Ukuveliswa kweSemiconductor: Kwinkqubo yokuvelisa i-chip, inkqubo ye-photolithography kufuneka idlulisele iphethini yesekethe ngokuchanekileyo kwi-wafer. Isiseko segranite se-axis eyodwa yomoya ojikelezayo wemodyuli yentshukumo echanekileyo inokubonelela ngokuchaneka okuphezulu kokuma kunye nenkxaso ezinzileyo yetafile ye-wafer kwisixhobo se-lithography. Ngokomzekelo, i-ASML kunye nabanye abavelisi bomatshini be-lithography abaziwayo ngamazwe ngamazwe basebenzisa iimodyuli ze-granite ezijikelezayo zomoya ezijikelezayo kwizixhobo zabo eziphezulu, ezinokulawula ukuchaneka kokumisa kwe-wafer kwinqanaba le-nanometer ukuqinisekisa ukuchaneka kwepateni ye-lithography, ngaloo ndlela kuphuculwe ukudibanisa kunye nokusebenza kwe-chip.
Intsimi yokulinganisa ngokuchanekileyo: I-CMM sisixhobo sokulinganisa esichanekileyo esisetyenziswa rhoqo kwimveliso yezoshishino, esetyenziselwa ukulinganisa ubungakanani, imilo kunye nokuchaneka kwendawo yomsebenzi. Imodyuli ye-ultra-precision motion module ye-axis air float kwisiseko segranite ingasetyenziselwa njengeqonga lentshukumo ye-CMM, enokuqonda i-high-precision linear motion kunye nokubonelela nge-stable motion trajectory kwi-probe yokulinganisa. Ngokomzekelo, i-CMM ye-Hexagon ye-high-end isebenzisa le ndibaniselwano ukulinganisa iinxalenye ezinkulu kunye neziyinkimbinkimbi kunye nokuchaneka kokulinganisa ukuya kwinqanaba le-micron, inika isiqinisekiso esinamandla sokulawulwa kwekhwalithi yeengxenye kwiimoto, i-aerospace kunye namanye amashishini.
Intsimi ye-aerospace: Ekuqhubeni nasekuvavanyeni iindawo ze-aerospace, ukuchaneka okuphezulu kuyafuneka. Umzekelo, ukwenziwa kweeblade ze-injini yenqwelo-moya kufuna ulawulo oluchanekileyo lwendlela yokushukuma yesixhobo ukuqinisekisa ukuchaneka kweprofayili yencakuba. Isiseko se-granite se-axis air float ultra-precision motion module ingasetyenziswa kwiziko le-machining ye-axis emihlanu kunye nezinye izixhobo zokubonelela ngolawulo oluchanekileyo oluchanekileyo lwesixhobo kunye nokuqinisekisa ukuba ukuchaneka komatshini we-blade kunokuhlangabezana neemfuno zoyilo. Ngexesha elifanayo, kwinkqubo yendibano ye-injini ye-aero, kuyafuneka kwakhona ukusebenzisa izixhobo zokulinganisa ezichanekileyo zokubona ukuchaneka kwendibano yamacandelo. Imodyuli ejikelezayo yomoya ejikelezayo yesiseko segranite inokubonelela ngenkxaso ezinzileyo kunye nokunyakaza okuchanekileyo kwezixhobo zokulinganisa ukuqinisekisa umgangatho wendibano.
Intsimi yokuhlola i-Optical: Kwinkqubo yokuvelisa kunye novavanyo lwamacandelo optical, kuyimfuneko ukwenza indawo echanekileyo ephezulu kunye nomlinganiselo wamacandelo optical. Ngokomzekelo, xa uvelisa amacandelo aphezulu achanekileyo afana nezibuko kunye neelensi, kuyimfuneko ukusebenzisa i-interferometers kunye nezinye izixhobo zokubona ukuchaneka kobume bomhlaba. Isiseko se-granite se-axis eyodwa yomoya ojikelezayo wemodyuli ye-ultra-precision motion module ingasetyenziswa njengeqonga lentshukumo ye-interferometer, enokuqonda ukuchaneka kokubeka i-sub-micron kunye nokubonelela ngenkxaso yedatha echanekileyo yokuchongwa kwamacandelo optical. Ukongeza, kwisixhobo sokulungisa i-laser, kuyafuneka ukuba kusetyenziswe iqonga lokuhamba elichanekileyo lokulawula ukuskena umkhondo we-laser beam, isiseko segranite semodyuli eshukumayo edadayo sinokuhlangabezana nale mfuneko, ukufezekisa ukuchaneka okuphezulu kwe-laser.
Ixesha lokuposa: Apr-07-2025