Kwihlabathi elichanekileyo lokwenziwa kwe-semiconductor, ukuvavanywa okungonakalisi kwee-wafers kuyikhonkco eliphambili lokuqinisekisa umgangatho weechips. Isiseko segranite esibonakala singabalulekanga ngokwenene "ligorha elingashiyiweyo" elimisela ukuchaneka kokubhaqwa. Ngaba zichaphazela njani iziphumo zovavanyo emhlabeni? Eli nqaku liza kuqhuba uhlalutyo olunzulu ukusuka kwimilinganiselo efana nempahla yezinto eziphathekayo kunye noyilo lwesakhiwo.
1. Isiseko esizinzile: Iinzuzo zendalo zegranite zibeka isiseko esiqinileyo sokuchaneka
1. Ukusebenza kakuhle kwenyikima
Ngexesha lokusebenza kwesixhobo sovavanyo esingonakalisiyo, ukujikeleza kwemoto kunye nokuhamba kwezinto ezinomatshini konke kuya kuvelisa ukungcangcazela. Ukuba ezi vibrations azicinezelwanga ngokufanelekileyo, ziya kuphazamisa ngokunzulu ukuchaneka kovavanyo. Ingaphakathi legranite lidityaniswe ngokusondeleyo kunye neekristale zamaminerali ezifana nequartz kunye nefeldspar. Ubume bayo obukhethekileyo bunika amandla okufunxa ukungcangcazela, ekwazi ukufunxa ngaphezulu kwe-90% yamandla okungcangcazela kwezixhobo. Idatha yokulinganisa yokwenene yomenzi othile we-semiconductor ibonisa ukuba emva kokusebenzisa isiseko se-granite, i-vibration amplitude yezixhobo zokufumanisa iye yancitshiswa ukusuka kwi-12μm ukuya kwi-2μm, ngokufanelekileyo ukuphepha ukuphambuka kwesignali yokufumanisa okubangelwa yi-vibration.
2. I-coefficient ephantsi kakhulu yokwandiswa kwe-thermal
Ngexesha lenkqubo yokufumanisa, izinto ezifana nokufudumala kwezixhobo kunye nokutshintsha kweqondo lokushisa lokusingqongileyo konke kuya kuchaphazela ukuzinza kwesiseko somatshini. Izinto eziqhelekileyo zanda kakhulu xa zifudumala, kodwa i-coefficient yokwandiswa kwe-thermal ye-granite yi-1/5 kuphela yentsimbi. Nokuba ubushushu be-ambient buguquguquka nge-10℃, inguquko yayo ayinakuhoywa. Oku kwenza ukuba isiseko segranite sinikeze iqonga elizinzile lokubhekisela kwisixhobo sokuhlola, ukuqinisekisa ukuba indawo ehambelanayo phakathi kweprobe yokuhlola kunye ne-wafer ihlala ichanekile ngamaxesha onke kwaye igweme iimpazamo zokuhlola ezibangelwa yi-thermal deformation.
Okwesibini, uyilo oluchanekileyo: Ukulungiswa kwesakhiwo kwandisa ngakumbi ukuthembeka kokubhaqwa
High-precision processing kunye nesiqinisekiso flatness
Isiseko segranite esikumgangatho ophezulu sicutshungulwa bubuchwephesha obuphambili bonxibelelwano lwe-CNC lwe-axis emihlanu, ene-flatness eyi-±0.5μm/m, ebonelela ngereferensi yofakelo lwe-ultra-flat kwisixhobo sokuhlola. Ekuhloleni i-wafer, ukuma kunye nomgangatho weprobe yokuhlola kubalulekile kwiziphumo zohlolo. Isiseko se-granite esiphezulu esichanekileyo sinokuqinisekisa ukubekwa ngokuchanekileyo kweprobe, okwenza idatha yokuhlola ichaneke kwaye inokwethenjelwa.
2. Ulungelelwaniso lwesakhiwo esilungiselelweyo
Iziseko zoomatshini beGranite zinokuthi zilungelelaniswe izixhobo zovavanyo ezahlukeneyo ze-wafer ezingonakalisi kunye neemfuno zenkqubo. Ngokomzekelo, ukuhlangabezana neemfuno zezixhobo zokuhlola ukukhanya kokukhanya, umphezulu wesiseko somatshini unokuphathwa ngokukodwa; Ukuhlangabezana neemfuno zofakelo lwezixhobo zokuvavanya i-ultrasonic, isiseko sinokuthi sifakwe ngaphambili kunye nemingxuma yokufakela echanekileyo kunye neetrayi zekhebula, okwenza ukufakwa ngokukhawuleza kunye nokuchanekileyo kwezixhobo kunye nokunciphisa ukuphambuka kokufumanisa okubangelwa yimpazamo yokufakela.
Iii. Uzinzo lwexesha elide: Nciphisa ilahleko echanekileyo ebangelwa kukugcinwa kwezixhobo
I-Granite inobunzima obuphezulu kunye nokuchasana okunamandla okugqoka, kunye nobunzima be-Mohs be-6 ukuya kwe-7, okuphindwe kathathu ukuchaswa kwentsimbi eqhelekileyo. Ngethuba lemisebenzi yokuhlola ixesha elide, umphezulu wesiseko somatshini awuthandeki ukunxiba kwaye unokuhlala ugcina imeko echanekileyo echanekileyo. Ngokwahlukileyo, iziseko ezenziwe kwezinye izinto zinokubangela utshintsho kwireferensi yofakelo lwesixhobo ngenxa yokuguga kunye nokukrazula, ngaloo ndlela kuchaphazela ukuchaneka kokufumanisa kunye nokufuna ukulinganisa rhoqo kunye nokugcinwa. Ubomi benkonzo ende kunye nokuzinza okuphezulu kwesiseko se-granite kunciphisa ngokufanelekileyo ukuphindaphinda kokugcinwa kwezixhobo kunye nokunciphisa umngcipheko wokulahleka okuchanekileyo okunokuthi kwenzeke ngexesha lokugcinwa kwenkqubo.
Ukusuka ekuxhathiseni ukothuka, ukumelana nobushushu ukuya kuyilo oluchanekileyo, yonke into yesiseko segranite ikhusela ukuchaneka kovavanyo olungonakalisi lweewafers. Kwixesha lanamhlanje lokwenziwa kwe-semiconductor elandela ukuchaneka kokugqibela, ukukhetha isiseko segranite esikumgangatho ophezulu kufana nokongeza umaleko oqinileyo we-inshurensi ukuchaneka nokuthembeka kweziphumo zovavanyo.
Ixesha lokuposa: Jun-18-2025