Kwiindawo ezithuleyo emhlabeni—iindawo zokwenza izinto ze-semiconductor—kuliwa idabi elingathethiyo nxamnye notshaba olungabonakaliyo: ukungcangcazela. Njengoko ishishini le-microelectronics lehlabathi lisiya kwimida yesango le-logic ye-2nm nangaphezulu, ukunyamezela ukungazinzi koomatshini kuye kwaphela. Ngaphakathi kwezi ndawo zixineneyo nezilawulwa kakhulu, ukusebenza kwesixhobo se-lithography okanye i-metrology esixabisa izigidi zeerandi kuxhomekeke kakhulu kumhlaba esimi kuwo. Yingakho imfuno yeigranite engenazingcangcazelo ye-fabiziseko zophuhliso ziguquke ukusuka kwinkcazo yobunewunewu ukuya kwimfuneko esisiseko yokwenza ngcono isivuno.
Iinkqubo zokwahlukanisa ukungcangcazela zemveli zihlala zigxila kwiibheringi zomoya ezisebenzayo okanye ukudanyaza okuntsonkothileyo kwe-elektroniki. Nangona kunjalo, iingqondo zobunjineli eziphucukileyo eYurophu naseMntla Melika ziyaqaphela ukuba iinkqubo ezisebenzayo zisebenza kuphela njengozinzo olungenamsebenzi lwesiseko sazo. I-granite yendalo, ngakumbi xa isetyenzwa kwi-semiconductor grade granite surface plate standard, inika uxinano lwangaphakathi lweemolekyuli oluzabalazela ukuphinda-phinda izinto zokwenziwa. Isakhiwo sekristale se-gabbro kunye ne-granite deposits ezikhethiweyo ze-ZHHIMG sisebenza njengesihluzi sendalo esiphantsi, sithatha amandla e-micro-acoustic aphindaphindayo ngaphambi kokuba siguqulelwe kwisixhobo-isiphelo sokufuduka.
Xa sixoxa ngeipleyiti yomphezulu wegranite yebanga le-semiconductor, sibhekisa kwinqanaba lokuchaneka elidlula i-metrology eqhelekileyo yemizi-mveliso. Kwi-workshop eqhelekileyo, ipleyiti yeBanga 00 inokwanela ukujonga iindawo zoomatshini. Kwimeko ye-semiconductor, iinjineli ze-ZHHIMG kufuneka ziqwalasele ukuchaneka kwe-volumetric, i-hygroscopy yomphezulu, kunye nokuzinza kweenkozo ixesha elide. Naluphi na utshintsho oluncinci kwilitye kwiminyaka emihlanu lunokukhokelela ekulahlekelweni okukhulu kwengqwalasela kwi-scanner ye-EUV (Extreme Ultraviolet). Ke ngoko, ukucubungula kwethu kubandakanya ixesha elinzima lokunciphisa uxinzelelo, okuvumela ilitye ukuba lifikelele kwimeko yokulingana kwejoloji ngaphambi kokuba kuqale ukuleqa ngokuchanekileyo kokugqibela.
Ukubaluleka koigranite engenazingcangcazelo ye-fabUkusetyenziswa kwandiswa ngakumbi ziimfuno ezikhulayo zokusetyenziswa kwe-wafer yanamhlanje. Iimoto ezikhawulezayo ezijikelezayo, ezihambisa izigaba ze-wafer ngokukhawuleza okumangalisayo, zivelisa amandla abalulekileyo asebenzayo. Ngaphandle kwesiseko esikhulu, esingasebenziyo, nesinciphisa ukungcangcazela, la mandla adala ukushukuma okushiyekileyo okufuna "ixesha lokuzinza" phakathi kokulinganisa. Ngokusebenzisa isisombululo se-granite esine-ZHHIMG ephezulu, abaqhubi be-fab banokulinciphisa kakhulu eli xesha lokuzinza, beguqulela ngokuthe ngqo kwii-wafers ezingaphezulu ngeyure kunye neendleko eziphantsi zobunini.
Izinto ezikwindawo ezingqongileyo zidlala indima ebalulekileyo ekukhetheni izinto. Igumbi lokucoca yindawo ebuthathaka kakhulu apho ukuguquguquka kobushushu, nokuba kuncinci kangakanani, kunokubangela ukuba izinto zande okanye zinciphe.ipleyiti yomphezulu wegranite yebanga le-semiconductorIimveliso zikhethwa ngenxa ye-coefficient yazo ephantsi kakhulu yokwandiswa kobushushu (CTE). Xa zidityaniswe netekhnoloji yethu yetshaneli yokupholisa edibeneyo, ezi ziseko zegranite zibonelela ngeqonga elingaguqukiyo lobushushu eligcina ubuthe tyaba balo nokuba bubushushu obuveliswa zizinto ze-elektroniki ezingaphezulu kwalo.
Xa sijonga umda obanzi weshishini, ukutshintshela kwi-300mm kunye nobukhulu be-wafer obunokubakho be-450mm kufuna izinto ezinkulu nezizinzileyo zesakhiwo. Olu luhlu luzisa umngeni wobunjineli owahlukileyo: ukugcina ucwangco olupheleleyo phezu kwendawo enkulu ngelixa kuqinisekiswa ukuba ilitye "alinangcangcazelo." I-ZHHIMG ijongene noku ngokutyala imali kwimishini yokugaya kunye ne-lapping ye-CNC eyenzelwe wena, enokufikelela kumlinganiselo we-micron kwiimitha ezininzi zelitye. Oku kuqinisekisa ukuba njengoko izixhobo zobugcisa zikhula ngobukhulu, uzinzo lwesiseko alunciphi.
Ngaphaya kwezixhobo zekhompyutha, ifilosofi ye-ZHHIMG isekelwe ekubonakaleni kobugcisa kunye nobunjineli bentsebenziswano. Siyaqonda ukuba kwi-OEM (Umenzi weZixhobo zoqobo) eMelika okanye kwi-European Union, ukuthembeka kwekhonkco lokubonelela kubaluleke njengokuqina kwelitye. Amaxwebhu ethu okulawula umgangatho abonelela "ngesatifikethi sokuzalwa" esipheleleyo kuyo yonke into.igranite engenazingcangcazelo ye-fabukuhanjiswa, ukuchaza imvelaphi yelitye, ukwakheka kwezimbiwa, kunye neziphumo zovavanyo lwe-ultrasonic. Eli nqanaba lokuqina liqinisekisa ukuba xa kufakwa isiseko se-ZHHIMG, siba yinxalenye ehlala ihleli nethembekileyo yelifa le-fab.
Njengoko ubukrelekrele bokwenziwa kunye nekhompyutha esebenza kakuhle ziqhuba utyalo-mali olutsha lwe-semiconductor, ukufuna indawo "engashukumiyo ngokupheleleyo" kuyaqhubeka. I-ZHHIMG isazinikele kule njongo, iphucula ubugcisa be-metrology yamatye ukuze ihlangabezane nemingeni yezakhiwo ze-nano zangomso. Sikholelwa ukuba ikamva letekhnoloji lakhiwe kwisiseko esiqinileyo, kwaye siyaziqhenya ngokubonelela ngezisombululo ze-granite surface plate ezizinzileyo, ezikumgangatho we-semiconductor kubayili bexesha ledijithali.
Ukuhlanganiswa kwelitye elichanekileyo le-ZHHIMG kwindawo ethile kungaphezulu nje kokhetho lwesakhiwo—kukuzinikela kwimigangatho ephezulu kakhulu ye-physical metrology. Njengoko eli shishini lijonge kwiminyaka elishumi ezayo yokuvelisa izinto ezintsha, ubukho obuthuleyo nobungenakushukunyiswa be-precision granite buya kuhlala buyiqhawe elizolileyo kuyo yonke imveliso ye-wafer ephumelelayo.
Ixesha lokuthumela: Matshi-05-2026