Iziseko zoomatshini begranite zisetyenziswa kakhulu ekucubungulweni kwe-semiconductor wafer ngenxa yozinzo lwazo oluphezulu, iipropati zokudambisa ukungcangcazela, kunye nozinzo lobushushu. Ukuze kusetyenziswe kakuhle esi sixhobo sisemgangathweni ophezulu kwaye kuqinisekiswe ukuba sihlala ixesha elide, la macebiso alandelayo kufuneka alandelwe ukuze kusetyenziswe kwaye kugcinwe ngokufanelekileyo.
Okokuqala, kubalulekile ukugcina isiseko somatshini wegranite sicocekile kwaye uphephe naziphi na izinto ezirhabaxa okanye ezirhabaxa ezinokudibana nayo. Sebenzisa ilaphu elithambileyo nelimanzi elinesepha okanye isicoci esithambileyo ukuze usule umphezulu rhoqo. Kuphephe ukusebenzisa izinyibilikisi, iiasidi, okanye izinto zokucoca ezinamandla kuba zingonakalisa umphezulu welitye.
Okwesibini, qinisekisa ukuba isiseko somatshini sifakwe kakuhle kwaye silinganiswe kakuhle ukuthintela nayiphi na intshukumo okanye ukungcangcazela okungeyomfuneko. Oku kungenziwa ngokujonga ukulungelelaniswa kwesiseko ngenqanaba elichanekileyo kunye nokulungisa iinyawo zokulinganisa ukuba kuyimfuneko.
Okwesithathu, kubalulekile ukuqaphela iimeko zobushushu ezivezwa kwisiseko somatshini. I-Granite ine-thermal expansion coefficient ephantsi kwaye ayimelani noxinzelelo lobushushu, kodwa isenokuphazamiseka kutshintsho olukhulu lobushushu. Kuphephe ukubeka isiseko somatshini kwiindawo apho sivezwa khona lilanga ngqo okanye ukuguquguquka kobushushu.
Okwesine, kuphephe ukubeka imithwalo enzima okanye amandla okubetha kwisiseko somatshini wegranite. Nangona iyinto enamandla kakhulu, isenokonakala ngamandla agqithisileyo. Ukuba imithwalo enzima kufuneka ibekwe kumatshini, sebenzisa umaleko okhuselayo ukusasaza ubunzima ngokulinganayo kwaye uphephe nayiphi na indawo yokulayisha.
Okokugqibela, qinisekisa ukuba naluphi na ulungiso okanye utshintsho olwenziwe kwisiseko somatshini lwenziwa yingcali enamava okusebenza ngegranite. Ukulungisa okanye ukuguqula isiseko ngendlela engafanelekanga kunokuphazamisa ulwakhiwo lwaso kunye nokusebenza kwaso.
Ngamafutshane, ukuze kusetyenziswe kwaye kugcinwe isiseko somatshini wegranite kwiimveliso zokucubungula i-wafer, kubalulekile ukusigcina sicocekile, sifakelwe kwaye silinganiswe kakuhle, kuthintelwe ukusibeka kwiimeko zobushushu obuphezulu, kuthintelwe ukubeka imithwalo enzima okanye amandla okubetha kuyo, kwaye kuqinisekiswe ukuba naluphi na ulungiso okanye utshintsho lwenziwa ngokuchanekileyo. Ngononophelo olufanelekileyo, isiseko somatshini wegranite sinokuba yinxalenye ehlala ixesha elide nethembekileyo yeenkqubo zokucubungula i-wafer.
Ixesha lokuthumela: Novemba-07-2023