Izinto ze-Granite zisetyenziswa ngokubanzi kwishishini le-semiconductor ngenxa yeempawu zabo ezintle, ezifana nokuzinza okuphezulu, ukwanda kwe-thermal ephantsi, kunye nokuchasana okuphezulu kwi-corrosion.Ezi zakhiwo zenza i-granite ibe yinto efanelekileyo yokwakha amacandelo achanekileyo kwindlela yokudlulisa i-wafer.
Kwinkqubo yokwenziwa kwe-semiconductor, inkqubo yokudluliselwa kwe-wafer idlala indima ebalulekileyo ekuthuthweni kweewafers kwizigaba ezahlukeneyo zenkqubo yokwenziwa.Ukuchaneka nokuchaneka zizinto eziyimfuneko ezifunekayo kwezi nkqubo njengoko ukutenxa nje okuncinci kunokubeka esichengeni yonke le nkqubo.Ke ngoko, amacandelo akwinkqubo yokuhanjiswa kwe-wafer kufuneka enziwe kwizinto ezikumgangatho ophezulu, kwaye igranite iyahlangabezana nezo migaqo.
Ezinye iinxalenye zenkqubo yokudluliselwa kwe-wafer ezenziwe ngezinto zegranite ziquka:
1. Vacuum Chuck Table
Itafile ye-vacuum chuck isetyenziselwa ukubamba i-wafer ngexesha lenkqubo, kwaye kufuneka ibe nomphezulu ozinzile ukuqinisekisa ukuba i-wafer ayonakaliswa.I-Granite yinto efanelekileyo yokwenza le tafile ngenxa yokuba inomhlaba osicaba, ongenayo i-porous enikezela ukuzinza okuphezulu kunye nokuchaneka.Ukongeza, i-granite ine-coefficient ephantsi yokwandiswa kwe-thermal, iyenza ixhathise utshintsho lweqondo lokushisa olunokubangela utshintsho lwe-dimensional kwi-wafer.
2. I-Air-Bearing Stage
Inqanaba lokuthwala umoya lisetyenziselwa ukuthutha i-wafer ngokusebenzisa izigaba ezahlukeneyo zenkqubo yokuvelisa.Iqonga lenziwe ngobunjineli ukubonelela ngentshukumo engenamkhuhlane, efuna ukuchaneka okuphezulu kunye nokuzinza.I-Granite isetyenziswe kwesi sicelo kuba lilitye eliqinileyo kwaye liqinile, kwaye liyamelana ne-deformation kunye nokunxiba ngokuhamba kwexesha.
3. Izikhokelo zeMotion Linear
Izikhokelo ezihamba ngemigca zisetyenziselwa ukukhokela inqanaba lomoya, kwaye kufuneka zibekwe ngokuchanekileyo ukuze kuncitshiswe iimpazamo.I-Granite isetyenziselwa ukwakha esi sikhokelo kuba sinozinzo olubalaseleyo lomatshini kunye namandla.Izinto eziphathekayo nazo zi-corrosion-resistant, eziqinisekisa ixesha elide lenkqubo yesikhokelo.
4. Izixhobo zeMetrology
Isixhobo se-Metrology sisetyenziselwa ukulinganisa imilinganiselo kunye neempawu ze-wafer ngexesha lenkqubo yokuvelisa.I-Granite yinto efanelekileyo yokwakha esi sixhobo kuba inokuqina okuphezulu, ukwanda okuphantsi, kunye nokuguqulwa okuncinci phantsi komthwalo.Ngaphezu koko, uzinzo lwe-thermal ye-granite iqinisekisa ukuba izixhobo ze-metrology zihlala zizinzile kwaye zichanekile ekuhambeni kwexesha.
Ukuqukumbela, ishishini le-semiconductor lithembele ekuchanekeni nasekuchanekeni, kwaye izinto zegranite zibonakalise ukuba zithembeke kakhulu kwaye zizinzile kwinkqubo yokwenziwa.Ngamacandelo amaninzi abalulekileyo kwinkqubo yokudluliselwa kwe-wafer efuna uzinzo oluphezulu, ukuchaneka, kunye nokwandiswa kwe-thermal ephantsi, iinjineli zijike kwizixhobo zegranite ukuhlangabezana nezi mfuno zibalulekileyo.
Ixesha lokuposa: Mar-19-2024