Ungazisebenzisa njani izinto zegranite kwinkqubo yokuvelisa i-semiconductor?

I-Granite yinto eqinileyo nehlala ixesha elide esetyenziswa rhoqo kwishishini lokwakha. Nangona kunjalo, ikwanazo iimpawu ezenza ukuba ibe luncedo kwimveliso ye-semiconductor, ngakumbi ekwenziweni nasekucutshungulweni kweesekethe ezidibeneyo. Izinto ze-granite, ezifana neetafile ze-granite kunye neebhloko ze-granite, zisetyenziswa kakhulu ngenxa yozinzo lwazo, ukuba zithe tyaba, kunye ne-coefficient ephantsi yokwandiswa kobushushu.

Enye yezona ndlela ziphambili zokusetyenziswa kwezixhobo zegranite kwimveliso ye-semiconductor kukwinkqubo yokwenziwa. Ii-silicon wafers, iibhloko zokwakha ezisisiseko zeesekethe ezidibeneyo, kufuneka zenziwe ngokuchanekileyo nangokuchaneka okuphezulu. Nakuphi na ukugqwetheka okanye intshukumo ngexesha lenkqubo kunokukhokelela kwiziphene ezinokuchaphazela umgangatho kunye nokusebenza kweesekethe ezidibeneyo. Iitafile zegranite, ezinozinzo oluphezulu kunye nokuthamba kwazo, zibonelela ngeqonga elifanelekileyo lezixhobo zokucubungula ii-wafer. Zikwamelana nokwanda kobushushu kunye nokucutheka okubangelwa kukufudumala nokupholisa okufunekayo kwinkqubo.

Iibhloko zegranite zikwasetyenziswa ekucubungulweni kwee-semiconductor ukuze zihlale ziqinile. Ngexesha leenkqubo zokugrumba okanye zokufaka, iigesi ezishushu okanye iiplasma zisetyenziselwa ukuguqula umphezulu we-silicon wafer. Ubushushu be-wafer kufuneka bulawulwe ukuqinisekisa ukuba inkqubo yenziwa ngokufanelekileyo nangokuchanekileyo. Iibhloko zegranite, ezinomlinganiselo wokwanda kobushushu obuphantsi, zinceda ekuzinziseni ubushushu be-wafer, zinciphisa umngcipheko wokuguquguquka kobushushu okunokuchaphazela umgangatho wezinto ezicutshungulwayo.

Ngaphandle kweenkqubo zokwenza nokucubungula, izinto zegranite zikwasetyenziswa kwizigaba zemetrology kunye nokuhlolwa kwemveliso ye-semiconductor. Ukulinganiswa kwemetrology kwenziwa ukuqinisekisa ukuba ubungakanani, imilo, kunye nendawo yezakhiwo kwi-wafer zingaphakathi kweenkcukacha ezifunekayo. Iibhloko zegranite zisetyenziswa njengemigangatho yokubhekisa kwezi zilinganiso ngenxa yokuzinza kwazo kunye nokuchaneka kwazo. Zikwasetyenziswa kwizigaba zokuhlola, apho umgangatho weesekethe ezidibeneyo ujongwa phantsi kokwandiswa okuphezulu.

Lilonke, ukusetyenziswa kwezixhobo zegranite kwimveliso ye-semiconductor kuye kwanda kwiminyaka yakutshanje. Imfuneko yokuchaneka okuphezulu, ukuchaneka, kunye nokuzinza ekwenziweni nasekucutshungulweni kweesekethe ezidibeneyo iqhubele phambili ukwamkelwa kwezi zinto ngabavelisi be-semiconductor. Iimpawu ezikhethekileyo zegranite, ezinje ngokuqina kwayo, ukuzinza, kunye ne-low thermal expansion coefficient, zenza ukuba ibe lukhetho oluhle kakhulu lokusetyenziswa kwezi nkqubo. Ngophuhliso oluqhubekayo kunye nokuphuculwa kwetekhnoloji ye-semiconductor, ukusetyenziswa kwezixhobo zegranite kulindeleke ukuba kukhule ngakumbi kwixesha elizayo.