Kutheni Izixhobo Ze-Semiconductor Zixhomekeke Kwiziseko Ze-Granite: Imfihlo Engasemva Kokuzinza kwe-±0.001mm

Kwishishini le-semiconductor, ukuchaneka akusiyo nje indlela yokusebenza—sisisiseko senkqubo yonke yokuvelisa. Ukusuka ekuhlolweni kwe-wafer kunye ne-lithography ukuya kwiinkqubo zokulungelelaniswa kwe-optical kunye ne-metrology, izixhobo kufuneka zigcine ukuchaneka kokubeka okuzinzileyo kakhulu. Nokuba ukuphambuka kwee-microns ezimbalwa kunokukhokelela kwiimpazamo zokulinganisa, ilahleko yemveliso, okanye ukusilela kwesixhobo.

Yingakho iziseko zegranite ziye zaba yinxalenye ebalulekileyo yesakhiwo kwizixhobo ze-semiconductor. Zaziwa ngokuqina kwazo okugqwesileyo, ukudambisa ukungcangcazela, kunye nokuzinza kobushushu, izakhiwo zegranite ezichanekileyo kakhulu zibonelela ngesiseko esizinzileyo sesalathiso esifunekayo ukufikelela kuzinzo lokubeka indawo oluyi-±0.001 mm.

Apha eZHHIMG, senza imvelisoiziseko zegranite ezichanekileyo kakhuluyenzelwe ngokukodwa ukusetyenziswa kwe-semiconductor kunye ne-metrology, ixhasa isizukulwana esilandelayo sezixhobo ezichanekileyo kakhulu.

Umngeni Wokuchaneka Kwimveliso Yee-Semiconductor

Iinkqubo zokwenza ii-semiconductor zisebenza kwizikali ezincinci kakhulu. Iinkqubo ezininzi zanamhlanje zibandakanya ukuchaneka kokubekwa kwinqanaba le-nanometer, oko kuthetha ukuba isiseko solwakhiwo lwezixhobo kufuneka sihlale sizinzile ngokugqibeleleyo phantsi kweemeko ezitshintshayo zendalo.

Imingeni ephambili ibandakanya:

• Ukwanda kobushushu okubangelwa kukuguquguquka kobushushu obuphakathi

• Ukungcangcazela okuvela kumatshini okanye kwizakhiwo ezikufutshane

• Ukuguqulwa koomatshini phantsi kwemithwalo enzima

• Ukushukuma okunobukhulu bexesha elide

Ukuba isakhiwo sesiseko asizinzanga, kwanezona sensors ziphambili, ii-linear motors, okanye izinto ezibonakalayo azikwazi ukugcina ukuchaneka kokulungelelaniswa.

Kulapho ke iziseko zegranite ezichanekileyo kakhulu zibonelela khona ngenzuzo enkulu.

Kutheni iGranite iyinto efanelekileyo kwiZiseko zeZixhobo zeSemiconductor

1. Uzinzo oluPhezulu lobushushu kwiinkqubo zeMetrology

Enye yezona mfuno zibalulekileyo kwizixhobo ze-semiconductor kukuzinza kobushushu kwi-metrology. Izinto ziyanda kwaye zinciphe xa ubushushu butshintsha, nto leyo echaphazela ngqo ukuchaneka komlinganiselo.

I-granite emnyama yendalo enoxinano oluphezulu inomlinganiselo ophantsi kakhulu wokwanda kobushushu xa ithelekiswa neentsimbi ezininzi. Oku kuvumela iziseko ze-granite ukuba zigcine uzinzo lwejometri nakwiindawo ezinotshintsho oluncinci lobushushu.

Kwiinkqubo zokuhlolwa kwee-semiconductor kunye ne-metrology ezifuna ukuchaneka kwe-sub-micron, olu zinzo lubalulekile.

2. Ukudambisa ukungcangcazela okungaqhelekanga

Izixhobo ze-semiconductor zihlala zidibanisa iinkqubo zokuhamba ngesantya esiphezulu ezifana nezi:

• Iimoto ezithe tyaba

• Amanqanaba okuthwala umoya

• Iinkqubo zokuskena ezibonakalayo

• Iimodyuli zokubeka ngokuchanekileyo

Ezi nkqubo zivelisa ii-micro-vibrations ngexesha lokusebenza. Ulwakhiwo lwe-crystalline yendalo yeGranite lubonelela ngokunciphisa ukungcangcazela okugqwesileyo, okunceda ukufunxa nokukhupha amandla ngokukhawuleza kakhulu kunezakhiwo zesinyithi.

Ngenxa yoko, iziseko zegranite zinciphisa ingxolo kwiinkqubo zokulinganisa kwaye ziphucula ukuchaneka kokubekwa kwazo.

3. Ukuqina Okuphezulu kunye Nozinzo Lomthwalo

Izixhobo ezichanekileyo kakhulu zingabandakanya izinto ezinzima ezifana nezi:

• Iimodyuli ezibonakalayo

• Izigaba ze-wafer

• Iinkqubo zokucoca umoya

• Amaqonga okushukuma ngokuchanekileyo

I-Granite inika amandla aphezulu okuxinwa kunye nokuqina kwesakhiwo, okwenza ukuba ikwazi ukuxhasa imithwalo enzima ngaphandle kokuguquka. Ngokungafaniyo nezakhiwo zesinyithi, i-granite nayo ayikhululeki kuxinzelelo lwangaphakathi, oko kuthetha ukuba igcina imo yayo kunye nokuchaneka kwayo ixesha elide.

Oku kwenza i-granite ibe yeyona nto iphambili ekhethwayo kwiimashini ze-CMM, izixhobo zokuhlola i-semiconductor, kunye neenkqubo zokulungelelanisa i-optical.

4. Ukumelana nokugqwala kunye nokuzinza kwexesha elide

Kwiindawo ezicocekileyo, izinto kufuneka zihlale zizinzile kwaye zingangcolisi. I-granite ineenzuzo ezininzi zendalo:

• Ayinamagnethi

• Ukumelana nokugqwala

• Ayinamhlwa

• Ukugcinwa okuphantsi

Ezi mpawu ziqinisekisa ubomi benkonzo ende kunye nokusebenza okuthembekileyo kwiindawo ezichanekileyo ezifana nezibonelelo zokwenza izinto ze-semiconductor kunye neelabhoratri eziphambili.

Ukusetyenziswa kweGranite Bases kwiZixhobo zeSemiconductor

Ngenxa yezi nzuzo, iziseko zegranite zezixhobo ze-semiconductor zisetyenziswa kakhulu kwezi:

• Oomatshini bokuhlola iiwafer

• Iinkqubo ze-semiconductor metrology

• Amaqonga okulungelelanisa okubonakalayo

• Izakhiwo zenkqubo engaphantsi kweLithography

• Amaqonga okushukuma anomoya

• Oomatshini bokulinganisa ngokuchanekileyo (i-CMM)

Kwiinkqubo ezininzi eziphambili, isiseko segranite sisebenza njengomphezulu ophambili wesalathiso, siqinisekisa ukuba zonke izinto ezishukumayo zigcina ulungelelwaniso oluchanekileyo.

Izisombululo zeGranite ze-ZHHIMG Ultra-Precision

Apha e-ZHHIMG, sigxile ekuveliseni izinto zegranite ezichanekileyo kakhulu kumashishini e-semiconductor kunye ne-metrology. Iziseko zethu zegranite zenzelwe ukuhlangabezana neemfuno ezingqongqo zabavelisi bezixhobo ezichanekileyo kakhulu.

Iingenelo eziphambili zeziseko zegranite zeZHHIMG ziquka:

• Igranite emnyama ye-ZHHIMG® enobunzima obuphezulu eneempawu ezibonakalayo eziphezulu

• Ukugawula nokulepha ngokuchanekileyo kwiindawo ezithe tyaba kakhulu

• Ukuhlanganiswa ngokwezifiso kwezinto ezifakelwe ngemisonto, imingxunya yomoya, kunye neempawu zokufakela ngokuchanekileyo

• Ulawulo lokusingqongileyo ngexesha lokuvelisa ukuze kufumaneke ukuchaneka okuphezulu

• Ubungakanani kunye nezakhiwo ezenziwe ngokwezifiso zoyilo lwezixhobo ze-semiconductor

Iimveliso zethu zisetyenziswa kakhulu ngabavelisi bezixhobo zehlabathi jikelele kwimizi-mveliso ye-semiconductor, i-laser, kunye ne-optical, bebonelela ngeziseko zesakhiwo ezithembekileyo zeenkqubo ezichanekileyo kakhulu.

Isiseko seTekhnoloji eNgcono kakhulu

Ukufikelela kuzinzo lwe-±0.001 mm akunakwenzeka ngaphandle kwesiseko esizinzileyo ngokwesakhiwo. Iziseko zegranite zibonelela ngozinzo loomatshini, ukwahlulwa kokungcangcazela, kunye nokuthembeka kobushushu obufunekayo kwizixhobo zanamhlanje ze-semiconductor.

Njengoko itekhnoloji ye-semiconductor iqhubeka ihambela phambili ukuya kwiindawo ezincinci kunye nokuchaneka okuphezulu, izakhiwo ze-granite ezichanekileyo kakhulu ziya kuhlala ziyinxalenye ebalulekileyo kwiinkqubo ze-metrology ezisebenzayo kakhulu kunye neenkqubo zokuvelisa.

Kwabavelisi bezixhobo abafuna izinto zokwakha ezizinzileyo nezithembekileyo, iziseko zegranite aziyonto ikhethekileyo—ziyimfuneko.