Kwimimandla efana nokuveliswa kwe-semiconductor kunye nezixhobo zokulinganisa ngokuchanekileyo, ukuchaneka kwamaqonga okuchaneka kwe-granite kumisela ngokuthe ngqo umgangatho wokusebenza kwezixhobo. Ukuqinisekisa ukuba ukuchaneka kweqonga kuyahlangabezana nemigangatho, kufuneka kwenziwe imizamo kwiinkalo ezimbini: ukufunyanwa kwezalathisi eziphambili kunye nokuthobela imigangatho esemgangathweni.
Ukufunyanwa kwesalathisi esingundoqo: Ulawulo olunemilinganiselo emininzi lokuchaneka
Ukuchonga ukuthambeka: Ukufumanisa "ukuthambeka" kwendiza yesalathiso
Ukuthe tyaba sisalathisi esiphambili samaqonga okuchaneka kwegranite, kwaye kudla ngokulinganiswa ngee-laser interferometers okanye amanqanaba e-elektroniki. I-laser interferometer inokulinganisa ngokuchanekileyo ukujikeleza kwemizuzu kumphezulu weqonga ngokukhupha umqadi welaser kwaye isebenzise umgaqo wokuphazamiseka kokukhanya, ngokuchaneka ifikelela kwinqanaba le-sub-micron. Inqanaba le-elektroniki lilinganisa ngokuhamba amaxesha amaninzi kwaye lizoba imephu ye-contour enemilinganiselo emithathu yomphezulu weqonga ukuze libone ukuba kukho naziphi na iiprotrusions zasekuhlaleni okanye ii-depressions. Umzekelo, amaqonga egranite asetyenziswa kumatshini we-semiconductor photolithography kufuneka abe ne-flatness ye-±0.5μm/m, oko kuthetha ukuba umahluko wokuphakama ngaphakathi kobude bemitha e-1 akufuneki udlule isiqingatha se-micrometer. Kuphela ngezixhobo zokuchonga ezichanekileyo kakhulu apho lo mgangatho ungqongqo ungaqinisekiswa khona.
2. Ukuchonga ukuthe tye: Qinisekisa "ukuthe tye" kokuhamba okuthe tye
Kwiqonga elithwala iindawo ezihamba ngokuchanekileyo, ukuthe tye kubaluleke kakhulu. Iindlela eziqhelekileyo zokufumanisa yindlela yentambo okanye i-laser collimator. Indlela yentambo ibandakanya ukuxhoma iingcingo zentsimbi ezichanekileyo kakhulu kunye nokuthelekisa umsantsa phakathi komphezulu weqonga kunye neengcingo zentsimbi ukuze kuchongwe ukuthe tye. I-laser collimator isebenzisa iimpawu zokusasazwa okuthe tye ze-laser ukuze kuchongwe impazamo ethe tye yomphezulu wokufakelwa kwereyile yesikhokelo seqonga. Ukuba ukuthe tye akuhlangabezani nomgangatho, kuya kubangela ukuba izixhobo zitshintshe ngexesha lokuhamba, okuchaphazela ukuchaneka kokucutshungulwa okanye kokulinganisa.
3. Ukuchonga uburhabaxa bomphezulu: Qinisekisa ukuba "ubuhle" boqhagamshelwano
Uburhabaxa bomphezulu weqonga buchaphazela ukulingana kofakelo lwecandelo. Ngokubanzi, imitha yoburhabaxa bestylus okanye i-microscope ebonakalayo isetyenziselwa ukufumanisa. Isixhobo sohlobo lwestylus sirekhoda utshintsho lokuphakama kweprofayili yemicroscopic ngokuqhagamshelana nomphezulu weqonga ngeprobe encinci. Ii-microscope ezibonakalayo zinokubona ngokuthe ngqo ubume bomphezulu. Kwizicelo ezichanekileyo, uburhabaxa bomphezulu weqonga legranite kufuneka bulawulwe kwi-Ra≤0.05μm, elingana nesiphumo esifana nesipili, ukuqinisekisa ukuba izinto ezichanekileyo zilingana kakuhle ngexesha lokufakwa kwaye kuthintelwe ukungcangcazela okanye ukufuduka okubangelwa zizithuba.
Imigangatho yokuchaneka ilandela oku: imigangatho yamazwe ngamazwe kunye nolawulo lwangaphakathi lweshishini
Okwangoku, kumazwe ngamazwe, imigangatho ye-ISO 25178 kunye ne-GB/T 24632 isetyenziswa rhoqo njengesiseko sokumisela ukuchaneka kwamaqonga egranite, kwaye kukho ukuhlelwa okucacileyo kwezalathisi ezifana nokuthe tye kunye nokuthe tye. Ukongeza, amashishini okuvelisa akumgangatho ophezulu adla ngokuseta imigangatho yolawulo lwangaphakathi engqongqo ngakumbi. Umzekelo, imfuneko yokuthe tye yeqonga legranite lomatshini we-photolithography iphezulu ngama-30% kunomgangatho wamazwe ngamazwe. Xa kuqhutywa uvavanyo, idatha elinganisiweyo kufuneka ithelekiswe nemigangatho ehambelanayo. Kuphela ngamaqonga ahambelana ngokupheleleyo nemigangatho anokuqinisekisa ukusebenza okuzinzileyo kwizixhobo ezichanekileyo.
Ukuhlola ukuchaneka kwamaqonga okuchaneka kwegranite yiprojekthi ecwangcisiweyo. Kuphela ngokuvavanya ngokungqongqo izalathisi eziphambili ezifana nokuthe tyaba, ukuthe tye, kunye nokurhabaxa komphezulu, kunye nokunamathela kwimigangatho yamazwe ngamazwe neyeshishini, apho ukuchaneka okuphezulu kunye nokuthembeka kweqonga kunokuqinisekiswa, kubeka isiseko esiqinileyo samacandelo okuvelisa akumgangatho ophezulu afana nee-semiconductors kunye nezixhobo zokuchaneka.
Ixesha leposi: Meyi-21-2025