Kwintsimi yokwenziwa kwe-semiconductor, ukuchaneka kwezixhobo zokuhlola i-wafer kuqinisekisa ngokuthe ngqo umgangatho kunye nesivuno seechips. Njengesiseko esixhasa amacandelo angundoqo okufumanisa, ukuzinza kwe-dimensional ye-base base material kudlala indima ebalulekileyo ekusebenzeni kwexesha elide lesixhobo. I-Granite kunye nentsimbi etyhidiweyo zizixhobo ezibini ezisisiseko ezisetyenziswa ngokuqhelekileyo kwizixhobo zokuhlola i-wafer. Uphononongo oluthelekisayo lweminyaka eyi-10 lubonakalise umahluko omkhulu phakathi kwabo ngokwemiqathango yokuzinza komda, ukubonelela ngezalathisi ezibalulekileyo zokukhethwa kwezixhobo.
Imvelaphi yoMfuniselo kunye noYilo
Inkqubo yokuveliswa kwee-wafers ze-semiconductor ineemfuno eziphezulu kakhulu zokufumanisa ukuchaneka. Nokuba ukutenxa kwe-micrometer-level dimensional kungakhokelela ekwehleni kokusebenza kwetshiphu okanye nokulahlwa. Ukuphonononga ukuzinza kwe-dimensional yegranite kunye nentsimbi etyhidiweyo ngexesha lokusetyenziswa kwexesha elide, iqela lophando lenze iimvavanyo ezifanisa iindawo zokusebenza zangempela. Igranite kunye neesampulu zentsimbi etyhidiweyo zolubalo olufanayo ziye zakhethwa zaze zabekwa kwigumbi lokusingqongileyo apho iqondo lobushushu laliguquguquka ukusuka kwi-15℃ ukuya kuma-35℃ kwaye ukufuma buyaguquguquka ukusuka kwi-30% ukuya kwi-70% RH. Ukungcangcazela komatshini ngexesha lokusebenza kwesixhobo kwafaniswa ngetafile yokungcangcazela. Imilinganiselo ephambili yeesampulu yalinganiswa nganye kwikota isebenzisa i-interferometer ye-laser echanekileyo, kwaye idatha ibhalwe ngokuqhubekayo iminyaka eyi-10.
Iziphumo zovavanyo: Inzuzo epheleleyo yegranite
Iminyaka elishumi yedatha yovavanyo ibonisa ukuba i-granite substrate ibonisa uzinzo olumangalisayo. I-coefficient yayo yokwandiswa kwe-thermal iphantsi kakhulu, i-avareji ye-4.6×10⁻⁶/℃ kuphela. Ngaphantsi kweenguqu ezinzulu zobushushu, ukutenxa kwe-dimensional kuhlala kulawulwa ngaphakathi kwe-± 0.001mm. Xa ujongana notshintsho lokufuma, ubume obuxineneyo begranite buyenza iphantse ingachaphazeleki, kwaye akukho tshintsho lunomlinganiselo olunokulinganiswa lwenzeka. Kwimeko-bume yokungcangcazela koomatshini, iimpawu ezibalaseleyo zokudambisa zegraniti zifunxa ngokufanelekileyo amandla okungcangcazela, kwaye ukuguquguquka komgangatho kuncinci kakhulu.
Ngokwahlukileyo, kwi-substrate ye-iron cast, i-coefficient ye-avareji yokwandiswa kwe-thermal ifikelela kwi-11 × 10⁻⁶/℃ - 13 × 10⁻⁶/℃, kunye nokuphambuka okuphezulu kwe-dimensional okubangelwa utshintsho lweqondo lokushisa phakathi kweminyaka eyi-10 yi-± 0.05mm. Kwindawo efumileyo, intsimbi egayiweyo ithanda ukuba nomhlwa kunye nokudleka. Ezinye iisampulu zibonisa ukuguqulwa kwendawo, kwaye ukutenxa komgangatho kuyanda. Ngaphantsi kwesenzo sokungcangcazela komatshini, intsimbi etyhidiweyo inokusebenza kakubi kwe-vibration yokudambisa kwaye ubungakanani bayo buguquguquka rhoqo, nto leyo eyenza kube nzima ukuhlangabezana neemfuno ezichanekileyo zokuhlolwa kwe-wafer.
Isizathu esibalulekileyo somahluko kuzinzo
I-Granite yenziwa ngaphaya kwamakhulu ezigidi zeminyaka ngokusebenzisa iinkqubo zejoloji. Ubume bayo bangaphakathi bunobunzima kwaye bufana, kwaye iikristali zamaminerali zicwangciswe ngokuzinzileyo, ziphelisa uxinzelelo lwangaphakathi ngokwemvelo. Oku kuyenza ingabi naluvelwano ngokugqithisileyo kutshintsho kwizinto zangaphandle ezifana nobushushu, ukufuma kunye nokungcangcazela. Intsimbi yentsimbi yenziwa ngenkqubo yokuphosa kwaye ineziphene ezincinci ezinje nge pores kunye nemingxuma yesanti ngaphakathi. Okwangoku, uxinzelelo olushiyekileyo oluveliswe ngexesha lenkqubo yokuphosa luthambekele ekubangeleni utshintsho lwe-dimensional phantsi kokukhuthazwa kwendalo yangaphandle. Iimpawu zetsimbi yentsimbi zenza ukuba zikwazi ukurusa ngenxa yokufuma, ukukhawulezisa umonakalo wesakhiwo kunye nokunciphisa ukuzinza kwe-dimensional.
Impembelelo kwisixhobo sokuhlola i-wafer
Izixhobo zokuhlola i-wafer esekelwe kwi-granite substrate, kunye nokusebenza kwayo okuzinzile kwe-dimensional, inokuqinisekisa ukuba inkqubo yokuhlola igcina ukuchaneka okuphezulu ixesha elide, ukunciphisa ukugweba kakubi kunye nokufumanisa okuphosiweyo okubangelwa ukuchaneka kwezixhobo, kunye nokuphucula kakhulu imveliso yemveliso. Okwangoku, iimfuno zokugcinwa okuphantsi zinciphisa iindleko ezipheleleyo zomjikelo wobomi besixhobo. Izixhobo ezisebenzisa i-cast iron substrates, ngenxa yokungazinzi kakuhle kwe-dimensional, zifuna ukulungiswa rhoqo kunye nokugcinwa. Oku akugcini nje ukwandisa iindleko zokusebenza kodwa kunokuchaphazela umgangatho wemveliso ye-semiconductor ngenxa yokungachaneki ngokwaneleyo, okubangela ilahleko yezoqoqosho enokubakho.
Phantsi kwentsingiselo yeshishini le-semiconductor lokufuna ukuchaneka okuphezulu kunye nomgangatho ongcono, ukukhetha igranite njengesiseko semathiriyeli yesixhobo sokuhlola i-wafer ngaphandle kwamathandabuzo linyathelo lobulumko lokuqinisekisa ukusebenza kwezixhobo kunye nokuphucula ukukhuphisana kwamashishini.
Ixesha lokuposa: May-14-2025