Izinto zegranite zisetyenziswa kakhulu kwishishini le-semiconductor ngenxa yeempawu zazo ezibalaseleyo, ezinje ngokuzinza okuphezulu, ukwanda okuphantsi kobushushu, kunye nokumelana okuphezulu nokugqwala. Ezi mpawu zenza igranite ibe yinto efanelekileyo yokwakha izinto ezichanekileyo kwinkqubo yokudlulisa i-wafer.
Kwinkqubo yokwenziwa kwe-semiconductor, inkqubo yokudluliselwa kwe-wafer idlala indima ebalulekileyo ekuthuthweni kwe-wafers kumanqanaba ahlukeneyo enkqubo yokwenziwa. Ukuchaneka nokuchaneka ziimfuno ezibalulekileyo kwezi nkqubo njengoko nokuba ukuphambuka okuncinci kunokubeka emngciphekweni yonke inkqubo. Ke ngoko, izinto ezikwinkqubo yokudluliselwa kwe-wafer kufuneka zenziwe ngezinto ezisemgangathweni ophezulu, kwaye i-granite iyahlangabezana nezo mfuno.
Ezinye iindawo zenkqubo yokudlulisa i-wafer ezenziwe ngezinto ze-granite ziquka:
1. Itafile ye-Vacuum Chuck
Itafile ye-vacuum chuck isetyenziselwa ukubamba i-wafer ngexesha lenkqubo, kwaye kufuneka ibe nomphezulu ozinzileyo ukuqinisekisa ukuba i-wafer ayonakalanga. I-Granite yinto efanelekileyo yokwenza le tafile kuba inomphezulu othe tyaba, ongenamibhobho obonelela ngozinzo oluphezulu kunye nokuchaneka. Ukongeza, i-granite inomlinganiselo ophantsi wokwanda kobushushu, okwenza ukuba imelane notshintsho lobushushu olunokubangela utshintsho kubukhulu be-wafer.
2. Inqanaba Lokuthwala Umoya
Isigaba esithwala umoya sisetyenziselwa ukuthutha i-wafer kwiinqanaba ezahlukeneyo zenkqubo yokwenziwa. Isigaba senzelwe ukubonelela ngentshukumo engenakuphikiswa, efuna ukuchaneka okuphezulu kunye nozinzo. I-granite isetyenziswa kwesi sicelo kuba lilitye eliqinileyo neliqinileyo, kwaye liyamelana nokuguquguquka kunye nokuguguleka ngokuhamba kwexesha.
3. Izikhokelo zeNdlela yokuHamba
Izikhokelo zokuhamba ezithe tye zisetyenziselwa ukukhokela inqanaba lokuthwala umoya, kwaye kufuneka zibekwe ngokuchanekileyo ukuze kuncitshiswe iimpazamo. I-granite isetyenziselwa ukwakha esi sikhokelo kuba inamandla okusebenza kakuhle kunye nokuqina. Le nto ikwamelana nokugqwala, nto leyo eqinisekisa ukuba inkqubo yesikhokelo ihlala ixesha elide.
4. Izixhobo zeMetrology
Izixhobo zeMetrology zisetyenziselwa ukulinganisa ubukhulu kunye neempawu zewafer ngexesha lenkqubo yokuvelisa. I-Granite yinto efanelekileyo yokwakha esi sixhobo kuba sinobunzima obuphezulu, ukwanda okuncinci, kunye nokuguquguquka okuncinci phantsi komthwalo. Ngaphezu koko, ukuzinza kobushushu begranite kuqinisekisa ukuba izixhobo zeMetrology zihlala zizinzile kwaye zichanekile ngokuhamba kwexesha.
Ukuqukumbela, ishishini le-semiconductor lixhomekeke ekuchanekeni nasekuchanekeni, kwaye izixhobo zegranite zibonakalise ukuba zithembekile kakhulu kwaye zizinzile kwinkqubo yokuvelisa. Ngenxa yezinto ezininzi ezibalulekileyo kwinkqubo yokudlulisa i-wafer ezifuna uzinzo oluphezulu, ukuchaneka, kunye nokwandiswa kobushushu obuphantsi, iinjineli ziye zasebenzisa izixhobo zegranite ukuze zihlangabezane nezi mfuno zibalulekileyo.
Ixesha leposi: Matshi-19-2024