Yintoni iGranite esetyenziswa kwisixhobo sokusetyenzwa kwe-wafer?

I-Granite yimathiriyeli eyaziwayo kwishishini lokulungisa i-wafer ngenxa yeempawu zayo ezikhethekileyo zoomatshini kunye nokuqina.Lilitye lendalo elembiwa kwiikwari kwihlabathi liphela kwaye lisetyenziswe kangangeenkulungwane ngeenjongo ezahlukeneyo zokwakha, kubandakanya ukwenziwa kwezixhobo zesemiconductor.Kweli nqaku, siza kuxubusha iipropati zegranite kunye nezicelo zayo ezahlukeneyo kwizixhobo zokulungisa i-wafer.

Iipropati zeGranite

Igranite lilitye elivuthayo elenziwe ngemica, feldspar, kunye nequartz.Iyaziwa ngamandla ayo akhethekileyo, ubulukhuni, kunye nokuqina, okwenza ukuba ibe yinto efanelekileyo kwizicelo ezifuna ukuchaneka okuphezulu kunye nokuchaneka.I-Granite ine-coefficient ephantsi yokwandiswa kwe-thermal, oku kuthetha ukuba ayinwebeki okanye iyancipha ngenxa yokutshintsha kweqondo lokushisa, iyenze izinze kakhulu.Ukongezelela, i-granite iyamelana nokubola kunye neekhemikhali, nto leyo eyenza ibe yinto efanelekileyo yokusetyenziswa kwiindawo ezinzima.

Ukusetyenziswa kweGranite kwiSixhobo sokuLungisa iWafer

I-Granite yinto esetyenziswa ngokubanzi kwishishini lokulungisa i-wafer ngenxa yendibaniselwano ekhethekileyo yeepropati.Oku kulandelayo zezinye zezicelo zegranite kwisixhobo sokusetyenzwa kwe-wafer:

1. Izixhobo zeMetrology

Igranite iqhele ukusetyenziswa xa kusenziwa izixhobo ze-metrology, ezinje ngoomatshini bokulinganisa abalungelelanisiweyo (i-CMMs) kunye neenkqubo zomlinganiselo wamehlo.Ezi zixhobo zifuna iindawo ezizinzileyo ezinokumelana nokungcangcazela kunye nobushushu.Ukuqina okuphezulu kunye nokwandiswa kwe-thermal ephantsi kwegranite kwenza kube yinto efanelekileyo kwizicelo ezinjalo.

2. Wafer Chucks

Ii-wafer chucks zisetyenziselwa ukubamba ii-wafers ngexesha lenkqubo yokuvelisa.Ezi chucks zifuna umphezulu othe tyaba nozinzileyo ukunqanda iwafer ekujikeni okanye ukugoba.Igranite ibonelela ngomphezulu othe tyaba ozinze kakhulu kwaye imelana nemfazwe, iyenza ibe yeyona nto ibalaseleyo kwiichucks ezisicaba.

3. IZixhobo zeMichiza yokuNgcolisa (CMP).

Izixhobo ze-CMP zisetyenziselwa ukupolisha ii-wafers ngexesha lenkqubo yokuvelisa.Ezi zixhobo zifuna iqonga elizinzileyo elinokuxhathisa ukungcangcazela kunye nobushushu.Ukuqina okugqwesileyo kunye nokwandiswa kwe-thermal ephantsi ye-granite kuyenza ibe yinto efanelekileyo yezixhobo ze-CMP.

4. Izixhobo zokuHlola iWafer

Isixhobo sokuhlola i-wafer sisetyenziselwa ukuhlola ii-wafers zokukhangela iziphene kunye neziphene.Ezi zixhobo zifuna umgangatho ozinzileyo kunye nosicaba ukuze kuqinisekiswe imilinganiselo echanekileyo.IGranite ibonelela ngomphezulu ozinzileyo kunye nosicaba ongaxhathisiyo, nto leyo eyenza ukuba ibe yeyona nto ifanelekileyo kwisixhobo sokuhlola iwafer.

Ukuqukumbela

Ukuqukumbela, igranite sisixhobo esisetyenziswa ngokubanzi kumzi mveliso we-wafer ngenxa yeepropathi zayo ezikhethekileyo zoomatshini kunye nokuqina.Ihlala isetyenziswa ekwenzeni izixhobo ze-metrology, ii-wafer chucks, izixhobo ze-CMP, kunye nezixhobo zokuhlola i-wafer.Inhlanganisela ekhethekileyo yeepropati yenza kube yinto efanelekileyo kwizicelo ezifuna ukuchaneka okuphezulu kunye nokuchaneka.Ngeenzuzo zayo ezininzi, igranite ihlala ilukhetho oludumileyo lwezixhobo zokusetyenzwa kwe-wafer, kwaye ukusetyenziswa kwayo kunokwenzeka ukuba kuqhubeke ukukhula kwixesha elizayo.