Kwishishini le-semiconductor, ukuhlolwa kwe-wafer kuyikhonkco eliphambili lokuqinisekisa umgangatho kunye nokusebenza kwe-chip, kwaye ukuchaneka kunye nokuzinza kwetafile yokuhlola kudlala indima ecacileyo kwiziphumo zokufumanisa. Isiseko seGranite esineempawu zaso ezizodwa, ibe lolona khetho lufanelekileyo lwetafile yokuhlola i-semiconductor wafer, oku kulandelayo kuhlalutyo olunemilinganiselo emininzi kuwe.
Okokuqala, ubungakanani besiqinisekiso esichanekileyo
1. I-Ultra-high flatness and straightness: Isiseko se-granite sicutshungulwa ngobuchwepheshe obuphezulu bokucubungula, kwaye i-flatness inokufikelela ku-± 0.001mm / m okanye nangaphezulu ukuchaneka, kwaye ukuchaneka kukuhle kakhulu. Kwinkqubo yokuhlola i-wafer, i-high-precision plane inikezela ngenkxaso ezinzileyo ye-wafer kwaye iqinisekisa uqhagamshelwano oluchanekileyo phakathi kwe-probe yezixhobo zokuhlola kunye ne-solder joints on the wafer surface.
2. I-coefficient ephantsi kakhulu yokwandiswa kwe-thermal: ukuveliswa kwe-semiconductor kuvakalelwa utshintsho lweqondo lokushisa, kwaye i-coefficient yokwandiswa kwe-thermal ye-granite iphantsi kakhulu, ngokuqhelekileyo malunga ne-5 × 10⁻⁶/℃. Xa iqonga lokubona lisebenza, nokuba ubushushu be-ambient buyaguquguquka, ubungakanani besiseko segranite sitshintsha kancinci kakhulu. Ngokomzekelo, kwi-workshop yobushushu obuphezulu ehlobo, iqondo lokushisa lesiseko sesiseko sesinyithi esiqhelekileyo sinokubangela ukuba indawo ehambelanayo ye-wafer kunye nezixhobo zokukhangela zitshintshe, ezichaphazela ukuchaneka kokufumanisa; Iqonga lokufumanisa isiseko se-granite linokugcina uzinzo, liqinisekise ukuchaneka kwesimo se-wafer kunye nezixhobo zokubona ngexesha lenkqubo yokukhangela, kunye nokubonelela ngendawo ezinzileyo yokufumanisa ngokuchanekileyo okuphezulu.
Okwesibini, umlinganiselo wokuzinza
1. Isakhiwo esizinzile kunye nokumelana nokungcangcazela: I-Granite emva kwezigidi zeminyaka yeenkqubo ze-geological, isakhiwo sangaphakathi sixinene kwaye sifana. Kwimeko enzima yefektri ye-semiconductor, ukunyakaza okwenziwa ngokusebenza kwezixhobo ze-peripheral kunye nabasebenzi abahambahambayo banqanyulwa ngokufanelekileyo kwisiseko segranite.
2. Ukuchaneka kokusetyenziswa kwexesha elide: xa kuthelekiswa nezinye izinto, i-granite inobunzima obuphezulu, ukuxhatshazwa okunamandla, kunye nobunzima be-Mohs bunokufikelela kwi-6-7. Umphezulu wesiseko segranite awunxitywa lula ngexesha lokulayishwa rhoqo kwe-wafer, ukothula kunye nemisebenzi yokuhlola. Ngokokusetyenziswa kweenkcukacha-manani zedatha, ukusetyenziswa kwetafile yovavanyo lwesiseko segranite, ukusebenza ngokuqhubekayo emva kweeyure ezingama-5000, ukutyeba kunye nokuchaneka okuthe tye kusenokugcinwa ngaphezulu kwe-98% yokuchaneka kokuqala, ukunciphisa izixhobo ngenxa yokunxiba kwesiseko okubangelwa kuhlengahlengiso oluqhelekileyo kunye namaxesha okugcina, ukunciphisa iindleko zokusebenza kweshishini, ukuqinisekisa ukuzinza kwexesha elide lomsebenzi.
Okwesithathu, ucoceko kunye nomlinganiselo wokuchasana nokuphazamiseka
1. Ukuveliswa kothuli oluphantsi: indawo yokuvelisa i-semiconductor kufuneka ihlambuluke kakhulu, kwaye i-granite impahla ngokwayo izinzile kwaye akulula ukuvelisa amaqhekeza othuli. Ngethuba lokusebenza kweqonga lokuvavanya, uthuli olwenziwa yisiseko lugwenywe ukungcolisa i-wafer, kwaye umngcipheko wesiphaluka esifutshane kunye nesiphaluka esivulekileyo esibangelwa ngamaqhekeza othuli ayancitshiswa. Kwindawo yokuhlola iwafer yendawo yokusebenzela engenathuli, ukugxininiswa kothuli olujikeleze isiseko setafile yokuhlola igranite ihlala ilawulwa ukuya kwinqanaba eliphantsi kakhulu, ihlangabezana neemfuno ezingqongqo zococeko lweshishini le-semiconductor.
2. Akukho ukuphazamiseka kwamagnetic: izixhobo zokufumanisa zivakalelwa kwindalo ye-electromagnetic, kunye negranite yinto engekho-magnetic, engayi kuphazamisa umqondiso we-elektroniki wesixhobo sokubona. Ekusetyenzisweni kokufunyanwa kwe-electron beam kunye nobunye itekhnoloji yovavanyo efuna imeko-bume ye-electromagnetic ephezulu kakhulu, isiseko segranite siqinisekisa ukuhanjiswa okuzinzileyo komqondiso we-elektroniki wesixhobo sokubona kwaye siqinisekisa ukuchaneka kweziphumo zovavanyo. Umzekelo, xa iwafer ivavanyelwa ukusebenza kombane okuchanekileyo, isiseko segranite esingesomagnetic sinqanda ukuphazamisana nobhaqo lwangoku kunye neempawu zombane, ukuze idatha yobhaqo ibonise ngokwenene iimpawu zombane.
Ixesha lokuposa: Mar-31-2025