Iziseko zoomatshini begranite zisetyenziswa kakhulu kwiimveliso zezixhobo zokucubungula i-wafer ngenxa yeempawu zazo eziphezulu ezifana nokuqina okuphezulu, ukuzinza, kunye nokuchaneka. Ukuhlanganisa, ukuvavanya, kunye nokulinganisa isiseko somatshini wegranite yinkqubo ebalulekileyo efuna ingqalelo enkulu kwiinkcukacha, ukuchaneka, kunye nokuchaneka. Kweli nqaku, siza kuxoxa ngenkqubo yenyathelo ngenyathelo yokuhlanganisa, ukuvavanya, kunye nokulinganisa isiseko somatshini wegranite kwiimveliso zezixhobo zokucubungula i-wafer.
Ukuhlanganisa
Inyathelo lokuqala kukulungiselela ipleyiti yomphezulu wegranite, isiseko, kunye nekholamu ukuze ihlanganiswe. Qinisekisa ukuba zonke iindawo zicocekile, zomile, kwaye azinazo naziphi na inkunkuma, uthuli, okanye ioyile. Faka izikhonkwane zokulinganisa kwisiseko uze ubeke ipleyiti yomphezulu phezu kwayo. Lungisa izikhonkwane zokulinganisa ukuze ipleyiti yomphezulu ithe tye kwaye ilingane. Qinisekisa ukuba ipleyiti yomphezulu igudiswe yisiseko kunye nekholamu.
Okulandelayo, faka ikholamu kwisiseko uze uyiqinise ngeebholiti. Sebenzisa isikrufu se-torque ukuqinisa iibholiti kwixabiso le-torque elicetyiswa ngumenzi. Jonga inqanaba lekholamu uze ulungise izikhonkwane zokulinganisa ukuba kuyimfuneko.
Okokugqibela, faka i-spindle assembly phezulu kwikholamu. Sebenzisa isikrufu se-torque ukuqinisa iibholithi ukuya kwixabiso le-torque elicetyiswa ngumenzi. Jonga inqanaba le-spindle assembly kwaye ulungise ii-leveling stud ukuba kuyimfuneko.
Uvavanyo
Emva kokudibanisa isiseko somatshini, inyathelo elilandelayo kukuvavanya ukusebenza kwawo kunye nokuchaneka kwawo. Qhagamshela umbane uze uvule umatshini. Qinisekisa ukuba zonke izinto ezifana neemoto, iigiya, iibhanti, kunye neebheringi zisebenza kakuhle kwaye azikho iingxaki okanye ingxolo engaqhelekanga.
Ukuvavanya ukuchaneka komatshini, sebenzisa isalathisi sokudayela esichanekileyo ukulinganisa ukutyibilika kwespindle. Beka isalathisi sokudayela kwipleyiti yomphezulu, kwaye ujikelezise ispindle. Ukutyibilika okuphezulu okuvumelekileyo kufuneka kube ngaphantsi kwe-0.002 mm. Ukuba ukutyibilika kungaphezulu komda ovumelekileyo, lungisa izikhonkwane zokulinganisa uze ujonge kwakhona.
Ukulinganisa
Ukulinganisa linyathelo elibalulekileyo ekuqinisekiseni ukuchaneka nokuchaneka kwesiseko somatshini. Inkqubo yokulinganisa ibandakanya ukuvavanya nokulungisa iiparameter zomatshini, ezinje ngesantya, indawo, kunye nokuchaneka, ukuqinisekisa ukuba umatshini uyahlangabezana neemfuno zomenzi.
Ukuze ulinganise umatshini, uya kufuna isixhobo sokulinganisa, esiquka i-laser interferometer, i-laser tracker, okanye i-ballbar. Ezi zixhobo zilinganisa intshukumo yomatshini, indawo, kunye nokulungelelaniswa kwawo ngokuchanekileyo.
Qala ngokulinganisa ii-axes zomatshini ezithe nkqo nezithe nkqo. Sebenzisa isixhobo sokulinganisa ukulinganisa intshukumo kunye nendawo yomatshini kumgama okanye i-engile ethile. Thelekisa amaxabiso alinganisiweyo kunye neenkcukacha zomenzi. Ukuba kukho naluphi na uphambuko, lungisa iiparameter zomatshini, ezinje ngeemoto, iigiya, kunye nee-drive, ukuze uzise amaxabiso alinganisiweyo ngaphakathi kwemida evumelekileyo.
Okulandelayo, vavanya umsebenzi wokudibanisa okujikelezayo komatshini. Sebenzisa isixhobo sokulinganisa ukwenza indlela ejikelezayo kwaye ulinganise intshukumo kunye nendawo yomatshini. Kwakhona, thelekisa amaxabiso alinganisiweyo kunye neenkcukacha zomenzi kwaye ulungise iiparameter ukuba kuyimfuneko.
Okokugqibela, vavanya ukuphindaphindwa komatshini. Linganisa indawo yomatshini kwiindawo ezahlukeneyo kwixesha elithile. Thelekisa amaxabiso alinganisiweyo kwaye ujonge naziphi na iziphambuko. Ukuba kukho naziphi na iziphambuko, lungisa iiparameter zomatshini kwaye uphinde uvavanyo.
Isiphelo
Ukuhlanganisa, ukuvavanya, kunye nokulinganisa isiseko somatshini wegranite kwiimveliso zezixhobo zokucubungula i-wafer yinkqubo ebalulekileyo efuna umonde, ingqalelo kwiinkcukacha, kunye nokuchaneka. Ngokulandela la manyathelo, unokuqinisekisa ukuba umatshini uhlangabezana neemfuno kunye nemisebenzi yomenzi ngokuchanekileyo, uzinzo, kunye nokuchaneka.
Ixesha lokuthumela: Disemba-28-2023