Imigangatho yovavanyo lwamacandelo egranite
Umgangatho wokuchaneka komda
Ngokwemigaqo yoshishino olufanelekileyo, ukunyamezela komgangatho ongundoqo wamacandelo achanekileyo egranite kufuneka alawulwe kuluhlu oluncinci kakhulu. Ukuthatha iqonga eliqhelekileyo lokulinganisa i-granite njengomzekelo, ubude bayo kunye nokunyamezela kobubanzi phakathi kwe-± 0.05mm kunye ne-± 0.2mm, kwaye ixabiso elithile lixhomekeke kubukhulu becandelo kunye neemfuno zokuchaneka kwesicelo sesicelo. Ngokomzekelo, kwiplatifomu yokugaya i-lens ye-optical high-precision, ukunyamezela kwe-dimensional kunokulawulwa kwi-± 0.05mm, ngelixa ukunyamezela kwe-dimensional ye-platform yokuhlola i-machining jikelele kunokukhululeka kwi-± 0.2mm. Kwimilinganiselo yangaphakathi efana ne-aperture kunye nobubanzi be-slot, ukuchaneka kokunyamezela kungqongqo, njengomgodi wokunyuka kwisiseko se-granite esisetyenziselwa ukufakela i-sensor echanekileyo, ukunyamezela kwe-aperture kufuneka kulawulwe kwi-± 0.02mm ukuqinisekisa ukuchaneka kunye nokuzinza kofakelo lwenzwa.
Umgangatho wokucaba
I-Flatness isalathiso esibalulekileyo samacandelo e-granite echanekileyo. Ngokomgangatho wesizwe / umgangatho waseJamani, ukunyamezela ukunyanzeliswa kwemigangatho echanekileyo yeqonga legranite lichazwe ngokucacileyo. Ukunyamezela flatness yeqonga iklasi 000 ibalwa njengoko 1× (1 + d/1000)μm (d ubude diagonal, iyunithi mm), 2× (1 + d/1000)μm iklasi 00, 4× (1 + d/1000)μm iklasi 0, kunye 8 μd/1 0 . I-platform ye-00 ye-granite ene-diagonal ye-1000mm inokunyamezela ukunyamezela kwe-2× (1 + 1000/1000)μm = 4μm. Kwizicelo ezisebenzayo, ezifana neqonga le-lithography kwinkqubo yokwenziwa kweetshiphu ze-elektroniki, ngokuqhelekileyo kuyafuneka ukuba kuhlangatyezwane nomgangatho we-000 okanye we-00 we-flatness umgangatho wokuqinisekisa ukuchaneka kwendlela yokusabalalisa ukukhanya kwinkqubo ye-chip lithography kwaye ugweme ukuphazamiseka kwepatheni ye-chip okubangelwa yimpazamo ye-flatness yeqonga.
Uburhabaxa bomgangatho womphezulu
Ubunzima bomphezulu wamacandelo e-granite achanekileyo achaphazela ngokuthe ngqo ukuchaneka kokuchaneka kunye nokusebenza kunye namanye amacandelo. Kwiimeko eziqhelekileyo, uburhabaxa bomphezulu uRa weqonga legranite elisetyenziselwa amacandelo optical kufuneka lifikelele kwi-0.1μm-0.4μm ukuze kuqinisekiswe ukuba amacandelo okukhanya anokugcina ukusebenza kakuhle kwe-optical emva kokufakwa kunye nokunciphisa ukusasazeka kokukhanya okubangelwa yimihlaba engalinganiyo. Kwiqonga legranite eliqhelekileyo elisetyenziselwa ukuvavanywa komatshini, uburhabaxa bomphezulu beRa bunokukhululeka ukuya kwi-0.8μm-1.6μm. Uburhabaxa bomphezulu buqhele ukubonwa ngokusebenzisa izixhobo zobuchwephesha ezifana neprofayili, emisela ukuba ixabiso lomphezulu woburhabaxa liyahlangabezana nomgangatho ngokulinganisa i-arithmetic ithetha ukutenxa kwiprofayili yomphezulu wemicroscopic.
Imigangatho yokufumanisa isiphene sangaphakathi
Ukuze kuqinisekiswe umgangatho wangaphakathi wamacandelo e-granite echanekileyo, kuyimfuneko ukufumanisa ngokungqongqo iziphene zabo zangaphakathi. Xa usebenzisa ukuhlolwa kwe-ultrasonic, ngokwemigangatho echaphazelekayo, xa kufunyaniswa ukuba kukho imingxuma, ukuqhekeka kunye nezinye iziphene ezinkulu kunobukhulu obuthile (ezifana nobubanzi obungaphezu kwe-2mm), icandelo ligwetywa njengento engafanelekanga. Kuhlolo lwe-X-reyi, ukuba umfanekiso we-X-reyi ubonisa iziphene eziqhubekayo zangaphakathi ezichaphazela amandla esakhiwo secandelo, njengeziphene zomgca ezinobude obungaphezulu kwe-10mm okanye iziphene ezinzulu ezinommandla ongaphezulu kwe-50mm², icandelo nalo aliwufikeleli umgangatho womgangatho. Ngokuphunyezwa ngokungqongqo kwale migangatho, inokuphepha ngokufanelekileyo iingxaki ezinzulu ezifana nokuqhekeka kwamacandelo okubangelwa iziphene zangaphakathi ngexesha lokusetyenziswa, kwaye uqinisekise ukhuseleko lwezixhobo zokusebenza kunye nokuzinza komgangatho wemveliso.
Uyilo lwesisombululo sokuhlolwa kwemizi-mveliso
Ukuhlanganiswa kwezixhobo zokulinganisa ukuchaneka okuphezulu
Ukuze ukwazi ukoyisa ingxaki yecandelo lokuchaneka kwegranite, kuyimfuneko ukwazisa izixhobo zokulinganisa eziphambili. I-interferometer ye-laser inokuchaneka okuphezulu kakhulu kubude kunye nokulinganisa kwe-Angle, kwaye inokulinganisa ngokuchanekileyo imilinganiselo ephambili yamacandelo e-granite, kunye nokuchaneka kokulinganisa kwayo kunokufikelela kwii-nanometers, ezinokuthi zifezekise ngokufanelekileyo iimfuno zokufumanisa ukunyamezela okuphezulu kwe-dimensional. Ngexesha elifanayo, inqanaba le-elektroniki lingasetyenziselwa ukukhawuleza kunye ngokuchanekileyo ukulinganisa i-flatness yamacandelo e-granite yesikhulumi, ngokusebenzisa umlinganiselo wamanqaku amaninzi kunye nokudibanisa ne-algorithms yobugcisa, unokuzoba iphrofayili ye-flatness echanekileyo, ukuchaneka kokufumanisa ukuya kwi-0.001mm / m. Ukongeza, i-3D i-scanner ye-optical scanner inokukhawuleza ihlolisise indawo eyinkimbinkimbi yecandelo le-granite ukuvelisa imodeli epheleleyo ye-three-dimensional, enokuthi ibone ngokuchanekileyo ukuphambuka kwemilo ngokuthelekisa nomzekelo woyilo, ukubonelela ngenkxaso yedatha ebanzi yovavanyo lomgangatho wemveliso.
Ukusetyenziswa kwetekhnoloji yovavanyo engonakalisiyo
Ngokujonga isoyikiso esinokuthi sibe khona kwiziphene zegranite zangaphakathi ekusebenzeni kwecandelo, uvavanyo olungonakalisi lubalulekile. I-ultrasonic flaw detector inokukhupha i-high-frequency ultrasound, xa i-wave wave idibana neentanda, imingxuma kunye nezinye iziphene ngaphakathi kwe-granite, iya kubonakalisa kwaye isasazeke, ngokuhlalutya umqondiso we-wave wave, inokugweba ngokuchanekileyo indawo, ubungakanani kunye nokuma kwesiphene. Ukufumanisa iziphene ezincinci, iteknoloji yokufumanisa i-X-ray i-flaw inenzuzo ngakumbi, inokungena kwizinto eziphathekayo zegranite ukwenza umfanekiso wesakhiwo sangaphakathi, ebonisa ngokucacileyo iziphene ezifihlakeleyo ekunzima ukuzibona ngeso lenyama, ukuqinisekisa ukuba umgangatho wangaphakathi wecandelo linokwethenjelwa.
Inkqubo yesoftware yokubona ekrelekrele
Inkqubo yesoftware yobhaqo enamandla yeyona hub engundoqo yesisombululo sonke. Inkqubo inokushwankathela, ukuhlalutya kunye nokusebenza kwedatha eqokelelwe zizo zonke iintlobo zezixhobo zokuvavanya ngexesha langempela. Ukusebenzisa i-algorithms yobukrelekrele bokwenziwa, isoftware inokuchonga ngokuzenzekelayo iimpawu zedatha kwaye iqinisekise ukuba iinxalenye zegranite ziyahlangabezana nemigangatho yomgangatho, iphucula kakhulu ukusebenza kakuhle kunye nokuchaneka. Ngokomzekelo, ngokuqeqesha inani elikhulu ledatha yokuhlola kunye neemodeli zokufunda ezinzulu, isofthiwe inokubona ngokukhawuleza nangokuchanekileyo uhlobo kunye nobukhulu beziphene zomhlaba, ukuphepha ukugwetywa okunokwenzeka okubangelwa ukutolika ngesandla. Kwangaxeshanye, inkqubo yesoftware inokuvelisa ingxelo yovavanyo eneenkcukacha, irekhode idatha yovavanyo kunye neziphumo zecandelo ngalinye, elilungele amashishini ukuba aqhube ukulandelelwa komgangatho kunye nolawulo.
Iinzuzo ze-ZHHIMG kwizisombululo zokuhlola
Njengenkokeli yoshishino, i-ZHHIMG iqokelele amava atyebileyo kwintsimi yokuhlolwa kwecandelo lokuchaneka kwegranite. Inkampani ineqela le-R & D lobuchwephesha, elihlala lizibophelele ekuveliseni nasekuphuculeni itekhnoloji yokuvavanya, ngokweemfuno ezikhethekileyo zabathengi bezisombululo zovavanyo ezilungiselelweyo. I-ZHHIMG iye yazisa izixhobo zovavanyo oluphambili lwamazwe ngamazwe kwaye yaseka inkqubo engqongqo yokulawula umgangatho ukuze kuqinisekiswe ukuba uvavanyo ngalunye lunokufikelela kwinqanaba eliphezulu loshishino. Ngokweenkonzo, inkampani ibonelela ngeenkonzo zokumisa enye ukusuka kuyilo lwesikimu sovavanyo, ukufakwa kwezixhobo kunye nokugunyaziswa kuqeqesho lwabasebenzi ukuze kuqinisekiswe ukuba abathengi banokusebenzisa izisombululo zovavanyo ngokutyibilikayo kunye nokuphucula amandla okulawula umgangatho wemveliso.
Ixesha lokuposa: Mar-24-2025