Amaqonga okuchaneka kwegranite, anobulukhuni obuphezulu, i-coefficient yokwandisa ephantsi, ukusebenza kakuhle kokudambisa kunye neempawu zendalo zokulwa nemagnethi, anexabiso elingenakutshintshwa kwizicelo kwiindawo zokuvelisa eziphezulu kunye nophando lwesayensi apho ukuchaneka kunye nozinzo zifuneka kakhulu. Nazi iimeko eziphambili zesicelo sayo kunye neenzuzo zobugcisa:
I. Intsimi yezixhobo zokucubungula ezichanekileyo kakhulu
Izixhobo zokwenza i-semiconductor
Iimeko zokusetyenziswa: Itafile yomsebenzi womatshini weLithography, isiseko somatshini wokudaya i-wafer, iqonga lokubeka izixhobo zokupakisha.
Ixabiso lobuchwephesha:
I-coefficient yokwandiswa kobushushu begranite yi-(0.5-1.0) ×10⁻⁶/℃ kuphela, enokumelana nokuguquguquka kobushushu ngexesha lokuvezwa kwe-nanoscale komatshini we-lithography (impazamo yokufuduka < 0.1nm kwindawo eyi-±0.1℃).
Ulwakhiwo lwangaphakathi lwe-micro-pore lwenza i-damping yendalo (umlinganiselo we-damping ukusuka ku-0.05 ukuya ku-0.1), nto leyo ethintela ukungcangcazela (i-amplitude < 2μm) ngexesha lokusika ngesantya esiphezulu ngumatshini wokusika kunye nokuqinisekisa ukuba i-edge roughness Ra ye-wafer cutting ingaphantsi kwe-1μm.
2. Oomatshini Bokugaya Ngokuchanekileyo kunye nooMatshini Bokulinganisa Ngokuhambelana (CMM)
Ityala lesicelo:
Isiseko somatshini wokulinganisa onama-three-coordinate sisebenzisa isakhiwo segranite esidibeneyo, esinobucaba obuyi-±0.5μm/m. Xa sidityaniswe nomzila wesikhokelo ohamba emoyeni, sifikelela ekuchanekeni kwentshukumo yenqanaba le-nano (ukuchaneka kokubeka kwakhona ±0.1μm).
Itafile yokusebenza yomatshini wokusila obonakalayo isebenzisa isakhiwo esidityanisiweyo segranite kunye nentsimbi yesilivere. Xa kugaywa iglasi ye-K9, ubungqindilili bomphezulu bungaphantsi kwe-λ/20 (λ=632.8nm), nto leyo ehlangabezana neemfuno zokucubungula ezigudileyo kakhulu zeelensi zelaser.
Ii. Intsimi ye-Optics kunye ne-Photonics
Iiteleskopu zeenkwenkwezi kunye neenkqubo zelaser
Izicelo eziqhelekileyo:
Iqonga lokuxhasa umphezulu wokubonakalisa weteleskopu enkulu yerediyo lisebenzisa isakhiwo se-granite honeycomb, esikhaphukhaphu ngobunzima baso (ubuninzi obuyi-2.7g/cm³) kwaye sinokumelana okunamandla kokungcangcazela komoya (ukuguquguquka < 50μm phantsi komoya okwinqanaba le-10).
Iqonga le-optical le-laser interferometer lisebenzisa i-granite enemingxuma emincinci. I-reflector ilungiswa nge-vacuum adsorption, kunye ne-flatness error engaphantsi kwe-5nm, ukuqinisekisa uzinzo lwe-ultra-precision optical experiments ezifana ne-gravitational wave detection.
2. Ukucubungula ngokuchanekileyo kwecandelo le-optical
Iingenelo zobugcisa:
I-magnetic permeability kunye ne-electrical conductivity yeqonga le-granite zisondele kwi-zero, ziphepha impembelelo yokuphazamiseka kwe-electromagnetic kwiinkqubo zokuchaneka ezifana ne-ion beam polishing (IBF) kunye ne-magnetorheological polishing (MRF). Ixabiso le-PV lokuchaneka kobuso be-asphical lens ecutshungulwayo linokufikelela kwi-λ/100.
Iii. Uhlolo lweenqwelo-moya kunye nokuchaneka
Iqonga lokuhlola izinto zeenqwelomoya
Iimeko zokusetyenziswa: Ukuhlolwa kweebhleyidi zeenqwelo-moya okunemilinganiselo emithathu, ukulinganiswa kokumelana kwemilo kunye nendawo yezixhobo zesakhiwo se-aluminium alloy yeenqwelo-moya.
Ukusebenza okuphambili:
Umphezulu weqonga legranite uphathwa yi-electrolytic corrosion ukuze wenze iipateni ezincinci (ezinoburhabaxa beRa 0.4-0.8μm), ezifanelekileyo kwiiprobe ze-trigger ezichanekileyo, kwaye impazamo yokubona iprofayili yeblade ingaphantsi kwe-5μm.
Ingakwazi ukumelana nomthwalo wezinto zeenqwelo moya ezingaphezu kwama-200kg, kwaye utshintsho lokuthamba emva kokusetyenziswa ixesha elide lungaphantsi kwe-2μm/m, nto leyo ehlangabezana neemfuno zokugcinwa ngokuchanekileyo kweBanga le-10 kushishino lweenqwelo moya.
2. Ukulinganisa izixhobo zokuhamba ngesantya esisezantsi
Iimfuno zobugcisa: Ukulinganiswa okungaguqukiyo kwezixhobo ezingenamandla ezifana neegyroscopes kunye nee-accelerometers kufuna iqonga lesalathiso elizinzileyo kakhulu.
Isisombululo: Iqonga legranite lidityaniswe nenkqubo yokwahlulahlula ukungcangcazela esebenzayo (i-frequency yendalo < 1Hz), ifikelela ekulinganisweni okuchanekileyo okuphezulu kozinzo lwe-zero-offset lwezixhobo ze-inertial < 0.01°/h kwindawo enokukhawuleziswa kokungcangcazela < 1×10⁻⁴g.
Iv. I-Nanotechnology kunye ne-Biomedicine
Iqonga le-scan probe microscope (SPM)
Umsebenzi ongundoqo: Njengesiseko se-atomic force microscopy (AFM) kunye ne-scanning tunneling microscopy (STM), kufuneka yahlulwe kwiintshukumo zokusingqongileyo kunye nokushukuma kobushushu.
Izalathi zokusebenza:
Iqonga legranite, kunye nemilenze yokwahlulahlula ukungcangcazela kwe-pneumatic, linokunciphisa izinga lokudluliselwa kokungcangcazela kwangaphandle (1-100Hz) ukuya ngaphantsi kwe-5%, lifezekise umfanekiso we-atom-level ye-AFM kwindawo enomoya (resolution < 0.1nm).
Uvakalelo lobushushu lungaphantsi kwe-0.05μm/℃, nto leyo ehlangabezana neemfuno zokujonga iisampuli zebhayoloji nge-nanoscale kwindawo enobushushu obungaguqukiyo (37℃±0.1℃).
2. Izixhobo zokupakisha zeBiochip
Ityala lesicelo: Iqonga lokulungelelanisa elichanekileyo kakhulu leetships zokulandelelanisa i-DNA lisebenzisa iireli zesikhokelo ezintantayo emoyeni zegranite, ngokuchanekileyo kwindawo yazo ye-±0.5μm, ukuqinisekisa ukubopha kwe-sub-micron phakathi kwetshaneli ye-microfluidic kunye ne-electrode yokufumanisa.
V. Iimeko zeSicelo Esivelayo
Isiseko sezixhobo zekhompyutha ze-quantum
Imingeni yobuchwephesha: Ukulungiswa kweQubit kufuna amaqondo obushushu aphantsi kakhulu (inqanaba le-mK) kunye nendawo yoomatshini ezinzileyo kakhulu.
Isisombululo: Ipropati yokwandiswa kobushushu obuphantsi kakhulu yegranite (izinga lokwandiswa < 1ppm ukusuka kwi -200℃ ukuya kubushushu begumbi) inokufanisa iimpawu zokucutheka kweemagnethi ze-superconducting zobushushu obuphantsi kakhulu, ukuqinisekisa ukuchaneka kokulungelelaniswa ngexesha lokupakisha iitships ze-quantum.
2. Inkqubo ye-Electron Beam Lithography (EBL)
Ukusebenza okuphambili: Ipropati yokukhusela yeqonga legranite (resistivity > 10¹³Ω · m) ithintela ukusasazeka kwemitha ye-electron. Idityaniswe ne-electrostatic spindle drive, ifezekisa ukubhalwa kwepateni ye-lithography echanekileyo kakhulu enobubanzi bomgca we-nanoscale (< 10nm).
Isishwankathelo
Ukusetyenziswa kwamaqonga okuchaneka kwegranite kuye kwanda ukusuka kumatshini wokuchaneka wendabuko ukuya kwiindawo eziphambili ezifana ne-nanotechnology, i-quantum physics, kunye ne-biomedicine. Ukhuphiswano lwayo oluphambili luxhomekeke ekudibaneni okunzulu kweempawu zezinto kunye neemfuno zobunjineli. Kwixesha elizayo, ngokudityaniswa kwezobuchwepheshe bokuqinisa obudibeneyo (ezifana ne-graphene-granite nanocomposites) kunye neetekhnoloji zokuqonda ezikrelekrele, amaqonga egranite aya kuphuma kwiindlela zokuchaneka kwinqanaba le-athomu, ukuzinza komgangatho wobushushu obupheleleyo, kunye nokuhlanganiswa kwemisebenzi emininzi, zibe zizinto eziphambili ezixhasa isizukulwana esilandelayo sokuvelisa ngokuchanekileyo kakhulu.
Ixesha leposi: Meyi-28-2025