Iinkqubo zokuhamba ezichanekileyo kakhulu zibalulekile kwimveliso yanamhlanje yobuchwepheshe obuphezulu, ngakumbi kwi-semiconductor lithography, ukuhlolwa kwe-wafer, ukulungelelaniswa kwe-optical, kunye ne-nanometer-scale metrology. Eyona nto iphambili kwezi nkqubo kuxhomekeke kumngeni wobunjineli: ukufezekisa intshukumo egudileyo, engenakuphikiswa, nephindaphindwayo ngaphandle kwempazamo ebangelwa kukuthintana ngoomatshini.

Itekhnoloji yokuthwala umoya, xa idityaniswe nozinzo oluphezuluizakhiwo zegranite, ibonelela ngesinye sezona zisombululo ziphambili kule ngxaki. Inkqubo yokuthwala umoya wegranite ithatha indawo yoqhagamshelwano lwendabuko lokuqengqeleka okanye lokutyibilika ngefilimu encinci yomoya oxinzelelweyo, ovumela intshukumo yokungqubana ephantse ibe zero kunye nokuchaneka okugqwesileyo kwejometri.

Kwiindawo zokuvelisa eziphambili, iinkampani ezifana ne-ZHHIMG zidibanisa iziseko zegranite ezinoxinano oluphezulu kunye nezixhobo zomoya ezichwetheziweyo ngokuchanekileyo ukuze kufezekiswe iinkqubo zokuhamba ezikwaziyo ukulawula indawo engaphantsi kwe-micron kunye nenqanaba le-nanometer.

1. Umgaqo-siseko osisiseko weTekhnoloji yokuthwala umoya

Iibheringi zomoya zisebenza ngokomgaqo wokwahlulwa kwamandla olwelo. Endaweni yokuvumela iindawo ezimbini eziqinileyo ukuba ziqhagamshelane, kungeniswa umaleko olawulwayo womoya ocinezelweyo phakathi kwazo.

1.1 Ukwenziwa kweFilimu yoMoya

Inkqubo eqhelekileyo yokuthwala umoya iqulathe oku kulandelayo:

• Isiseko segranite esimiyo
• Inqwelo okanye iqonga elihambayo
• Ii-nozzles zomoya ezichanekileyo okanye imidiya eneembobo
• Inkqubo yokubonelela ngomoya elawulwayo

Umoya ocinezelweyo ungeniswa ngee-micro-orifices okanye izinto ze-ceramic ezinemingxuma, zenze ifilimu encinci edla ngokuba phakathi kwee-micrometer ezi-2 ukuya kwezingama-20 ubukhulu.

Le filimu yomoya ixhasa umthwalo kwaye isusa unxibelelwano oluthe ngqo noomatshini.

1.2 IiMechanics zoQhagamshelo oluNgekho

Ngokungafaniyo neebheringi zebhola okanye izikhokelo ezithe ngqo, iibheringi zomoya zisebenza kwimeko apho:

• I-coefficient yokungqubana isondela ku-zero
• Ukunxiba akusasetyenziswa ngokwethiyori
• Akukho ntshukumo yokutyibilika kwentonga

Oku kwenza iibheringi zomoya zilungele iinkqubo zokubeka izinto ngendlela echanekileyo kakhulu apho i-hysteresis yoomatshini ingamkelekanga.

1.3 Indlela Yokuhamba KweLaminar

Ukusebenza kweebheringi zomoya kuxhomekeke kakhulu ekuzinzeni kokuhamba kwe-laminar. I-Turbulence iveza oku kulandelayo:

• Ukutshintshatshintsha koxinzelelo
• Ukungazinzi kwesikhundla
• Ingxolo eyongezelelekileyo kwiinkqubo zokulinganisa

Ngoko ke, uyilo lokuthwala umoya oluchanekileyo lufuna ukulungiswa kwe-computational fluid dynamics (CFD) ukuqinisekisa ukusasazwa okuzinzileyo komphezulu wokuthwala.

2. Indima yeGranite kwiiNkqubo zoMbane zoMoya

I-granite ayisiyonto yokuxhasa isakhiwo nje kuphela; yinxalenye esebenzayo yenkqubo yokuhamba.

2.1 Uzinzo lweSakhiwo

I-granite emnyama enoxinano oluphezulu inika:

• Imodulus ephezulu yozinzo lokuqina
• Ukuthembeka kwexesha elide
• Ukuchasana nokuguqulwa phantsi komthwalo

Ezi mpawu zibalulekile kuba iibheringi zomoya zixhomekeke ekugcineni ukuphakama komsantsa ofanayo kuwo wonke umphezulu wohambo.

2.2 Uzinzo lobushushu kunye noLawulo lokuHamba

Ukushukuma kobushushu ngomnye wemithombo yempazamo ephambili kwiinkqubo zokushukuma ngokuchanekileyo.

I-Granite inayo:

• I-coefficient yokwandisa ubushushu ephantsi (~4–7 × 10⁻⁶ /°C)
• I-inertia ephezulu yobushushu
• Ukusasazwa kwe-gradient yobushushu obucothayo

Oku kunciphisa:

• Ukuthambeka kwenqanaba ngenxa yokufudumeza okungalinganiyo
• Ukushukuma kwe-Z-axis kwiimilinganiselo zexesha elide
• Iimpazamo zokulungelelaniswa kwiinkqubo ze-optical

2.3 Ukudambisa ukungcangcazela

Ukudambisa kwendalo kweGranite kunciphisa ukuhanjiswa kwe-vibration rhoqo okuvela kwimithombo yangaphandle efana nale:

• Ukungcangcazela komgangatho
• Izixhobo zoomatshini ezikufutshane
• Iinkqubo zokuphatha umoya

Oku kubalulekile ekugcineni uzinzo kwindawo yokusebenza kwi-nanometer-scale.

3. Uyilo lweNkqubo yeePlatforms zeGranite Air Bearing

Inkqubo eqhelekileyo yokuthwala umoya wegranite idibanisa iinkqubo ezingaphantsi koomatshini, umoya, kunye nolawulo.

3.1 Ulwakhiwo lweMishini

Izinto eziphambili:

• Iqonga lesiseko segranite
• Iireyile zokuhamba ngokuchanekileyo emhlabeni
• Iiphedi zomoya (uhlobo lwe-ceramic okanye uhlobo lwe-orifice)
• Ukuhlanganisana kwesigaba okuhambayo

Ukuthe tyaba kwesiseko segranite kudla ngokulawulwa ukuya kumanqanaba e-micron okanye e-sub-micron kuxhomekeke kudidi lwesicelo.

3.2 Inkqubo yoLawulo lweMimoya

Inkqubo yokubonelela ngomoya ibandakanya:

• Isixinizelelo somoya esinoxinzelelo oluphezulu
• Abalawuli bokuchaneka
• Izithintelo zokuhamba kwamanzi
• Iiyunithi zokucoca (ukususwa kweoyile, ukufuma, iinxalenye)

Nokuba ungcoliseko oluncinci lunokuchaphazela kakhulu ukuzinza kweebheringi.

3.3 Iinkqubo zeNgxelo kunye noLawulo

Iinkqubo eziphezulu ziyadibana:

• Ii-interferometer zeLaser
• Iikhowudi ezilandelelanayo
• Izinzwa zokufuduka ezikwaziyo

Ezi nkqubo zivumela ulawulo lwentshukumo oluvaliweyo olunesisombululo sesikali se-nanometer.

4. Metrology kunye nokusebenza ngokuchanekileyo

Iinkqubo zokuthwala umoya zivavanywa ngokusekelwe kwiiparameter ezininzi ezibalulekileyo zemetrology.

4.1 Ukuthe tye kunye nokuthamba

Iimpazamo zokuthe tye zihlala zivela:

• Ukuphambuka kwesiseko segranite
• Ukwahluka kobukhulu befilimu yomoya
• Ukungalingani kokusasazwa komthwalo

Iinkqubo eziphezulu zinokufezekisa:

• Ukuthe tye kwe-sub-micron phezu kohambo oluhamba ngemitha
• Ukuphindaphinda kwinqanaba le-nanometer kwiindawo ezilawulwayo

4.2 Ukuchaneka kokubekwa

Ukuchaneka kokubekwa kwendawo kuxhomekeke kwi:

• Isisombululo se-encoder
• Uzinzo lweluphu yokulawula
• Ukuqina kwefilimu yomoya

Ngokungafaniyo neenkqubo zoomatshini, iibheringi zomoya aziyicimi ngokupheleleyo i-backlash.

4.3 Ukuqina Okuguquguqukayo

Ukuqina okuguquguqukayo kuchaza indlela inkqubo esabela ngayo kumandla angaphandle.

Umboniso weebheringi zomoya:

• Ukuqina okuphezulu kwiifrequencies eziphantsi
• Ukuqina okuncitshisiweyo kwiifrikhwensi eziphezulu ngenxa yokucinezeleka komoya

Olu tshintsho lulawulwa ngoyilo lwenkqubo kunye nokulungiswa kokulayisha kwangaphambili.

5. Izicelo zemizi-mveliso

Iinkqubo zokuthwala umoya zegranite zisetyenziswa kakhulu kumacandelo okuvelisa aphucukileyo.

5.1 Ishishini leSemiconductor

Izicelo ziquka:

• Amanqanaba okuhlolwa kwe-wafer
• Iinkqubo zokulungelelanisa iLithography
• Indawo yokubeka imaski yefoto

Ezi nkqubo zifuna ukuphindaphindwa kwinqanaba le-nanometer.

5.2 I-Precision Optics

Isetyenziswa kwi:

• Iinkqubo zokulungelelanisa iilensi
• Ukubekwa kwelaser beam
• Useto lokulinganisa phakathi kwe-interferometric

5.3 Ulungelelwaniso lweMetroloji

Amaqonga egranite anomoya asetyenziswa kwezi zinto zilandelayo:

• Iinkqubo zeCMM eziphezulu
• Oomatshini bokulinganisa i-Optical coordinate
• Iinkqubo zokuhlola ezineenzwa ezininzi

5.4 Ukwenziwa Kwemveliso Okuphucukileyo

Kubandakanya:

• Iinkqubo zoomatshini abancinci
• Amaqonga okucubungula i-laser ye-Femtosecond
• Iinkqubo zokulinganisa imveliso eyongezelelweyo

6. Imingeni yokudibanisa izinto

Ukuyila inkqubo yokuthwala umoya yegranite kubandakanya iindlela ezininzi zobunjineli.

6.1 Iimfuneko zokuThambeka komphezulu

Iibheringi zomoya zifuna ukusasazwa kwesithuba somoya esifanayo kakhulu. Nakuphi na ukuphambuka kwi-granite flatness kuchaphazela ngokuthe ngqo:

• Ukusasazwa komthwalo
• Ukuhamba kakuhle
• Ukuchaneka kwendawo

6.2 Ubuthathaka boMbane woMoya

Ukusebenza kwenkqubo kuyachaphazeleka:

• Uzinzo loxinzelelo
• Ukufana kokuhamba komsinga
• Amanqanaba ongcoliseko

Kwanee-micron-scale particles zinokuphazamisa ukuhamba komoya.

6.3 Ukudibanisa okushushu kunye noomatshini

Ukwandiswa kobushushu begranite kunye nezinto zokwakha kufuneka kuhambelane ngononophelo ukuthintela:

• Ukuthambekela kwesiteji
• Ukushukuma kwe-Z-axis
• Ukuguqulwa kwejometri

7. Iinkqubo zoMveliso kunye noLungiso

Iinkqubo zomoya ezithwala igranite ezichanekileyo kakhulu zifuna iindawo zokuvelisa ezilawulwayo.

Amanqanaba enkqubo aqhelekileyo aquka:

1. Umatshini wokugaya igranite orhabaxa
2. Imijikelo yokuzinzisa ubushushu
3. Ukugaya nokuleqa ngokuchanekileyo
4. Ukuhlanganiswa kokuthwala umoya
5. Ukuqinisekiswa kweMetrology
6. Ulungelelwaniso lokulinganisa i-laser

Abavelisi abaphambili abanjengoZHHIMG basebenza kwiindawo ezilawulwayo ezinozinzo lobushushu oluhlala lungaphakathi kwe-±1°C ukuqinisekisa ukuchaneka kwejometri okuphindaphindwayo.

8. Iingenelo ngaphezu kweeNkqubo zokuthwala iiMechanical

Iibheringi zomoya zisusa imida emininzi esisiseko yeenkqubo zoomatshini.

Isiphelo

Iinkqubo zokuthwala umoya zegranite zimele esinye sezisombululo eziphambili zolawulo lokuhamba oluchanekileyo kakhulu kwimveliso yanamhlanje. Ngokudibanisa uzinzo lwesakhiwo segranite enoxinano oluphezulu kunye neempawu ezingenakuphikiswa zokwahlulwa kwefilimu yomoya, ezi nkqubo zifikelela kumanqanaba akhethekileyo okuchaneka, ukuphindaphindwa, kunye nokuzinza kwexesha elide.

Njengoko amashishini obunjineli be-semiconductor kunye nobuchwephesha obuchanekileyo eqhubeka nokuqhubela phambili kwi-nanometer kunye ne-sub-nanometer tolerances, amaqonga omoya we-granite aza kuhlala eyiteknoloji eyintloko evumela iinkqubo ze-metrology kunye nemveliso zesizukulwana esilandelayo.