Kwicandelo lokulinganisa ngokuchanekileyo, iqonga lokuchaneka kwegranite elinozinzo olugqwesileyo, ubulukhuni obuphezulu kunye nokumelana kakuhle nokuguguleka, liye laba yinkxaso yesiseko efanelekileyo kwimisebenzi emininzi yokulinganisa ngokuchanekileyo. Nangona kunjalo, ukuguquguquka kobushushu kwizinto ezingqongileyo, njenge "precision killer" efihliweyo ebumnyameni, kunempembelelo engathethekiyo ekuchanekeni kokulinganisa kweqonga lokuchaneka kwegranite. Kubaluleke kakhulu ukuphanda nzulu umda wempembelelo ukuqinisekisa ukuchaneka kunye nokuthembeka komsebenzi wokulinganisa.
Nangona igranite yaziwa ngokuzinza kwayo, ayikhuselekanga kutshintsho lobushushu. Izinto zayo eziphambili yiquartz, feldspar kunye nezinye iiminerali, eziya kuvelisa ukwanda kobushushu kunye nokuncipha kobushushu kubushushu obahlukeneyo. Xa ubushushu obuphakathi bunyuka, iqonga lokuchaneka kwegranite liyafudunyezwa kwaye landiswe, kwaye ubukhulu beqonga buya kutshintsha kancinci. Xa ubushushu buhla, buya kuncipha bubuyele kwimeko yalo yokuqala. Utshintsho olubonakala luncinci kubukhulu lunokwandiswa lube zizinto eziphambili ezichaphazela iziphumo zokulinganisa kwiimeko zokulinganisa ngokuchanekileyo.
Ukuthatha iqonga legranite elihambelana nezixhobo zokulinganisa eziqhelekileyo njengomzekelo, kumsebenzi wokulinganisa ngokuchanekileyo, iimfuno zokuchaneka kokulinganisa zihlala zifikelela kwinqanaba le-micron okanye ngaphezulu. Kucingelwa ukuba kubushushu obuqhelekileyo be-20℃, iiparameter ezahlukeneyo zobukhulu beqonga zikwimeko efanelekileyo, kwaye idatha echanekileyo inokufumaneka ngokulinganisa umsebenzi. Xa ubushushu obujikeleze umhlaba butshintshatshintsha, imeko yahlukile kakhulu. Emva kwenani elikhulu lezibalo zedatha zovavanyo kunye nohlalutyo lwethiyori, phantsi kweemeko eziqhelekileyo, ukuguquguquka kobushushu bendalo ye-1℃, ukwandiswa okuthe ngqo okanye ukucutheka kweqonga lokuchaneka kwegranite malunga ne-5-7 ×10⁻⁶/℃. Oku kuthetha ukuba kwiqonga legranite elinobude becala bemitha e-1, ubude becala bungatshintsha nge-5-7 microns ukuba ubushushu butshintsha nge-1 ° C. Kwimilinganiselo yokuchaneka, olo tshintsho kubukhulu lwanele ukubangela iimpazamo zokulinganisa ngaphaya koluhlu olwamkelekileyo.
Kumsebenzi wokulinganisa ofunekayo ngamanqanaba ahlukeneyo okuchaneka, umda wempembelelo yokutshintshatshintsha kobushushu nawo wahlukile. Kwimilinganiselo eqhelekileyo yokuchaneka, njengokulinganisa ubungakanani beendawo zoomatshini, ukuba impazamo yokulinganisa evumelekileyo ingaphakathi kwe-±20 microns, ngokwendlela yokubala i-expansion coefficient engentla, ukutshintshatshintsha kobushushu kufuneka kulawulwe ngaphakathi koluhlu lwe-± 3-4 ℃, ukuze kulawulwe impazamo yokulinganisa ebangelwe kukutshintsha kobukhulu beqonga kwinqanaba elamkelekileyo. Kwiindawo ezineemfuno zokuchaneka okuphezulu, njengokulinganisa inkqubo ye-lithography kwimveliso yee-chip ze-semiconductor, impazamo ivunyelwe ngaphakathi kwe-±1 micron, kwaye ukutshintshatshintsha kobushushu kufuneka kulawulwe ngokungqongqo ngaphakathi kwe-± 0.1-0.2 ° C. Nje ukuba ukutshintshatshintsha kobushushu kudlule lo mda, ukwanda kobushushu kunye nokucutheka kweqonga le-granite kunokubangela ukuphambuka kwiziphumo zokulinganisa, okuya kuchaphazela isivuno sokuveliswa kwee-chip.
Ukuze kujongwane nempembelelo yokuguquguquka kobushushu obujikeleze umhlaba kwi-precision yokulinganisa yeqonga lokuchaneka kwegranite, amanyathelo amaninzi adla ngokusetyenziswa kumsebenzi osebenzayo. Umzekelo, izixhobo zobushushu ezichanekileyo nezizinzileyo ezifakelwe kwindawo yokulinganisa ukulawula ukuguquguquka kobushushu kuluhlu oluncinci kakhulu; Imbuyekezo yobushushu yenziwa kwidatha yokulinganisa, kwaye iziphumo zokulinganisa zilungiswa yi-algorithm yesoftware ngokwe-thermal expansion coefficient yeqonga kunye notshintsho lobushushu lwexesha langempela. Nangona kunjalo, nokuba ngawaphi amanyathelo athathwayo, ukuqonda ngokuchanekileyo impembelelo yokuguquguquka kobushushu obujikeleze umhlaba kwi-precision yokulinganisa yeqonga lokuchaneka kwegranite yisiseko sokuqinisekisa umsebenzi wokulinganisa ochanekileyo nothembekileyo.
Ixesha leposi: Epreli-03-2025