Ishishini le-semiconductor lehlabathi ngoku libandakanyeka ekufuneni okungapheliyo i-"Angstrom Era," apho ubukhulu be-transistor bulinganiswa ngobubanzi bee-athomu ezimbalwa. Njengoko i-lithography kunye nezixhobo zokuhlola zitshintshela kwezi zikali ezincinci, imfuno yozinzo lwesakhiwo itshintshile ukusuka kwi-"macro" ukuya kwi-"nano." Embindini wolu tshintsho kukho izinto ezindala njengoMhlaba ngokwawo: iPrecision Granite.
Nangona abaninzi bebona i-granite njengelitye elilula, xa kujongwa imeko yelityeinqanaba lokubeka i-nanopositioningokanye inkqubo yokuhlola i-wafer ekhawulezayo, yi-ceramic yobunjineli enobuchule. Ukuqonda umahluko phakathi kwezixhobo ezisisiseko ze-metrology kunye namaqonga okushukuma aphambili kubalulekile kwii-OEM ezifuna ukutyhala imida yoko kunokwenzeka ekwenzeni i-silicon.
I-Granite CMM vs. I-Granite Surface Plate: Ukuqonda iShift yoBunjineli
Kwiilabhoratri ezininzi zokulawula umgangatho,Ipleyiti yomphezulu weGraniteyinto efumaneka kuyo yonke indawo—isalathiso esithembekileyo nesithe ngqo sokulinganisa ngesandla. Nangona kunjalo, kukho ingcamango ephosakeleyo yokuba ipleyiti yomphezulu kunye nesiseko seGranite CMM (Coordinate Measuring Machine) ziyatshintshana. Ngokwembono yobunjineli, zimele amanqanaba amabini ahlukeneyo obunzima.
Ipleyiti yomphezulu yenzelwe ukuzinza okungashukumiyo. Umsebenzi wayo ophambili kukuhlala uthe tyaba phantsi komthwalo ongashukumiyo. Ngokwahlukileyo koko, isiseko segranite se-CMM okanye isigaba sokuchaneka kufuneka sithwale imithwalo eguquguqukayo. Njengoko ibhulorho ye-CMM ihamba okanye i-linear motor ikhawulezisa isigaba se-wafer kwi-Gs ezininzi, igranite mayingaxhathisi nje kuphela ukugoba, kodwa kunye ne-torsion kunye ne-harmonic resonance.
Iinjineli ze-ZHHIMG zikhetha ngokukodwa i-"Black Granite" kwiindlela ezitshintshayo ngenxa yobuninzi bayo kunye nolwakhiwo lwengqolowa olucolekileyo. Nangona ipleyiti yomphezulu esemgangathweni inokusebenzisa uhlobo olunemingxuma ngakumbi, isiseko se-CMM sifuna i-Young's Modulus ephezulu kangangoko ukuqinisekisa ukuba "ukuqhwanyaza" kwentshukumo yesantya esiphezulu akuguquleli kwisandi solwakhiwo esinokonakalisa idatha yokulinganisa.
Amanqanaba Okuchaneka Kwimveliso Yeekhonduktha Zeemiconductor: Isiseko Semveliso
Kwimveliso ye-semiconductor, i-throughput kunye ne-yield zezona ndlela zimbini zibalulekileyo zokulinganisa. Zombini zixhomekeke ngokuthe ngqo ekusebenzeni kwe-amanqanaba okuchanekaNokuba yinqanaba le-wafer kumatshini we-DUV/EUV lithography okanye inkqubo yokubeka kwindawo kwisixhobo se-Automated Optical Inspection (AOI), izinto ezisisiseko kufuneka zincede ekuphindaphindweni kwe-sub-nanometer.
Umngeni ophambili kwifab bubushushu. Iimoto ezizii-linear kunye nee-actuators zivelisa amandla amakhulu obushushu. Ukuba isiseko sesiteji senziwe nge-aluminium okanye intsimbi, ukwanda kobushushu okubangelwayo kuya kubangela ukuba i-wafer itshintshe ingalingani, nto leyo ekhokelela "kwiimpazamo zokugquma" ezonakalisa zonke iitships.
I-coefficient ephantsi kakhulu yokwandiswa kobushushu (CTE) yeGranite iqinisekisa ukuba nangona iimoto zishushu, "imephu" ebonakalayo yeqonga ihlala ihleli. Ngaphezu koko, i-ZHHIMG ibonelela ngezinto zegranite ezenzelwe wena ngeendlela ezidibeneyo zokuthwala umoya. Ngenxa yokuba igranite inokudityaniswa ibe yi-flatness efana nesipili, isebenza njengendawo efanelekileyo yokujongana neebheringi zomoya, ivumela izigaba ukuba "zintante" kwifilimu encinci yomoya engenakho ukungqubana kunye ne-zero stiction.
Ifiziksi yeNanopositioning Stage Base
Xa singena kummandla wehlabathiinqanaba lokubeka i-nanopositioning, sijongene neentshukumo ezincinci kuneenwele zomntu nge-10,000. Kweli nqanaba, ukungcangcazela lutshaba. Iifloor zemizi-mveliso eziqhelekileyo ziyangcangcazela rhoqo ngenxa yeenkqubo ze-HVAC, ukuhamba ngeenyawo, kunye noomatshini abakufutshane.
Igranite isebenza njengesihluzi esikhulu esingena ngaphantsi. Ngenxa yobunzima bayo obukhulu kunye nokuxinana okukhulu kwangaphakathi, ngokwemvelo ifunxa ukungcangcazela okuphezulu ngaphambi kokuba ifikelele kwiisensa ezibuthathaka okanye kwi-wafer ngokwayo. Olu "kuhlukaniswa okungenamsebenzi" yimbangela yokuba ababoneleli be-lithography abaphambili kwihlabathi baxhomekeke kwi-ZHHIMG ukubonelela ngeziseko ezinzima nezizinzileyo zezigaba zabo ezihambelana ne-vacuum. Igranite yethu iphathwe ngokukodwa ukuqinisekisa ukuba akukho gesi iphumayo, nto leyo eyenza ifaneleke kwiindawo ezine-vacuum ephezulu ezifunekayo kwiinkqubo ze-electron-beam kunye ne-EUV.
Ukuwela umda: Inzuzo ye-ZHHIMG
Utshintsho ukusuka kwibhloko yelitye engekalungiswa ukuya kwinxalenye ye-semiconductor-grade luhambo olunomonde omkhulu. Nangona ukugaya nge-CNC kusisondeza, ibakala lokugqibela elithi "Super-Precision" lifezekiswa ngokufaka isandla. Le yinkqubo apho iingcali ze-ZHHIMG zisebenzisa ii-abrasive pastes kunye neentshukumo ezenziwe ngesandla ukuze zichebe amaqhekeza e-micron ngexesha.
Yeinqanaba lokubeka i-nanopositioning, ukuba tyaba akukuphela kwemfuneko; ukuhambelana kunye nokuma okuthe nkqo kwemiphezulu yesikhokelo kubaluleke ngokulinganayo. Isakhiwo sethu sisebenzisa ii-laser trackers kunye namanqanaba e-elektroniki anezisombululo ze-0.1 arc-seconds ukuqinisekisa ukuba i-axis nganye ilungelelaniswe ngokugqibeleleyo. Eli nqanaba lobuchule liqinisekisa ukuba xa umthengi efaka ii-linear motors kunye nee-encoders zakhe, isiseko soomatshini sisondele "esigqibeleleyo" njengoko ifiziksi ivumela.
Ukuqinisekisa Ikamva Elihle
Njengoko ishishini lisiya kwi-2nm nodes nangaphezulu, iimfuno zokucoceka kwezinto kunye nokuzinza kobukhulu ziya kuqina ngakumbi. Ukuhlanganiswa kwegranite nezinye izinto eziphambili—ezifana neebhulorho ze-carbon fiber okanye ii-ceramic vacuum chucks—ngumda olandelayo kulawulo lokuhamba.
I-ZHHIMG isazimisele ukuba ngaphezu kokuba ngumthengisi nje; singamaqabane asebenzisanayo kwikhonkco lokubonelela ngezixhobo ze-semiconductor zehlabathi. Ngokubonelela ngeziseko ezizinzileyo ezifunekayo kwisizukulwana esilandelayo samanqanaba okuchaneka, sincedisa ekwakheni oomatshini abakha ikamva.
Ixesha lokuthumela: Feb-02-2026