Kwicandelo elichanekileyo lokwenziwa kwee-semiconductor, inkqubo yokudlulisa ii-wafer ifana "nomgca wobomi bomgca wokuvelisa ii-chip", kwaye ukuzinza kwayo kunye nokuchaneka kwayo kumisela ngokuthe ngqo izinga lokuvelisa ii-chips. Isizukulwana esitsha seenkqubo zokudlulisa ii-wafer sidibanisa ngokuphindaphindiweyo ii-motors ezithe nkqo kunye neziseko ze-granite, kwaye iingenelo ezikhethekileyo zezinto ze-granite ziyindlela ephambili yokuvula uthumelo olusebenza kakuhle.
Isiseko segranite: Ukwakha "isiseko esiqinileyo njengelitye" sokuhambisa umbane okuzinzileyo
I-granite, emva kweminyaka engamakhulu ezigidi yokulungiswa kwejoloji, ine-crystallization yangaphakathi eqinileyo nefanayo. Olu phawu lwendalo lwenza ukuba ibe yinto efanelekileyo yesiseko seenkqubo zokudlulisa ii-wafer. Kwindawo entsonkothileyo yeendawo zokucoca ze-semiconductor, i-granite, ene-coefficient yayo ephantsi kakhulu yokwandiswa kobushushu (kuphela i-5-7 × 10⁻⁶/℃), inokumelana nobushushu obuveliswa ngexesha lokusebenza kwezixhobo kunye nempembelelo yotshintsho lobushushu bendalo, iqinisekisa uzinzo lobukhulu besiseko kwaye iphephe ukuphambuka kwendlela yokudlulisela okubangelwa kukuguquka kobushushu. Ukusebenza kwayo okugqwesileyo kokuxinana kokudlidliza kunokufunxa ngokukhawuleza ukudlidliza koomatshini okuveliswa ngexesha lokuqalisa, ukuvala kunye nokukhawulezisa ii-motors ezithe tyaba, kunye nokuphazamiseka kwangaphandle okubangelwa kukusebenza kwezinye izixhobo kwindawo yokusebenzela, okubonelela ngeqonga elizinzileyo "elinokunyakaza okungekho" kokudlulisa ii-wafer.
Okwangoku, ukuzinza kweekhemikhali zegranite kuqinisekisa ukuba ayidli okanye ayidli kwi-semiconductor workshops apho i-acid kunye ne-alkali reagents zitshintshatshintsha khona kwaye kufuneka ucoceko oluphezulu, ngaloo ndlela kuthintelwe impembelelo ekuchanekeni kokudluliselwa ngenxa yokuguga kwezinto okanye ukufunxwa kongcoliseko. Iimpawu zomphezulu ezigudileyo nezixineneyo zinokunciphisa ukunamathela kothuli ngempumelelo, zihlangabezane nemigangatho engqongqo engenalo uthuli yamagumbi acocekileyo kwaye zisuse umngcipheko wongcoliseko lwe-wafer oluvela kwingcambu.
Isiphumo "sobudlelwane begolide" seemoto ezithe ngqo kunye negranite
Iimoto ezizii-linear, ezineempawu zokungavumeli ukudluliselwa koomatshini, ukukhawulezisa okuphezulu kunye nesantya esiphezulu sokuphendula, ukudluliselwa kwe-endow wafer kunye neenzuzo "zokukhawuleza, ukuchaneka kunye nokuqina". Isiseko segranite sibonelela ngeqonga lenkxaso eliqinileyo nelithembekileyo kuso. Ezi zimbini zisebenza kunye ukufezekisa ukusebenza okuphezulu. Xa imoto e-linear iqhuba isithwali se-wafer ukuba sisebenze kumzila wesiseko segranite, ukuqina okuqinileyo kunye nokuzinza kwesiseko kuqinisekisa ukudluliselwa okusebenzayo kwamandla okuqhuba emoto, kuthintelwe ukulahleka kwamandla okanye ukulibaziseka kokudluliselwa okubangelwa kukuguqulwa kwesiseko.
Ziqhutywa yimfuno yokuchaneka kwe-nanoscale, ii-linear motors zinokufikelela kulawulo lokufuduka oluphantsi kwe-micron. Iimpawu zokucubungula ngokuchanekileyo kweziseko ze-granite (ezineempazamo zokuthamba ezilawulwa ngaphakathi kwe-±1μm) zihambelana ngokugqibeleleyo nolawulo oluchanekileyo lwee-linear motors, ziqinisekisa ukuba impazamo yokuma ngexesha lokudluliselwa kwe-wafer ingaphantsi kwe-±5μm. Nokuba kukuthunyelwa ngesantya esiphezulu phakathi kwezixhobo ezahlukeneyo zenkqubo okanye ukupaka ngokuchanekileyo kokunikezelwa kwe-wafer, indibaniselwano yee-linear motors kunye neziseko ze-granite inokuqinisekisa "ukuphambuka okungekhoyo kunye nokungabi nangxaki" kukudluliselwa kwe-wafer.
Ukuqinisekiswa kwendlela yokusebenza kweshishini: Ukuphuculwa kabini kokusebenza kakuhle kunye nezinga lemveliso
Emva kokuphucula inkqubo yayo yokudlulisa i-wafer, ishishini eliphambili le-semiconductor lehlabathi lamkele isisombululo sesiseko se-linear motor + granite, esonyusa ukusebenza kakuhle kokudlulisa i-wafer ngama-40%, sanciphisa izinga lokuvela kweziphene ezifana nokungqubana kunye nokunciphisa ngexesha lenkqubo yokudlulisa ngama-85%, saza saphucula izinga lemveliso iyonke yeetships nge-6%. Emva kwedatha kukho isiqinisekiso sozinzo lokudlulisa olubonelelwa sisiseko se-granite kunye nesiphumo sokusebenzisana esikhawulezayo nesichanekileyo se-linear motor, enciphisa kakhulu ilahleko kunye neempazamo kwinkqubo yokudlulisa i-wafer.
Ukususela kwiipropati zezinto ezibonakalayo ukuya kwimveliso echanekileyo, ukusuka kwiingenelo zokusebenza ukuya ekuqinisekisweni okusebenzayo, indibaniselwano yeemoto ezithe ngqo kunye neziseko zegranite ichaze ngokutsha imigangatho yeenkqubo zokudlulisa iiwafer. Kwixesha elizayo xa iteknoloji ye-semiconductor ihambela phambili kwiinkqubo ze-3nm kunye ne-2nm, izixhobo zegranite ngokuqinisekileyo ziya kuqhubeka nokufaka impembelelo enamandla kuphuhliso lweli shishini ngeenzuzo zazo ezingenakutshintshwa.
Ixesha leposi: Meyi-14-2025