Njengoko amashishini e-semiconductor kunye ne-optical ehlabathi eqhubela phambili ukuya kubukhulu beempawu ezincinci kunye neemfuno eziphezulu zokuchaneka, izixhobo ezisisiseko ezivumela ukulinganisa kunye nokulungelelanisa ziye zaba yinto ebaluleke kakhulu. Kwimveliso ye-semiconductor, apho ubukhulu be-transistor ngoku bufikelela kwi-nanometers yedijithi enye, nakwiinkqubo ze-optical apho ukulungelelaniswa kokulungelelaniswa kufikelela kwiinxalenye zobude be-wavelength, uzinzo kunye nokuchaneka kwezixhobo zokulinganisa kumisela ngokuthe ngqo isivuno semveliso kunye nokusebenza. Eli nqaku lihlola isizathu sokuba izixhobo zokulinganisa i-granite-kuquka iipleyiti zomphezulu we-granite, iziseko ze-granite ezichanekileyo, kunye nezinto ze-metrology-ziye zaba ngumgangatho weshishini wezicelo ezichanekileyo kakhulu, ziphumelela ezinye iindlela zesinyithi zemveli.
Imfuno yokuchaneka kwe-sub-micron idale utshintsho olukhulu kwi-metrology. Izixhobo zokulinganisa zesinyithi kunye nentsimbi zemveli, nangona zanele ukwenziwa kwemveli, ziyasokola ukugcina uzinzo phantsi kweemeko ezingqongqo ezifunekayo zokuhlolwa kwe-semiconductor wafer, ukulungelelaniswa kwe-lithography, kunye nokuhlanganiswa kwe-optical. I-Granite, enomxube wayo okhethekileyo weempawu zomzimba ezenziwe kwiminyaka engaphezu kwezigidi phantsi koqweqwe loMhlaba, inikezela ngesisombululo esijongana neemfuno zokuchaneka ezinzima kakhulu kushishino lwanamhlanje.
Iipropati Eziphambili Zomzimba: Kutheni iGranite Iphumelela Kwiizicelo Ezichanekileyo
Uzinzo lobushushu: Isiseko sokulinganisa okulinganayo
Enye yezona nzuzo zibalulekileyo zezixhobo zokulinganisa i-granite kukuzinza kwazo okumangalisayo kobushushu. Ngomlinganiselo wokwanda kobushushu we-6.5±0.5×10⁻⁶/℃, i-granite ibonisa malunga nesinye kwisithathu sokwanda kobushushu besinyithi esityhidiweyo kunye nesinye kwishumi se-aluminium. Olu kwandiswa kobushushu obuphantsi kuthetha ukuba iinkqubo zokulinganisa ezisekwe kwi-granite zigcina ukuchaneka kwazo kobukhulu nokuba zichatshazelwe kukutshintshatshintsha kobushushu okuqhelekileyo kwiindawo zokwenza imveliso.
Kwizicelo ze-semiconductor metrology, apho utshintsho lobushushu lwe-1℃ kuphela lunokubangela ukuba i-300mm silicon wafer yande malunga ne-7.5μm, ukuzinza kobushushu be-granite kuba yinto ebalulekileyo. Ipleyiti yomphezulu we-granite ejongene notshintsho lobushushu olufanayo iya kwanda nge-1.95μm kuphela kububanzi obufanayo, inika indawo yokubhekisa ezinzileyo ngakumbi kwiimilinganiselo ezibalulekileyo. Le propati ixabiseke kakhulu kwimisebenzi yokuvelisa iiyure ezingama-24/7 apho izixhobo zivelisa ubushushu obuqhubekayo obunokuchaphazela ukuchaneka kokulinganisa.
Ubunzima obungaqhelekanga kunye nokumelana nokunxiba
Uvavanyo lobunzima beGranite's Mohs oluyi-6–7 luyibeka phakathi kwezixhobo ezinzima kakhulu zoshishino ezisetyenziselwa ukulinganisa ngokuchanekileyo. Olu bunzima buphezulu buguqulela ngokuthe ngqo ekuchaseni ukuguguleka okugqwesileyo, okuqinisekisa ukuba izixhobo zokulinganisa igranite zigcina ukuchaneka kwazo ixesha elide lokusetyenziswa. Ngokungafaniyo nemiphezulu yesinyithi enokubangela imikrwelo, ukuguguleka, kunye neepateni zokuguguleka ngokudibana okuphindaphindiweyo, ulwakhiwo lwekristale yegranite luyamelana nokuwohloka komphezulu.
Olu xhathiso lokuguguleka lulinganiswa yidatha yeshishini ebonisa ukuba iindawo ezichanekileyo zegranite zinamava okuguguleka angaphantsi kwe-0.3μm kwiminyaka elishumi yokusetyenziswa rhoqo, xa kuthelekiswa ne-0.8μm ngonyaka kwisinyithi esityhidiweyo. Kubavelisi be-semiconductor kunye ne-optical, oku kuthetha ukunciphisa i-recalibration frequency, iindleko eziphantsi zokugcinwa, kunye nokuchaneka kokulinganisa rhoqo kulo lonke ixesha lokusebenza kwesixhobo.
Amandla okuDamping okuGqibezela aphezulu
Ukungcangcazela lutshaba lokulinganisa ngokuchanekileyo. Kwizakhiwo zokwenza ii-semiconductor, apho ii-linear motors, iinkqubo zokuphatha iirobhothi, kunye nezixhobo ze-HVAC zivelisa ukungcangcazela koomatshini okungaguqukiyo, ukukwazi ukwahlula nokufumisa ezi ziphazamiso kubalulekile. Ulwakhiwo lwe-crystalline yendalo ye-Granite lubonelela ngeempawu zokungcangcazela ezisebenza ngokuphindwe kathathu ukuya kahlanu kune-cast iron.
Iimpawu eziphezulu zobunzima kunye nokuxinana kwangaphakathi kwegranite zenza isihluzo sendalo esiphantsi somatshini, esifunxa ukungcangcazela okukhawulezayo ngaphambi kokuba kufikelele kwiisensa zokulinganisa ezinobuthathaka okanye izinto ezibonakalayo. Oku kuhlukaniswa kokungcangcazela okungapheliyo kubaluleke kakhulu kwiimashini zokulinganisa ezilungelelanisiweyo (ii-CMM), ii-interferometer ze-laser, kunye neenkqubo zokuhlola i-wafer, apho nokungcangcazela okulinganiselweyo kwe-nanometer kunokonakalisa idatha yokulinganisa.
Iipropati ezingezizo zeMagnetic kunye neChemical Inert
Ulwakhiwo lweGranite olungeyontsimbi lususa umngcipheko wokuphazamiseka kwemagnethi, nto leyo eluncedo kakhulu kuzo zombini izicelo zokulinganisa i-semiconductor kunye ne-optical. Amasimi emagnethi anokuphazamisa izixhobo zokulinganisa ze-elektroniki ezibuthathaka kwaye abangele iimpazamo zokulungelelanisa kwiinkqubo ze-optical. Ngezixhobo zokulinganisa i-granite, akukho mngcipheko wokuba imagnethi ichaphazele ukuchaneka kokulinganisa okanye ukutsala amasuntswana e-ferromagnetic anokonakalisa ii-wafers ezibuthathaka okanye izinto ze-optical.
Ukongeza, i-granite ayisebenzi ngokweekhemikhali, imelana nee-asidi, ii-alkali, kunye neekhemikhali zokucoca ezisetyenziswa kakhulu kwiindawo ezicocekileyo. Olu xhathiso lweekhemikhali luqinisekisa ukuba imiphezulu ye-granite igcina ukugqitywa kwayo ngokuchanekileyo kunye nomgangatho wesakhiwo nokuba ivezwe kwiikhemikhali eziqatha ezisetyenziswa ekucutshungulweni kwe-semiconductor kunye nokucoca izinto ze-optical.
Izicelo zoShishino lweSemiconductor: Ukuvumela iNano-Revolution
Uhlolo lweWafer kunye neeNkqubo zeMetrology
Kwimveliso ye-semiconductor, ukuhlolwa kwe-wafer yinkqubo ebalulekileyo echaphazela ngokuthe ngqo isivuno kunye nomgangatho wemveliso. Izixhobo zokulinganisa i-granite zisebenza njengesiseko solwakhiwo lweenkqubo zokuhlolwa kwe-optical optical (AOI), izixhobo zokulinganisa ubukhulu be-wafer, kunye nezixhobo ze-critical dimension metrology.
Imiphezulu ethe tyaba kakhulu yeziseko zegranite ezichanekileyo ibonelela ngeplani yesalathiso esizinzileyo esifunekayo ukuze kulinganiswe ngokuchanekileyo ijiyometri ye-wafer. Iipleyiti zomphezulu wegranite zebanga le-000, ezinokunyamezelana okuthe tyaba kwe-≤1.5μm/m, ziqinisekisa ukuba ii-wafers ezingama-300mm kunye ne-450mm zixhaswa ngokulinganayo ngexesha lokuhlolwa. Olu xhaso lufanayo luthintela ukugoba kwe-wafer okanye ukugqwetheka okunokukhokelela kwiimpazamo zokulinganisa kunye nokufunyanwa kweziphene ezingezizo.
Iinkqubo zoMatshini weLithography kunye noLungelelaniso
I-semiconductor lithography yeyona ndlela inzima kakhulu yokusebenzisa izinto zegranite ezichanekileyo. Kwiinkqubo ze-ultraviolet (EUV) kunye ne-deep ultraviolet (DUV) lithography, izigaba ze-wafer kunye ne-reticle kufuneka zifezekise ukuchaneka kokubeka i-sub-nanometer kwaye zigcine ulungelelwaniso kwiindawo zokuvezwa.
Ukudibanisa kweGranite ukuzinza kobushushu, ukuxinana kokungcangcazela, kunye nokuhlala ixesha elide kwenza ukuba ibe yeyona nto ifanelekileyo kwezi zinto zibalulekileyo zesigaba. Ukwandiswa kobushushu obuphantsi kuqinisekisa ukuba ijiyometri yesigaba ihlala ihleli njengoko iimoto ezithe nkqo zivelisa ubushushu ngexesha lokubeka isantya esiphezulu, zithintela iimpazamo zokugquma ezinokonakalisa zonke iitships. Idatha yeshishini ibonisa ukuba izigaba ze-lithography ezisekelwe kwi-granite zifezekisa ukuphindaphindwa kokubeka okungaphantsi kwe-5nm, okuvumela ukupeyinta kwe-2nm kunye nee-transistor nodes ezincinci.
Izikhululo zoPhando kunye noVavanyo loMbane
Ukuhlolwa kwe-wafer ye-semiconductor kufuna ukulungelelaniswa okuchanekileyo phakathi kwamakhadi e-probe kunye nee-wafer test pads. Izixhobo zokulinganisa i-granite zibonelela ngesiseko esiqinileyo nesizinzileyo kwizikhululo ze-probe, ukuqinisekisa ukuba ukulungelelaniswa okubuthathaka phakathi kwee-probe kunye nee-pads kugcinwa kuzo zonke iinkqubo zovavanyo. Iimpawu ze-granite ezingezizo ze-magnetic zisusa naluphi na uphazamiseko lwe-magnetic kwizibonakaliso zovavanyo lombane, ziqinisekisa ukulinganiswa okuchanekileyo kwamandla ombane kunye ne-voltage.
Oomatshini bokulinganisa abaQokelelweyo (ii-CMM)
Oomatshini bokulinganisa abadibeneyo babalulekile ekuqinisekiseni ubukhulu bezinto zokupakisha ze-semiconductor, izixhobo ze-MEMS, kunye nezixhobo. I-Granite isebenza njengesakhiwo sesiseko kunye nomphezulu wesalathiso kwezi matshini, inika uzinzo lwejometri olufunekayo ukuze kulinganiswe ngokuchanekileyo komlinganiselo onemilinganiselo emithathu. Ukudibanisa isiseko se-granite, ibhuloho le-granite, kunye neendlela zokuthwala umoya we-granite kudala inkqubo yokulinganisa enozinzo olukhethekileyo lobushushu kunye nolwe-mechanical, ifezekisa ukungaqiniseki komlinganiselo kuluhlu lwe-sub-micron.
Izicelo zoShishino lwe-Optical: Ukuxhasa ukuLawulwa kokukhanya okuchanekileyo
Iziseko zeTheyibhile eziBonakalayo kunye namaQonga
Ishishini le-optical lixhomekeke kwizixhobo zokulinganisa i-granite ukubonelela ngamaqonga azinzileyo kwiinkqubo ze-laser, ii-interferometers, kunye neendawo zokusebenza ze-optical assembly. Ngelixa iitafile ze-optical zanamhlanje zihlala zisebenzisa ii-honeycomb steel tops, i-granite ihlala iyeyona nto ikhethwayo kwizakhiwo ezisisiseko nakwizicelo ezifuna uzinzo oluphezulu lobushushu kunye nolwe-mechanical.
Amaqonga e-granite optical anika ukuthamba okugqwesileyo kunye nokuqina, okuqinisekisa ukuba izinto ze-optical zigcina ulungelelwaniso lwazo oluchanekileyo ngokuhamba kwexesha. Oku kubaluleke kakhulu kwiimilinganiselo ze-interferometric, apho umahluko wobude bendlela yee-nanometer ezimbalwa nje unokuchaphazela kakhulu iziphumo zokulinganisa. Iimpawu ze-granite zokudambisa ukungcangcazela zikwanceda ukwahlula iinkqubo ze-optical kwiintshukumo zokwakha kunye nokuphazamiseka okubangelwa zizixhobo.
Iziseko zeLaser Interferometer kunye neZakhiwo zeReference
Ii-interferometer ze-laser zimele usetyenziso lokulinganisa oluphezulu kakhulu, olufuna uzinzo olukhethekileyo ukugcina ulungelelwaniso oluchanekileyo lwezibuko, izihluzi zemitha, kunye nezinto ezibonakalayo. Iziseko zegranite zibonelela ngesiseko esiqinileyo nesizinzileyo sobushushu esifunekayo kwezi zixhobo zinobuzwe obuphezulu.
Kwiinkqubo ze-semiconductor wafer flatness metrology, ezifana ne-XCALIBIR interferometer eyenziwe yiNational Institute of Standards and Technology (NIST), iitafile zegranite zisebenza njengeqonga elizinzileyo elixhasa yonke inkqubo ye-optical. Zisebenza kulawulo lobushushu be-(20 ± 0.02)°C, ezi nkqubo zifezekisa ukungaqiniseki komlinganiselo we-RMS emalunga ne-1nm—amanqanaba okuchaneka okungenakwenzeka ukuba kufezwe ngezakhiwo ezisekwe kwisinyithi.
Ukuhlanganiswa kwe-Optical Precision kunye noLungelelaniso
Ukuhlanganiswa kweenkqubo ezintsonkothileyo ze-optical, kuquka iilensi zekhamera, i-telescope optics, kunye neenkqubo zokuhambisa imisebe ye-laser, kufuna ukulungelelaniswa ngokuchanekileyo kwezinto ezininzi ze-optical. Izixhobo zokulinganisa i-granite—kuquka iipleyiti zomphezulu, imiphetho ethe tye, kunye neepleyiti ze-engile—zibonelela ngereferensi zejometri ezifunekayo ukuqinisekisa ukulungelelaniswa okufanelekileyo ngexesha lokuhlanganiswa.
Iingcali ze-optical zisebenzisa ii-granite surface plates njengee-reference planes zokulungelelanisa izinto ze-lens, ukuqinisekisa ukuba icandelo ngalinye libekwe ngokuchanekileyo ngokumalunga ne-optical axis. Uzinzo oluhle kakhulu lwe-granite luqinisekisa ukuba ezi zixhobo ze-reference zigcina ukuchaneka kwazo kangangeminyaka emininzi, zibonelela ngemilinganiselo yokulungelelanisa ehambelanayo kuyo yonke inkqubo ye-optical.
Iingenelo zokuthelekisa: Izinto zeGranite vs. Izinto zeSinyithi zeMveli
Ubomi beNkonzo eyongeziweyo
Izixhobo zokulinganisa i-granite zinika ubomi obude kakhulu xa kuthelekiswa nezinye iindlela zesinyithi. Njengoko kulindeleke ukuba zisebenze iminyaka engaphezu kwama-30, izixhobo ze-granite zinokusebenzela izizukulwana ezininzi zezixhobo zokwenza, zibonelela ngembuyekezo ebalaseleyo kutyalo-mali. Ngokwahlukileyo koko, iipleyiti zomphezulu wesinyithi esityhidiweyo zihlala zifuna ukufakelwa umphezulu rhoqo emva kweminyaka emi-5 ukuya kweli-10 kwaye zinobomi obuluncedo beminyaka eli-10 ukuya kweli-15 ngaphambi kokuba kufuneke zitshintshwe.
Olu bomi benkonzo bude buthetha ukonga kakhulu iindleko kwixesha elide. Uphononongo luka-2023 olwenziwe yi-American Society of Mechanical Engineers (ASME) lufumanise ukuba izinto ezakhiweyo zegranite zibonelela ngeendleko zobunini eziphantsi ngama-27% xa kuthelekiswa nezinye iindlela zentsimbi okanye zesinyithi esitshisiweyo kwixesha leminyaka eli-10. Kwizinto zokwenziwa ze-semiconductor kunye nezakhiwo zokwenza izinto ze-optical, oku kuthetha ukunciphisa inkcitho yemali kunye nokuphazamiseka okuncinci kwemveliso ngenxa yokutshintshwa kwezixhobo.
Iimfuno zoLondolozo olusezantsi
Izixhobo zokulinganisa i-granite azidingi ukugcinwa kakhulu kunezinye iindlela zesinyithi. Ngokungafaniyo nemiphezulu yentsimbi ephosiweyo efuna ioyile rhoqo ukuthintela ukugqwala kunye nokukrwela rhoqo ukubuyisela ukuba tyaba, imiphezulu ye-granite ayigcinwa phantsi kweemeko zokusebenza eziqhelekileyo.
Indlela igranite engenazimbobo, engasebenzi kakuhle ngokweekhemikhali ithetha ukuba ayigqwali, ayifuni zigqubuthelo zokukhusela, kwaye iyamelana nongcoliseko oluvela kwinkunkuma kunye neekhemikhali zaseworkshop. Amanqanaba okubola kokuchaneka konyaka amalunga ne-1% athetha ukuba izixhobo zegranite zigcina ulungelelwaniso lwazo ixesha elide kunezixhobo zesinyithi, ezinokubona ukuchaneka konyaka kwe-5-10% ngenxa yokuguga kunye neemeko zokusingqongileyo.
Uzinzo Lwexesha Elide Lwemilinganiselo
Mhlawumbi eyona nzuzo ibalulekileyo yezixhobo zokulinganisa i-granite kukuzinza kwazo okumangalisayo kobude bexesha elide. Ekubeni idlule kwizigidi zeminyaka yokukhululeka koxinzelelo lwendalo phantsi komphezulu woMhlaba, i-granite ayifumani kuphumla koxinzelelo lwangaphakathi olubangela ukuba izakhiwo zesinyithi zigobe kwaye zijike ngokuhamba kwexesha.
Olu zinzo luthetha ukuba xa isixhobo sokulinganisa igranite sicoliwe ngokuchanekileyo ukuya kutsho kumlinganiselo waso wokugqibela, siya kugcina loo milinganiselo kangangamashumi eminyaka. Idatha yeshishini ibonisa ukuba iipleyiti zomphezulu wegranite zigcina i-95% yokuchaneka kwazo kokuqala emva kweminyaka eli-10 yokusetyenziswa rhoqo, xa kuthelekiswa ne-70–80% kwiipleyiti zesinyithi ezisemgangathweni ophezulu. Kubavelisi be-semiconductor kunye ne-optical, oku kuthetha ukuchaneka kokulinganisa okuqhubekayo unyaka nonyaka, kunciphisa umngcipheko weempazamo zemveliso ezibangelwa kukulinganiswa kwezixhobo ezijikelezayo.
Ukusebenza kweHlabathi lokwenyani: Izifundo zeTyala kunye neDatha
Impumelelo yoHlolo lweWafer yeSemiconductor
Umenzi ophambili we-semiconductor waseYurophu usebenzise amaqonga okuhlola i-wafer asekelwe kwi-granite kwaye uxele ngophuculo olukhulu ekuthembekeni kokulinganisa. Utshintsho oluvela kwi-cast iron ukuya kwi-granite reference surfaces lubangele oku kulandelayo:
- Ukunciphisa ngo-40% ukwahluka kokulinganisa kuzo zonke iinguqu zobushushu
- Ukuncipha kwama-60% kwisantya sokulinganisa kwakhona (ukusuka kwiinyanga ezi-6 ukuya kwiminyaka emi-2)
- Ukuphucuka kwe-2.3% kwimveliso iyonke ngenxa yokuhlolwa rhoqo
Ukuzinza kobushushu beeplatifomu zegranite bekubaluleke kakhulu kwimeko yokwenziwa kwenkampani iiyure ezingama-24 ngosuku, apho ubushushu obuveliswa zizixhobo bubangele ukuguquguquka kobushushu obebuchaphazela ukuchaneka kokulinganisa ngaphambili.
Ukusebenza kweLebhu yeMetrology ye-Optical
I-National Institute of Standards and Technology (NIST) ibhale phantsi ukusebenza kweenkqubo ze-interferometer ezisekwe kwi-granite kwilebhu yayo ye-wafer flatness metrology. I-XCALIBIR interferometer, efakwe kwitafile ye-precision granite, ifezekisa oku kulandelayo:
- Ukungaqiniseki komlinganiselo wokuthe tyaba kwe-~1nm RMS kwiiwafers ezingama-300mm
- Uzinzo lwe-angle lwe-0.01μrad lokulungelelanisa izinto ezibalulekileyo ze-optical
- Ukusebenza rhoqo kwiminyaka engaphezu kwe-10 yokusebenza ngokuqhubekayo ngaphandle kokuwohloka kwesakhiwo
Eli nqanaba lokusebenza, eliqhutywa ziimpawu ezibalaseleyo zegranite, lixhasa uphuhliso lwetekhnoloji yokuvelisa i-semiconductor yesizukulwana esilandelayo.
Ukuqinisekiswa Kokuqina Kwexesha Elide
Uvavanyo oluzimeleyo olwenziwe yiNational Physical Laboratory yase-UK luvavanye ukusebenza kwexesha elide kwezixhobo zokulinganisa i-granite phantsi kweemeko zoshishino. Emva kweminyaka eli-15 yokusetyenziswa ngokuqhubekayo kwindawo yokuvelisa ngokuchanekileyo, iipleyiti zomphezulu we-granite ezivavanyiweyo zibonise:
- Ukuphambuka kokuthe tyaba okungaphantsi kwe-1.2μm kwiinkcukacha zokuqala (kukwizinga lokunyamezelana leBanga 000)
- Akukho monakalo womphezulu olinganisekayo nangona kukho amawaka emijikelo yokulinganisa
- Ukusebenza kokwandiswa kobushushu okuhlala kufana neenkcukacha zezinto zokuqala
Ezi ziphumo ziqinisekisa ukuqina okumangalisayo kunye nokuzinza kwexesha elide kwezixhobo zokulinganisa i-granite kwizicelo ezifuna amandla kwimizi-mveliso.
Iindlela zexesha elizayo kunye nesiphelo
Njengoko ishishini le-semiconductor liqhubeka nokuqhubela phambili ukuya kwi-sub-2nm transistor nodes kwaye ishishini le-optical lityhala imida yokuchaneka kwiinkqubo ze-laser, i-imaging, kunye ne-quantum optics, imfuno yezixhobo zokulinganisa ezizinzileyo nezichanekileyo iya kwanda kuphela. Izixhobo zokulinganisa i-granite, kunye nomxube wazo oqinisekisiweyo wozinzo lobushushu, ukumelana nokuguguleka, ukuxinana kokungcangcazela, kunye nokuzinza kwexesha elide, zibekwe kakuhle ukuhlangabezana nezi mfuno ziguqukayo.
Iindlela ezintsha ezisetyenziswa kwiinkqubo zezinto ezixutyiweyo, ezidibanisa i-granite kunye nezinto ezidityanisiweyo okanye iiseramikhi eziphambili, zithembisa ukuphucula ngakumbi ukusebenza kwezixhobo zokulinganisa ngokuchanekileyo ngelixa zijongana neemfuno ezithile zesicelo ezifana nokunciphisa ubunzima okanye ukuhanjiswa kobushushu okuphuculweyo. Nangona kunjalo, iingenelo ezisisiseko ze-granite yendalo—eyenziwe ngexesha lejoloji kwaye yaphuculwa ngokwenziwa ngokuchanekileyo—ziya kuhlala zingenakutshintshwa kwizicelo ezichanekileyo kakhulu.
Kubavelisi be-semiconductor kunye ne-optical, utyalo-mali kwizixhobo zokulinganisa i-granite luzisa imbuyekezo ngokuchaneka kokulinganisa okuphuculweyo, iindleko zokugcinwa ezincitshisiweyo, ubomi benkonzo obude, kwaye ekugqibeleni, isivuno esiphezulu semveliso. Njengoko ukunyamezela ukulinganisa kuqhubeka kuqina kwaye iinkqubo zokuvelisa zisiba nzima ngakumbi, ixabiso lezixhobo zokulinganisa i-granite liya liba nomtsalane ngakumbi.
Ukuqukumbela, iingenelo zezixhobo zokulinganisa igranite kwimizi-mveliso ye-semiconductor kunye ne-optical zicacile kwaye zibhalwe kakuhle. Ukususela ekuzinzeni kwazo okugqwesileyo kobushushu kunye nokumelana nokuguguleka ukuya kubuchule bazo obuphezulu bokungcangcazela kunye nobomi benkonzo yeminyaka engaphezu kwama-30, izixhobo zegranite zibonelela ngesiseko sokulinganisa ngokuchanekileyo okuvumela ukuqhubela phambili kwetekhnoloji yanamhlanje. Njengoko amashishini eqhubeka nokunciphisa imida yoko kunokwenzeka kwi-nanomanufacturing kunye ne-optical ngokuchanekileyo, izixhobo zokulinganisa igranite ziya kuhlala zingumgangatho wegolide kwizicelo ze-metrology kunye nokulungelelaniswa.
Ixesha leposi: Meyi-08-2026