Kwikhonkco eliphambili lokwenziwa kweetshiphusi - ukuskena kwe-wafer, ukuchaneka kwezixhobo kumisela umgangatho wetshiphusi. Njengenxalenye ebalulekileyo yesixhobo, ingxaki yokwandiswa kobushushu besiseko somatshini wegranite itsale ingqalelo enkulu.
I-coefficient yokwandiswa kobushushu begranite idla ngokuba phakathi kwe-4 kunye ne-8×10⁻⁶/℃, nto leyo engaphantsi kakhulu kuneyeentsimbi kunye ne-marble. Oku kuthetha ukuba xa ubushushu butshintsha, ubungakanani bayo butshintsha kancinci. Nangona kunjalo, kufuneka kuqatshelwe ukuba ukwanda kobushushu obuphantsi akuthethi ukuba akukho ukwanda kobushushu. Phantsi kokuguquguquka okukhulu kobushushu, nokuba ukwanda okuncinci kunokuchaphazela ukuchaneka kwe-nanoscale ye-wafer scanning.
Ngexesha lenkqubo yokuskena i-wafer, kukho izizathu ezininzi zokuba kubekho ukwanda kobushushu. Ukuguquguquka kobushushu kwindawo yokusebenzela, ubushushu obuveliswa kukusebenza kwezixhobo, kunye nobushushu obuphezulu obukhawulezileyo obuziswa kukucutshungulwa kwe-laser konke oku kuya kubangela ukuba isiseko se-granite "sande kwaye sinciphe ngenxa yotshintsho lobushushu". Nje ukuba isiseko sidlule ekukhuleni kobushushu, ukuthe tye kwereyile yesikhokelo kunye nokuba sithe tyaba kweqonga kunokuphambuka, okubangela ukuba itafile ye-wafer ihambe ngendlela engachanekanga. Izixhobo ezixhasayo ze-optical nazo ziya kutshintsha, okubangela ukuba umqadi wokuskena "uphambukile". Ukusebenza ngokuqhubekayo ixesha elide kuya kuqokelela iimpazamo, okwenza ukuchaneka kube kubi ngakumbi nangakumbi.
Kodwa ungakhathazeki. Abantu sele benazo izisombululo. Ngokuphathelele izinto, imithambo yegranite ene-coefficient ephantsi yokwandiswa kobushushu iya kukhethwa kwaye iphathwe ngokuguga. Ngokuphathelele ulawulo lobushushu, ubushushu beworkshop bulawulwa ngokuchanekileyo kwi-23±0.5℃ okanye nangaphantsi, kwaye isixhobo esisebenzayo sokusasaza ubushushu siya kuyilwa nesiseko. Ngokuphathelele uyilo lwesakhiwo, izakhiwo ezilinganayo kunye neenkxaso eziguquguqukayo ziyasetyenziswa, kwaye ukujonga ngexesha langempela kwenziwa ngee-sensors zobushushu. Iimpazamo ezibangelwa kukuguqulwa kobushushu zilungiswa ngokuguquguqukayo zii-algorithms.
Izixhobo eziphezulu ezifana noomatshini be-lithography be-ASML, ngokusebenzisa ezi ndlela, zigcina isiphumo sokwandiswa kobushushu besiseko segranite sikwinqanaba elincinci kakhulu, nto leyo evumela ukuchaneka kokuskena kwe-wafer ukufikelela kwinqanaba le-nanometer. Ke ngoko, lo gama nje ilawulwa ngokufanelekileyo, isiseko segranite sihlala silukhetho oluthembekileyo lwezixhobo zokuskena ze-wafer.
Ixesha leposi: Juni-12-2025