Ukwenziwa kwee-semiconductor: Kwinkqubo yokwenziwa kwee-chip, inkqubo ye-photolithography kufuneka idlulisele ipateni yesekethe ngokuchanekileyo kwi-wafer. Isiseko se-granite se-single axis air floating ultra-precision motion module sinokubonelela ngokubeka ngokuchanekileyo okuphezulu kunye nenkxaso ezinzileyo kwitafile ye-wafer kwizixhobo ze-lithography. Umzekelo, i-ASML kunye nabanye abavelisi bomatshini be-lithography abadumileyo kwihlabathi liphela basebenzisa iimodyuli ze-granite base air floating motion kwizixhobo zabo eziphezulu, ezinokulawula ukuchaneka kokubeka kwe-wafer kwinqanaba le-nanometer ukuqinisekisa ukuchaneka kwepateni ye-lithography, ngaloo ndlela kuphuculwe ukuhlanganiswa kunye nokusebenza kwe-chip.
Intsimi yokulinganisa ngokuchanekileyo: I-CMM sisixhobo sokulinganisa ngokuchanekileyo esisetyenziswa kakhulu kwimveliso yemizi-mveliso, esisetyenziselwa ukulinganisa ubungakanani, imilo kunye nokuchaneka kwendawo yokusebenza. Imodyuli yokunyakaza echanekileyo kakhulu ye-single axis air float kwisiseko segranite ingasetyenziswa njengeqonga lokunyakaza le-CMM, elinokufezekisa intshukumo echanekileyo ephezulu kwaye libonelele ngomzila ozinzileyo we-probe yokulinganisa. Umzekelo, i-CMM ephezulu ye-Hexagon isebenzisa olu dibaniso ukulinganisa iindawo ezinkulu nezintsonkothileyo ngokulinganisa ngokuchanekileyo ukuya kwinqanaba le-micron, inika isiqinisekiso esinamandla solawulo lomgangatho weendawo kwiimoto, kwi-aerospace nakwamanye amashishini.
Intsimi yeenqwelo-moya: Ekucutshungulweni nasekuvavanyweni kweendawo zeenqwelo-moya, kufuneka ukuchaneka okuphezulu. Umzekelo, ukucutshungulwa kweebhleyidi zenjini yeenqwelo-moya kufuna ulawulo oluchanekileyo lwendlela yokuhamba kwesixhobo ukuqinisekisa ukuchaneka kweprofayili yebhleyidi. Isiseko segranite semodyuli yentshukumo ye-single axis air float ultra-precision motion module sinokusetyenziswa kwiziko loomatshini le-five-axis kunye nezinye izixhobo ukubonelela ngolawulo oluchanekileyo lokuhamba kwesixhobo kunye nokuqinisekisa ukuba ukuchaneka kokucutshungulwa kwebhleyidi kunokuhlangabezana neemfuno zoyilo. Kwangaxeshanye, kwinkqubo yokuhlanganisa injini ye-aero, kuyimfuneko ukusebenzisa izixhobo zokulinganisa ezichanekileyo ukuze kubonwe ukuchaneka kokuhlanganisela kwamalungu. Imodyuli yokuhamba emoyeni edadayo yesiseko segranite inokubonelela ngenkxaso ezinzileyo kunye nokushukuma okuchanekileyo kwezixhobo zokulinganisa ukuqinisekisa umgangatho wokuhlanganisela.
Intsimi yokuhlolwa kwe-Optical: Kwinkqubo yokuvelisa nokuvavanya ii-optical components, kuyimfuneko ukwenza indawo echanekileyo kunye nokulinganisa ii-optical components. Umzekelo, xa kusenziwa ii-optical components ezichanekileyo ezifana nezipili kunye neelensi, kuyimfuneko ukusebenzisa ii-interferometers kunye nezinye izixhobo ukuze kufunyanwe ukuchaneka kobuso bomphezulu. Isiseko se-granite se-single axis air floating ultra-precision motion module singasetyenziswa njengeqonga lokuhamba le-interferometer, elinokufezekisa ukuchaneka kokubeka i-sub-micron kwaye libonelele ngenkxaso yedatha echanekileyo yokufumanisa ii-optical components. Ukongeza, kwizixhobo zokucubungula i-laser, kuyimfuneko ukusebenzisa iqonga lokuhamba elichanekileyo ukulawula indlela yokuskena ye-laser beam, isiseko se-granite se-air floating module sinokuhlangabezana nale mfuneko, ukuze kufezekiswe ukucutshungulwa kwe-laser echanekileyo.
Ixesha leposi: Epreli-07-2025