Ibhedi yegranite yinxalenye ebalulekileyo kwizixhobo ezahlukeneyo ze-semiconductor. Njengento ezinzileyo kakhulu neqinileyo, igranite isetyenziswa kakhulu njengesiseko sezixhobo zokucubungula i-semiconductor. Ibonakaliswa yi-coefficient yayo yokwandisa ubushushu obuphantsi, uzinzo oluphezulu, kunye neempawu ezintle zoomatshini. Ngenxa yezi mpawu, ibhedi yegranite isetyenziswa kakhulu kwiintlobo ezintathu ezahlukeneyo zezixhobo ze-semiconductor - izixhobo ze-metrology, izixhobo ze-lithography, kunye nezixhobo zokuhlola.
Izixhobo zeMetrology zisetyenziselwa ukulinganisa nokubona ubungakanani obubalulekileyo bezixhobo ze-semiconductor. Zidlala indima ebalulekileyo ekugcineni umgangatho kunye nokuhambelana kwenkqubo yokwenziwa kwe-semiconductor. Izixhobo zeMetrology ziquka izixhobo ezifana nee-optical microscopes, ii-electron microscopes, kunye nee-atomic force microscopes (AFMs). Ekubeni ukusebenza kwezi zixhobo zokulinganisa kuxhomekeke ekuzinzeni kwazo, ukuchaneka, kunye nokumelana nokungcangcazela, i-granite yeyona ndlela ifanelekileyo yezinto zazo zebhedi. Ukufana kunye nokuzinza kwebhedi yegranite kubonelela ngeqonga elizinzileyo lezixhobo, eliphucula ukuchaneka kunye nokuthembeka kwazo.
Izixhobo zeLithography zisetyenziselwa ukwenza iipateni ze-microchip kwi-wafer. Inkqubo ye-lithography ifuna inqanaba eliphezulu lokuchaneka kunye nokuchaneka ukudala iisekethe ezintsonkothileyo kunye nokuphucula ukusebenza kwe-chip. Izixhobo ze-lithography ziquka iinkqubo ze-stepper kunye ne-scanner ezisebenzisa ukukhanya ukuhambisa imifanekiso kwi-wafer. Njengoko inkqubo ye-lithography ivakalelwa kakhulu kukungcangcazela kunye notshintsho lobushushu, ibhedi esemgangathweni ophezulu ibalulekile ukuqinisekisa uzinzo kunye nokuphindaphindwa kwenkqubo ye-lithography. Iibhedi ze-granite zibonelela ngozinzo olufunekayo kunye nokusebenza okungqongqo kwe-vibration damping kwiinkqubo ze-lithography. Ibhedi ye-granite ivumela inkqubo ye-stepper okanye ye-scanner ukuba igcine ubudlelwane obuchanekileyo bendawo ukuqinisekisa ukuchaneka okuphezulu kunye nomgangatho wokugqibela wemveliso.
Izixhobo zokuhlola zisetyenziselwa ukubona naziphi na iziphene kwizixhobo ze-semiconductor. Izixhobo zokuhlola ziquka iinkqubo ezifana nee-microscopes ze-laser scanning, ii-electron microscopes, kunye nee-optical microscopes. Ngenxa yokuba ezi zixhobo zifuna ukuba zichaneke kakhulu, zizinzile kwaye zingashukumi, ii-granite beds zezona zinto zifanelekileyo. Iimpawu zoomatshini zeGranite kunye nozinzo olulinganayo zinceda ekuhlukaniseni ukushukuma, okuphucula ukuchaneka kwemveliso yezixhobo zokuhlola.
Ukuqukumbela, ibhedi yegranite ibalulekile kwishishini le-semiconductor kwaye isetyenziswa kakhulu kwiintlobo ngeentlobo zezixhobo. Iimpawu zayo ezikhethekileyo ezifana nokuzinza kobukhulu, i-coefficient yokwandisa ubushushu obuphantsi, kunye nokuzinza okugqwesileyo koomatshini kwenza i-granite ibe lukhetho olufanelekileyo kwizixhobo zebhedi zezixhobo ze-semiconductor. Njengoko ibhedi yegranite esemgangathweni ophezulu inika uzinzo olufunekayo, ukuchaneka, kunye nokumelana nokungcangcazela kwizixhobo ze-semiconductor, ekugqibeleni iphucula umgangatho wemveliso yokugqibela. Ke ngoko, ukusetyenziswa kwebhedi yegranite kwizixhobo ze-semiconductor ngokuqinisekileyo kuya kuqhubeka iminyaka ezayo.
Ixesha lokuthumela: Epreli-03-2024