I-Granite yinto enzima kunye neyomeleleyo ehlala isetyenziswa kwishishini lokwakha. Nangona kunjalo, ikwanazo neepropati ezenza ukuba zibe luncedo kwimveliso ye-semiconductor, ngakumbi ekwenziweni nasekuqhubeni iisekethe ezidibeneyo. Amacandelo e-granite, afana neetafile zegranite kunye neebhloko zegranite, zisetyenziselwa ngokubanzi ukuzinza kwazo, ukunyanzeliswa, kunye ne-coefficient ephantsi yokwandisa i-thermal.
Olunye lolona setyenziso luphambili lwamacandelo e-granite kwimveliso ye-semiconductor kwinkqubo yokwenziwa. I-Silicon wafers, iibhloko ezisisiseko zokwakha iisekethe ezidibeneyo, kufuneka zenziwe ngokuchaneka okuphezulu kunye nokuchaneka. Nakuphi na ukuphazamiseka okanye ukunyakaza ngexesha lenkqubo kunokukhokelela kwiziphene ezinokuchaphazela umgangatho kunye nokusebenza kweesekethe ezidibeneyo. Iitafile ze-Granite, kunye nokuzinza kwazo okuphezulu kunye ne-flatness, zibonelela ngeqonga elifanelekileyo lezixhobo zokucubungula i-wafer. Kwakhona zichasene nokwandiswa kwe-thermal kunye nokunciphisa okubangelwa ukufudumeza kunye nokupholisa okufunekayo kwinkqubo.
Iibhloko zeGranite nazo zisetyenziselwa ukusetyenzwa kwe-semiconductor ukuzinza kwazo kwe-thermal. Ngexesha le-etching okanye iinkqubo zokubeka, iigesi ezishushu okanye iiplasma zisetyenziselwa ukuguqula umphezulu we-silicon wafer. Ukushisa kwe-wafer kufuneka kulawulwe ukuqinisekisa ukuba inkqubo iqhutywe ngokufanelekileyo nangokuchanekileyo. Iibhloko ze-Granite, kunye ne-coefficient ephantsi yokwandisa i-thermal, inceda ukuzinzisa ubushushu be-wafer, ukunciphisa umngcipheko wokuguquguquka kweqondo lokushisa elinokuthi lichaphazele umgangatho wezinto ezicutshungulwayo.
Ngaphandle kwenkqubo yokwenziwa kunye nokucubungula, amacandelo e-granite nawo asetyenziswa kwi-metrology kunye nezigaba zokuhlola ukuveliswa kwe-semiconductor. Imilinganiselo ye-Metrology yenziwe ukuqinisekisa ukuba ubungakanani, imilo, kunye nokuma kwezakhiwo kwi-wafer ngaphakathi kweenkcukacha ezifunekayo. Iibhloko zeGranite zisetyenziswa njengemigangatho yereferensi kule milinganiso ngenxa yokuzinza kwazo kunye nokuchaneka kwazo. Zikwasetyenziselwa kwizigaba zokuhlola, apho umgangatho weesekethe ezidibeneyo zihlolwe phantsi kokukhulisa okuphezulu.
Ngokubanzi, ukusetyenziswa kwamacandelo e-granite kwimveliso ye-semiconductor kunyukile kwiminyaka yakutshanje. Isidingo sokuchaneka okuphezulu, ukuchaneka, kunye nokuzinza ekuqulunqweni nasekuqhutyweni kweesekethe ezidibeneyo kuye kwaqhuba ukwamkelwa kwezi zixhobo ngabavelisi be-semiconductor. Iimpawu ezikhethekileyo zegranite, ezifana nobunzima bayo, ukuzinza, kunye ne-coefficient yokwandisa i-thermal ephantsi, yenza kube yinto ekhethekileyo yokusetyenziswa kwezi nkqubo. Ngophuhliso oluqhubekayo kunye nokuphuculwa kweteknoloji ye-semiconductor, ukusetyenziswa kwamacandelo e-granite kulindeleke ukuba kukhule ngakumbi kwixesha elizayo.
Ixesha lokuposa: Dec-05-2023