Imigangatho yokuvavanya izixhobo zegranite ngokuchanekileyo
Umgangatho wokuchaneka kobukhulu
Ngokwemigaqo efanelekileyo yoshishino, ukunyamezelana okubalulekileyo kwezixhobo zokuchaneka kwegranite kufuneka kulawulwe ngaphakathi koluhlu oluncinci kakhulu. Ukuthatha iqonga lokulinganisa igranite eliqhelekileyo njengomzekelo, ukunyamezelana kobude nobubanzi balo kuphakathi kwe-±0.05mm kunye ne-±0.2mm, kwaye ixabiso elithile lixhomekeke kubukhulu becandelo kunye neemfuno zokuchaneka kwesimo sesicelo. Umzekelo, kwiqonga lokugaya ilensi ye-optical echanekileyo kakhulu, ukunyamezelana okulinganayo kunokulawulwa kwi-±0.05mm, ngelixa ukunyamezelana okulinganayo kweqonga lokuhlola i-machining ngokubanzi kunokuncitshiswa ukuya kwi-±0.2mm. Kwimilinganiselo yangaphakathi efana nokuvula kunye nobubanzi besloti, ukuchaneka kokunyamezela nako kungqongqo, njengomngxuma wokufaka kwisiseko segranite osetyenziselwa ukufaka i-precision sensor, ukunyamezelana kokuvuleka kufuneka kulawulwe kwi-±0.02mm ukuqinisekisa ukuchaneka kunye nokuzinza kofakelo lwe-sensor.
Umgangatho wokutyibilika
Ukuthe tyaba luphawu olubalulekileyo lwezinto ezichanekileyo zegranite. Ngokomgangatho wesizwe/waseJamani, ukunyamezelana kokuthe tyaba kwamanqanaba ahlukeneyo okuchaneka kweqonga legranite kuchazwe ngokucacileyo. Ukunyamezelana kokuthe tyaba kweqonga leklasi 000 kubalwa njenge-1×(1 + d/1000)μm (d bubude obuthe tyaba, iyunithi mm), 2×(1 + d/1000)μm kwiklasi 00, 4×(1 + d/1000)μm kwiklasi 0, kunye ne-8×(1 + d/1000)μm kwiklasi 1. Umzekelo, iqonga legranite leKlasi 00 eline-diagonal ye-1000mm linokunyamezelana kokuthe tyaba kwe-2×(1 + 1000/1000)μm = 4μm. Kwizicelo ezisebenzayo, ezifana neqonga le-lithography kwinkqubo yokwenziwa kweetships ze-elektroniki, kudla ngokufuneka ukuba kuhlangatyezwane nomgangatho we-000 okanye we-00 level flatness ukuqinisekisa ukuchaneka kwendlela yokusasazwa kokukhanya kwinkqubo ye-chip lithography kunye nokuphepha ukuphazamiseka kwepateni ye-chip okubangelwa yimpazamo ye-platform flatness.
Umgangatho woburhabaxa bomphezulu
Uburhabaxa bomphezulu wezinto ezichanekileyo zegranite buchaphazela ngokuthe ngqo ukuchaneka kunye nokusebenza okulinganayo nezinye izinto. Kwiimeko eziqhelekileyo, uburhabaxa bomphezulu iRa yeqonga legranite elisetyenziselwa izinto ezibonakalayo kufuneka lifikelele kwi-0.1μm-0.4μm ukuqinisekisa ukuba izinto ezibonakalayo zinokugcina ukusebenza kakuhle kwe-optical emva kokufakwa kwaye zinciphise ukusasazeka kokukhanya okubangelwa yimiphezulu engalinganiyo. Kwiqonga eliqhelekileyo legranite elisetyenziselwa uvavanyo lwemishini, uburhabaxa bomphezulu iRa bunokuncitshiswa ukuya kwi-0.8μm-1.6μm. Uburhabaxa bomphezulu buhlala bubonwa ngokusebenzisa izixhobo zobungcali ezifana neprofayili, egqiba ukuba ixabiso loburhabaxa bomphezulu liyahlangabezana nomgangatho ngokulinganisa ukuphambuka okuphakathi kwe-arithmetic yeprofayili yemicroscopic yomphezulu.
Imigangatho yokuchonga iziphene zangaphakathi
Ukuze kuqinisekiswe umgangatho wangaphakathi wezinto ezichanekileyo zegranite, kuyimfuneko ukufumanisa ngokungqongqo iziphene zazo zangaphakathi. Xa kusetyenziswa uvavanyo lwe-ultrasonic, ngokwemigangatho efanelekileyo, xa kufunyaniswa ukuba kukho imingxunya, imifantu kunye nezinye iziphene ezingaphezulu kobukhulu obuthile (njengobubanzi obungaphezulu kwe-2mm), inxalenye igwetywa njengengafanelekanga. Kuhlolo lwe-X-ray, ukuba umfanekiso we-X-ray ubonisa iziphene zangaphakathi eziqhubekayo ezichaphazela amandla olwakhiwo lwenxalenye, njengeziphene ezithe ngqo ezinobude obungaphezulu kwe-10mm okanye iziphene ezinzulu ezinommandla ongaphezulu kwe-50mm², inxalenye ayihlangabezani nomgangatho womgangatho. Ngokusebenzisa ngokungqongqo le migangatho, inokuziphepha ngempumelelo iingxaki ezinzulu ezifana nokuqhekeka kwezixhobo ezibangelwa ziziphene zangaphakathi ngexesha lokusetyenziswa, kwaye iqinisekise ukhuseleko lokusebenza kwezixhobo kunye nokuzinza komgangatho wemveliso.
Uyilo lwesisombululo sokuhlolwa kwemizi-mveliso
Ukuhlanganiswa kwezixhobo zokulinganisa ngokuchanekileyo okuphezulu
Ukuze koyiswe ingxaki yokufumanisa i-granite ngokuchanekileyo kwecandelo, kuyimfuneko ukwazisa izixhobo zokulinganisa eziphambili. I-laser interferometer inobuchane obuphezulu kakhulu ngobude kunye nomlinganiselo we-Angle, kwaye inokulinganisa ngokuchanekileyo ubukhulu obuphambili bezinto ze-granite, kwaye ukuchaneka kwayo kokulinganisa kunokufikelela kwi-nanometers, ezinokuhlangabezana ngempumelelo neemfuno zokufumanisa zokunyamezelana okuchanekileyo. Kwangaxeshanye, inqanaba le-elektroniki lingasetyenziselwa ukulinganisa ngokukhawuleza nangokuchanekileyo ubucaba bezinto ze-granite zeqonga, ngokulinganisa amanqaku amaninzi kwaye kudityaniswe ne-algorithms yobungcali, inokuzoba iprofayili echanekileyo yobucaba, ukuchaneka kokufumanisa ukuya kuthi ga kwi-0.001mm/m. Ukongeza, iskena se-3D optical sinokuskena ngokukhawuleza umphezulu ontsonkothileyo wecandelo le-granite ukuvelisa imodeli epheleleyo enemilinganiselo emithathu, enokubona ngokuchanekileyo ukuphambuka kwesimo ngokuthelekisa nemodeli yoyilo, inika inkxaso epheleleyo yedatha yovavanyo lomgangatho wemveliso.
Ukusetyenziswa kwetekhnoloji yovavanyo olungonakalisiyo
Ngenxa yengozi enokubakho yeziphene zegranite yangaphakathi ekusebenzeni kwecandelo, uvavanyo olungonakalisiyo lubalulekile. Isixhobo sokubona iziphene se-ultrasonic sinokukhupha i-ultrasound ephindaphindayo, xa igagasi lesandi lidibana nemingxunya, imingxunya kunye nezinye iziphene ngaphakathi kwegranite, siya kubonakalisa kwaye sisasazeke, ngokuhlalutya isignali yamaza ebonakalisiweyo, sinokugweba ngokuchanekileyo indawo, ubungakanani kunye nokuma kwesiphene. Ukuze kufunyanwe iziphene ezincinci, iteknoloji yokubona iziphene ze-X-ray iluncedo ngakumbi, inokugqobhoza izinto zegranite ukuze yenze umfanekiso wesakhiwo sangaphakathi, ibonisa ngokucacileyo iziphene ezingabonakaliyo ezinzima ukubonwa ngamehlo enyama, ukuqinisekisa ukuba umgangatho wangaphakathi wecandelo uthembekile.
Inkqubo yesoftware yokubhaqa ekrelekrele
Inkqubo yesoftware enamandla yokufumanisa ekrelekrele yeyona nto iphambili kwisisombululo sonke. Inkqubo inokushwankathela, ihlalutye kwaye icwangcise idatha eqokelelwe zizo zonke iintlobo zezixhobo zokuvavanya ngexesha langempela. Isebenzisa ii-algorithms zobukrelekrele bokwenziwa, isoftware inokuchonga ngokuzenzekelayo iimpawu zedatha kwaye imisele ukuba izixhobo zegranite ziyahlangabezana nemigangatho yomgangatho, iphucula kakhulu ukusebenza kakuhle kokufumanisa kunye nokuchaneka. Umzekelo, ngokuqeqesha idatha eninzi yokuhlolwa ngeemodeli zokufunda ezinzulu, isoftware inokuchonga ngokukhawuleza nangokuchanekileyo uhlobo kunye nobunzima beziphene zomphezulu, iphephe ukugweba okungalunganga okubangelwa kukutolikwa ngesandla. Kwangaxeshanye, inkqubo yesoftware inokuvelisa ingxelo yovavanyo eneenkcukacha, irekhode idatha yovavanyo kunye neziphumo zecandelo ngalinye, elilungele amashishini ukuqhuba ukulandelelwa nokulawulwa komgangatho.
Iingenelo ze-ZHHIMG kwizisombululo zokuhlola
Njengenkokeli kushishino, i-ZHHIMG iqokelele amava atyebileyo kwicandelo lokuhlolwa kwe-granite ngokuchanekileyo kwecandelo. Le nkampani ineqela le-R & D eliqeqeshiweyo, elihlala lizinikele ekuveliseni nasekuphuculeni itekhnoloji yokuvavanya, ngokweemfuno ezikhethekileyo zabathengi, izisombululo zokuvavanya ezenzelwe wena. I-ZHHIMG izise izixhobo zokuvavanya eziphambili zamazwe ngamazwe kwaye yaseka inkqubo yokulawula umgangatho engqongqo ukuqinisekisa ukuba uvavanyo ngalunye lunokufikelela kwinqanaba eliphezulu kushishino. Ngokuphathelele iinkonzo, inkampani ibonelela ngeenkonzo zokumisa kanye ukusuka kuyilo lweskimu sokuvavanya, ukufakwa kwezixhobo kunye nokunika abasebenzi uqeqesho ukuqinisekisa ukuba abathengi banokusebenzisa izisombululo zokuvavanya ngokutyibilikayo kunye nokuphucula amandla okulawula umgangatho wemveliso.
Ixesha leposi: Matshi-24-2025