Kutheni Abavelisi Bezixhobo Ze-Semiconductor Bechaza Iziseko ZeGranite Zendalo - Izizathu Ezi-5 Ezibalulekileyo

Kwihlabathi elinzima lokwenza izinto ze-semiconductor, apho ubukhulu beempawu bulinganiswa ngee-nanometers, isiseko somatshini sibaluleke kakhulu njenge-optics okanye inkqubo ye-vacuum. Nokuba ngumatshini wokuhlola i-wafer okanye inkqubo ye-lithography ye-deep-ultraviolet (DUV), ii-OEM zehlabathi zihlala zichaza i-granite emnyama yendalo kwiziseko zazo zesakhiwo.

Kodwa kutheni ilitye lendalo liyimigangatho yegolide kwishishini elichazwa zizixhobo zokwenziwa ezisemgangathweni ophezulu? Nazi izizathu zobugcisa ezintlanu zokuba kutheni i-granite yendalo ilukhetho olungenakuthengiswa kwizixhobo ze-semiconductor.

1. Uzinzo oluPhezulu lobushushu kwiFab

Indawo ye-semiconductor "Front-End" ifuna ukuhambelana okugqibeleleyo. Nokuba yincinci yeqondo lokutshintsha kobushushu inokubangela ukuba izakhiwo zesinyithi zande, nto leyo ekhokelela kwiimpazamo zokugquma okanye "ukufiphala" kwi-lithography.

I-granite yendalo ine-Coefficient of Thermal Expansion (CTE) ephantsi kakhulu. Xa uthelekisaisiseko segraniteKwimishini yokuhlola i-wafer ukuya kwisinyithi okanye i-aluminium, i-granite ihlala "iqandisiwe" ngobukhulu nangona kukho utshintsho oluncinci kwindalo. Olu tshintsho lobushushu luqinisekisa ukuba indlela ye-optical ihlala ilungelelaniswe ukusuka kwi-wafer yokuqala ye-shift ukuya kweyokugqibela.

2. Ukudambisa okungaqhelekanga kokungcangcazela kweNanometer Precision

Izixhobo zeLithography kunye nezixhobo zeMetrology ezinesisombululo esiphezulu ziyasabela kakhulu “kwingxolo”—ukungcangcazela okuvela kumgangatho wefektri, iifeni zokupholisa, okanye iziphatho zerobhothi zewafer.

Nangona iintsimbi zidla “ngokukhazimla” (zingcangcazela ixesha elide emva kokungqubana), igranite yendalo inomthamo ophezulu wokudambisa ngaphakathi. Ifunxa kwaye ichithe amandla e-kinetic ngokukhawuleza. Le granite yokudambisa ukungcangcazela yezixhobo ze-lithography ivumela umatshini ukuba uhlale ngokukhawuleza emva kokuhamba ngesantya esiphezulu, nto leyo eyandisa kakhulu amandla esixhobo se-“Units Per Hour” (UPH).

3. Ayisebenzisi Magnetic kwaye Ayisebenzisi Umbane

Iinkqubo ze-semiconductor zihlala ziquka imisebe ye-electron ebukhali (i-E-beam) okanye ii-motor ze-magnetic linear ezichanekileyo kakhulu. Isiseko sesinyithi sinokuphazamisana nale mimandla ye-magnetic okanye senze imisinga ye-eddy ephazamisa ukuchaneka kwe-sensor.

Njengesigqubuthelo sendalo, igranite ibonelela ngeqonga le-metrology elingengomagnetic lamagumbi okucoca. Ayiphazamisi imeko-bume ye-electromagnetic yesixhobo, ivumela idatha ecocekileyo, engonakaliswanga ngexesha lokumapha i-wafer topography okanye ukuhlolwa kweziphene.

4. Ukumelana nokugqwala kunye nokuhambelana kwegumbi lokucoca

Kwigumbi lokucoca (iKlasi 1 okanye iKlasi 10), ukuphuma kwegesi kunye nokuveliswa kwamasuntswana ziintshaba zemveliso. Ngokungafaniyo nentsimbi ephoswe okanye intsimbi, igranite yendalo ayigqwali, ayixubi, okanye ayifuni iipeyinti zeekhemikhali kunye neengubo ezinokuqhekeka okanye ziphume igesi ngokuhamba kwexesha.

I-granite ayisebenzi kakuhle ngokweekhemikhali. Nokuba isetyenziswa kwiindawo ezikhethekileyo zokucoca ezisetyenziswa kwi-semiconductor fab, igcina umgangatho wayo ucocekile. Ulwakhiwo lwayo oluxineneyo (malunga ne-3100kg/m³) luqinisekisa ukuba ihlala "ingathathi cala" kuyo yonke i-cycle yezixhobo.

5. Ukufikelela "kwi-True Flatness" ngokuLap-Lapping

Kwishishini le-semiconductor, "iflethi" ayithe tyaba ngokwaneleyo. Iinxalenye zihlala zifuna ukuchaneka kwinqanaba le-nano nto leyo oomatshini be-CNC abangenakukwazi ukuyifikelela.

I-granite yendalo ivumela ukugoba ngesandla, inkqubo yokucoca ngesandla apho iingcali zifikelela ekunyamezeleni ukuthamba okuqinileyo njenge-±0.001mm. Eli nqanaba lokuchaneka libalulekile kwizigaba zomoya ezisetyenziswa kwi-wafer scanners zanamhlanje, apho umsantsa womoya phakathi kweqonga kunye nesiseko kufuneka uhlale ufana ngokugqibeleleyo kulo lonke uhambo.

Inzuzo ye-ZHHIMG: Ukuchaneka kweNano-Age

Apha kwi-UNPARALLELED (ZHHIMG), siyiqonda ngcono imeko yobushushu begranite kwi-semiconductor fabs kunaye nabani na. Sibonelela ngezixhobo zegranite ezenziwe ngokwezifiso kubavelisi bezixhobo ze-semiconductor abaphambili kwihlabathi, abagxile koku kulandelayo:

• Iziseko ezihambelana ne-vacuum ezinkulu kakhulu.

• Imiqadi echanekileyo yeenkqubo ze-gantry ezikhawulezayo.

• Izifakelo ezidityanisiweyo zokufakelwa kweemoto ezithe ngqo.

I-granite yethu emnyama enobunzima obuphezulu ifumaneka kwaye icutshungulwa ukuze ihlangabezane neemfuno ezifunekayo kakhulu zesicwangciso se-semiconductor sehlabathi.