Kwintsimi yokwenziwa kwe-semiconductor, ukuchaneka kwe-sub-micron ngundoqo ekuqinisekiseni ukusebenza kwe-chip, kunye ne-(ZHHIMG®) isiseko se-granite, kunye neempawu zayo eziphathekayo, ukucubungula ngokuchanekileyo kunye noyilo olusha, ibe yisiqinisekiso esisisiseko sokuphumeza oku kuchanekileyo.
Ngokwembono yezinto eziphathekayo, i-granite emnyama ekhethwe yi-ZHHIMG® inoxinano malunga ne-3100kg/m³, kunye nesakhiwo esixineneyo sangaphakathi. Oku kuxinana okuphezulu kunika uzinzo olubalaseleyo kunye nokuqina. Ngexesha lokusebenza kwezixhobo ze-semiconductor, ukujikeleza kweemoto kunye nokuhamba kwamacandelo omatshini ngaphakathi kwesixhobo kuya kuvelisa ukungcangcazela. Isiseko se-granite sinokufunxa ngokufanelekileyo ngaphezu kwe-90% yamandla okungcangcazela, ukunciphisa kakhulu impembelelo ye-vibration ekuchanekeni kwezixhobo. Okwangoku, i-coefficient yayo ephantsi kakhulu yokwandiswa kwe-thermal yenza ukuba igcine i-deformation yayo ngaphakathi kwinqanaba elincinci kakhulu xa ubushushu be-ambient buguquguquka, ukubonelela ngesiseko esizinzileyo senkxaso yezixhobo ze-semiconductor kunye nokuthintela ukufuduka kwamacandelo ezixhobo ngenxa yokutshintsha kweqondo lokushisa, elinokuthi lichaphazele ukuchaneka.
Ngokubhekiselele ekuqhutyweni nasekuveliseni, i-factory ye-ZHHIMG® ithatha izixhobo zokusebenza zamazwe ngamazwe eziphuculweyo kwaye zineemishini ezine ezinkulu zokugaya (umatshini ngamnye ubiza ngaphezu kwe-500,000usd), enokwenza ukugaya okuphezulu kwigranite. Ngokusebenzisa i-five-axis linkage CNC machining kunye nezinye iinkqubo, i-flatness yesiseko somatshini unokufikelela kwinqanaba le-nanometer, ukubonelela nge-ultra-flat reference surface yokufakelwa kwezixhobo ze-semiconductor kunye nokuqinisekisa indawo echanekileyo yecandelo ngalinye lesixhobo. Ngaphezu koko, i-workshop yeqondo lokushisa rhoqo kunye nokufuma (egubungela indawo ye-square metres ye-10,000) inika indawo ezinzileyo yokulungiswa. Ububanzi be-500mm kunye ne-2000mm enzulu ye-anti-vibration imisele ejikelezileyo, kunye neekrane ezithuleyo, zihlukanisa ngokufanelekileyo ukuphazamiseka kokungcangcazela kwangaphandle kwaye ziqinisekise ukuchaneka kokulungiswa kwesiseko somatshini.
Ukongeza, i-ZHHIMG® ikwanesakhono esinamandla sokwenza ngokwezifiso. Kwiimfuno ezikhethekileyo zezixhobo ze-semiconductor, imingxuma yokufakela echanekileyo kunye neetrayi zekhebula zinokuthi zenziwe kwangaphambili ukuze zifezekise ukuhambelana okugqibeleleyo phakathi kwezixhobo kunye nesiseko. Ngexesha elifanayo, ngokudibanisa ne-metrology ekumgangatho wehlabathi kunye nezixhobo zokuvavanya ezifana ne-German Mahr gauge yemizuzu (ngokuchaneka kwe-0.5um) kunye ne-Swiss WYLER ye-electronic level, isiseko somatshini sihlolwe ngokungqongqo kwaye silinganiswe ukuqinisekisa ukuba isiseko somatshini ngamnye sinokuhlangabezana neemfuno ezingqongqo zezixhobo ze-semiconductor ukwenzela ukuchaneka kwenqanaba le-sub-micron.
Kukudityaniswa ngokuchanekileyo kwezi zibonelelo okwenza isiseko segranite ye-ZHHIMG® ibe yinto ethembekileyo yokufumana ukuchaneka kwe-sub-micron kwisixhobo se-semiconductor, ukunceda ukuveliswa kwe-semiconductor ukuya kwiindawo ezichanekileyo eziphezulu.
Ixesha lokuposa: Jun-18-2025