokucubungula we-500kg, impazamo ye-Z-axis verticality inyuke kuphela nge-0.3μm, iqinisekisa ngokufanelekileyo ukuchaneka kokulungiswa kwemiphezulu egobileyo.
4. Uzinzo oluhlala ixesha elide: Nciphisa iindleko zomjikelo wobomi zizonke
Ubunzima be-Mohs be-granite bufikelela kwi-6 ukuya kwi-7, kwaye ukuxhathisa kwayo kugqithise ngaphezu kwezihlandlo ezihlanu zentsimbi eqhelekileyo. Kumgca wokuvelisa imveliso ye-3C esebenza kwi-avareji yeeyure ze-16 ngosuku, isiseko segranite sinokufikelela ekusebenzeni kwamahhala kwi-8 ukuya kwi-10 iminyaka, ngelixa isiseko sentsimbi etyhidiweyo sibonisa ukuguga kwisikhokelo soqhagamshelwano lwesikhokelo (ubunzulu> 5μm) emva kweminyaka emi-3. Ukongezelela, ukungazinzi kwayo kweekhemikhali kwenza ukuba ikwazi ukugcina ubuninzi be-Ra≤0.2μm kwiindawo ezine-acidic kunye ne-alkaline, ngokuqhubekayo ukubonelela ngereferensi yofakelo oluzinzileyo lwamacandelo achanekileyo afana neerula ze-grating kunye neenjini ze-linear.
Ukuqukumbela: Uxinaniso oluphezulu lweGranite-"Intshatsheli efihliweyo" yoMveliso ochanekileyo
Ukusuka kwi-nanoscale positioning ukuya kwi-heavy-duty processing, i-granite yoxinaniso oluphezulu luhlengahlengisa imigangatho yobugcisa yeetafile zokusebenzela ezichanekileyo ezininzi kunye nokusebenza kwayo okubanzi okungenakulinganiswa. Kumashishini alandela ukuchaneka kokugqibela kunye nokuthembeka, ukukhetha iziseko zegranite eziphezulu (ezifana neemveliso ze-ZHHIMG® eziqinisekiswe yi-ISO ezintathu iinkqubo) ayisosiqinisekiso semveliso yangoku kuphela kodwa kunye notyalo-mali olucwangcisiweyo ekuphuculeni inkqubo yexesha elizayo.
Ixesha lokuposa: Jun-09-2025