Izinto ze-Granite zisetyenziswa ngokubanzi kwishishini le-semiconductor ngenxa yeempawu zabo ezintle, ezifana nokuzinza okuphezulu, ukwanda kwe-thermal ephantsi, kunye nokuchasana okuphezulu kwi-corrosion. Ezi zakhiwo zenza i-granite ibe yinto efanelekileyo yokwakha amacandelo achanekileyo kwindlela yokudlulisa i-wafer.
Kwinkqubo yokwenziwa kwe-semiconductor, inkqubo yokudluliselwa kwe-wafer idlala indima ebalulekileyo ekuthuthweni kweewafers kwizigaba ezahlukeneyo zenkqubo yokwenziwa. Ukuchaneka nokuchaneka zizinto eziyimfuneko ezifunekayo kwezi nkqubo njengoko ukutenxa nje okuncinci kunokubeka esichengeni yonke le nkqubo. Ke ngoko, amacandelo akwinkqubo yokuhanjiswa kwe-wafer kufuneka enziwe kwizinto ezikumgangatho ophezulu, kwaye igranite iyahlangabezana nezo migaqo.
Ezinye iinxalenye zenkqubo yokudluliselwa kwe-wafer ezenziwe ngezinto zegranite ziquka:
1. Vacuum Chuck Table
Itafile ye-vacuum chuck isetyenziselwa ukubamba i-wafer ngexesha lenkqubo, kwaye kufuneka ibe nomphezulu ozinzile ukuqinisekisa ukuba i-wafer ayonakaliswa. I-Granite yinto efanelekileyo yokwenza le tafile ngenxa yokuba inomhlaba osicaba, ongenayo i-porous enikezela ukuzinza okuphezulu kunye nokuchaneka. Ukongeza, i-granite ine-coefficient ephantsi yokwandiswa kwe-thermal, iyenza ixhathise utshintsho lweqondo lokushisa olunokubangela utshintsho lwe-dimensional kwi-wafer.
2. Inqanaba lokuBamba umoya
Inqanaba lokuthwala umoya lisetyenziselwa ukuthutha i-wafer ngokusebenzisa izigaba ezahlukeneyo zenkqubo yokuvelisa. Iqonga lenziwe ngobunjineli ukubonelela ngentshukumo engenamkhuhlane, efuna ukuchaneka okuphezulu kunye nokuzinza. I-Granite isetyenziswe kwesi sicelo kuba lilitye eliqinileyo kwaye liqinile, kwaye liyamelana ne-deformation kunye nokunxiba ngokuhamba kwexesha.
3. Izikhokelo zeMotion Linear
Izikhokelo ezihamba ngemigca zisetyenziselwa ukukhokela inqanaba lomoya, kwaye kufuneka zibekwe ngokuchanekileyo ukuze kuncitshiswe iimpazamo. I-Granite isetyenziselwa ukwakha esi sikhokelo kuba sinozinzo olubalaseleyo lomatshini kunye namandla. Izinto eziphathekayo nazo zi-corrosion-resistant, eziqinisekisa ixesha elide lenkqubo yesikhokelo.
4. Izixhobo zeMetrology
Izixhobo ze-Metrology zisetyenziselwa ukulinganisa imilinganiselo kunye neempawu ze-wafer ngexesha lenkqubo yokuvelisa. I-Granite yinto efanelekileyo yokwakha esi sixhobo kuba inokuqina okuphezulu, ukwanda okuphantsi, kunye nokuguqulwa okuncinci phantsi komthwalo. Ngaphezu koko, uzinzo lwe-thermal ye-granite iqinisekisa ukuba izixhobo ze-metrology zihlala zizinzile kwaye zichanekile ekuhambeni kwexesha.
Ukuqukumbela, ishishini le-semiconductor lithembele ekuchanekeni nasekuchanekeni, kwaye izinto zegranite zibonakalise ukuba zithembeke kakhulu kwaye zizinzile kwinkqubo yokwenziwa. Ngamacandelo amaninzi abalulekileyo kwinkqubo yokudluliselwa kwe-wafer efuna uzinzo oluphezulu, ukuchaneka, kunye nokwandiswa kwe-thermal ephantsi, iinjineli zijike kwizixhobo zegranite ukuhlangabezana nezi mfuno zibalulekileyo.
Ixesha lokuposa: Mar-19-2024