Zeziphi iindawo zenkqubo yenkqubo yokuqhubela phambili zizixhobo ezisetyenziswayo?

Izinto zeGranite zisetyenziswa ngokubanzi kumzi-mveliso we-semicondcuctor ngenxa yeempawu zabo ezintle, ezinjengokuzinza okuphezulu, ukwanda komhlaba okuphantsi, kunye nokuxhathisa kakhulu. Ezi ndawo zibangela ukuba umxholo ofanelekileyo wokwakha izinto eziphezulu zokuchaneka kwinkqubo yokuhambisa i-wafer.

Kwinkqubo yokutsalela i-semiconductorctor, inkqubo yokuhamba efihlakeleyo idlala indima ebalulekileyo ekuthuthani ii-wafr kumanqanaba ohlukeneyo enkqubo yokwenziwa kwemveliso. Ukuchaneka kunye nokuchanekayo ziimfuno ezibalulekileyo kwezi nkqubo ngokuchasene nokuncinci okuncinci kunokubeka emngciphekweni yonke inkqubo. Ke ngoko, izinto kwiNkqubo yokuHanjiswa kweShiti kufuneka zenziwe kwizixhobo ezisemgangathweni eziphezulu, kwaye uGranite uhlangabezana neekhrayitheriya.

Ezinye iindawo zenkqubo yokuqhubela phambili ye-wafer of Effeed kwizinto zeGranite zibandakanya:

I-1. Itheyibhile ye-vacuum chuck

Itheyibhile ye-vacuum ye-vacuum isetyenziselwa ukubamba i-wafer ngexesha lenkqubo, kwaye kufuneka ibe nomphezulu ozinzileyo wokuqinisekisa ukuba i-wafer ayiyonakalisi. I-Granite yeyona nto ifanelekileyo yokwenza le tafile kuba inomphezulu, ongenantlonelo onikezela uzinzo oluphezulu kunye nokuchaneka ngokuchanekileyo. Ukongeza, i-granite ine-coanded ephantsi yolwandiso lwe-thermal, lenza ukuba kunganyangeki kutshintsho lobushushu olunokubangela utshintsho olunokubangela utshintsho kwi-wafer.

I-2. Inqanaba lokuthwala umoya

Inqanaba lokuzala lisetyenziselwa ukuthutha i-wafer ngamanqanaba ahlukeneyo enkqubo yokwenziwa. Inqanaba ligqwetha lokubonelela ngentshukumo engenamsebenzi, efuna ukuchaneka okuphezulu kunye nozinzo. IGranite isetyenziswa kwesi sicelo kuba lilitye eliqinileyo nelukhuni, kwaye liyayiphepha ngokugqithisileyo kwaye linxibe ixesha elingaphezulu.

3. Isikhokelo sokuhamba ngendlela

Isikhokelo sokuhamba esinentambo sisetyenziselwa ukukhokela inqanaba lokuthwala umoya, kwaye kufuneka kubekwe ngokuchanekileyo ukunciphisa iimpazamo. IGranite isetyenziselwa ukwakha esi sikhokelo kuba inozinzo oluhle kakhulu kunye namandla. Lo mbandela uphakathi-ngokunganyangekiyo, okuqinisekisa ukuba lubomi benkqubo yesikhokelo.

4. Izixhobo zeMetrology

Izixhobo zeMetrology zisetyenziselwa ukulinganisa ubungakanani kunye neepropathi zesikhubekiso ngexesha lemveliso yokwenziwa. IGranite yeyona nto ifanelekileyo yokwakha izixhobo kuba inolukhuni oluphezulu, ukwanda okuphantsi, kunye nokusebenza okuncinci phantsi komthwalo. Ngaphaya koko, ukuzinza kwe-Granite kuqinisekisa ukuba izixhobo ze-Metrology zihlala zizinzile kwaye zichanekile ngokuhamba kwexesha.

Ukuqukumbela, ishishini le-semicondcuctor lixhomekeke ngokuchaneka kunye nokuchaneka, kunye nezinto ezingcwele zingqineke zithembekile kwaye zizinzile kwinkqubo yokuphucula. Ngamacandelo amaninzi amanqatha kwi-wafe system system efuna uzinzo oluphezulu, ukuchaneka, kunye nokwanda komhlaba ophantsi, iinjineli ziye zaguqulela izilwanyana ezihlekisayo zokufezekisa ezi mfuno zibaluleke kakhulu.