Kwimeko yangoku yobunjineli obuchanekileyo, utshintsho ukusuka ekunxibelelaneni koomatshini bendabuko ukuya ekushukumeni okungenazingxabano akusekho nje umkhwa—yinto eyimfuneko yobugcisa. Kumashishini aqala ekuhlolweni kwe-semiconductor wafer ukuya ekucutshungulweni kwe-laser okuphambili, ukufuna "i-scan epheleleyo" kuholele iinjineli kwizixhobo ezisisiseko: i-granite emnyama yendalo. Xa le nto yakudala yenziwe yaba yi-Uhlobo lweGantry Air Bearing Stage, isombulula imingeni ehlala ihleli kwi-metrology: ukungqubana, ukushukuma kobushushu, kunye ne-mechanical hysteresis.
Kwi-ZHHIMG (www.zhhimg.com), sibonile ukuba iinkqubo ezichanekileyo kakhulu azikho nje yingqokelela yamacandelo, kodwa zihambelana ngokupheleleyo phakathi kwesayensi yezinto kunye ne-fluid dynamics. Isiseko sale ntsebenzo sikwi-interface phakathi kweGranite Air Guide Rail kunye neGranite Air Slide Block yayo ehambelanayo. Ngokungafaniyo ne-steel recirculating ball guides, ezi zixhobo zisebenza kwifilimu encinci yomoya oxinzelelweyo, ngokuqhelekileyo phakathi kwe-5 ukuya kwi-10 microns ubukhulu. Le filimu yomoya isebenza njengesihluzo sendalo, ikhupha umlinganiselo wokungabikho kakuhle komphezulu we-microscopic kwaye ibonelela ngenqanaba lokuthe tye elingenakukwazi ukuliphinda iibheringi zoomatshini.
Enye yezona nzuzo zibalulekileyo zokusebenzisaIsikhokelo seSitimela seGranite Airluzinzo lwayo oluyimilinganiselo. Kwizicelo zokuskena ngesantya esiphezulu, ii-metal rails zivelisa ubushushu ngokungqubana, nto leyo ekhokelela ekwandeni kobushushu kunye "nokushukuma okuchanekileyo" kwiiyure zokusebenza. I-Granite, njengelitye eliyi-igneous eline-coefficient ephantsi kakhulu yokwanda kobushushu, ayikhathali kolu tshintsho lobushushu. Xa i-Ibhloko yeSlide yoMoya yeGraniteityibilika phezu kwalo mphezulu, ukungabikho koqhagamshelwano lomzimba kuthetha ukuba akukho kutshabalala, akukho kungcangcazela okuvela kwiibhola ezijikelezayo, kwaye akukho mfuneko yokuthambisa—into ebalulekileyo kwiindawo zokucoca ze-ISO Class 1 apho inkungu yeoyile okanye uthuli lwesinyithi luya kubeka emngciphekweni yonke imveliso.
Nangona kunjalo, ukuchaneka kwenkqubo yokuhamba kulungile kuphela xa ikhonkco layo libuthathaka. Yiyo loo nto eli shishini litshintshela kwi-Granite assembly epheleleyo ngezikrufu zebhola kunye nee-rails. Ngelixa ii-air bearing zibonelela "nge-froth" engenakuphikiswa, indlela yokuqhuba—edla ngokuba yi-precision-ground ball screw okanye i-linear motor—kufuneka idityaniswe ngononophelo olukhulu. Ngokufaka ezi zinto zokuqhuba ngqo kwisiseko se-granite esinamatheliswe ngocoselelo, sisusa iimpazamo zokulungelelanisa ezidla ngokuchaphazela iinkqubo ze-hybrid metal-and-stone. Le ndlela idibeneyo iqinisekisa ukuba iziko lomxhuzulane kunye neziko le-thrust zilungelelaniswe ngokugqibeleleyo, zinciphisa "impazamo ye-Abbe" enokonakalisa ukuchaneka xa kukhawuleziswa okuphezulu.
Kwi-OEM zehlabathi, ukhetho lweUhlobo lweGantry Air Bearing Stageidla ngokuqhutywa yimfuno yokukhupha amandla aphezulu ngaphandle kokulahlekelwa kukuphinda-phinda. Kwisimo esiqhelekileyo se-gantry, uyilo lwe-dual-drive luvumela ukuhamba ngefomathi enkulu—okubalulekileyo kuhlolo lwanamhlanje lwe-FPD (Flat Panel Display)—ngexesha igcina ubulukhuni besakhiwo obubonelelwa yi-granite cross-beam. Iimpawu zendalo zokudambisa i-granite zingcono kakhulu kune-cast iron okanye i-aluminium, okuvumela inkqubo ukuba "ihlale" phantse kwangoko emva kokuhamba ngesantya esiphezulu. Oku kunciphisa ixesha lokuhlala kuthetha ngokuthe ngqo kwiiyunithi eziphezulu ngeyure (UPH) kumsebenzisi wokugqibela.
Ukuyila ezi nkqubo kufuna ukuqonda okunzulu "ngebhajethi yeempazamo." Yonke i-micron iyabaluleka. Xa senza i-Granite assembly enezikrufu zebhola kunye nee-rails, inkqubo yethu ibandakanya ukubethelela ubuso be-granite ngesandla kwiinkcukacha zeBakala 00 ngaphambi kokuba kwenzeke naluphi na ukufakelwa koomatshini. Oku kuqinisekisa ukubaIsikhokelo seSitimela seGranite AirInika isalathiso esicwangcisiweyo ngokugqibeleleyo kuyo yonke i-motion envelope. Isiphumo yinkqubo enika isisombululo senqanaba le-nanometer kunye nokuphindaphinda kwe-sub-micron, imihla ngemihla, kwiindawo zoshishino ezifuna kakhulu.
Njengoko sijonge kwikamva le-nanotechnology kunye ne-2nm semiconductor nodes, indima yetekhnoloji yokuthwala umoya esekwe ngamatye iya kwanda kuphela. Uzinzo lweGranite Air Slide Block ehamba buthule phezu kwereyile echanekileyo bubungqina bendlela izixhobo zemveli kunye nefiziksi yanamhlanje ezinokudibaniswa ngayo ukuze kutyhalelwe imida yoko kunokulinganiswa. Kwi-ZHHIMG, siyaqhubeka nokuphucula ezi zisombululo ezisekwe kwi-granite, siqinisekisa ukuba amaqabane ethu anesiseko esizinzileyo, esingenasiphako abasidingayo ukwakha isizukulwana esilandelayo seempumelelo zobuchwepheshe.
Fumanisa iinkcukacha zobugcisa kunye namathuba okwenza ngokwezifiso amaqonga ethu okunyakaza aphawww.zhhimg.com.
Ixesha leposi: Jan-16-2026
