Kwizixhobo zesemiconductor, zeziphi ii-subsystems ezingundoqo ezisetyenziswa kakhulu?

I-Granite yenye yezona zinto zidumileyo ezisetyenziswa kwizixhobo ze-semiconductor.Ludidi lwelitye eliqinileyo, elivutha umlilo eliza ngeendlela ezahlukeneyo ezingwevu, ezipinki namhlophe.I-Granite yaziwa ngokuhlala kwayo, i-coefficient yokwandisa i-thermal ephantsi, kunye ne-thermal conductivity egqwesileyo, iyenza ibe yinto efanelekileyo yokusetyenziswa kwi-subsystems yesixhobo se-semiconductor.

Enye yeendlela ezisezantsi ezisebenzisa igranite kwizixhobo zesemiconductor kukuphathwa kwewafer kunye nokusetyenzwa kwenkqubo engaphantsi.Le subsystem idlala indima ebalulekileyo kwinkqubo yokwenziwa kwezixhobo zesemiconductor.I-wafer sisiqalo se-substrate yesixhobo, kwaye i-subsystem yokuphatha kunye nokucubungula inoxanduva lokudlulisa ama-wafers phakathi kwamagumbi ahlukeneyo kunye nezixhobo zokusebenza.Igranite isetyenziselwa ukwenza imiphezulu yokuphatha echanekileyo kunye nesicaba kwaye ibonelela ngeqonga elizinzileyo lokusetyenzwa kwe-wafer.

Enye inkqubo esezantsi ebalulekileyo esebenzisa igranite yivacuum subsystem.Kwizixhobo ze-semiconductor, amagumbi okucoca asetyenziselwa ukuphepha ukungcola ngexesha lokuvelisa.Ukuze le nkqubo isebenze ngokufanelekileyo, igumbi kufuneka livalwe ngokupheleleyo, apho i-granite ingena khona.Ukongeza, ukuchaneka okuphezulu komatshini wegranite kuvumela ukuyilwa kwesitywina esigqibeleleyo, ukubonelela ngendawo enokuthenjwa yokucoca iwafer.

Isixokelelwano esisezantsi solungelelwaniso sesinye isixokelelwano esibalulekileyo esenza ukusetyenziswa kweempawu ezizodwa zegranite.Le subsystem inoxanduva lokulungelelanisa iindawo ezahlukeneyo zezixhobo ze-semiconductor ngokuchanekileyo kunye nokuchaneka.I-Granite isetyenziselwa ukuyila kunye nokwakhiwa kwezigaba zokulungelelanisa ukuqinisekisa ukuqina okuphezulu kunye nokuzinza.Ukuqina okuphezulu kwegranite kunceda ekufezekiseni ukuchaneka kokulungelelaniswa okuphezulu, okukhokelela ekuvelisweni kwezixhobo ezichanekileyo kunye nezithembekileyo ze-semiconductor.

Okokugqibela, isistim ye-metrology yenye inkqubo yezixhobo ze-semiconductor esebenzisa igraniti.I-Metrology idlala indima ebalulekileyo ekusetyenzweni kwe-wafer, kwaye ukuchaneka kwesi sistim ibaluleke kakhulu ekuqinisekiseni umgangatho wesixhobo.I-Granite inikezela ngeqonga elizinzile kwaye eliqinileyo elinceda ekunciphiseni ukungcangcazela kunye nokunciphisa umphumo wokuguquguquka kweqondo lokushisa.Oku, kwakhona, kunceda ekufezekiseni imilinganiselo echanekileyo kakhulu kwi-metrology subsystem, ekhokelela ekuvelisweni kwezixhobo eziphezulu ze-semiconductor.

Ukuqukumbela, igranite yimathiriyeli ebalulekileyo ekwenzeni izixhobo zesemiconductor.Iipropathi zayo ezizodwa ezinje ngokuqina okuphezulu, ukwandiswa kwe-thermal ephantsi, kunye nokuhanjiswa kwe-thermal okugqwesileyo kuyenza ibe yeyona nto ibalaseleyo kwiinkqubo ezisezantsi kwizixhobo ze-semiconductor, kubandakanya ukuphathwa kwe-wafer kunye nokusetyenzwa, isistim yokucoca, inkqubo engaphantsi yolungelelwaniso, kunye nenkqubo esezantsi ye-metrology.Ngaphezu koko, ukusetyenziswa kwegranite kwizixhobo ze-semiconductor kuye kwanceda ekuveliseni izixhobo ezichanekileyo, ezithembekileyo nezisebenzayo eziye zaguqula amashishini amaninzi.