Iipleyiti zomphezulu wegranite zizixhobo ezisisiseko zokubhekisa kwi-dimensional metrology. Zisebenza njengedatha ephambili ebonakalayo yokuhlolwa, ukulinganiswa, kunye nokulungelelaniswa kwendibanoiindawo zokwenza imveliso ezichanekileyoAmashishini afana neenqwelo moya, ukwenziwa kwee-semiconductor, iinkqubo zokukhanya, kunye nobunjineli bezixhobo zoomatshini obuphambili axhomekeke kwezi zakhiwo ukugcina ukuchaneka kwejometri kumanqanaba e-micrometer kunye ne-sub-micrometer.

Ngokungafaniyo neetafile zesalathiso zesinyithi, igranite inika isakhiwo sekristale esizinzileyo ngokwendalo esinoxinzelelo lwangaphakathi oluphantsi kakhulu, iimpawu ezibalaseleyo zokudambisa ukungcangcazela, kunye nozinzo lwejometri oluhlala ixesha elide. Ezi mpawu zenza ukuba ibe yenye yezona zinto zisetyenziswa kakhulu kwiziseko zemetrology echanekileyo kwihlabathi liphela.

Kwiindawo zokuvelisa eziphucukileyo, imibutho efana ne-ZHHIMG isebenzisa i-granite emnyama enoxinano oluphezulu ukuvelisa iipleyiti zomphezulu ezenzelwe iindawo zokulinganisa ezizinzileyo kakhulu apho ukuphindaphinda kunye nolawulo lokungaqiniseki kubalulekile.

1. Isayensi yezinto ezisetyenziswayo emva kweePlati zomphezulu weGranite

I-Granite lilitye eliyi-igneous elenziwe ikakhulu yi-quartz, i-feldspar, kunye ne-mica. Ukufaneleka kwayo kwizicelo zobunjineli obuchanekileyo akubangelwanga yimpazamo kodwa kuvela kwiimpawu zayo zesakhiwo.

1.1 Ulwakhiwo lwekristale kunye nozinzo

I-matrix yekristale edibeneyo yegranite inika:

• Amandla aphezulu okucinezela
• Ukuguqulwa okuncinci kwe-elastic phantsi komthwalo
• Uxinzelelo oluphantsi olushiyekileyo xa luthelekiswa neentsimbi ezibunjiweyo
• Uzinzo oluhle kakhulu lwexesha elide

Ngokungafaniyo nentsimbi okanye i-aluminium, i-granite ayitshintshi izigaba okanye iguqulwe yiplastiki phantsi kwemithwalo eqhelekileyo ye-metrology, nto leyo eyenza ukuba ifaneleke kwiindawo ezibhekisele kuzo.

1.2 Ukuziphatha kobushushu

Uzinzo lobushushu yenye yezona parameter zibalulekileyo kwiinkqubo zemetrology.

Iimpawu eziqhelekileyo zegranite emnyama enoxinano oluphezulu:

• I-coefficient yokwandiswa kobushushu: ~4–7 × 10⁻⁶ /°C
• I-inertia ephezulu yobushushu
• Ukuqhuba okuphantsi kobushushu

Oku kuthetha ukuba ii-gradients zobushushu zisasazeka kancinci kwizinto, zinciphisa ukuphambuka kwendawo ngexesha lemisebenzi yokulinganisa.

Ngokwahlukileyo koko, izakhiwo zentsimbi zinokubonisa amaxabiso okwanda kobushushu ukuya kuthi ga kwi-12 × 10⁻⁶ /°C, nto leyo eyenza zingazinzi kangako kwizicelo zesalathiso esichanekileyo.

1.3 Iimpawu zokudambisa

I-Granite ibonakalisa ukungcangcazela kwendalo ngenxa yokwakheka kwayo kwezimbiwa ezahlukeneyo. Le mpawu ibalulekile kwiindawo apho:

• Kukho ukungcangcazela koomatshini bangaphandle
• Oomatshini bokulinganisa abaQokelelweyo (i-CMM) bayasebenza
• I-interferometry yelaser iyenziwa

Amandla okungcangcazela asasazeka ngemida yangaphakathi yeenkozo endaweni yokuba adluliselwe kwisakhiwo.

2. Imigangatho echanekileyo yeePlati zomphezulu weGranite

Iipleyiti zomphezulu wegranite azizizo ii-slabs ezithe tyaba; zenziwe kwaye ziqinisekiswa phantsi kwemigangatho engqongqo ye-metrology yamazwe ngamazwe.

2.1 Umgangatho we-DIN 876 (eJamani)

Umgangatho we-DIN 876 uchaza amanqanaba okunyamezelana nokuthamba:

Ukuqina kwe-flatness kudla ngokuvavanywa kusetyenziswa amanqanaba e-elektroniki, i-laser interferometry, okanye ii-autocollimators.

2.2 I-ASME B89 (eMelika)

I-ASME B89 ichaza oku:

• Iimfuneko zokungaqiniseki komlinganiselo
• Iinkqubo zokulinganisa
• Ukulandelelwa kwemigangatho yesizwe

Isetyenziswa kakhulu kwiinkqubo zokuvelisa i-aerospace kunye nokuzikhusela.

2.3 Iinkqubo zoMgangatho ezisekwe kwi-ISO 9001 / ISO

Nangona i-ISO 9001 ingachazi ngokuthe ngqo ukunyamezelana kwe-metrology, ilawula oku kulandelayo:

• Iinkqubo zolawulo lomgangatho
• Ukulandeleka kokulinganisa
• Iimfuno zolawulo lwenkqubo

Abavelisi abasebenza phantsi kweenkqubo ze-ISO kufuneka baqinisekise ukuba ziyaphindaphindeka kwaye zinoluhlu lwee-calibration chains ezibhalwe phantsi.

3. Ubunjineli beFlatness kunye neendlela zokulinganisa

Ukuthe tyaba yiparameter echazayo yepleyiti yomphezulu. Nangona kunjalo, ukuthe tyaba akuyondlela yokulinganisa inqaku elinye kodwa yipropathi yejometri efunyenweyo.

3.1 Iindlela zokulinganisa

Iindlela eziqhelekileyo ziquka:

• Amanqanaba omoya we-elektroniki (umz., iinkqubo ze-WYLER)
• I-interferometry yeLaser (iinkqubo zeRenishaw)
• Ii-Autocollimators
• Uthelekiso loomatshini kusetyenziswa imiphetho ethe tye eyintloko

Indlela nganye ivelisa igalelo ezahlukeneyo zokungaqiniseki.

3.2 Imithombo yeempazamo ekulinganisweni kobucaba

Izinto eziphambili ezibangela ukungaqiniseki:

• Iigradients zobushushu kumphezulu
• Ukuphinda-phinda kwe-probe
• Ukungcangcazela okuncinci okubangelwa kukuhamba komoya
• Ukwahluka kokuphatha umqhubi
• Ukungaqiniseki kokulinganiswa kwezixhobo

Kwiilabhoratri ezikumgangatho ophezulu, ukungaqiniseki komlinganiselo opheleleyo kunokulawulwa ngaphakathi kwamanqanaba angaphantsi kwe-micron.

3.3 Ukuziphatha Kozinzo Lwexesha Elide

Ngokungafaniyo neepleyiti zesinyithi, igranite ayibonisi:

• Ukuphumla koxinzelelo
• Ukuguqulwa kweplastiki
• Ukugqwetheka okubangelwa kukudinwa

Oku kwenza iipleyiti zomphezulu wegranite zifaneleke ukusetyenziswa kwexesha elide ngaphandle kokuphinda zisetyenziswe rhoqo.

4. Usetyenziso lweMizi-mveliso lweePlate zeGranite Surface

Iiplati zomphezulu wegranite zisebenza njengezinto ezisisiseko kumashishini amaninzi akwi-high-tech.

4.1 Iimatshini zokulinganisa eziDibeneyo (CMM)

Isetyenziswa njenge:

• Idatha yesalathiso esisiseko
• Iqonga lokulinganisa umatshini
• Isiseko sokuhlolwa kwemisebenzi

4.2 Izixhobo zeSemiconductor

Izicelo ziquka:

• Iinkqubo zokulungelelanisa i-wafer
• Amanqanaba okubeka iLithography
• Amaqonga ovavanyo lwemetrology

4.3 Ukulinganisa Izixhobo Zomatshini Ngokuchanekileyo

Isetyenziselwa:

• Ulungelelwaniso lomatshini we-CNC
• Ukulinganiswa kwesikhokelo somgca
• Ukuqinisekiswa kokuhamba kwe-Spindle

4.4 Iinkqubo zeOptical nezeLaser

Inkxaso yeziseko zegranite:

• Ii-interferometer zeLaser
• Iibhentshi zokulungelelanisa ezibonakalayo
• Iinkqubo zokuhlanganisa iifotoniki

5. Igranite vs Izinto ezizezinye

Isigqibo esibalulekileyo sobunjineli kukukhetha izinto ezisetyenziswa kwiziseko zereferensi.

I-granite ihlala iphumelela kakhulu kunezinye iindlela zesinyithi kwiindawo ze-metrology.

6. Izinto Eziqwalaselwayo Kwimveliso Yemizi-mveliso

Iipleyiti zomphezulu wegranite eziphezulu zifuna iindawo zokuvelisa ezilawulwayo:

• Iinkqubo zokulepha ngokuchanekileyo
• Ukukrwela nokugaya ngamanqanaba amaninzi
• Ulawulo lobushushu bendalo esingqongileyo (20°C ±1°C eqhelekileyo)
• Imijikelo yokuzinzisa uxinzelelo

Abavelisi abaphambili abanjengoZHHIMG badibanisa iinkqubo ezinkulu zoomatshini ezikwaziyo ukuvelisa iipleyiti ezidlula iimitha ezininzi ubude ngelixa begcina ulawulo lokuthamba kwinqanaba le-micron.

Isiphelo

Iipleyiti zomphezulu wegranite zihlala zisisiseko se-metrology yokuchaneka kwanamhlanje ngenxa yokudibanisa kwazo okwahlukileyo kozinzo loomatshini, ukungathathi cala kobushushu, kunye neempawu zokudambisa ukungcangcazela. Xa zidityaniswe nokunamathela ngokungqongqo kwimigangatho yamazwe ngamazwe efana ne-DIN 876 kunye ne-ASME B89, iinkqubo ezisekwe kwigranite zibonelela ngesiseko seziseko zokulinganisa ezinokuthenjwa, eziphindaphindwayo, nezilandelekayo.

Njengoko ukuchaneka kokuvelisa kuqhubeka kuhambela phambili ukuya kumlinganiselo we-nanometer, i-granite iya kuhlala iyinto ebalulekileyo evumelayo kwinkqubo ye-metrology yehlabathi.