Ibhedi yeGranite iyinxalenye ebalulekileyo kwizixhobo ezahlukeneyo ze-semiconductor.Njengemathiriyeli ezinzile kwaye eqinile, igranite isetyenziswa ngokubanzi njengesiseko sezixhobo zokusetyenzwa kwe-semiconductor.Ibonakaliswa ngumlinganiso ophantsi wokwandiswa kwe-thermal, uzinzo oluphezulu lwe-dimensional, kunye neempawu ezibalaseleyo zoomatshini.Ngenxa yezi zakhiwo, ibhedi yegranite isetyenziswa kakhulu kwiindidi ezintathu ezahlukeneyo zezixhobo zesemiconductor - izixhobo zemetrology, izixhobo zelithography, kunye nezixhobo zokuhlola.
Isixhobo se-Metrology sisetyenziselwa ukulinganisa kunye nokufumanisa imilinganiselo ebalulekileyo yezixhobo ze-semiconductor.Idlala indima ebalulekileyo ekugcineni umgangatho kunye nokuhambelana kwenkqubo yokwenziwa kwe-semiconductor.Izixhobo ze-Metrology ziquka izixhobo ezifana ne-optical microscopes, i-electron microscopes, kunye ne-atomic force microscopes (AFMs).Ekubeni ukusebenza kwezi zixhobo zokulinganisa kuxhomekeke ekuzinzeni kwazo, ukuchaneka, kunye nokuxhathisa ukungcangcazela, i-granite yinto efanelekileyo yokukhetha izinto zabo zokulala.Ukufana kunye nokuzinza kwebhedi ye-granite kunika iqonga elizinzile lezixhobo, eziphakamisa ukuchaneka kwazo kunye nokuthembeka.
Isixhobo se-Lithography sisetyenziselwa ukwenza iipateni ze-microchip kwi-wafer.Inkqubo ye-lithography idinga izinga eliphezulu lokuchaneka kunye nokuchaneka ukudala iisekethe eziyinkimbinkimbi kunye nokuphucula ukusebenza kwe-chip.Izixhobo ze-lithography zibandakanya i-stepper kunye ne-scanner iinkqubo ezisebenzisa ukukhanya ukuhambisa imifanekiso kwi-wafer.Njengoko inkqubo ye-lithography inomdla kakhulu kwi-vibration kunye notshintsho lwe-thermal, ibhedi ephezulu ibalulekile ukuqinisekisa ukuzinza kunye nokuphindaphinda kwenkqubo ye-lithography.Iibhedi zegranite zibonelela ngozinzo olufunekayo kunye nokusebenza okungqongqo kwe-vibration damping kwiinkqubo zelithography.Ibhedi yegranite ivumela i-stepper okanye inkqubo yeskena ukugcina ubudlelwane obuchanekileyo besithuba esiqinisekisa ukuchaneka okuphezulu kunye nomgangatho wokugqibela wemveliso.
Izixhobo zokuhlola zisetyenziselwa ukukhangela naziphi na iziphene kwizixhobo ze-semiconductor.Izixhobo zokuhlola ziquka iinkqubo ezifana ne-laser scanning microscopes, i-electron microscopes, kunye ne-optical microscopes.Ngesidingo sokuba ezi zixhobo zichaneke kakhulu, zizinzile kwaye zikwazi ukungcangcazela, iibhedi zegranite zizinto ezifanelekileyo.Iipropati ze-Granite ze-mechanical kunye nokuzinza kwe-dimensional zinceda kwi-vibration yodwa, ephucula ukuchaneka kwemveliso yezixhobo zokuhlola.
Ukuqukumbela, ibhedi yegranite ibalulekile kwishishini le-semiconductor kwaye isetyenziswa ngokubanzi kwiintlobo ezahlukeneyo zezixhobo.Iipropathi zayo ezizodwa ezinjengozinzo lwe-dimensional, i-coefficient ephantsi yokwandiswa kwe-thermal, kunye nokuzinza okugqwesileyo komatshini kwenza i-granite ibe lolona khetho lufanelekileyo lwempahla yebhedi yezixhobo ze-semiconductor.Njengoko ibhedi ephezulu yegranite ibonelela uzinzo oluyimfuneko, ukuchaneka, kunye nokuxhathisa ukungcangcazela kwisixhobo se-semiconductor, ekugqibeleni iphucula umgangatho wemveliso yokugqibela.Ke ngoko, ukusetyenziswa kwebhedi yegranite kwizixhobo ze-semiconductor ngokuqinisekileyo kuya kuqhubeka iminyaka ezayo.
Ixesha lokuposa: Apr-03-2024