Ngokukhula kwetekhnoloji, ukusetyenziswa kwezixhobo ze-granite kwizixhobo ze-semiconductor kuye kwaziwa ngakumbi.IGranite lukhetho oludumileyo lokusetyenziswa kwitekhnoloji yokucubungula izixhobo zesemiconductor ngenxa yeenzuzo zayo ezininzi.I-Granite yenye yezona zinto zinzima kwaye zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala zihlala khona.Yeyona mqhubi we-thermal ogqwesileyo kwaye ine-coefficient ephantsi kakhulu yokwandiswa kwe-thermal eyenza ilungele ukusetyenziswa kwizicelo zobushushu obuphezulu.
Itekhnoloji yokucubungula iinxalenye zegranite kwisixhobo se-semiconductor ibandakanya uluhlu lweendlela kunye neenkqubo.Amanyathelo abalulekileyo kukupolisha, ukuhombisa, kunye nokucoca umphezulu wegranite.Uhlobo lobuchwephesha obusetyenzisiweyo luya kuxhomekeka kwisicelo kunye nohlobo lwegranite esetyenziswayo.
Ukupholisha ngumba obalulekileyo wokulungisa iinxalenye zegranite kwisixhobo sesemiconductor.Ukupholisa umphezulu wegranite ukuya kwinqanaba eliphezulu lokugudiswa kunceda ukuqinisekisa ukuba i-wafer ayibonakali ngexesha lokucubungula.Oku kunciphisa amathuba okungcoliseka ngamasuntswana okanye imikrwelo kumphezulu we-wafer.Ukupholisha kunokufezekiswa ngeendlela ezahlukeneyo ezinje ngokugulisa oomatshini, ukupolisha kweekhemikhali, kunye nokupholisha kwe-electrochemical, phakathi kwabanye.
I-Etching yenye inkalo esisiseko yokusetyenzwa kwamalungu egranite kwizixhobo zesemiconductor.I-Etching isetyenziselwa ukwenza iipatheni ezifunwayo kumphezulu wenxalenye yegranite.Iipateni zisetyenziselwa ukwenziwa kunye nokusetyenzwa kwee-wafers ze-semiconductor.Kukho iindlela ezininzi zokwenza i-etching, kubandakanya i-plasma etching, i-chemical etching emanzi, kunye ne-chemical etching eyomileyo, phakathi kwabanye.Uhlobo lwenkqubo ye-etching esetyenzisiweyo iya kuxhomekeka kwizinto eziphathekayo kunye nomzekelo ofunekayo.
Ukucoca umphezulu wegraniti nako kubalulekile.Inkqubo yokucoca iyimfuneko ukususa nayiphi na into engcolileyo ebusweni, njengamaqhekeza kunye nezinye izinto ezingcolileyo ezinokuphazamisa inkqubo yokuvelisa i-semiconductor.Ukucoca kungenziwa ngokusebenzisa iindlela ezahlukeneyo ezifana nokucocwa kwe-ultrasonic, ukucocwa kweekhemikhali, okanye ukucocwa kweplasma, phakathi kwabanye.
Ukuqukumbela, itekhnoloji yokulungisa iinxalenye zegranite kwizixhobo zesemiconductor idlala indima ebalulekileyo kwinkqubo yokwenziwa kwesemiconductor.Ukusetyenziswa kwamacandelo e-granite kunceda ukuphucula umgangatho kunye nokuthembeka kwemveliso yokugqibela.Itekhnoloji yokucubungula ibandakanya ukupolisha, ukukrolwa, kunye nokucoca umphezulu wegranite.Kukho iindlela ezahlukeneyo ezikhoyo kwisinyathelo ngasinye, kwaye uhlobo lweteknoloji yokucubungula esetyenzisiweyo iya kuxhomekeka kwizinto eziphathekayo kunye nomzekelo ofunekayo.Ngokusebenzisa itekhnoloji yokulungisa echanekileyo, inkqubo yokuvelisa i-semiconductor inokwenziwa isebenze ngakumbi, ithembekile, kwaye ingabizi kakhulu.
Ixesha lokuposa: Mar-19-2024