Kwizixhobo ze-semiconductor, zeziphi iinkqubo ezingundoqo ezisetyenziswa kakhulu yi-granite?

I-Granite yenye yezona zinto zidumileyo ezisetyenziswa kwizixhobo ze-semiconductor. Luhlobo lwelitye eliqinileyo, eliyi-igneous eliza ngemibala eyahlukeneyo yengwevu, pinki, kunye nemhlophe. I-Granite yaziwa ngokuqina kwayo, i-thermal expansion coefficient ephantsi, kunye ne-thermal conductivity egqwesileyo, okwenza ukuba ibe yinto efanelekileyo yokusetyenziswa kwiinkqubo ezincinci zezixhobo ze-semiconductor.

Enye yeenkqubo eziphambili ezisebenzisa igranite kwizixhobo ze-semiconductor yinkqubo engaphantsi yokuphatha nokucubungula i-wafer. Le nkqubo idlala indima ebalulekileyo kwinkqubo yokuvelisa izixhobo ze-semiconductor. I-wafer sisixhobo sokuqala sesixhobo, kwaye inkqubo engaphantsi yokuphatha nokucubungula inoxanduva lokudlulisa ii-wafer phakathi kwamagumbi ahlukeneyo kunye nezixhobo zokucubungula. I-Granite isetyenziselwa ukudala iindawo zokuphatha ii-wafer ezichanekileyo nezithe tyaba kwaye ibonelela ngeqonga elizinzileyo lokucubungula ii-wafer.

Enye inkqubo engaphantsi ebalulekileyo esebenzisa igranite yinkqubo engaphantsi kwevacuum. Kwizixhobo ze-semiconductor, amagumbi okucoca asetyenziselwa ukuthintela ungcoliseko ngexesha lokwenziwa. Ukuze le nkqubo isebenze kakuhle, igumbi kufuneka livalwe ngokupheleleyo, apho igranite ingena khona. Igranite yinto efanelekileyo kumagumbi okucoca kuba inamazinga aphantsi kakhulu okukhupha igesi kwaye inokugcina indawo yokucoca ezinzileyo. Ukongeza, ukuchaneka okuphezulu kwegranite kuvumela ukudalwa kwetywina elifanelekileyo, okubonelela ngendawo yokucoca ethembekileyo yokucubungula i-wafer.

Inkqubo yokulungelelanisa yenye inkqubo ebalulekileyo esebenzisa iimpawu ezikhethekileyo zegranite. Le nkqubo inoxanduva lokulungelelanisa iindawo ezahlukeneyo zezixhobo ze-semiconductor ngokuchanekileyo nangokuchaneka. Igranite isetyenziswa kuyilo nasekwakhiweni kwezigaba zokulungelelanisa ukuqinisekisa ukuqina okuphezulu nokuzinza. Ukuqina okuphezulu kwegranite kunceda ekufezekiseni ukuchaneka okuphezulu kokulungelelanisa, okukhokelela ekuvelisweni kwezixhobo ze-semiconductor ezichanekileyo nezithembekileyo.

Okokugqibela, inkqubo engaphantsi kwe-metrology yenye inkqubo yezixhobo ze-semiconductor ezisebenzisa i-granite. I-Metrology idlala indima ebalulekileyo ekucutshungulweni kwe-wafer, kwaye ukuchaneka kwale nkqubo engaphantsi kubalulekile ekuqinisekiseni umgangatho wesixhobo. I-Granite ibonelela ngeqonga elizinzileyo neliqinileyo elinceda ekunciphiseni ukungcangcazela nokunciphisa impembelelo yokuguquguquka kobushushu. Oku, kunceda ekufezekiseni imilinganiselo echanekileyo kakhulu kwinkqubo engaphantsi kwe-metrology, nto leyo ekhokelela ekuvelisweni kwezixhobo ze-semiconductor ezikumgangatho ophezulu.

Ukuqukumbela, igranite yinto ebalulekileyo ekuvelisweni kwezixhobo ze-semiconductor. Iimpawu zayo ezikhethekileyo ezifana nokuqina okuphezulu, ukwanda kobushushu obuphantsi, kunye nokuqhuba kakuhle kobushushu kwenza ukuba ibe yinto efanelekileyo kwiinkqubo ezininzi zezixhobo ze-semiconductor, kubandakanya ukuphathwa kunye nokucubungula i-wafer, inkqubo encinci ye-vacuum, inkqubo encinci yokulungelelanisa, kunye nenkqubo encinci ye-metrology. Ngaphezu koko, ukusetyenziswa kwegranite kwizixhobo ze-semiconductor kuncede ekuvelisweni kwezixhobo ezichanekileyo kakhulu, ezinokuthenjwa nezisebenzayo ezitshintshe amashishini amaninzi.