Kwintsimi yokulinganisa ngokuchanekileyo, ukuzinza kwesiseko sesixhobo sokulinganisa sinquma ngokuthe ngqo ukuthembeka kwedatha. Ingxaki yempazamo yokulinganisa ebangelwa kukuguqulwa kwe-thermal yeziseko zentsimbi etyhidiweyo kudala ikhathaza ishishini lokuvelisa. Nangona kunjalo, iqonga lesixhobo sokulinganisa i-granite flatness esasungulwa yi-ZHHIMG, kunye ne-AAAA-level certification echanekile ephula imigangatho yoshishino, ibonelela ngesisombululo soguquko somlinganiselo ophezulu wokuchaneka.
Ingxaki ye-thermal deformation yeziseko zentsimbi: Umbulali ongabonakaliyo weempazamo zokulinganisa
Iziseko zentsimbi zazisetyenziswa ngokubanzi kwisixhobo sokulinganisa ngenxa yexabiso eliphantsi kunye nobungqongqo obuqinileyo. Nangona kunjalo, kwizicelo ezisebenzayo, i-drawback yokuzinza kwabo okungahambi kakuhle kwe-thermal kuye kwavela ngokuthe ngcembe. I-coefficient yokwandiswa kwe-thermal yensimbi etyhidiweyo iphezulu njenge-11-12 × 10⁻⁶/℃. Xa isixhobo sisebenza okanye ubushushu be-ambient buguquguquka, buthanda kakhulu ukuguqulwa kwe-thermal. Umzekelo, xa ubushushu be-ambient kwindawo yokusebenzela butshintsha nge-5℃, isiseko sentsimbi egayiweyo sinokuthi singene kwi-linear deformation ye-0.0055-0.006mm. Utshintsho oluncinci olunjalo luya kubangela ngokuthe ngqo ireferensi yokulinganisa ukutshintsha, ukuphindaphinda impazamo yokulinganisa.
Ukongezelela, ukuqhutyelwa kokushisa kwesiseko sensimbi etyhidiweyo akulingani. Xa izixhobo zisebenza, ukufudumeza kwendawo kuya kubangela "impembelelo ye-thermal gradient", okubangela ukuphazamiseka kunye nokuguqulwa ebusweni besiseko. Kumlinganiselo we-flatness, le deformation inokubangela ukutenxa kwindawo ehambelanayo phakathi kweprobe yokulinganisa kunye nento elinganiswayo, ekugqibeleni ikhuphe idatha yokulinganisa engalunganga. Ngokwezibalo zoshishino, izixhobo zokulinganisa ezineziseko zentsimbi, iimpazamo ezibangelwa yi-akhawunti ye-thermal deformation ngaphezu kwe-40% yeempazamo zizonke, ezichaphazela kakhulu ukuchaneka kokuhlolwa komgangatho wemveliso.
Ukuphumelela kwetekhnoloji yeqonga legranite le-ZHHIMG: Ukuphelisa ukuguquka kwe-thermal kwingcambu.
Iqonga lesixhobo sokulinganisa i-granite ye-ZHHIMG ye-granite yokulinganisa ithatha i-granite yendalo njengento esisiseko, ukuxazulula ingxaki yokuguqulwa kwe-thermal ukusuka kwisiseko sezinto eziphathekayo. I-coefficient yokwandiswa kwe-thermal ye-granite kuphela i-5-7 × 10⁻⁶ / ℃, enesiqingatha kuphela sentsimbi. Ngaphezu koko, isakhiwo sayo sangaphakathi sixinene kwaye siyafana. Naphantsi kokutshintsha kobushushu obugqithisileyo, inokugcina ubungakanani obuzinzileyo kunye nokumila. Idatha yelebhu ibonisa ukuba kwindawo eneqondo lokushisa elingama-20 ℃, ukuguqulwa komgca weqonga legranite lingaphantsi kwe-0.0014mm, eliphantse lingabalulekanga.
Ukongeza kwizinto eziluncedo, i-ZHHIMG yamkela itekhnoloji ye-patent ye-ultra-precision processing technology. Ngokusebenzisa i-CNC yokusila kunye neendlela zokupholisha, ukunyanzeliswa kwendawo yesikhulumi kuphuculwe ukuya kwi-± 0.001mm / m, ukufikelela kwinqanaba eliphezulu kwishishini. Okwangoku, i-honeycomb-shaped-shaped stress release structure yenziwe ngaphakathi kweqonga, eliqhubela phambili ukunyusa ukuqina ngelixa lichitha ngokufanelekileyo i-deformations yemizuzu ebangelwa kuxinzelelo lwe-thermal, ukuqinisekisa ukuba ireferensi yokulinganisa ihlala izinzile kwaye inokwethenjelwa ngamaxesha onke.
Isatifikethi sokuchaneka kwenqanaba le-Aaa: Ukuzinikela komgangatho oxhaswa ligunya
Iqonga le-granite le-ZHHIMG liphumelele isiqinisekiso sokuchaneka kwe-AAA-level liziko eligunyazisiweyo lamazwe ngamazwe. Lo mgangatho wesatifikethi ufuna ukuba impazamo yokulinganisa yesixhobo ihlale ilawulwa ngaphakathi kwe-±0.3μm phantsi kweenguqu ezininzi zokusingqongileyo ezifana nobushushu, ukufuma kunye nokungcangcazela. Ukuhlangabezana nalo mgangatho, i-ZHHIMG iseke inkqubo yokulawula umgangatho ogcweleyo: ukusuka ekuhlolweni kwe-ore eluhlaza ye-granite, ukulungiswa ngokuchanekileyo ukuya ekuhlolweni kweemveliso ezigqityiweyo, ikhonkco ngalinye libekwe esweni ngokungqongqo ngezixhobo zokuhlola ezizenzekelayo. Ngokomzekelo, i-interferometer ye-laser isetyenziselwa ukuqhuba i-micron-level scanning of the surface platform ukuqinisekisa ukuba impazamo ye-flatness iphuculwe. Ukuzinza kwe-thermal yeqonga kuqinisekiswa ngokufanisa iindawo ezingqongileyo ezigqithiseleyo ngokusebenzisa i-labhoratri yokushisa kunye nomswakama oqhubekayo.
Kwizicelo ezisebenzayo, iqonga le-ZHHIMG libonise inzuzo ebalulekileyo kumashishini afana ne-semiconductors, iilensi zamehlo, kunye nokubumba okuchanekileyo. Emva kokuba ishishini elithile le-semiconductor lingenise eli qonga, impazamo yokulinganisa i-flatness yancitshiswa ngama-90%, kwaye izinga lokuvelisa imveliso liye lanyuswa nge-15%, ngokufanelekileyo ukuxazulula ingxaki yokuphinda iphinde isebenze ngenxa yeempazamo zokulinganisa.
Ngokuchasene nemvelaphi yophuculo lweshishini lemveliso ukuya ekuchanekeni okuphezulu kunye nobukrelekrele, iqonga lesixhobo sokulinganisa ukugcwala kwegraniti ye-ZHHIMG lichaze ngokutsha umgangatho womlinganiselo ochanekileyo kunye nolawulo lwalo lokugqibela lokuguquguquka kwe-thermal kunye ne-AAA-level yokuqinisekisa ukuchaneka. Ayinikezeli kuphela iziqinisekiso zomlinganiselo othembekileyo kumashishini, kodwa ikwakhuthaza ukutsiba kwethekhinoloji yoshishino ukusuka "kumgwebo wobungqina" ukuya "kubhaqo oluchanekileyo".
Ixesha lokuposa: May-12-2025